Optimization of rapid thermal processing for uniform temperature distribution on wafer surface

An optimization of rapid thermal processing (RTP) was conducted to obtain uniform temperature distribution on a wafer surface by using linear programming and radiative heat transfer modeling. The results show that two heating lamp zones are needed to maintain uniform wafer temperature and the optimal lamp positions are unique for a given geometry and not affected by wafer temperatures. The radii of heating lamps, which were obtained by optimization, are 45 mm and 108 mm. The emissivity and temperature of the chamber wall do not significantly affect the optimal condition. With obtained optimum geometry of the RTP chamber and lamp positions, the wafer surface temperatures were calculated. The uniformity allowance of the wafer surface is less than ±1°C when the mean temperature of the wafer surface is 1000°C. This paper was recommended for publication in revised form by Associate Editor Dongsik Kim Hyuck-Keun Oh received the B.S. and M.S degrees in Mechanical & Aerospace Engineering from Seoul National University in 2000 and 2002, respectively. He had experienced mechanical and electrical engineering in the Samsung SDI Corporation on various display devices between 2002 and 2007. He is now pursuing the Ph.D degree in Mechanical & Aerospace engineering at Seoul National University, Korea. His research interests are heat transfer and thermal management with a focus on power generation and energy efficiency. Sae Byul Kang received the B.S degree in Mechanical engineering from Korea University in 1996. He then went on to receive his M.S and Ph.D. degrees from Seoul National University in 1998 and 2003, respectively. Dr. Kang is currently a senior researcher at the Korea Institute of Energy Research in Daejeon, Korea. Dr. Kang’s research interests are development of industrial boiler and burner for bio-mass. Young Ki Choi received the B.S and M.S degrees in Mechanical engineering from Seoul National University in 1978 and 1980, respectively and the Ph.D. de-gree in mechanical engineering from the University of California at Berkeley in 1986. He is currently a professor at the School of Mechanical Engineering, Chung Ang University, Korea. His research interests are in the area of micro/nanoscale energy conversion and transport, computational fluid dynamics, and molecular dynamics simulations. Joon Sik Lee received the B.S and M.S degrees in Mechanical engineering from Seoul National University in 1976 and 1980, respectively and the Ph.D. degree in mechanical engineering from the University of California at Berkeley in 1985. He is currently a professor at the School of Mechanical & Aerospace Engineering, Seoul National University, Korea. He is also the director of Micro Thermal System Research Center. His research interests are in the area of micro/nanoscale energy conversion and transport, thermal management for power generation and energy efficiency, and various convective heat transport phenomena such as pool boiling and nanofluid.     

Heat transfer analysis during a curing process for UV nanoimprint lithography

A heat transfer analysis during the curing process in UV-Nanoimprint lithography was carried out. To imprint nano/micro patterns into a large-area target glass such as LCD panels, a mold with a poly-urethane-acrylate layer is often used, on which layer the micro/nano patterns are inscribed for the UV-NIL process. After UV resin is coated between the target glass and the flexible mold, the UV resin is cured by exposing UV light on the resin. In the curing process, heat from the phase change of the resin and the radiation by UV lamp would induce a temperature change and thermal distortion of the mold. In this study, we measured the temperature change of the flexible mold, and established an analytic model of the heat transfer. From the result, we derived the thermal properties of the PUA layer, and a thermal resistance layer between the PUA and the cured resin layer. This paper was presented at the 4th Asian Conference on Multibody Dynamics(ACMD2008), Jeju, Korea, August 20–23, 2008. Jay Jeong received Ph.D. degree from Seoul National University in 2002. He held a Post-doctorate at Johns Hopkins University, USA from 2003 to 2006. Dr. Jeong is currently an assistant professor at the School of Mechanical and Automotive Engineering in Kookmin University in Seoul, Korea. His research interests are in the area of nano-robotics and intelligent mechanism.     

Efficiency of grid representation and its algorithms for areal 3D scan data

This paper describes the efficiency of a grid representation for an areal 3D scan data and the algorithms for managing measurement data captured by areal 3D scanners. Due to the measurement principles of areal 3D scanners, a measurement point is generated for each pixel of the imaging sensor inside the 3D scanner. Therefore, when the measurement points are perspectively projected on the image plane of the imaging sensor, each point has one-to-one correspondence to the imaging elements of the sensor that has a regular grid structure. By using this property, measurement points are represented by their depth values in a grid representation model. Compared to the conventional representation model, such as triangular mesh and cloud of points, the grid representation uses less memory and allows efficient algorithms for processing the measurement data captured by areal 3D scanners. This paper was recommended for publication in revised form by Associate Editor Soon Hung Han Minho Chang is a Professor at the department of mechanical engineering at Korea University in Seoul Korea. He received a PhD degree in Mechanical Engineering from MIT in 1996. He worked for Korea Institute of Science and Technology. His research interests include mechanical design, three-dimensional measurement, and CAD. Yun Chan Chung is a Professor in the department of die and mold engineering at Seoul National University of Technology, Korea. He worked for Cubictek and DaimlerChrysler, developing CAD/CAM systems mainly in die and mold making. He received PhD in Industrial Engineering from KAIST in 1996. His research interests include digital manufacturing, tool-path generation and verification, and software engineering.     

Evaporation of inkjet printed pico-liter droplet on heated substrates with different thermal conductivity

In this work, the evaporation phenomena of 20–45 picoliter water droplet (i.e. 50–65 μm diameter) on heated substrates with different thermal conductivity are studied experimentally. The effect of thermal conductivity of substrates and inter-distance between jetted droplets on the evaporation is investigated. In addition, the model to predict evaporation rate of the picoliter droplet on different substrates at a heated condition is developed using approximations for picoliter droplet. This paper was presented at the 7th JSME-KSME Thermal and Fluids Engineering Conference, Sapporo, Japan, October 2008. Taewoong Lim received his B.S and M.S. degree in mechanical engineering from Korea University, Seoul, Korea in 2007 and 2009, respectively. His thesis topic was the evaporation of inkjet printed pico-liter droplet and He has been working at Hyundai Motor Company. Jaeik Jeong received his B.S. degree in mechanical engineering from Korea University in 2008. He is currently a M.S. candidate in mechanical engineering at Korea University. Jaewon Chung received his B.S. and M.S. degrees in mechanical engineering from Yonsei University, Seoul, Korea in 1995 and 1997, respectively and Ph.D. degree from University of California, Berkley in 2002. He was postdoctoral associate in Engineering System Research Center at University of California, Berkley in 2002–2004 and had worked in the Center of Micro and Nano Technology at Lawrence Livermore National Laboratory as a visiting collaborator. He is a currently an associate professor at the Department of Mechanical Engineering at Korea University in Seoul, Korea. His research interests include direct writing methods including drop on demand inkjet printing, electrohydrodynamic printing and laser material processing for printing electronics. Jin Taek Chung received his B.S. and M.S. degrees in mechanical engineering from Korea University, Seoul, Korea in 1983 and 1985, respectively and Ph. D. degree from University of Minnesota, U.S.A. in 1992. He is a currently a professor at the Department of Mechanical Engineering at Korea University in Seoul, Korea. His research interests are heat transfer and 3-D flow in gas turbines and thermal management of electronic devices.     

Investigation of penetration force of living cell using an atomic force microscope

Recently, the manipulation of a single cell has been receiving much attention in transgenesis, in-vitro fertilization, individual cell based diagnosis, and pharmaceutical applications. As these techniques require precise injection and manipulation of cells, issues related to penetration force arise. In this work the penetration force of living cell was studied using an atomic force microscope (AFM). L929, HeLa, 4T1, and TA3 HA II cells were used for the experiments. The results showed that the penetration force was in the range of 2∼22 nN. It was also found that location of cell penetration and stiffness of the AFM cantilever affected the penetration force significantly. Furthermore, double penetration events could be detected, due to the multi-membrane layers of the cell. The findings of this work are expected to aid in the development of precision micro-medical instruments for cell manipulation and treatment. This paper was presented at the 9^th Asian International Conference on Fluid Machinery (AICFM9), Jeju, Korea, October 16–19, 2007.recommended for publication in revised form by Associate Editor Keum-Sik Hong Eun-Young Kwon received her B.S. and M.S degrees in Mechanical Engineering from Yonsei University, Korea, in 2005 and 2007, respectively. Ms. Kwon is currently an Engineer at Digital Printing Division of Samsung Electronics. Her research interests include biotribology, tribology, and electrophotography. Young-Tae Kim received his B.S. in Automotive Engineering from Seoul National University of Technology, Korea, in 2003. He then received his M.S. degree from Yonsei University in Seoul, Korea in 2005. Mr. Kim is currently a Ph. D. candidate at the Graduate School of Mechanical Engineering at Yonsei University in Seoul, Korea. His research interests include biotribology, tribology, and biomechanics. Dae-Eun Kim received his B.S. in Mechanical Engineering from Tufts University, USA, in 1984. He then received his M.S. and Ph.D. degrees from M.I.T. in 1986 and 1991, respectively. Dr. Kim is currently a Professor at the School of Mechanical Engi-neering at Yonsei University in Seoul, Korea. His research interests include tribology, functional surfaces, and micromachining.     

Data format and browser of lightweight CAD files for dimensional verification over the internet

The demand for the use of 3D CAD data over the Internet environment has been increasing. However, CAD data size has deteriorated the communication effectiveness of 3D CAD files. Good design methodology of a lightweight CAD file is required for rapid transmission on the distributed network environment. In this paper, a file translation system is constructed to produce lightweight CAD files from commercial CAD systems by using InterOp and APIs of the ACIS kernel. Using B-rep models and mesh data extracted from the CAD native files, the lightweight CAD files with topological information are constructed as binary files. As the lightweight CAD files retain topological and geometric information, they are applicable to dimensional verification, digital mock-ups, and visualization of CAD files through a CAD viewer. The effectiveness of the proposed lightweight CAD files is confirmed through various case studies on the CAD viewer. This paper was recommended for publication in revised form by Associate Editor Jooho Choi In-Ho Song received B.S. and M.S. degrees in mechanical engi-neering from Kunsan National University, and Ph.D. degree in mechanical engineering from Hanyang University, Seoul, Korea in 2007. From 2002 to 2007, he served as a team manager to develop CAD and PLM systems in CIES in Korea. He is currently a post-doc researcher in the mechanical engineering department in Hanyang University. As he had developed a lightweight CAD viewing kernel for CAD/CAM systems, he received a New Technology Certificate from Korean Government (MOCIE) in 2005. He also received several prizes from the Korean Society of CAD/CAM Engineers in 2003 and 2004. He specializes in geometric modeling, CAD kernels, product design and digital manufacturing systems. Sung-Chong Chung received the B.S. degree with honors in mechanical engineering from Hanyang University, Seoul, Korea, and the M.S. and Ph. D. in mechanical engineering from KAIST, Seoul, Korea in 1979, 1981 and 1987, respectively. Since 1983, he has been a professor in the School of Mechanical Engineering, Hanyang University, Seoul, Korea. In 2000, he received the outstanding paper award from the North American Manufacturing Research Institution of the Society of Manufacturing Engineers. He received the academic research and software development awards from the Korean Society of Mechanical Engineers and the Korean Society of CAD/CAM Engineers in 2003 and 2004, respectively. His research interests include CAD/CAM, control, mechatronics, manufacturing and precision engineering.     

A path tracking control algorithm for underwater mining vehicles

In this paper, a path tracking control algorithm is formulated for the use of tracked underwater mining vehicles. The algorithm consists of two parts, the forward velocity control and the heading angle control. The control algorithm is designed based on kinematics, and it considers the track slips and the longitudinal and yaw dynamic models of the tracked vehicle including the soil-track interaction force model. The desired heading angle is obtained by the so-called “Line of Sight” method. The suggested algorithm is tested by numerical simulations using the TRACSIM software developed by MOERO/KORDI, Korea. After the control gains are tuned by a series of numerical simulations, the algorithm is verified on a scale vehicle on air on a soil bin test bed containing the cohesive soil of the Bentonite-water mixture. This paper was recommended for publication in revised form by Associate Editor Kyongsu Yi Sup Hong received the B.Sc. and the M.sc. degree in the department of naval architecture and ocean engineering from Seoul National University, Korea, and the Doctor of Engineering degree in mechanical engineering from the Technical university of Aachen, Germany. Currently, he is the principal researcher at MOERI (Maritime and Ocean Engineering Research Institute), Korea. His main research areas include dynamics of marine structure, and development of marine mineral resources. Especially, he is focusing on the development of deep seabed mining technologies since 1994. Mooncheol Won received the B.Sc. and the M.sc. degree in the department of naval architecture and ocean engineering from Seoul National University, Korea, and the Ph.D. degree in mechanical engineering from the University of California at Berkeley, USA. Currently, he is a professor in the department of mechatronics engineering of Chungnam national university, Korea. His research interests include control of maritime and mechatronics systems, and machine learning applications of robotic systems.     

A study on the tension estimator by using register error in a printing section of roll to roll e-printing systems

The focus of this study is on the development of a mathematical model for estimating tension of a printing section by using the register error in R2R (Roll to Roll) e-Printing systems. In a printing section of conventional R2R printing systems, the tension is generally measured not for controlling but for monitoring, because the tension control may cause the occurrence of a register error. But, for high precision control, the tension in the R2R e-Printing system must be controlled as well as measured for more precise control of the register error. The tension can be measured by the loadcell in the conventional R2R systems. However, installing a loadcell on the R2R systems causes extra economic burden. In addition, the space for adding a loadcell on R2R systems is limited due to many components including dryers, lateral guider, doctor blade, ink supply unit and cooling unit. Therefore, a tension estimator can be another possibility for predicting the tension in a printing section. In this study, a new tension estimation model is proposed. The proposed model is based on the register error model, the equivalent torque equation, and the tension model considering tension transfer. Numerical simulations and experimental results showed that the proposed model was effective in estimating the tension in a printing section. This paper was recommended for publication in revised form by Associate Editor Hong Hee Yoo Chang-Woo Lee received a B.S. degree in Mechanical Engineering from Konkuk University in 2001. He received his M.S. and Ph.D. degrees from Konkuk university in 2003 and 2008, respectively. Dr. Lee is currently a researcher at the Flexible Display Roll to Roll Research Center at Konkuk University in Seoul, Korea. Dr. Lee’s research interests are in the area of fault tolerant control, R2R e-Printing line design, and tension-register control. He is the holder of several patents related to R2R e-Printing system. Jang-Won Lee received the B.S. and M.S.degrees in mechanical engineering from Konkuk University, Seoul, Korea. He studied continuous flexible process at the FDRC (Flexible Display R2R Research Center, Project Director: Kee-Hyun Shin), as a reseacher from the concentment to 2008. Since 2008, he has been a Research Engineer with the SKC Films R&D, Suwon, Gyeonggi-do, Korea. Now he is great on the plastic flim mechanics such as a scratch on the film surface, film extruding, winding/slitting mecha-nism and coating processes. Hyunkyoo Kang received the B.S. and M.S degree in 2000 and 2003 res-pectively from Konkuk Uni-versity, Seoul, Korea, where he is currently working toward the Ph. D. degree in mechanical design. He took part in the development of an autoalign guiding system for high-speed winding in a cable winding system, a 3-D roll-shape diagnosis method in a steel rolling system, a design of register controller for high-speed converting machine and real-time control design of electronic printing machine. His research topics include register modeling and control for printed electronics and distributed real-time control. Kee-Hyun Shin received the B.S. degree from Seoul National University, Seoul, Korea, and the M.S. and Ph.D. degrees in mechanical engineering from Oklahoma State University (OSU), Stillwater. Since 1992, he has been a Professor with the Department of Mechanical and Aerospace Engineering, Konkuk University, Seoul, Korea. For more than 18 years, he has covered several research topics in the area of web handling, including tension control, lateral dynamics, diagnosis of defect rolls/rollers, and fault-tolerant realtime control in the Flexible Display Roll-to-Roll Research Center, Konkuk University, of which he has also been a Director. He is the author of Tension Control (TAPPI Press, 2000) and is the holder of several patents related to R2R e-Printing system.     

Free surface transition and momentum augmentation of liquid flow in Micro/Nano-scale channels with hydrophobic and hydrophilic surfaces

We propose a novel micro/nano-scale nozzle structure, featuring an interfacial line between the hydrophilic and the hydrophobic surfaces for a jetting system, such as an inkjet head or electrospray devices. This research will investigate the impact of the interfacial line on flow instability and momentum augmentation as the liquid meniscus moves across the line. The research methods used in this paper, in respect to micro-and nano-scale channels, are computational fluid dynamics (CFD) and non-equilibrium molecular dynamics (MD), respectively. With the growing interest in micro/nano electromechanical systems (MEMS/NEMS), many studies have been conducted to develop an advanced micro/nanofluidic system. However, until now, there have been few in-depth studies on passive flow control in micro and nano nozzles using the hydrophilic and hydrophobic surface characteristics. In this research, the sequential arrangement of hydrophilic and hydrophobic surfaces in the nozzle is presented along with an investigation into how flow instability and momentum augmentation are going to be applied to an efficient micro/nano jetting system. When a liquid meniscus arrives at the interfacial line between hydrophilic and hydrophobic surfaces, the meniscus shape changes from concave to convex and the fluid motion near the wall stops until the concave shape is fully converted. Because the momentum should be conserved, the lost momentum near the wall transfers to the center region, and therefore the liquid at the center region is accelerated as it crosses the line. If we use this nozzle structure and the augmentation of the momentum near the center, a tiny droplet can be easily generated. This paper was recommended for publication in revised form by Associate Editor Haecheon Choi Doyoung Byun received the B.S., M.S, and Ph.D. degrees in school of mechanical and aerospace engineering from the Korea Advanced Institute of Science and Technology (KAIST), Taejon, Korea, in 1994, 1996, and 2000, respectively. From 2000 to 2002, he was in the Korea Institute of Science and Technology Evaluation and Planning as a Senior Researcher. In 2003, he joined the faculty of the School of Mechanical and Aerospace Engineering, Konkuk University, Seoul, Korea. His current research topics are development of electrohydrodynamic inkjet head, microfluidic devices, and biomimetic robot systems. His research interests include microfluidics, MEMS, and biomimetics.     

Approximate velocity scale for primary and secondary dual-inlet side-dump flows

Effects of the bulk inlet velocity on the characteristics of dual-inlet side-dump flows are numerically investigated. Non-reacting subsonic turbulent flow is solved by a preconditioned Reynolds-averaged Navier-Stokes equation system with low-Reynolds number k − ɛ turbulence model. The numerical method is properly validated with measured velocity distributions in the head dome and the combustor. With substantial increase in the bulk inlet velocity, general profiles of essential primary and secondary flows normalized by the bulk inlet velocity are quantitatively invariant to the changes in the bulk inlet velocity. This paper was recommended for publication in revised form by Associate Editor Do Hyung Lee Seung-chai Jung received his B.S. degree in Mechanical Engineering from Yonsei University, Korea, in 2001. He then received his M.S. degree in Mechanical Engineering from Yonsei University, Korea, in 2005. Mr. Jung is currently a Ph. D. candidate at Yonsei University, where he is majoring in Mechanical Engineering. Mr. Jung’s research interests include propulsion system and particle-surface collision dynamics. Byung-Hoon Park received his B.S. degree in Mechanical Design and Production Engineering from Yonsei University in 2003. He is currently a Ph.D. candidate in Yonsei University in Seoul, Korea. His research interests include performance design of propulsion systems and nu-merical analysis of instability in multiphase turbulent reacting flow-fields. Hyun Ko received his B.S. degree in Aerospace Engineering from Chonbuk National University, Korea, in 1996. He then received his M.S. degree in Mechanical Design from Chonbuk National University, Korea, in 1998. In 2005, he obtained his Ph.D. degree from Yonsei University, where he majored in mechanical engineering. Dr. Ko is currently a Principal Research Engineer of the MicroFriend Co., Ltd. in Seoul, Korea. His research interests include propulsion related systems and computational fluid dynamics. Woong-sup Yoon received his B.S. degree in Mechanical Engineering from Yonsei University, Korea, in 1985. He then received his M.S. degree from University of Missouri-Rolla in 1989. In 1992, he obtained his Ph.D. degree from the University of Alabama in Huntsville, where he majored in mechanical and aerospace engineering. Dr. Yoon is currently a professor at the School of Mechanical Engineering at Yonsei University in Seoul, Korea. His research interests include propulsion system and particle-related environmental/ thermal engineering.     

Development of a guiding system and visual feedback real-time controller for the high-speed self-align optical cable winding

Recently, the demand for the optical cable has been rapidly growing because of the increasing number of internet users and the high speed internet data transmission required. But the present optical cable winding systems have some serious problems such as pile-up and collapse of cables usually near the flange of the bobbin in the process of cables winding. To reduce the pile-up collapse in cable winding systems, a new guiding system is developed for a high-speed self-align cable winding. First, mathematical models for the winding process and bobbin shape fault compensation were proposed, the winding mechanism was analyzed and synchronization logics for the motions of winding, traversing, and the guiding were created. A prototype cable winding systems was manufactured to validate the new guiding system and the suggested logic. Experiment results showed that the winding system with the developed guiding system outperformed the system without the guiding system in reducing pile-up and collapse in high-speed winding. This paper was recommended for publication in revised form by Associate Editor Dae-Eun Kim Chang-woo Lee received a B.S. degree in Mechanical Engineering from Konkuk University in 2001. He received his M.S. and Ph.D. degrees from Konkuk university in 2003 and 2008, respectively. Dr. Lee is currently a researcher at the Flexible Display Roll to Roll Research Center at Konkuk University in Seoul, Korea. Dr. Lee’s research interests are in the area of fault tolerant control, R2R e-Printing line design, and tension-register control. He is the holder of several patents related to R2R e-Printing system. HyanKyoo Kang received the B.S. and M.S degree in 2000 and 2003 respectively from Konkuk University, Seoul, Korea, where he is currently working toward the Ph.D. degree in mechanical design. He took part in the development of an autoalign guiding system for high-speed winding in a cable winding system, a 3-D roll-shape diagnosis method in a steel rolling system, a design of register controller for high-speed converting machine and real-time control design of electronic printing machine. His research topics include register modeling and control for printed electronics and distributed real-time control. Kee-Hyun Shin (S’81-M’02) received the B.S. degree from Seoul National University, Seoul, Korea, and the M.S. and Ph.D. degrees in mechanical engineering from Oklahoma State University (OSU), Still-water. Since 1992, he has been a Professor with the Department of Mechanical and Aerospace Engineering, Konkuk University, Seoul, Korea. For more than 18 years, he has covered several research topics in the area of web handling, including tension control, lateral dynamics, diagnosis of defect rolls/rollers, and fault-tolerant real-time control in the Flexible Display Roll-to-Roll Research Center, Konkuk University, of which he has also been a Director. His research topics include distributed real-time control, embedded control, monitoring, and diagnosis and fault-tolerant control of large-scale systems such as steel plants, film-and-paper-making plants, aircraft, ships, and ubiquitous control of multirobot systems. He is the author of Tension Control (TAPPI Press, 2000) and is the holder of several patents related to R2R e-Printing system.     

Design and analysis of a twisting-type thermal actuator for micromirrors

This paper reports the design of a novel twisting-type micromirror actuation system. The actuating mechanism for driving the micromirror combines two paralleled bimorph actuators bending in opposite directions for rotational control of the micromirror. Each actuator is structured by gold and silicon dioxide or nickel and silicon nitride thin films with embedded polysilicon line heaters. With a size of only 15μm in width, 1.3μm in thickness, and 100μm in length, two bimorph actuators can result in a vertical displacement of 25μm at 10 volts dc with the span of 120μm, and thus the micromirror can rotate by angles over 20°, which is a significant improvement, compared to conventional tilting-type micromirrors. This paper was recommended for publication in revised form by Associate Editor Dongsik Kim Dong Hyun Kim received his B.S. and M.S. degrees in Mechanical Engineering from Hongik University, Korea, in 2005 and 2007, respectively. Mr. Kim is currently graduate student in the department of Mechanical Engineering at Hongik University in Seoul, Korea. His research interests include micro and nanoscale heat transfer and silicon crystallization technologies for displays. Kyung Su Oh received his B.S. and M.S. degrees in Mechanical Engineering from Hongik University, Korea, in 2005 and 2007, respectively. Mr. Oh is currently a research scientist at LG Chem. Ltd. His research interests include nanoscale heat transfer, nanotubes and fuel cells and molecular simulation technology. Seungho Park received his B.S. and M.S. degrees in Mechanical Engineering from Seoul National University, Korea, in 1981 and 1983, respectively. He then received his Ph.D. degree from U.C. Berkeley, U.S.A. in 1989. Dr. Park is currently a Professor at the department of Mechanical and System Design Engineering at Hongik University in Seoul, Korea. He served as a director of general affairs of KSME. Dr. Park’s research interests include micro and nanoscale heat transfer, molecular dynamics simulation and silicon crystallization technologies for displays.     

Characteristics of Sn-2.5Ag flip chip solder joints under thermal shock test conditions

The interfacial reaction between Cu pad coated with Au/Ni and solder bump of flip chip package, using Sn97.5wt.%-Ag2.5wt%, was studied under thermal shock stress. All joints were subjected to thermal shock test with −65°C/+150°C temperature range. For the Sn-2.5Ag solder, a scallop-like (Cu,Ni)₆Sn₅ intermetallic compound was formed in the solder matrix after 20 cycles of thermal shock. (Cu,Ni)₆Sn₅ was detached from the interface as (Ni,Cu)₃Sn₄ grew underneath the (Cu,Ni)₆Sn₅ IMC(Intermetallic Compound), whereas the elements of Sn, Ni and Cu were moved by interdiffusion at the interface between solder alloy and Cu pad. The composition of the IMCs in the solder joints and elemental distribution across the joint interfaces were quantitatively measured with EPMA (electron probe micro analysis). Finally, it was found that the crack initiation point and its propagation path could be influenced by the thermal shock conditions, two underfills, and their properties. This paper was recommended for publication in revised form by Associate Editor Chongdu Cho Kyoung Chun Yang received his B.E. and M.E. degrees in Mechanical Engineering from Chung-Ang University, Korea, in 2006 and 2008, respectively. His research interests include reliability in electronic packages, micro joints evaluation, advanced IC packaging/assembly technologies. Seong Hyuk Lee received his Ph. D. degree in Mechanical Engineering from Chung-Ang University, Korea, in 1999. Dr. Lee is currently an Associate Professor at the School of Mechanical Engineering of Chung-Ang University in Seoul, Korea. His research interests are mainly in the micro/nanoscale energy conversion and transport, the computational physics associated with thin film optics, and thermal and fluid engineering. Jong-Min Kim received his B.E. and M.E. degrees in Mechanical Engineering from Chung-Ang University, Korea, in 1997 and 1999, respectively. He then received his Ph.D. degree in Manufacturing Science from Osaka University, Japan, in 2002. Dr. Kim is currently an Associate Professor at the School of Mechanical Engineering at Chung-Ang University in Seoul, Korea. He has been mainly engaged in the fields of the interconnection & packaging technology in microelectronics and the intelligent assembly process in micro/nano systems. Young Ki Choi received his B.E. and M.E. degrees in Mechanical Engineering from Seoul National University, Korea, in 1978 and 1980, respectively. He then received his Ph.D. degree in Manufacturing Science from Univ. of California, Berkeley, U.S.A., in 1986. Dr. Choi is currently a Professor at the School of Mechanical Engineering at Chung-Ang University in Seoul, Korea. He has been mainly engaged in the fields of the heat transfer in micro-nano systems and the numerical analysis of the heat transfer system. Dave F. Farson received B.S. and M.S. degrees in Welding Engineering and Ph.D. degree in Electrical Engineering from The Ohio State University in 1987. He worked at Westinghouse R&D and Applied Research Laboratory at Penn State University before returning Ohio State University in 1995, where he is currently an Associate Professor in the Department of Integrated Systems Engineering. He is a past-president and Fellow of the Laser Institute of America and was co-editor of its Handbook of Laser Materials Processing. He is also active in the American Welding Society. He does research in laser materials processes and materials joining for a range of applications including biomedical and electronics device fabrication. Young Eui Shin received his B.E.degree Mechanical Engineering from Chung-Ang University in Korea, and M.S and Ph.D degrees from Nihon Univ. and Osaka Univ. in 1985 and 1992 respectively. He worked as principal researcher in the Technical central lab of Daewoo Heavy industry from 1985 to 1988, and as a chief researcher in Technical Center of Samsung Electronics from 1992 to 1994. At present, he is a Professor at the School of Mechanical Engineering, Chung-Ang Univ., in Korea. He is also working as President, Korea Micro Joining Association. He has been mainly engaged in eco friendly materials application for micro system packaging and reliability evaluation for micro joints.     

Optimal microchannel design using genetic algorithms

This paper presents a novel method of optimizing particle-suspended microfluidic channels using genetic algorithms (GAs). The GAs can be used to generate an optimal microchannel design by varying its geometrical parameters. A heuristic simulation can be useful for simulating the emergent behaviors of particles resulting from their interaction with a virtual microchannel environment. At the same time, fitness evaluation enables us to direct evolutions towards an optimized microchannel design. Specifically, this technique can be used to demonstrate its feasibility by optimizing one commercialized product for clinical applications such as the microchannel-type imaging flow cytometry of human erythrocytes. The resulting channel design can also be fabricated and then compared to its counterpart. This result implies that this approach can be potentially beneficial for developing a complex microchannel design in a controlled manner. This paper was recommended for publication in revised form by Associate Editor Hong Hee Yoo Hyunwoo Bang was born in Korea on June 2, 1978. He received the B.S. degree in mechanical and aerospace engineering from Seoul National University, Seoul, Korea in 2001 and the Ph.D. degree in mechanical and aerospace engineering from Seoul National University in 2007. He did postdoctoral research at University of California Los Angeles, CA that involved the integration of functional biological components into engineered devices with Prof. Jacob J. Schmidt from April 2007 to August 2008. His current research interests include microfluidics based Lab-on-a-chip devices and their design optimization using artificial intelligence. Dong-Chul Han received the B.S. degree from the Department of Mechanical Engineering, Seoul National University, Seoul, Korea, in 1969, and the Dipl.-Ing. and Dr.-Ing. degrees from the Department of Mechanical Engineering, University of Karlsruhe, Karlsruhe, Germany, in 1975 and 1979, respectively. He also received the Habilitation from the Department of Mechanical Engineering, University of Karlsruhe. He had been a professor in the school of Mechanical and Aerospace Engineering at Seoul National University from 1982 to 2008. His research interests include active magnetic bearing systems, mechanical lubrication, Bio-MEMS (MicroElectroMechanical Systems) and nano-fabrication.     

Improvement of Local Surface Quality by Using Single Abrasive Abrasion Process

AFM-based wear process actually is single abrasive abrasion process. It is widely employed in the surface micro/nano machining for fabrication of structures at the nanometer scale exhibiting high removing ability of nanometer scale materials. In this study, application of AFM-based single abrasive abrasion process in the local surface quality (surface roughness) improvement was studied. Merged holes were fabricated using an AFM diamond tip with different wear parameters on the surface of germanium (Ge) machined by conventional ultra-precision diamond turning. Results showed that cracks left by diamond turning can be removed and the local surface quality can be improved. Also effects of the wear parameters on the surface roughness were investigated. The optimized parameters of the abrasion process for improving the surface quality were provided. It is verified that AFM-based single abrasive abrasion process is a novel approach to modify or repair local surface on the surface of parts manufactured by other methods.     

A study on the MHD (magnetohydrodynamic) micropump with side-walled electrodes

This paper presents the continuous flow MHD(magnetohydrodynamic) micropump with side walled electrodes using Lorentz force, which is perpendicular to both magnetic and electric fields, for the application of microfluidic systems. A theoretically simplified MHD flow model includes the theory of fluid dynamics and electromagnetics and it is based upon the steady state, incompressible and fully developed laminar flow theory. A numerical analysis with the finite difference method is employed for solving the velocity profile of the working fluid across the microchannel under various operation currents and magnetic flux densities. In addition, the commercial CFD code called CFD-ACE has been utilized for simulating the MHD micropump. When the program was run(CFD-ACE), the applied current and magnetic flux density were set to be the variables that affected the performance of the MHD micropump. The MHD micropump was fabricated by using MEMS technology. The performance of the MHD micropump was obtained by measuring the flow rate as the applied DC current was changed from 0 to 1mA at 4900 and 3300 Gauss for the electrodes with the lengths of 5000, 7500 and 10000 μm, respectively. The experimental results were compared with the analytical and the numerical results. In addition, with the theoretical analysis and the preliminary experiments, we propose a final model for a simple and new MHD micropump, which could be applicable to microfluidic systems. This paper was recommended for publication in revised form by Associate Editor Seungbae Lee Bumkyoo Choi received a B.S. degree in mechanical engineering, M.S. in mechanical design engineering from Seoul National University, Seoul, Korea in 1981 and 1983 respectively, and PhD in engineering mechanics from the University of Wisconsin, Madison in 1992. From 1992 to 1994, he was a technical staff member of CXrL (Center of X-ray Lithography) in the University of Wisconsin where he developed a computer code for thermal modeling of X-ray mask membrane during synchrotron radiation. He is currently a professor in the Dept. of Mechanical Engineering of Sogang Univ., Seoul, Korea. His research interest includes microelec-tromechanical system (MEMS), micromatching and microfabrication technologies, and modeling issues. Sangsoo Lim received a B.S. degree in mechanical engineering from Sogang University, Seoul, Korea in 2005. He currently works at Hyundai Motors.     

Sensitivity analysis of nanoparticles pushing critical conditions in 2-D controlled nanomanipulation based on AFM

This paper investigates the sensitivity of critical parameters in AFM-based nanomanipulation, including the nanoparticle pushing force and time versus changing all parameters of the nanomanipulation process. The presented model includes both adhesional and normal friction forces. Also, pull-off forces are modeled by using the Johnson–Kendall–Roberts (JKR) contact mechanics model. Dynamic equations are developed based on the free body diagram of the pushing system, including AFM cantilever and probe, nanoparticle, and substrate. Dynamic simulation of gold particle manipulation on a silicon substrate is performed. In this model, the nanoparticle can be traced at every moment and at the same time all the dynamics and deformations of nanoparticle can be achieved from numerical simulation. Depending on obtained diagrams for parameters sensitivity, the suggested behavior will be followed by the particle such as rolling, sliding, stick-slip, and rotation. Its novelty is that the sensitivity of critical force and critical time for particle pushing on the substrate are obtained for all parameters. This is important for designing and choosing of geometry and materials of AFM, nanoparticle, and substrate. Also this is effective on choosing of proper initial condition in pushing purposes. Finally, it can be used to adjust proper pushing time and force for an accurate and successful pushing and assembly, and real-time visualization during micro/nanomanipulation using real-time force data.     

Efficiency evaluation of micro factory for micro pump manufacture

The micro factory, a miniature manufacturing system, is a means of achieving higher throughput with minimal space, and minimal consumption of energy and resources by downsizing of production processes. Even though, a micro factory is able to perform whole manufacturing processes like the macro factory, the possibility of improving its manufacturing efficiency has not been considered enough. In this paper, an efficiency index is proposed to calculate the efficiency of the micro factory to manufacture a micro pump. The efficiency index has been proposed based on efficiency definition with input and output parameters of the system. Input parameters include cost of system, processing time and energy. Output parameters represent number of product manufactured from the microfactory. Cost of the system has been categorized by micro assembly machine cost, cost of resources, manipulators’ cost, manufacturing space value, and human operators. Processing time has been categorized by assembly time and material handling time. This paper was recommended for publication in revised form by Associate Editor Dae-Eun Kim Murali Subramaniyam received his B.E. and M.Tech. from India in 2003 and 2005, respectively. Currently, he is pursuing his Ph.D. in Me-chanical Design Engineering under Brain Korea 21 program fellowship at CNU (Chungnam National University), Korea. Also he is working as a research associate in LID (Laboratory of Intelligent Design and manufacturing) at CNU, under Professor Sangho Park. His research interests include CAD/CAM (Computer Aided Design/ Computer Aided Manufac-turing), Computer Integrated Manufacturing, Rapid Prototyping and DHM (Digital Human Modeling). Sangho Park is currently a Professor in Mechanical Design Engineering at CNU. He received his B.S., M.S. and Ph.D. from Seoul National University, Korea in 1988, 1990 and 1995 respectively. He was a Senior Research Scientist at ETRI (Electronics and Telecommunications Research Institute), Korea. His areas of expertise and research interest includes CAD/CAM, Virtual Reality, DHM and Micro Assembly. LID (renamed from CAD/CAM) is doing research under his advice. Sung-il Choi received a B.S. form Konyang University in 1995, Korea. He then received an M.S. from CNU in 1997. Currently, he is pursuing his Ph.D. in Mechanical Design Engineering at CNU. He was a researcher at ETRI. His research intersts include the areas of development of CAD interface, virtual simulation, 3D Web solutions, geometric modelling, micro-assembly, and application of distributed environment. Jun-Yeob Song is a Team Leader in the IT Machinery Research Team, Korea Institute of Machinery and Materials, Korea. Also, He is a Chief of National Research Laboratory on Knowledge Evolution based Manufacturing Devices. He received a Ph. D. from the School of Industrial Engineering at Busan National University in 2001. He has extensive experience in design & control of automation and autonomous manufacturing systems, and reliability engineering. In recent years, Dr. Song’s research interests are in the area of micro assembly, bonding, and multi chip packaging (MCP). Jong-Kweon Park received a B.S. degree in Mechanical Engineering from Inha University in 1977. He then received M.S. and Ph.D. degrees in mechanical engineering from Changwon National University in 1993 and 1997. Dr. Park is currently a principal research at Korea Institute of Machinery and Materials in Daejeon, Korea. His current research areas are cutting dynamics and control, structural dynamics and optimization, ultra precision machining systems, micro/nano manufacturing systems, and design and evaluation of machine tool systems. He is currently a project leader for the project, “Development of Microfactory System Technologies for Next Generation.”     

微纳米力学测试系统的研制

采用闭环控制微纳压电位移驱动器为核心加载装置,以压电式微力传感器作为测量装置,集成显微光学数字视频监测系统,并编写完整的测量、控制与标定算法软件,研制量程0.1m N-500m N的全自动微纳米力学测试系统。该系统具有被测样品与实验探针的自动定位、可编程自动加载与显微实时监测与记录功能,能够满足小至微米级样品的实验要求,填补现有微纳测试仪器因量程过小或功能不足等问题所导致的空白,预期可应用于微纳机电、微纳米材料、生物医学工程等领域。     

Analysis of the effects of main design parameters variation on the vibration characteristics of a vehicle sub-frame

In the design process of an automobile part, several analysis methods are usually used to evaluate the performance of the part. However, most automobile design engineers do not directly use CAE (computer aided engineering) tools since specific skills are required to obtain practical results. Moreover, CAE requires a huge amount of computation time and cost. To resolve these problems, a new design approach, termed first order analysis (FOA), has been proposed. In this paper, the FOA technique is employed to design a vehicle sub-frame. An equivalent model of the vehicle subframe which only consists of beam elements is proposed and the modal properties obtained with the model are compared to those obtained with a full scale finite element model. The effects of some parameter variations on the modal characteristics of the vehicle sub-frame are investigated by employing the FOA equivalent model. This paper was presented at the 4th Asian Conference on Multibody Dynamics(ACMD2008), Jeju, Korea, August 20–23, 2008. Hong Hee Yoo graduated from the Department of Mechanical Design and Production Engineering at Seoul National University in 1980 and received his Master’s degree from the same department in 1982. He received his Ph.D. degree in 1989 from the Department of Mechanical Engineering and Applied Mechanics at the University of Michigan at Ann Arbor, U.S.A. He is currently working as a professor in the School of Mechanical Engineering in Hanyang University, Seoul, Korea.