基于微环谐振器的甲烷传感器

提出了一种新型的基于微环谐振器的甲烷传感器。该传感器通过微环表层的穴番A涂层来增加微环的有效折射率,使微环谐振器中谐振波长随甲烷浓度的增加而向右漂移;通过测量输出光信号的谐振波长推算出甲烷浓度。理论分析结果表明,该传感器的谐振波长变化范围在一个自由光谱范围内,甲烷浓度测量范围为0~15%;对比SOI材料和聚合物材料、单面敏感膜和三面敏感膜的测量结果,得出聚合物材料三面敏感膜微环的谐振波长变化幅度较大,测量灵敏度为60pm。     

谐振式硅微机械加速度计研究进展

谐振式硅微机械加速度计作为一种新型的对加速度进行测量的传感器,是通过检测加速度施加前后谐振敏感元件谐振频率变化实现对加速度检测的。该传感器具有频率信号输出、稳定性好、灵敏度高、精度高等优点,己成为微传感器的重要发展方向之一。汇总了该传感器的国内外相关研究现状,并对加工工艺进行了总结,讨论了谐振式硅微加速度计设计中的关键技术因素,并给出了未来的发展方向。     

数据驱动的负荷频率系统自整定控制器设计

在互联电力系统负荷频率控制系统中,存在建模不精确和工况大规模变化等一系列不确定性问题,使得固定参数的PI控制器难以取得预期的频率控制效果。针对以上问题设计了一种数据驱动参数自整定控制器,基于迭代反馈整定算法使PI控制器的控制性能达到最优状态,可维持电力系统的频率稳定。首先,基于I/O数据提出负荷频率控制系统的性能函数;然后,在闭环系统上进行两次实验并采集I/O数据;最后,通过迭代参数更新算法进行PI参数迭代寻优的过程。三区域互联系统仿真结果表明提出的数据驱动的PI参数自整定控制器具有良好的跟踪性能。     

一种洛伦兹力微机械谐振磁传感器建模及数值仿真

针对微机械洛伦兹力谐振磁传感器灵敏度受驱动控制电路和谐振频率漂移影响问题,利用平均周期法分析了鉴相器为异或门的锁相环频率跟踪电路的动力学模型,并求解出频率跟踪的稳定条件和稳态振幅平衡点.设计的磁传感器数值建模及仿真实验表明:当锁相环积分器系数小于临界值时,环路频率跟踪稳定;当锁相环积分器系数大于临界值时,频率跟踪振荡;稳态振幅与理论分析一致,灵敏度与接口电路无关;频率跟踪动态过程与压控振荡器初始频率ω0、积分系数kI、滤波器时间常数ξ有关.     

微机械振动陀螺仪闭环驱动电路分析与设计

为了提高微机械振动陀螺仪输出信号的灵敏度,通常要求驱动信号频率与陀螺仪驱动模态的谐振频率相匹配,且驱动信号幅值稳定.驱动电压信号要满足这些要求,必须采用闭环驱动方式.完整地推导了闭环驱动电路的内在机理,探讨了自激振荡与锁相环两种实现方式,并给出了具体的电路原理框图.     

MEMS陀螺仪驱动谐振频率的温度补偿方法

微机电系统(MEMS)陀螺的模态谐振频率和品质因子具有较强的温度敏感性,使得MEMS陀螺的输出零偏随温度漂移。为了解决零偏随温度漂移问题,提出了一种基于MEMS微机械陀螺的驱动谐振频率做温度基准的零偏温度补偿方法。温度在-40～60℃范围内变化,经多次循环测量陀螺零偏,获得零偏与温度之间的变化关系,并在此基础上,对零偏进行建模分析。利用谐振频率与温度的线性关系,以驱动谐振频率为温度参考,对陀螺零偏进行实时温度补偿。实验结果表明:上电零偏稳定性由补偿前的143. 81°/h变为补偿后的26. 51°/h,降低了5. 42倍;温度在-40～60℃范围内变化,补偿前后的零偏稳定性分别为1368. 05°/h和62. 86°/h,降低了22倍。     

静电刚度式谐振微加速度计闭环驱动控制

分析了谐振微加速度计闭环驱动控制的要求,并根据要求建立了幅度和频率自适应控制的双闭环驱动分析模型．鉴于系统的高阶非线性,采用近似平均法分析了系统的稳态平衡点和稳定条件．对基于锁相技术的频率跟踪环,得到了环路频率稳定跟踪的积分控制器临界条件．对基于自动增益的幅度控制环,分析表明在没有PI控制器时不能实现恒幅振动,在引入PI控制器后,振动幅度与品质因数和频率无关;同时,较小的直流参考电压能实现同样大的振幅．仿真结果有效的验证了上述结论,理论分析和仿真有助于驱动电路的设计和调试．     

一种扭转谐振式MEMS电场传感器

提出了一种基于微机电系统(MEMS)的扭转谐振式电场传感器。该微型电场传感器的感应电极与屏蔽电极采用共面叉指结构,首次采用扭转谐振的工作方式,显著提高了微型电场传感器的灵敏度。介绍了传感器的工作原理、结构设计、有限元仿真及实验。实验结果表明:在0～50 kV/m电场范围内,该传感器的线性度为0. 14%,3个往返行程的总不确定度优于0. 43%。在增益电阻为100 MΩ的情况下,传感器灵敏度达到4. 55 mV/(kV/m),相对已有传感器灵敏度提高了1个数量级。     

硅谐振微传感器中微弱信号频率的外差式随机共振检测

硅谐振微传感器输出信号的信噪比很低,频率信号往往淹没在噪声之中.论文分析了随机共振系统的功率谱放大率和信噪比特性,提出了外差式随机共振频率检测方法,并将该方法应用于硅谐振微传感器输出信号的频率检测.理论分析和数值仿真结果表明,外差式随机共振能将更多的噪声能量转变为频率信号的能量,通过调节载波信号频率可从共振谱峰的变化中准确测定谐振频率.该方法是可行、有效的.     

一种新颖的微杆杠结构的理论建模及其在谐振式微加速度传感器中的应用

为了提高谐振式微加速度传感器的灵敏度,提出一种新颖的微杠杆结构.分析该结构的工作原理,推导该结构的理论模型,得到这种微杆杠放大倍数的解析表达式.在这个理论模型的基础上,为了进一步提高微杆杠的放大倍数,对其参数进行优化,分析微杆杠结构中各参数对于放大倍数的影响,优化后该结构的放大倍数高达200.基于这种微杠杆结构设计两种分别为静电驱动/电容检测和电热驱动/压阻拾振的谐振式微加速度传感器,分别介绍这两种传感器的工作原理及其特点,并对这两种结构进行有限元模拟.模拟结果证实这两种微加速度传感器的灵敏度均高于1 000 Hz/gn,进而验证这种新提出的微杠杆结构的有效性.     

A piezoelectric micro-cantilever bio-sensor using the mass-micro-balancing technique with self-excitation

A biosensor was developed for using in a Lab-On-a-Chip (LOC). The sensor detects the change in the resonance frequency of a micro-cantilever with a piezoelectric film. This is the mass micro-balancing technique, which has been successfully used for detecting bio-materials in the quartz crystal microbalance (QCM). The PZT film, a piezoelectric film, is designed to act as both sensor and actuator. The geometry of the micro cantilever is optimized to maximize the sensitivity and minimize the environmental effects such as viscous damping and added mass effect in liquid. The fabricated sensor is composed of a 100 μm long, 30 μm wide, and 5 μm thick cantilever with a 2.5 μm thick piezoelectric (PZT) layer on it. The ratio of thickness to length of the micro cantilever is very high compared to others in micro cantilever-based studies. This high aspect ratio is the key to maximize the sensitivity and minimize the environmental effects. The fabricated micro sensor was tested by detecting the mussel gluing protein, the insulin-anti insulin binding protein and the poly T-sequence DNA.     

Micro devices for a cerebrospinal fluid (CSF) shunt system

This paper reports a novel cerebrospinal fluid (CSF) shunt system for the hydrocephalus patients. The CSF shunt system consists of a micro telemetry pressure sensor, an electromagnetic micropump and a controller. The pressure sensor has a flexible p+ diaphragm and a planar copper coil that construct an LC resonant circuit. The cerebrospinal pressure is measured from the phase shift at the resonance frequency. The micropump consists of an actuator diaphragm and a pair of passive valves. Each device is fabricated by micromachining technology and tested to obtain the characteristic. The feasibility of the proposed shunt system is evaluated with the in vitro performance test.     

自适应鲁棒最优PI控制器

提出一种具有鲁棒性能的自适应最优PI控制器, 它首先基于控制回路在正常运行操作中产生的过程输入和输出信号, 通过信号分解和频域分析在线辨识出过程对象在重要频率点的频率特性, 然后计算出可同时满足鲁棒性能指标λ和最小负载扰动特性的最优PI控制器参数, 同时控制性能可以很方便地根据实际需要通过改变鲁棒性能指标λ来调节. PI控制器的自适应过程不需要过程对象和控制器的任何先验知识, 也不需要中断控制回路的正常运行, 仿真实验表明了自适应控制器的有效性和可行性.     

Closed loop driving and detect circuit of piezoelectric solid-state micro gyroscope

Piezoelectric solid-state micro gyroscope is a novel kind of rotating rate sensor, which is based on the special thickness-shear vibrating mode of a piezoelectric body. Compared with the general vibratory micro gyroscope, it has no evident mass-spring component in its structure, so it has larger stiffness and robust resistance to shake and strike. Therefore, piezoelectric solid-state micro gyroscope can be used in the high-g environment. In this paper, piezoelectric solid-state micro gyroscope working principle is described. The closed loop driving and detect circuit of piezoelectric solid-state micro gyroscope is proposed in order to track the resonance frequency drift, stabilize the driving voltage value and detect the gyroscope output. The closed loop driving circuit (CLDC) mainly contains phase lock loop circuit, automatic gain circuit. Detect circuit mainly contains de-modulator, difference amplifier, Phase shift circuit and low pass filter. Experimental results show that the frequency of CLDC fluctuates within ±15 Hz with the resonance frequency of 357.9 kHz when get its stable status and the fluctuation of reference voltage is within ±7 mv, while the fluctuation of reference voltage in open loop driving circuit is ±23 mv. In the experiment, the sensitivity of the gyroscope with 740 mv/rad/s is observed. The work in the paper provides the theoretical and experimental foundation for realizing for this kind of gyroscope.     

Robustness analysis and design of fractional order Iλ Dμ controllers using the small gain theorem

ABSTRACT

In this paper, a simple method is proposed to tune the parameters of Fractional Integral-Fractional Derivative (FIFE) I^λ D^μ controllers based on the Bode diagram. The proposed technique provides a practical approach for tuning FIFE controllers to compensate stable plants. Using the small gain theorem and based on the sensitivity functions analysis, it is proved that by applying the designed FIFE controller the robustness of the compensated system in the presence of plant uncertainties is improved in comparison to the PI controller in a similar structure. Moreover, the closed-loop phase margin and gain crossover frequency are adjustable by tuning the free controller parameters. Simulation results are presented to demonstrate the simplicity of application and effectiveness of the tuned controller.     

Pi Tuning Under Performance Constraints

In this paper, a PI controller tuning method is proposed to meet several practical constraints such as the system bandwidth, the stability robustness and the low‐frequency disturbance rejection ability. An objective sensitivity function is first given subject to the above constraints. The PI controller is then designed by making the actual closed‐loop sensitivity function close to the optimal one in the frequency domain. Simulation examples are provided to demonstrate the effectiveness of the proposed method.     

微型磁通门性能指标的综合测试与分析

对铁芯结构的改进有利于提高微型磁通门传感器的性能,采用MEMS工艺制备了多孔铁芯结构微型磁通门,并对所制备的微型磁通门进行主要的工作参数和性能指标的综合测试,分析了激励电流和激励频率对灵敏度、线性范围、噪声、剩磁误差等性能指标的影响规律.对实验结果的分析结论为传感器选择合适工作参数提供了数据支持.     

Analytical study on cantilever resonance type magnet-integrated sensor device for micro-magnetic field detection

A beam-shaped cantilever resonance type magnetic sensor device has been proposed with a micro magnet. Two structural designs, named as design 1 and design 2, have been comparatively analyzed using ANSYS in order to obtain larger frequency shifts (higher magnetism sensitivity) due to the applied exterior magnetic field. The analytical results show that, in the range of 0–10 mT, the frequency shifts are small, while under 100 mT, a relatively larger frequency shift of about 30 Hz can be theoretically obtained. The power consumption of the proposed devices has been further theoretically studied for preliminary understanding. Using the well-known displacement equations, the estimated power consumption is around 0.21 μW, which is very lower than that of the reported magnetic field sensors. This implies that it is possible to fabricate higher sensitive magnetic field sensor with lower power consumption.     

高灵敏集成光学加速度计的优化设计

针对基于光弹效应的集成光学微腔悬臂梁式加速度计难以同时实现高灵敏度和高抗冲击性的问题,提出增加光学微腔周长的方案。经过详细的理论分析得出:通过增加微腔周长可以有效地增加惯性力下微腔谐振点波长偏移量,提高探测灵敏度。设计了多回路长直跑道型微腔结构,在100μm×600μm悬臂梁区域内集成出周长达5297μm的硅微谐振腔。利用MEMS工艺制作出所设计的微腔结构,测试品质因数达105。该结构应用于加速度等传感器中,在不减小传感器抗冲击性和量程的前提下,能有效提高探测灵敏度。     

基于BF-PSO的船舶电站柴油机分数阶控制器

针对船舶电力系统的频率稳定性问题,对船舶电站柴油机调速系统设计了分数阶PIλDμ控制器。采用细菌觅食-粒子群混合优化(BF-PSO)算法对分数阶PIλDμ控制器参数进行优化整定,解决了分数阶PIλDμ控制器整定参数多、设计复杂的问题。对分别采用分数阶PIλDμ控制器和传统整数阶PID控制器的柴油机调速系统进行了仿真和对比。结果表明,在同等条件下优化得到的分数阶PIλDμ控制器能够有效抑制模型参数摄动,鲁棒性更强,具有更好的控制效果。