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采用均相沉淀法制备了SiO2/CeO2复合磨料,并利用X射线衍射仪(XRD)、透射电子显微镜(TEM)、傅里叶变换红外光谱仪(FT-IR)等对样品的相组成和形貌进行了表征。将所制备的SiO2/CeO2复合磨料用于蓝宝石晶片的化学机械抛光,利用原子力显微镜检测抛光后的蓝宝石晶片表面粗糙度。结果表明:所制备的SiO2/CeO2复合磨粒呈球形,粒径在40-50nm;在相同条件下,经过复合磨料抛光后的蓝宝石晶片表面粗糙度为0.32nm,材料去除速率为16.4nm/min,而SiO2抛光后的蓝宝石晶片表面粗糙度为0.92nm,材料去除速率为20.1nm/min。实验显示,复合磨料的材料去除速率略低于单一SiO2磨料,但它获得了较好的表面质量,基本满足蓝宝石作发光二极管(LED)衬底的工艺要求。 相似文献
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不同壳厚聚苯乙烯/氧化铈复合磨料的合成及其抛光特性 总被引:1,自引:0,他引:1
以表面带负电荷的聚苯乙烯(Polystyrene,PS)微球为内核,采用液相工艺合成不同壳厚的聚苯乙烯/氧化铈(PS/Ce02)核壳包覆结构复合磨料,并用透射电子显微镜、场发射扫描电子显微镜、激光拉曼(Raman)光谱仪、热重示差扫描量热仪和动态光散射仪等手段对样品进行表征.用原子力显微镜观察和测量抛光表面的微观形貌、轮廓及粗糙度,考察复合磨料壳厚对硅晶片热氧化层抛光性能的影响.结果表明,所制备的PS/Ce02复合磨料呈规则球形,粒径在200~250 nm,壳厚在10~30nm.化学机械抛光结果显示,PS/CeO2复合磨料对硅晶片热氧化层表现出良好的抛光特性,且复合磨料壳厚对抛光表面粗糙度和材料去除率具有较大影响.经壳厚为20 nm的复合磨料抛光后晶片表面在5μm×5 μm范围内粗糙度平均值和方均根值分别为0.196 nm和0.254 nm,材料去除率为568.2 nm/min. 相似文献
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针对传统磨料的固定磨料抛光布容易在加工表面产生划伤,以及材料去除效率低等问题,提出了采用微米级球形聚集氧化硅粒子的固定磨料抛光布。将纳米聚集氧化硅粒子添加到抛光布中,用pH为10.5的碱性水溶液替代传统的抛光液,进行了Si基板的的抛光加工试验。与传统采用不规则形状天然氧化硅及球形熔融氧化硅固定磨料抛光布进行了比较,得到了纳米聚集氧化硅的固定磨料抛光布的加工特性,并讨论了它的基本参数对加工特性的影响。实验得到了与现行纳米抛光液(重量百分比为3%,pH=10.5)相同的材料去除率,加工表面粗糙度降低了约30%。与传统不规则形状天然氧化硅磨料抛光布相比,纳米聚集氧化硅抛光布的磨料为球形,弹性系数仅为其1.4%~60%,因此不易划伤抛光表面。与熔融氧化硅抛光布相比,纳米聚集氧化硅抛光布在pH为10.5的碱性水溶液中磨料表面可吸附的[-OH]离子提高了25倍,使得液相化学去除作用增大至去除率的70%以上。另外,随着纳米聚集氧化硅的微米粒径的增大,固定磨料抛光布的纳米级加工表面粗糙度几乎不变,但对前加工面表面粗糙度的去除能力明显增大,表现出微米粒径效应。 相似文献
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在超声辐射条件下,使用正丁醇/水反应体系通过均相沉淀法制备了纳米CeO2粉体;将所制备的纳米CeO2粉体作为磨料对硅晶片进行抛光,用原子力显微镜观察抛光表面的微观形貌并测量表面粗糙度;研究了超声场以及醇/水反应体系对纳米CeO2粉体粒径和团聚情况的影响,考察了纳米CeO2磨料对硅晶片的抛光效果。结果表明:超声辐射以及醇/水反应体系均有利于制备出粒径更小,且分散性更好的纳米CeO2粉体;使用纳米CeO2磨料抛光的硅晶片表面最终在2μm×2μm范围内的微观粗糙度值为Ra0.108nm,而且抛光表面非常平整。 相似文献
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利用静电层层自组装原理,通过PDADMAC在聚合物粒子表面改性和吸附不同层数的SiO2磨粒,制备n-SiO2/BGF复合磨粒及其抛光液。分析了交替吸附PDADMAC和SiO2磨粒的BGF微球表面Zeta电位的变化,利用TEM表征了不同层数的n-SiO2/BGF复合磨粒SiO2磨粒的吸附情况。分析了聚合物表面磨粒的吸附层数、游离磨粒浓度、聚合物粒径对复合磨粒抛光液抛光的影响。抛光实验表明:3-SiO2/BGF复合磨粒抛光液的材料去除率最高,为368.8nm/min;复合磨粒抛光液中的聚合物粒子为1~2μm、游离磨料SiO2的质量分数为5%时,材料去除率取得较大值。经3-SiO2/BGF复合磨粒抛光液抛光后的硅表面,在10μm×10μm范围内,表面粗糙度从0.3μm降至0.9nm,峰谷值小于10nm,表明复合磨粒抛光液对硅片具有良好的抛光效果。 相似文献
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以硝酸铈和碳酸氢铵为原料,用双液超声雾化反应法制备了纳米CeO2粉体;用X射线衍射仪和透射电子显微镜分析了雾化温度、焙烧温度、雾化液浓度、表面活性剂等因素对粉体颗粒尺寸和形貌的影响.结果表明:前驱体的物相组成与雾化温度有关,雾化温度60℃时制备的纳米CeO2颗粒团聚现象较轻、均匀性好;培烧温度的提高会使纳米CeO2颗粒迅速长大,比表面积大大减小,200℃焙烧较好;雾化液浓度的减小对颗粒尺寸影响不大,但会使其团聚状况有明显减轻,优化的浓度为0.2 mol·L-1;表面活性剂的加入有利于降低雾化液的表面张力,加入体积分数10%乙醇+0.5%聚乙二醇后,有利于生成更细小、粒径更加均匀的球形颗粒;在以上最佳工艺条件下制备的CeO2颗粒尺寸为3 Nm. 相似文献
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磨料的粒径分布严重影响铜膜抛光效果,单一粒径磨料在抛光过程中,部分较大或较小磨料的作用难以准确评估。针对这一问题,采用不同且粒径相近(40、60和80 nm)的磨料混合来表征反映粒径分散性对铜膜抛光的影响,研究单一磨料、2种和3种粒径磨料混合的抛光液对硅通孔铜膜抛光的影响。结果表明:在相同质量分数条件下,不同粒径磨料混合能提高铜膜抛光速率和改善表面质量;2种粒径磨料混合时,粒径差距越大,则抛光速率越快;3种粒径磨料混合时其抛光速率和抛光表面质量优于单一粒径和2种粒径混合,当40、60和80 nm 3种粒径磨料的比例为1∶3∶2时,抛光效果最好。建立铜片与抛光垫之间磨料分布的物理模型,揭示混合磨料提高铜膜去除速率的机制,计算出磨料与铜片的接触面积。 相似文献
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制备纳米金属间化合物Fe-Al/Cr_3C_2复合涂层并测试其抗腐蚀性能,为利用热喷涂技术治理火电站易损部件腐蚀问题提供有效手段。运用自主研发的造粒系统,成功对高活性的纳米Fe-Al/Cr_3C_2复合喷涂粉体实施团聚造粒;运用高速火焰喷涂方法,在结构材料表面制备出了纳米Fe-Al/Cr_3C_2复合涂层,对比测试了微米、纳米Fe-Al/Cr_3C_2复合涂层的抗高温腐蚀性能,分别采用抛物线型和幂函数型对腐蚀动力学曲线进行拟合。纳米Fe-Al/Cr_3C_2复合喷涂材料的粒径由原始的50nm团聚到最终的114~178μm,团聚后的纳米颗粒呈圆形或椭圆形,各成分比例保持原始比例,团聚颗粒内部仍然保持纳米粉体状态;纳米Fe-Al/Cr_3C_2复合涂层表面致密、铺展均匀,截面元素过渡平缓、层片细小;运用幂函数方程对腐蚀动力学曲线的拟合效果更好。通过对腐蚀动力学拟合方程进行求导运算可推算出各复合涂层的腐蚀速率。团聚后的纳米颗粒满足热喷涂材料的相关要求,纳米Fe-Al/Cr_3C_2复合涂层的抗高温腐蚀性能显著高于微米Fe-Al/Cr_3C_2复合涂层。纳米Al、Cr优先氧化生成具有保护作用的氧化膜机理解释了纳米涂层抗高温腐蚀性能优异的原因。 相似文献
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以纳米Fe3O4颗粒为核,分别采用液相沉积法和溶胶一凝胶法两种方法将MnO2包覆在其上制备了Fe3O4/MnO2磁性复合颗粒,并借助XRD、TEM、FTIR和VSM等手段分别对纳米Fe3O4颗粒和两种复合颗粒进行表征.结果表明:采用液相沉积法进行包覆可生成以多个纳米Fe3O4颗粒为核、粒径约为200 nm的近球形Fe3O4/MnO2磁性复合颗粒,其饱和磁化强度为24.4 kA·m-1;采用溶胶-凝胶法进行包覆则生成以单个纳米Fe3O4颗粒为核、粒径约为50 nm的磁性复合颗粒,包覆层为絮状MnO2,其饱和磁化强度为16.5 kA·m-1. 相似文献
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MORPHOLOGY CONTROL OF ULTRAFINE CeO2 AND ITS POLISHING EFFICACY 总被引:1,自引:0,他引:1
Chen Jianqing College of Materials Science Technology Jiangsu University Zhenjiang China Chen Zhigang Li Jinchun Department of information Science Jiangsu Polytechnique University Changzhou China 《机械工程学报(英文版)》2005,18(1):14-16
Homogenous precipitation and subsequent calcination has been used to synthesize ultrafine ceria from cerium nitrate and urea solution. The ceria calcined from the precursor inherit the size and morphology of it. The size and morphology of the precursor are closely related to the preparation process. The morphology, size and distribution of the precursor could be tailored by changing the reaction condition and the ageing time. Monodispersed 200 run sized spherical particles is prepared by this method. The powder is used in the chemical-mechanical polishing of Si wafer. The average surface roughness of the polished Si wafer is 0.171 nm measured by AFM. 相似文献
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TiO2/SiO2/Fe3O4 nanoparticles have bigger specific area which can greatly increase the efficiency of photo-catalysis.The TiO2/SiO2/Fe3O4 particles in nano scale were prepared with reduction method at high temperature in this paper,and their morphology,particle size and magnetic property were characterized by transmission electron microscope(TEM),Xray diffraction(XRD) and magnetometer.The results show that the grain sizes of Fe3O4,SiO2-Fe3O4 and TiO2-SiO2-Fe3O4 particles were 50nm,70nm and 120nm,respectively.With the modification of SiO2,Fe3O4 magnetic cores are protected from oxidation.Moreover,by the addition of TiO2 function layer,TiO2-SiO2-Fe3O4 functional nanoparticles,with the saturation magnetization density of 34.1emu/g,is magnetically recoverable.The processes of this method are so simple that the nanoparticles can be produced in large quantity. 相似文献
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Influence of Al2O3 reinforcement on the abrasive wear characteristic of Al2O3/PA1010 composite coatings 总被引:2,自引:0,他引:2
In the present study, the abrasive wear characteristics of Al2O3/PA1010 composite coatings were tested on the turnplate abrasive wear testing machine. Steel 45 (quenched and low-temperature tempered) was used as a reference material. The experimental results showed that when the Al2O3 particles have been treated with a silane coupling agent (γ-aminopropyl-triethoxysilane), the abrasive wear resistance of Al2O3/PA1010 composite coatings has a good linear relationship with the volume fraction of Al2O3 particles in Al2O3/PA1010 composite coatings and the linear correlation coefficient is 0.979. Under the experimental conditions, the size of Al2O3 particles (40.5-161.0 μm) has little influence on the abrasive wear resistance of Al2O3/PA1010 composite coatings. By treating the surface of Al2O3 particles with the silane coupling agent, the distribution of Al2O3 particles in PA1010 matrix is more homogeneous and the bonding state between Al2O3 particles and PA1010 matrix is better. Therefore, the Al2O3 particles make the Al2O3/PA1010 composite coatings have better abrasive wear resistance than PA1010 coating. The wear resistance of Al2O3/PA1010 composite coatings is about 45% compared with that of steel 45. 相似文献
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分散剂对超细硫酸钡粉体制备的影响 总被引:3,自引:0,他引:3
采用直接沉淀法,在反应体系中添加不同的分散剂,制得了超细硫酸钡,用TEM表征了硫酸钡粉体的形貌、大小。结果表明:不同分子量匹配的聚乙二醇(PEG)作为分散剂有较好的分散效果,当PEG加入量为4%,PEG200和PEG4000的配比为5:1,反应时间为10min时,制得的粉体分散性较好,粒径分布窄,团聚得到了有效抑制,平均粒径在300nm左右。 相似文献
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Ammonium aluminum carbonate hydroxide (AACH) was prepared by a precipitation-azeotropic distillation method, which uses aluminum sulfate as the Al source and ammonium carbonate as the precipitant. Then, AACH was calcined into ultrafine ?-Al2O3 powder. The factors that influence the dispersion property of ultrafine ?-Al2O3 powder are discussed in this paper, such as the methods of adding materials, surfactant, and drying methods. The changes of the structure and property of ultrafine alumina in the thermal treatment process are also studied. The morphological structure and properties of AACH are characterized by DTA/TGA, SEM, XRD, and ICP measurements. The results show that ultrafine ?-Al2O3 powder with a uniform particle size and well-distributed property can be synthesized only after aluminum sulfate atomizes into ammonium carbonate, proper amount of PEG1000 is added as the dispersant, and the product is treated by azeotropic distillation. The phase transformation of alumina during the calcination process can be described as amorphous Al2O3 → ?-Al2O3 → ?-Al2O3 → ?-Al2O3. The crystal grain size and density of ultrafine alumina powder increase with the increase of the calcination temperature. After AACH has been calcined at 1200°C for 2 h, the ultrafine ?-Al2O3 with uniform particle size, spherical shape, and more than 99.97% purity is obtained and its powder is well dispersed. 相似文献