MOEMS扫描微镜的测试实验与分析

针对集成角度传感器微镜在实际使用过程中的要求,在分析研究MOEMS扫描微镜结构与工作原理的基础上,进行了MOEMS扫描微镜最大偏转角度、驱动电压、谐振频率和传感器输出参数的测试.并且为了提高数据的可靠性,利用几何光学理论和误差理论的方法对该测试系统进行了详细分析,以此作为测试的系统误差与测试随机误差进行了误差合成.误差分析表明,该微镜在驱动电压为0.7 V时,最大偏转角为±8.704 15°,测试误差为±0.045 605°.此外,还对测试过程中扫描微镜谐响应频率随扫描模式及扫描电压而变化的现象进行了分析.     

压电驱动MEMS光学扫描镜的研制

为实现高速大角度光学扫描,研制了一种新型压电陶瓷驱动MEMS光学扫描镜．将两块压电陶瓷分别放置在扫描镜背面两侧作为驱动,通过简单的扭转梁结构把两块压电陶瓷沿相反方向上下振动转换成镜片的扭转振动．采用MEMS体硅工艺及微装配技术,制备出器件样品．经测试,大气压下,研制出的扫描镜扫描谐振频率可达21．9kHz,施加200V交流电,谐振态的光学扫描角度为21．8°．测试数据表明该器件适用于激光打印、务形码扫描及微型激光投影显示等领域．     

Investigation of a double-pass confocal scanning microscope with a self-pumped phase-conjugate mirror

Investigations of a double-pass scanning microscope with a self-pumped phase-conjugate mirror are presented. The microscope achieves lateral- and axial-resolution enhancements compared with the conventional confocal transmission microscope and has the advantages of self-alignment and aberration compensation owing to the properties of a phase-conjugate mirror. Using a self-pumped phase-conjugate mirror makes it possible to achieve a high scan rate, which is essential to observing objects by a confocal microscope.     

Dispersion and mirror transmission characteristics of bulk acoustic wave resonators

A heterodyne laser interferometer is used for a detailed study of the acoustic wave fields excited in a 932-MHz solidly mounted ZnO thin-film BAW resonator. The sample is manufactured on a glass substrate, which also allows direct measurement of the vibration fields from the bottom of the acoustic mirror. Vibration fields are measured both on top of the resonator and at the mirror-substrate interface in a frequency range of 350 to 1200 MHz. Plate wave dispersion diagrams are calculated from the experimental data in both cases and the transmission characteristics of the acoustic mirror are determined as a function of both frequency and lateral wave number. The experimental data are compared with 1-D and 2-D simulations to evaluate the validity of the modeling tools commonly used in mirror design. All the major features observed in the 1-D model are identified in the measured dispersion diagrams, and the mirror transmission characteristics predicted for the longitudinal waves, by both the 1-D and the 2-D models, match the measured values well.     

Fast scanning method for one-dimensional surface profile measurement by detecting angular deflection of a laser beam

A fast scanning method for one-dimensional surface profile measurement is proposed. The profile is measured by integration of a slope distribution of the surface obtained from angular deflection of a scanning laser beam. A scanning optical system that consists principally of a spherical concave mirror and a rotating scanner mirror has reasonably low cost and is insensitive to mechanical vibration because of its high-speed scanning, of the order of milliseconds. A surface profile of a polygonal mirror along a 5-mm width was measured with the scanning method and with an interferometer. The root-mean-square difference between the two measured results is 0.98 nm.     

Efficient fabrication of fused-fiber biconical taper structures by a scanned CO2 laser beam technique

The driving mechanism of a scanning mirror can cause significant impairment of expanded beam properties, which we investigated for several scanning waveforms. Engineering on the scanning waveform is then carried out by a scanned CO2 laser beam technique to enlarge the uniform heating region for stretching and sintering of silica fibers. Details of the derivation are given. A simple thermal model is presented to account for the relationship between the scanning beam profile and the taper shape. Fusion profiles are also compared for various scanning waveforms. The corresponding scanned beam power distributions are determined experimentally, which enables us to determine precise power density conditions for CO2 laser fusion.     

Determination of candidate subjects for better recognition of faces

In order to improve the accuracy of face recognition and to solve the problem of various poses, we present an improved collaborative representation classification (CRC) algorithm using original training samples and the corresponding mirror images. First, the mirror images are generated from the original training samples. Second, both original training samples and their mirror images are simultaneously used to represent the test sample via improved collaborative representation. Then, some classes which are “close” to the test sample are coarsely selected as candidate classes. At last, the candidate classes are used to represent the test sample again, and then the class most similar to the test sample can be determined finely. The experimental results show our proposed algorithm has more robustness than the original CRC algorithm and can effectively improve the accuracy of face recognition.     

用于对空探测的激光成像雷达设计

本文提出了线阵扫描式激光成像雷达的组成方案,对激光发射、成像接收、分析处理等各个分系统的设计方法进行了详细探讨.以此为依据并且充分考虑了各种参数之间的相互关系,设计出一个原型系统.该系统采用32维APD线列器件,工作波长1.064μm,扫描机构为一维振镜.     

Diffractive element design for resonant scanner angular correction

We propose an optical corrective element with zooming capability to convert nonlinear sinusoidal scanning into linear scanning. Such a device will be useful for linearizing the angular scan of a resonant mirror scanner. The design methodology is to create a graded index of refraction device as the reference design, with its index of refraction parameters based on the propagation of an electromagnetic field in inhomogeneous media. The algorithm for converting this refractive element to the corresponding binary diffractive version is also presented. Design and simulation data are shown.     

高速转镜相机中倾斜光束的成象

本文通过建立几何模型 ,讨论了高速转镜相机光束倾斜入口的成象原理。证实了倾斜光束入口在转镜旋转时成象点的扫描轨迹是在以入射点为顶点 ,以成象点和入射点的连线为母线扫出的正圆锥底面的平面内 ,从而把空间光学的复杂设计问题简化成平面上的设计。此原理已用于 PDF- 2 0 0型平面转镜等待式分幅相机的设计     

多面转镜双光束扫描场的研究

运用矢量光学理论研究了双光束多面转镜扫描场中的相应问题：导出双光束扫描的基本方程,其中包括,入射点集团,反射点在空间以及在转镜反射面的移动轨迹,反射线标量方程,观察面上扫描点的集团以及远场扫描轨迹等,这些方程描述了多光束面转镜扫描的动态特性及其基本规律;在此基础上通过数值计算分析研究扫描场的成象特性。     

Single-mirror beam steering system: analysis and synthesis of high-order conic-section scan patterns

The vector approach introduced in an early paper for modeling mirror-scanning devices [Y. Li, Appl. Opt. 34, 6417 (1995)] provides the basis of a rigorous study of the scan field generated by a single-mirror beam steering system, in which a hinged movable mirror is able to turn about a fixed pivot point to steering a single laser beam. Because of fewer constraints on mirror angular motion, the system may behave like a true point source for both vector and raster scanning applications. After a summary of the expressions for scan fields generated under different conditions, some fundamental and advanced topics of the single-mirror system are addressed: (1) basic parameters of high-order conic-section scan patterns, (2) scanning spot kinematics, (3) effect of input offset and pixels distortions on two-dimensional images displayed on screens of different formats, (4) mapping and its inverse between the mirror vector space and the scan vector space, and (5) single-mirror beam steering system as a one-element reflective and continuous image zooming device.     

Evaluation of fitness parameters used in an iterative approach to aberration correction in optical sectioning microscopy

A major problem when imaging at depth within a biological sample in confocal or nonlinear microscopy is the introduction of sample induced aberrations. Adaptive optical systems can provide a technique to compensate for these sample aberrations and often iterative optimizations are used to improve on a particular parameter of the image (known as the fitness parameter). In this investigation, using a deformable membrane mirror as the adaptive optic element, we examine the effectiveness of a number of fitness parameters, when used with a genetic algorithm, at determining the optimal mirror shape required to compensate for sample induced aberrations. These fitness parameters are compared in terms of the number of mirror changes required to achieve optimization and the final axial resolution of the optical system. The effect that optimizing each fitness parameter has on the lateral and axial point-spread function is also examined.     

Endoscopic optical coherence tomography with a modified microelectromechanical systems mirror for detection of bladder cancers

Experimental results of a modified micromachined microelectromechanical systems (MEMS) mirror for substantial enhancement of the transverse laser scanning performance of endoscopic optical coherence tomography (EOCT) are presented. Image distortion due to buckling of MEMS mirror in our previous designs was analyzed and found to be attributed to excessive internal stress of the transverse bimorph meshes. The modified MEMS mirror completely eliminates bimorph stress and the resultant buckling effect, which increases the wobbling-free angular optical actuation to greater than 37 degrees, exceeding the transverse laser scanning requirements for EOCT and confocal endoscopy. The new optical coherence tomography (OCT) endoscope allows for two-dimensional cross-sectional imaging that covers an area of 4.2 mm x 2.8 mm (limited by scope size) and at roughly 5 frames/s instead of the previous area size of 2.9 mm x 2.8 mm and is highly suitable for noninvasive and high-resolution imaging diagnosis of epithelial lesions in vivo. EOCT images of normal rat bladders and rat bladder cancers are compared with the same cross sections acquired with conventional bench-top OCT. The results clearly demonstrate the potential of EOCT for in vivo imaging diagnosis and precise guidance for excisional biopsy of early bladder cancers.     

Face recognition based on symmetrical virtual image and original training image

In face representation-based classification methods, we are able to obtain high recognition rate if a face has enough available training samples. However, in practical applications, we only have limited training samples to use. In order to obtain enough training samples, many methods simultaneously use the original training samples and corresponding virtual samples to strengthen the ability of representing the test sample. One is directly using the original training samples and corresponding mirror samples to recognize the test sample. However, when the test sample is nearly symmetrical while the original training samples are not, the integration of the original training and mirror samples might not well represent the test samples. To tackle the above-mentioned problem, in this paper, we propose a novel method to obtain a kind of virtual samples which are generated by averaging the original training samples and corresponding mirror samples. Then, the original training samples and the virtual samples are integrated to recognize the test sample. Experimental results on five face databases show that the proposed method is able to partly overcome the challenges of the various poses, facial expressions and illuminations of original face image.     

基于转镜的激光照明系统设计及实验研究

为了实现区域内快速运动微小目标的激光辅助照明,提出了利用转镜与点激光器组成扇形激光辅助照明系统的设计方案.详细论述了转镜面数、外接圆直径及转速与激光照明光幕的关系.给出了该激光照明系统下目标被照亮部分的平均激光功率密度与点激光光源功率、激光扫描速度、点激光发散角、相机曝光时间和目标与激光光源距离之间关系的计算公式.仿真...     

Utilization of frequency information in a linear wavenumber-scanning interferometer for profile measurement of a thin film

The positions of the front and rear surfaces of a silicon dioxide film with 4 μm thickness is measured with a novel and simple method in which both amplitude and phase of a sinusoidal wave signal corresponding to one optical path difference of a reflecting surface is utilized in a linear wavenumber-scanning interferometer. For this utilization, the scanning width and the position of the reference mirror are adjusted exactly to distinguish the two sinusoidal waves corresponding to the two surfaces of the film. The scanning width of the wavenumber and wavelength of the light source are 0.326×10(-3) nm(-1) and 140 nm, respectively.     

Experimental investigations of the scanning functions of galvanometer-based scanners with applications in OCT

We analyze the three most common profiles of scanning functions for galvanometer-based scanners (GSs): the sawtooth, triangular and sinusoidal functions. They are determined experimentally with regard to the scan parameters of the input signal (i.e., frequency and amplitude). We study the differences of the output function of the GS measured as the positional error of the oscillatory mirror from the ideal function given by the input signal of the device. The limits in achieving the different types of scanning functions in terms of duty cycle and linearity are determined experimentally for the possible range of scan parameters. Of particular importance are the preservation of an imposed duty cycle and profile for the sawtooth function, the quantification of the linearity for the sinusoidal function, and the effective duty cycle for the triangular, as well as for the other functions. The range of scan amplitudes for which the stability of the oscillatory regime of the galvo mirror is stable for different frequencies is also highlighted. While the use of the device in certain scanning regimes is studied, certain rules of thumb are deduced to make the best out of the galvoscanner. Finally, the three types of scanning functions are tested with a Fourier domain optical coherence tomography (FD OCT) setup and the conclusions of the study are demonstrated in an imaging application by correlating the determined limits of the scanning regimes with the requirements of OCT.     

Automatic Inspection of Photographic Materials

An infra-red laser scanning instrument has been developed for the automatic inspection of unexposed photographic strip products (film and paper) for visible defects. The system has been developed jointly by Sira and Kodak and one unit has been in constant use in an on-line application for over 2 years. The laser scanning head is designed to inspect web with a width of up to 1500 mm at line speeds up to at least 100 m/min. Scratches of width down to 50 w m running along the strip, and certain other defects such as digs down to 300 w m in diameter, can be detected. The basic optical principle is to scan an infra-red laser beam with a mirror drum scanner sequentially across the inspected surface, from which the specularly reflected light is collected by a large cylindrical mirror and directed at a photomultiplier detector. When defects in the surface are scanned the photomultiplier signal is temporarily increased or decreased, and it is these features which are extracted by the electronic signal processing units. The output from the instrument can be displayed on an oscilloscope in the form of a ‘videoprint’ (which is a picture of the web surface showing only defects); a permanent ‘videoprint’ can be recorded on a photographic hard-copy instrument.     

Oxidation microstructure of iron aluminides

Abstract

Isothermal oxidation behavior of FeAl alloy with different surface preparations was performed at 800°C in synthetic air. The oxidation products were identified by glancing angle X-ray diffraction. Characterization of the specimens after oxidation was made using scanning (SEM) and transmission electron microscopy (TEM). The oxidation kinetics of ground sample appears much faster than that of the mirror polished sample. X-ray diffraction analysis, SEM and TEM observations of the scales indicate a predominance of faster growing θ–Al₂O₃ on ground sample.