离子束混合及离子注入陶瓷材料表面改性研究概述

对离子注入陶瓷材料引起的辐照损伤和材料力学性能、摩擦学性能的改善及陶瓷基体上金属薄膜的离子束混合增强粘着研究的进展进行了综述。     

强脉冲离子束材料表面改性研究进展

强脉冲离子束材料表面改性技术是正在发展中的新的材料表面改性技术。近四、五年来,我们围绕发展强脉冲离子束材料表面改性技术对其主要机制(强脉冲能量效应)、离子辐照诱发的热力学过程、表面熔坑现象及大面积均匀离子束技术开展了比较全面的基础性研究。研究表明,强脉冲离子束改性除了离子注入的元素掺杂效应外,其更可利用强脉冲能量沉积诱发的热力学效应,有望突破离子射程对改性层厚度的限制,并高效利用离子剂量和能量,成为新一代低成本、高效率、高生产率、实用化的离子束材料改性与合成工艺。本文对于上述研究的主要进展和相关问题进行了总结和评论。     

离子注入α－Al_2O_3陶瓷材料的表面改性研究

研究了α－Ａｌ２Ｏ３单晶注入Ｎ＋后的力学性能变化。结果表明，注入剂量为１×１０１７Ｎ＋／ｃｍ２时，Ａｌ２Ｏ３的显微硬度提高了９２％；注入剂量为３×１０１７Ｎ＋／ｃｍ２时，在Ａｌ２Ｏ３表面形成非晶层，导致表面软化，显微硬度只是基体的５０％左右．离子注入在样品表面产生了高达￣１１５０ＭＰａ的压应力，材料的断裂韧性的改善与此有关，实验亦发现Ｎ＋离子注入后Ａｌ２Ｏ３的断裂韧性提高了９５％左右．ＳＥＭ分析同样证明Ｎ＋注入ａ－Ａｌ２Ｏ３后，其表面力学性能确实有所改善。     

Temperature effects on ion-desorption dynamics from solid Ne by low-energy ion impacts

Interactions between low-energy ions and solid rare gases have been investigated by observing desorbed ions. When low-energy ions were injected into solid Ne, we found that the kinetic energy of desorbed cluster ions significantly increased with irradiation time for a film thickness of several hundred monolayers. This result can be explained by charge-up (i.e., electronic holes) in the solid Ne. The kinetic energy of the desorbed ions is considered to be proportional to the number of holes created in the solid by the ion impacts. The solid’s temperature effects on the desorbed-ion kinetic energy can be understood as a dependence on the diffusion rate of the holes. The temperature was controlled between 4.7 and 7.0 K. The activation energy of hole-hopping transport is estimated at 0.7 meV based on the slope of Arrhenius plots.     

离子辐照聚合物薄膜引起的降解和能量传输过程

用１２０ｋｅＶＮ＾＋，Ａｒ＾＋，Ｆｅ＾＋辐照聚酰亚胺薄膜，辐照剂量为５×１０＾１４－１×１０＾１７ｉｏｎｓ／ｃｍ＾２，对辐照样品做了表面电阻和光学吸收数量，结果表明：辐照后样品的表面电阻有明显变化，且随辐照剂量变化呈现阈值，在高剂理下达到饱和值。     

铬,钽离子束表面冶金合金的抗腐蚀机制

根据离子束表面冶金的特点，从合金成分、结构、缺陷、元素性质以及表面污染等方面系统地讨论了Ｃｒ、Ｔａ元素加入对金属腐蚀行为的影响。在此基础上，提出它们抑制腐蚀的综合模式，较好地解释了这类表面合金抗腐蚀的机制。     

Insight in the outside: New applications of low-energy ion scattering

Low energy ion scattering is used to selectively probe the outermost atomic layer of the surface. The development of double toroidal analyzers has improved the detection sensitivity of low energy ion scattering by orders of magnitude. The features of these analyzers are discussed. It is shown that the absence of matrix effects makes it possible to quantify the surface density of fluorine in polymers with a LiF(1 0 0) surface. The extreme surface sensitivity of LEIS also enables one to study intramolecular segregation processes. As an example the aging of a polypropylene surface that has been activated with atomic oxygen is described. As an example of the LEIS analysis of highly dispersed isolating surfaces, the formation of coke on a commercial three-way catalyst is discussed.     

Response of Si p-i-n diode and Au/n-Si surface barrier detector to heavy ions

Pulse height versus energy calibrations of a Si p-i-n diode and a Au-/n-Si surface barrier detector have been studied for heavy ions with atomic number (Z₁) from 3 to 79 in a range from 0.1 to 0.8 MeV per nucleon as a function of bias voltage and detector tilting angle. The detector response is simultaneously measured using a time of flight-energy elastic recoil detection analysis set-up with recoils produced over a wide energy range from a thick target of each element. Prior to impinging on the Si detector, the individual recoil is tagged by its energy determined from the time of flight and tabulated isotopic mass. For both detectors, the pulse height-energy calibration for recoils with a given Z₁ is described well by a linear relationship with small systematic deviations. The linear-fit parameters show similar, but not identical dependence on both Z₁ and bias voltage (collecting field strength) for the surface barrier detectors and the p-i-n diode. These results suggest that the efficiency of electron–hole pair collection is markedly dependent on the different electric field configurations for the two detector structures.     

The surface charge effect by using boron ions implantation in p-channel MOSFETs fabricated

This article reports on the effects of surface charge on bare wafers and p-channel MOSFETs by a positive ion beam accompanied by an electron beam current for surface charge neutralization. Without the negative electron beam the films show a higher sheet resistance and the pMOSFETs exhibit a lower threshold voltage, a lower breakdown voltage and a lower gain factor. If the electron beam current is equal to or higher than the ion beam current of 6 mA, the uniformity of sheet resistance, fluctuations of breakdown voltage and gain factor are significantly improved by controlling the charge neutralization in this experiment. It prevents the positive charges from penetrating the poly-gate and causing catastrophic damage in the gate oxide layer. The sheet resistance deviation for the samples with a capped photoresist is higher than that for the bare wafer because the insulating property of the photoresist enhances the wafer surface charge accumulation and thus repels the subsequently implanted ions. The thinner gate oxide layer leads to larger deviations of threshold voltage, breakdown voltage and gain factor due to the imbalance of surface charge.     

氩离子注入模拟太阳风对月岩的作用

对玄武岩和斜长岩等多种岩石样品进行了低能、超高剂量氩离子注入。氩离子能量12 0keV ,注入剂量 5× 10 18 cm2 。用X射线荧光光谱仪分析了辐照样品和未辐照样品的表面元素组成 ;用分步加热法分析了注入气体释放模式及岩石对氩气的保留能力。初步探讨了岩石对氩气的保留能力和分步加热释气模式等问题     

强脉冲离子束辐照混合陶瓷/NiCoCrAlY热障涂层研究

为提高高温合金的工作温度,一般在其表面涂覆由粘结过渡层和陶瓷隔热层构成的热障层.热障层的热稳定性决定了高温合金部件的寿命.为延长由部分稳定的ZrO2/NiCoCrAIY合金构成的热障层的服役寿命,采用强脉冲离子束对它们的界面进行辐照处理.本工作研究了不同参数的强脉冲离子束(IPIB)对不同厚度结构的靶的辐照混合效应,通过一系列分析测试研究,发现合适参数的IPIB辐照能够有效地在界面形成混合层,从而改善热障层在高温氧化环境中的高温耐久性.其中采用峰值能量300 keV,脉冲宽度65 ns,峰值流强密度250 A/cm2的IPIB单脉冲辐照后的样品获得最好效果.对其原因做了分析,认为在界面处形成特定元素分布的混合层在高温氧化条件下既能形成完整的保护层,又改善了层间晶格和热胀系数失配,减小了失配热应力,从而提高了热障层在高温氧化条件下的稳定性.     

Electrical model and experimental analysis of a double spiral structure surface dielectric barrier discharge

A surface dielectric barrier discharge (SDBD) can discharge at atmospheric pressure and produce a large area of low-temperature plasma. An SDBD plasma reactor based on the double spiral structure is introduced in this paper. To study the discharge mechanism of SDBD, an equivalent circuit model was proposed based on the analysis of the micro-discharge process of SDBD. Matlab/Simulink is used to simulate and compare the voltage–current waves, Lissajous and discharge power with the experimental results. The consistency of the results verifies the validity of the SDBD equivalent circuit model. Maxwell software based on the finite elements method is used to analyze the electrostatic field distribution of the device, which can better explain the relationship between the discharge image and the electrostatic field distribution. The combination of equivalent circuit simulation and electrostatic field simulation can provide better guidance for optimizing a plasma generator. Finally, the device is used to treat PM2.5 and formaldehyde. The test results show that the degradation rate of PM2.5 can reach 78% after 24 min, and formaldehyde is about 31.5% after 10 min of plasma treatment.     

Monte Carlo prediction of crater formation by single ion impact on solid surface

A method is presented for predicting the topography changes following the impact of one energetic ion on the plane surface of a monatomic amorphous solid. This is done in two stages. The first is a Monte Carlo calculation of the sputter yield and interior distribution relocated atoms, with no compensation for local departures from equilibrium density. In the second stage there is a systematic relaxation of the solid, in which the density returns to its previous constant value and a crater develops in the surface. Two alternative methods of carrying out stage two are compared. In the first the solid is subdivided into cells within which relaxation is carried out normal to the surface, as in previous one-dimensional studies. The second method treats the solid as a 3-dimensional incompressible medium. Both seem to reproduce quite well the main features found experimentally.     

GCr15轴承钢N＋B离子注入层的XRD,AES和XPS研究

用X-射线衍射(XRD)、俄歇电子能谱(AES)和X-光电子能谱(XPS)的方法对N+B离子注入层的相组成、元素的分布和元素的结合状态进行了综合考察。结果表明:注入层是由基体中原有的α-Fe、Fe_3C相和注入过程中新生成的六方BN相和ε-Fe_2N-Fe_3N相组成的。另外,在注入层表面还有一层石墨型结构的碳膜存在。     

Various patterns in dielectric barrier glow discharges simulated by a dynamic model

In this paper, various patterns of dielectric barrier glow discharge simulated by a phenomenological dynamic model are reported. The model is constructed based on the basic dynamic process of dielectric barrier glow discharge and involves the voltage-transfer characteristic as well as the lateral inhibition effect. In simulations, different driving voltage profiles are applied to achieve one or two pulsed discharges in each half-period and the corresponding pattern evolution is investigated. The final stable patterns driven by a rectangular wave voltage organize simply as stationary striations or hexagonal lattices. The patterns driven by a multi-step wave appear to be much more complicated, with complementary striations, concentric rings and square superlattices observed. The evolutions of these patterns from the initial uniform state are described and it is found that the spreading of the inhibition effect plays a key role in these evolutions. The numerical simulations in the present work are in excellent accordance with previous experiments and fluid modeling. This dynamic model proves to be a convenient and promising approach to reproducing different pattern structures and pattern evolutions in dielectric barrier glow discharge systems.     

低能氮离子束注入固态5＇－dTMP的辐照损伤研究

对３０ｋｅＶ氮离子束辐照５’ｅｄＴＭＰ核苷酸引起的无机磷和碱基的释放进行了多方面的研究，得到无机磷产率和碱基产生量的剂量效应曲线。以及０．１ｍｏｌ／ＬＮａＯＨ碱处理对它们的影响。碱处理不仅增加了无机磷的释放量，而且还使辐照产生的游离碱基受到损伤而裂解。碱处理后立刻测量得知，受辐照样品的碱溶液中无机磷的含量为其水溶液中的１７倍，而样品碱溶液中的碱基浓度却只有其水溶液中的０．５倍左右，碱处理４０ｍｉｎ后，受辐照样品之碱溶液中无机磷含量则增至其水溶液中的２．８倍左右。另外，离子束辐照作用主要是直接作用，具有较高的Ｇ（Ｐｉ）值，达０．４４分子／１００ｅＶ以上。     

聚变反应堆壁材料钨和钼的表面离子束效应

运用扫描电子显微镜(SEM)及氘的定量深度分布测量,系统地研究了在氘离子轰击下金属钨和钼的损伤情况, 特别是钨表面气泡的形成及机制,以及氘在表面层的滞留量与气泡形成机制之间的关系。D+能量为100—1000eV, 轰击注量为11019—11021cm-2。轰击过程中靶表面温度分别控制在室温、600℃和800℃。研究结果为聚变堆壁材料的选择提供了依据。     

The effects of gas flow pattern on the generation of ozone in surface dielectric barrier discharge

Ozone production utilizing surface dielectric barrier discharge (SDBD) was experimental studied for different flow patterns considering the influences of transversal flow, lateral flow and different lateral flow positions. Results show that the flow patterns have a remarkable impact on the ozone yield by affecting the uniformity and turbulence of gas flow. Meanwhile, distributing the O₂ flow rate according to the intensity of the plasma reaction would also increase the generation efficiency of SDBD for ozone production. By improving the uniformity and introducing the lateral flow to the transversal flow, the highest ozone yield was obtained in flow pattern ‘F’. In this case, the ozone yield increased by 28.4% to 131 gkWh ⁻¹ from 102.8 gkWh⁻¹ in flow pattern ‘A’.