微流控分析芯片的加工技术

综述了微流控分析芯片的加工技术和材质性能.光刻和蚀刻技术常用于加工硅、玻璃和石英芯片.有机聚合物由于品种多、易加工,是代替玻璃和石英的芯片材料.本文总结和讨论了各种芯片材料和它们的加工方法,如光刻、湿法刻蚀、干法刻蚀、模塑法、软刻蚀、热压法、激光切蚀法、LIGA技术和键合技术.引用文献36篇.     

液相芯片微流器件制备方法综论

微流器件的制备是液相芯片技术一项重要的相关技术。分别简要地介绍了硅、玻璃和石英基片的机械加工法、光刻和蚀刻法与高分子基片的激光烧蚀法制备微流器件的原理和方法,以及实验结果。     

先进IC制造技术在超精密加工中的应用与发展

介绍了集成电路(IC)在超精密加工技术中的发展。分析IC生产基本工艺流程与工艺技术，对影响IC发展的最新的3项关键生产技术进行研究；通过对国内外集成电路(IC)工艺装备的发展趋势进行分析，提出加工特征尺寸0．1～0．07μm的掩膜制造、光刻、刻蚀等关键装备以及芯片材料技术是IC技术创新和IC制造工艺设备的发展趋势。     

玻璃微流检测芯片厚胶光刻温度条件的平衡优化

采用正性光刻胶AZ 4620进行玻璃微流检测芯片的厚胶光刻制备,试验了各工艺阶段不同的温度参数条件对光刻胶浮雕面形、光刻胶与玻璃基质的粘附性、光刻胶在刻蚀液中的耐受时间、刻蚀速率和最大刻蚀深度等因素的影响。结果表明,软烘温度直接影响曝光显影工艺质量;后烘温度对显影效果有一定影响;坚膜温度对光刻胶浮雕面形、耐受时间有较大影响;而刻蚀环境温度直接影响着刻蚀速率、刻蚀深度和刻蚀面形效果。经平衡优化后,得出了理想的温度参数选取方案。     

半导体晶圆材料的超精密加工研究方面获重要进展

正纳米加工过程中实现原子级精度的超精密制造对开发纳米电子器件的独特功能至关重要。理论上讲,半导体晶圆材料的加工极限为单原子层去除。以往传统的加工方法,如金刚石切削,以及后来发展的光刻技术均无法达到该加工极限。尽管原子层刻蚀技术或聚焦离子束辅助光刻技术可以实现原子级精度加工,但会带来表面化学污染或加工表面缺陷等问题。西南交通大学与清华大学摩擦学团队合作,首次基于扫描探针技术在不具有层状解理面的单晶硅材料表面实现了极限精     

无掩膜流动刻蚀技术研究

为了实现玻璃材料高深宽比微结构的加工,提出了一种基于微尺度下流体分层流动现象的微流道内无掩膜流动刻蚀方法。通过对玻璃基体材料进行大量的工艺实验,明确了流动参数对于刻蚀成型微结构深宽比、侧壁形状、刻蚀速率的影响。证明了可以通过改变刻蚀剂与隔离剂的流动参数实现对成型微结构形貌的控制。实验结果表明约束流动刻蚀工艺可以在玻璃基体材料上加工出形态复杂、大深宽比的微结构,微结构的形貌取决于微流道中流体的流速。本实验的结果对于微尺度下分层流动的特性研究有一定的参考价值,并可为解决各向同性材料的微结构加工难题提供有效的解决方案。     

大尺寸熔石英采样光栅的研究进展

综述了近五年来为神光装置研制大口径熔石英采样光栅所取得的主要进展。提出了大尺寸采样光栅的化学机械抛光技术,将全息光刻-离子束刻蚀的430mm口径采样光栅的采样效率均匀性控制在均方根值低于5%,满足了采样光栅的设计要求。针对采样光栅的阈值特性,利用二次离子质谱技术,定量表征了采样光栅制备过程中引入的污染及其清洗效果,优化、发展了采样光栅的清洗方法。探索了基于氢氟酸和感应耦合等离子体刻蚀的熔石英基底处理技术,结合干湿法处理技术来去除熔石英光栅基底的亚表面损伤。为进一步提升采样光栅抗激光辐射损伤特性,提出将发展大尺寸熔石英采样光栅的氢氟酸处理方法及具有亚波长减反光栅结构的采样光栅的制备方法。     

基于玻璃湿法刻蚀的微流控器件加工工艺研究

介绍了以玻璃为基体材料的微加工工艺流程,重点研究了玻璃湿法刻蚀工艺,选择多种不同成分的刻蚀剂进行了对比性刻蚀试验,同时研究了刻蚀温度、搅拌方式和清洗间隔时间等多种刻蚀条件对刻蚀效果的影响,研究主要以高刻蚀速率的深度刻蚀以及高表面质量的毛细管道刻蚀两种典型应用为目标。对比与分析了多种试验结果并对其适用范围进行了适当的评价,为基于玻璃材质的微流控器件加工工艺提供了基本选择方案及实际经验曲线。     

应用双埋层SOI工艺制备低g值微惯性开关

采用双埋层SOI( Silicon-On- Insulator)材料,结合KOH腐蚀工艺、电感耦合等离子体(ICP)刻蚀工艺、阳极键合以及喷雾式涂胶工艺,研制了一种基于平面矩形螺旋梁的低g值微惯性开关.利用二氧化硅KOH腐蚀/ICP刻蚀自停止的特点,平面矩形螺旋梁厚度的精度为±0.46 μm.分析了双埋层SO1材料的电学特性,采用等电位技术,实现了双埋层SOI与上下两层硼硅玻璃的阳极键合.采用玻璃无掩模湿法腐蚀技术,在玻璃封盖底部设计制作了大小为200 μm×200μm的防粘连凸台,解决了芯片在清洗干燥过程中的粘连问题.采用ICP刻蚀用硅衬片方法,解决了ICP刻蚀工艺中高温导致的金硅共晶合金问题.实验验证显示,提出的方法效果较好,芯片成品率得到较大提高,为大批量地研制低g值微惯性开关提供了可靠的工艺基础.     

热压法快速制作微流控芯片模具

提出了一种微流控芯片模具的快速批量制作方法。应用光刻与湿法腐蚀技术制作玻璃母模,然后采用热压成形技术批量制作聚甲基丙烯酸甲酯(PMMA)阳模,再利用阳模浇模、键合批量制作聚二甲基硅氧烷(PDMS)微流控芯片。结果表明,该法制作的PMMA模具及复制得到的PDMS芯片平整度好、一致性高,其沟道宽度和深度的相对标准偏差分别小于0.5%和1.5%。     

Friction-Induced Nanofabrication:A Review

As the bridge between basic principles and applications of nanotechnology,nanofabrication methods play significant role in supporting the development of nanoscale science and engineering,which is changing and improving the production and lifestyle of the human.Photo lithography and other alternative technologies,such as nanoimprinting,electron beam lithography,focused ion beam cutting,and scanning probe lithography,have brought great progress of semiconductor industry,IC manufacturing and micro/nanoelectromechanical system(MEMS/NEMS)devices.However,there remains a lot of challenges,relating to the resolution,cost,speed,and so on,in realizing high-quality products with further development of nanotechnology.None of the existing techniques can satisfy all the needs in nanoscience and nanotechnology at the same time,and it is essential to explore new nanofabrication methods.As a newly developed scanning probe microscope(SPM)-based lithography,friction-induced nanofabrication provides opportunities for maskless,flexible,low-damage,low-cost and environment-friendly processing on a wide variety of materials,including silicon,quartz,glass surfaces,and so on.It has been proved that this fabrication route provides with a broad application prospect in the fabrication of nanoimprint templates,microfluidic devices,and micro/nano optical structures.This paper hereby involved the principals and operations of friction-induced nanofabrication,including friction-induced selective etching,and the applications were reviewed as well for looking ahead at oppor-tunities and challenges with nanotechnology development.The present review will not only enrich the knowledge in nanotribology,but also plays a positive role in promoting SPM-based nanofabrication.     

微压印聚合物微流控芯片的传热分析研究

微压印是制造聚合物微流控芯片的主要技术之一,其加工过程中的工艺参数对聚合物微流控芯片成型质量具有重要影响。在聚合物微流控芯片压印成型机理研究基础上,对其压印过程中的热传导进行分析,建立了多层材料一维热传导的模型,并用有限元法进行温度响应求解,进而可获得压印加热时间等工艺参数。     

微流控分析芯片在线尿中蛋白及LDH同工酶检测

利用MEMS(微机电系统)标准光刻、湿法腐蚀以及低温键合技术制作了微流控分析芯片。在自制的紫外吸收微芯片生化分析仪上,利用该芯片对临床妊娠高血压和多发性骨髓瘤患者的尿液样本进行了在线芯片电泳分析,得到了与医院常规诊断方法一致的诊断结果,而此法进行一次分析仅需要2 min,且试剂消耗量少,这是常规方法不能比拟的。也以LDH同工酶标准品为分析对象,对芯片在线同工酶诊断进行了初步研究,初步实现了LDH₁和LDH₅混合样本的片上分离、孵育反应和产物检测。     

聚合物PDMS片表面特性的AFM和XPS初步研究

本文用原子力显微镜(AFM),研究常用固化模具材料玻璃、有机玻璃(PMMA)和塑料制作的PDMS盖片的表面特性。并用XPS分析PDMS表面的化学组成,表明在优化的PDMS芯片制作条件下,PDMS芯片的自粘粘合力取决于盖片的表面粗糙度。     

Two-photon fluorescent microlithography for live-cell imaging

Fluorescent dyes added to UV-cure resins allow the rapid fabrication of fluorescent micropatterns on standard glass coverslips by two-photon optical lithography. We use this lithographic method to tailor fiduciary markers, focal references, and calibration tools, for fluorescence and laser scanning microscopy. Fluorescent microlithography provides spatial landmarks to quantify molecular transport, cell growth and migration, and to compensate for focal drift during time-lapse imaging. We show that the fluorescent patterned microstructures are biocompatible with cultures of mammalian cell lines and hippocampal neurons. Furthermore, the high-relief topology of the lithographed substrates is utilized as a mold for poly(dimethylsiloxane) stamps to create protein patterns by microcontact printing, representing an alternative to the current etching techniques. We present two different applications of such protein patterns for localizing cell adhesion and guidance of neurite outgrowth.     

Flow-restricted Etching Method on Isotropic Substrates and Its Mechanism

With the development of analytical instrumentation to minimization,integration and automation,the microfluidic chips,which are more integrated,complex and diversified,have been applied widely on the manufacturing of analytical instrumentation.However,the present photolithography-based microfabrication technology,which is only able to pattern microchannels with simple inside structures,can not follow the rapid development of requirements.For solving the problem,a fabrication method based on the restricting effect of laminar flow is proposed for the micro etching on isotropic substrates.Experiments were conducted inside glass-based microchannels,in which certain etchant was used to form complicated microstructures.The flow parameters' effects on the aspect ratio,side wall profile and etching rate were revealed by the experiments.The experimental results reveal that the topography of micro structures patterned with the restricted flow etching method is mainly determined by the flowrates of separator and etchant.The computational fluid dynamics(CFD) model on the interface between multiple streams was established for the etching process,and analysis on the causes of various micro topographies was conducted based on the CFD simulation results.The experimental data consisted with the simulation results very well.The investigation depicted in this paper indicate that the flow restricted etching method provides sufficient references for the research and understanding on the mass transport at the liquid-liquid surface in the microchannel and can be used to pattern complex micro structures with high aspect ratios,meantime,it greatly enriches the microfabrication technology for microfluidic chips.     

用于蓝宝石光盘的数字化数据存储

为了解决长时数据存储的难题,开展了以数字格式在蓝宝石光盘表面写入数据的研究工作。根据艾林方程,分析了利用常用无机材料进行数据存储的数据失效时间。描述了在蓝宝石材料为基底的光盘上以数字格式记录数据的基本工艺流程,重点介绍了用于蓝宝石光盘的离子束刻蚀系统。实验结果显示,蓝宝石光盘表面刻蚀的信息坑宽度为0.6μm,深度为0.2μm,磁道节距为1.6μm,符合ISO/IEC 10149:1995规定的CD-ROM格式数据存储要求,表明采用本文提出的方法实现蓝宝石光盘的数字化数据存储是可行的。此外,这种基本工艺流程不仅适用于蓝宝石光盘,同样适用于其它以高度稳定的材料(如石英玻璃)作为基底的光盘。     

The development of a novel Bio-MEMS filtration chip for the separation of specific cells in fluid suspension

In the clinical/microbiological laboratory there are currently several ways of separating specific cells from a fluid suspension. Conventionally cells can be separated based on size, density, electrical charge, light-scattering properties, and antigenic surface properties. Separating cells using these parameters can require complex technologies and specialist equipment. This paper proposes new Bio-MEMS (microelectromechanical systems) filtration chips manufactured using deep reactive ion etching (DRIE) technology that, when used in conjunction with an optical microscope and a syringe, can filter and grade cells for size without the requirement for additional expensive equipment. These chips also offer great versatility in terms of design and their low cost allows them to be disposable, eliminating sample contamination. The pumping mechanism, unlike many other current filtration techniques, leaves samples mechanically and chemically undamaged. In this paper the principles behind harnessing passive pumping are explored, modelled, and validated against empirical data, and their integration into a microfluidic device to separate cells from a mixed population suspension is described. The design, means of manufacture, and results from preliminary tests are also presented.