用改进曝光模型模拟厚胶显影轮廓

考虑厚胶曝光过程中非线性因素的影响及其显影特点,用一套随抗蚀剂厚度发生变化的曝光参数改进的Dill曝光模型,仿真厚层抗蚀剂光刻过程,并比较新曝光模型与原有Dill模型模拟的结果差异。模拟显示,用新曝光模型获得的厚抗蚀剂显影轮廓与实验结果吻合较好;并对厚胶光刻成像机理进行了讨论。通过分析正性厚层抗蚀剂AZ4562的显影轮廓,给出其显影线宽及边墙陡度随显影时间的变化规律,提出应以获得最大边墙陡度作为优化显影时间的思想。对厚度5μm和15μm的抗蚀剂,经计算,可获得良好的抗蚀剂浮雕轮廓的优化显影时间分别为98s和208s。     

Experimental observations and computer simulations for metallic projectile fragmentation and impact crater development in thick metal targets

Stainless steel (3.18 mm diameter) spherical projectiles impacting 2.5 cm thick targets of nickel, copper, 304 stainless steel, and 70/30 brass at velocities ranging from 0.52 to 5.12 km/s were observed by SEM to form decreasing average fragment sizes with increasing impact velocity, beyond a fragmentation onset velocity of 0.7 km/s. Crater observations by optical microscopy and SEM were qualitatively simulated using an AUTODYN numerical analysis code, which also illustrated a decrease in fragmentation density within the target craters with increasing impact velocity. However, extrapolated simulations corresponding to impact velocities as high as 10 km/s showed residual fragmentation within these craters in contrast to extrapolations of the experimental fragment size versus impact velocity data indicative of zero fragment size at 6 km/s.     

Application of wide angle beam spectroscopic ellipsometry for quality control in solar cell production

Wide angle beam ellipsometry developed by our group uses non-collimated illumination with a special light source and arrangement giving multiple-angle-of-incidence and multiwavelength information. Our aim was to make our wide angle beam ellipsometer suitable for spectral measurement and to obtain the spectra of many points along a long line (presently 0.2 m but it could be increased up to 1 m if necessary) of an entire sample simultaneously. The prototype uses a xenon lamp as a light source with film polarizers and a concave optical grating to reach the desired 6 nm spectral resolution over the range of 360-630 nm. This new technique mixed with an appropriate ellipsometric model has the capability to make “in situ” control in solar cell fabrication. In order to demonstrate the ability of our instrument, wide angle beam spectroscopic ellipsometry measurements were carried out on Al-doped ZnO samples, which have different physical properties such as specific resistance and transparency.     

Determination of the refractive index of single crystal bulk samples and micro-structures

We present comparative studies for the exact determination of the refractive index of single crystals using spectroscopic ellipsometry and photonic-mode-structure investigations by means of spatially resolved photoluminescence spectroscopy, especially in the near band-gap spectral range. By applying such complementary methods we can overcome the uncertainties in the determination of the bulk refractive index introduced by surface properties. The physical effects used are the electromagnetic field reflection used by spectroscopic ellipsometry at large scale planar single crystals and the whispering-gallery-mode formation by total internal reflection in confined micro-structures. We demonstrate the applicability of such studies using the example of uniaxial ZnO bulk samples and micro-wires. By assuming a surface near region with electronic properties different from the bulk material, the method presented here gives the refractive index dispersion for both types of samples in an energy range from 1 to 3.4 eV.     

Experimentation and modeling of inclined ballistic impact in thick polycarbonate plates

The penetration and perforation of a thick polycarbonate (PC) plate (one and 3 stacked) by an armor piercing 7.62 mm projectile is investigated experimentally and numerically. The characteristic structure of the projectile’s trajectory in the PC plates is studied. It is observed that the trajectory consist of a cavity and a circumferential cracked zone attached to it, which is fully embedded within a cylindrical plastic zone. The size of the plastic zone is approximately twice that of the cavity zone and can be clearly observed due to the change of the refractive properties of the material. Strong local recovery of the PC is shown as well.A 3D transient non-linear adiabatic finite element simulation is performed using the commercial software Abaqus 6.9-EF1. The numerical analyses include two combined failure criteria: “Ductile failure with damage evolution”, and tensile failure. The material properties are strain rate and temperature dependent. The numerical simulations are tested by comparing the numerical trajectory prediction to actual trajectories of inclined impacts of projectiles. It is found that the projectile perforates the plate at angles of inclinations of 30° and higher. The observed agreement between experiments and numerical modeling indicates that the combined effect of the two failure criteria (tensile vs. ductile failure) can reasonably well predict the projectile’s trajectory within a thick PC plate.The numerical analyses are further used to study the effect of the projectile impact velocity on the depth of penetration (DOP). It is found that the DOP scales slightly non-linear with the impact velocity. The core velocity during the penetration process is also slightly non-linear. The deceleration during penetration is almost a linear function of the penetration velocity and it is higher for higher penetration velocities.     

Optical modeling of nickel-base alloys oxidized in pressurized water reactor

The knowledge of the aging process involved in the primary water of pressurized water reactor entails investigating a mixed growth mechanism in the corrosion of nickel-base alloys. A mixed growth induces an anionic inner oxide and a cationic diffusion parallel to a dissolution-precipitation process forms the outer zone. The in situ monitoring of the oxidation kinetics requires the modeling of the oxide layer stratification with the full knowledge of the optical constants related to each component. Here, we report the dielectric constants of the alloys 600 and 690 measured by spectroscopic ellipsometry and fitted to a Drude-Lorentz model. A robust optical stratification model was determined using focused ion beam cross-section of thin foils examined by transmission electron microscopy. Dielectric constants of the inner oxide layer depleted in chromium were assimilated to those of the nickel thin film. The optical constants of both the spinels and extern layer were determined.     

On the determination of the cohesive zone parameters for the modeling of micro-ductile crack growth in thick specimens

The paper deals with the determination of the cohesive zone parameters (separation energy, , and cohesive strength, T _max) for the 3D finite element modeling of the micro-ductile crack growth in thick, smooth-sided compact tension specimens made of a low-strength steel. Since the cohesive zone parameters depend, in general, on the local constraint conditions around the crack tip, their values will vary along the crack front and with crack extension. The experimental determination of the separation energy via automated fracture surface analysis is not accurate enough. The basic idea is, therefore, to estimate the cohesive zone parameters, and T _max, by fitting the simulated distribution of the local crack extension values along the crack front to the experimental data of a multi-specimen J _IC-test. Furthermore, the influence of the cohesive zone parameters on the crack growth behavior is investigated. The point of crack growth initiation is determined only by the magnitude of . Both and T _max affect the crack growth rate (or the crack growth resistance), but the influence of the cohesive strength is much stronger than that of the separation energy. It turns out that T _max as well as vary along the crack front. In the center of the specimen, where plane strain conditions prevail, the separation energy is lower and the cohesive strength is higher than at the side-surface.     

Application of neural classification in ellipsometry for robust thin-film characterizations

Nowadays, ellipsometry is a widely used technique for thin-film analyses among the existing methods. It offers a rapid, accurate and non-destructive control. The main task in this technique remains in the inverse problem which goal is to extract the interesting characteristics of the sample from the ellipsometric measurement. This is a purely mathematical step and the common algorithms used to achieve it are based on the gradient method. These latter proceed iteratively and hence require a well-chosen initial solution in order to converge towards a global minimum corresponding to the real physical solution. The main limitation of these algorithms is the risk to slip into a local minimum, leading to an erroneous solution. In this paper, we propose an original method based on neural classification in order to give a first estimation about the location of the solution in the multi-parameter space. This operation generally takes place before the characterization step itself. In this work, the method is implemented experimentally to estimate the thickness range of photoresist thin films deposited on a glass substrate.     

On the use of time series techniques in shape recognition applications

In this paper, a method for classifying objects based on the use of autoregressive model parameters which are obtained from a time series representation of shape boundaries in digital images of objects is presented. This technique is insensitive to size and is rotation invariant. The objects chosen are four types of aircraft from a digital photograph. Recognition accuracies of more than 90% were obtained for all the pattern classes. All pattern recognition problems involve two random variables, the pattern vector and the class to which it belongs. The interdependence of the two variables is given by the conditional probability density function. The degree of dependence between the pattern vector and the particular class is measured by the “distance”. A simple Bhattacharya distance classifier was used for the purpose.     

Functionalization control of porous silicon optical structures using reflectance spectra modeling for biosensing applications

Modeling and experimental reflectance spectra of porous silicon single layers at different steps of functionalization and protein grafting process are adjusted in order to determine the volume fraction of the biomolecules attached to the internal pore surface. This method is applied in order to control the efficiency of the chemical functionalization process of porous silicon single layers. Using results from single porous silicon layer study, theoretical microcavity is simulated at each step of the functionalization process. The calculated reflectance spectrum is in good agreement to the experimental one. Therefore the single layers study can be applied to multilayer structures and can be adapted for other optical structures such as waveguides, interferometers for biosensing applications.     

Determination of the parameters of circuit models of resistive microwave structures

New methods of determining the parameters of circuit models of resistive microwave structures are considered, based on a measurement of the wave scattering parameters of the contact device, consisting of coaxial-stripline transitions, a stripline transmission line and the structure analyzed. Results which demonstrate the high efficiency of the proposed methods of solving the problem are presented. __________ Translated from Izmeritel'naya Tekhnika, No. 8, pp. 51–55, August, 2008.     

Experimental investigation on the effect of top electrode diameter in PZT thick films

We report the effect of top electrode diameter size in aerosol deposited Pb(Zr_0.52Ti_0.48)O₃ thick films (~ 10 μm-thick) with Pt top and bottom electrode. Dielectric and ferroelectric results showed that top electrode diameter of 0.5-1 mm provides reasonable performance with 1 mm being the most suitable dimension in wide range of AC electric field and frequency. The results were discussed based on the surface microstructure and Debye relaxation. The dielectric analysis showed that the properties variation was mainly due to average grain size and defect density. Debye relaxation modeling exhibited that the result is because of materials characteristic not measurement artifact. We believe the results of this study will find immediate application in design of aerosol deposition process.     

Determination of spectrometer-detector parameters from calibration spectra and the use of the parameters in spectrometer calibrations

The grating equation is used to generate quadratic calibration equations for multichannel detectors with perpendicular and tilted focal planes. The quadratic coefficients are not independent and contain terms that are used to solve for spectrometer-detector parameters. The parameters can be calculated from a quadratic fit at one spectrometer position, but more accurate values can be obtained from quadratic fits at two spectrometer positions. The calculations show that the detector focal plane is tilted by about two degrees. Once values for the spectrometer-detector parameters are obtained from calibrations using at least three lines at one or two spectrometer positions, only one calibration line at any spectrometer position is required to obtain accuracies on the order of 0.1 cm(-1) over a several thousand wavenumber range. The main cause of spectrometer drift is a change in the diffraction angle and/or the spectrometer included angle. This drift is almost totally compensated by the one-line calibration, which adjusts the diffraction angle. A neon pen lamp is used to generate the calibration spectra. Using standard air wavelengths compared to true wavelengths can produce calibration errors of 0.1 to 0.6 cm(-1); the magnitude depends on local conditions and how the laser wavelength is treated.     

Determination of fracture parameters for crack propagation in concrete using an energy approach

Double-G fracture model, a new analytical model describing fracture behaviour on cracked concrete, was recently proposed by Xu and Zhao based on the conception of energy release rate. This model couples the Griffith brittle fracture theory with the bridging softening property of concrete, and it is an extension of double-K fracture model proposed by Xu and Reinhardt. In this model, two fracture parameters, i.e., the initiation fracture energy release and the unstable fracture energy release , are termed to distinguish the different crack propagation stages undergoing during the whole fracture process in concrete. The difference between the two parameters, written as , is assumed to come from the contribution by aggregate bridging interlock, which results in the presence of fracture process zone. In our present work, firstly, the new model is elaborately introduced. Then, fracture tests are conducted, where besides three-point bending beams, a new testing method, called wedge-splitting on compact tension is adopted. In the experiments, electrical strain gauges are used to measure initial cracking load. Based on recorded load-crack mouth opening displacement curve (P-CMOD) or load-displacement curve (P-δ) and load-strain curve (P-ε), double-G fracture parameters are experimentally determined. Further more, based on the assumed three parameters relationship among , and , unstable fracture energy release are calculated. A comparable result between the measured and the calculated confirms this assumption. In order to verify the feasibility of this new model, the effective double-K fracture parameters converted by double-G fracture parameters using are compared with the double-K fracture parameters calculated by double-K fracture model. It is found that there is a good agreement. Another two series of different initial crack-depth ratios three-point bending beams carried out by Refai and Swartz are also collected to provide more experimental verification. It shows that the results obtained from the double-G fracture model agree well with those of double-K fracture model.     

Determination of relevant parameters for the use of electronic dosemeters in pulsed fields of ionising radiation

Active electronic dosemeters using counting techniques are used for radioprotection purposes in pulsed radiation fields in X-ray diagnostics or therapy. The disadvantage of the limited maximum measurable dose rate becomes significant in these radiation fields and leads to some negative effects. In this study, a set of relevant parameters for a dosemeter is described, which can be used to decide whether it is applicable in a given radiation field or not. The determination of these relevant parameters-maximum measurable dose rate in the radiation pulse, dead time of the dosemeter, indication per counting event and measurement cycle time-is specified. The results of the first measurements on the determination of these parameters for an electronic personal dosemeter of the type Thermo Fisher Scientific EPD Mk2 are shown.     

The use of the Sawyer-Tower method and its modifications to measure the electrical parameters of ferroelectric materials

Modifications of the Sawyer-Tower method, based on a measurement of the impedance and Fourier transformations, are proposed. A functional and metrological analysis of the methods is presented, which enables the reliability of the measurements of the field dependences of the parameters of ferroelectric materials to be increased, which should find application in microelectronic and nanoelectronic products. __________ Translated from Izmeritel’naya Tekhnika, No. 10, pp. 54–58, October, 2007.     

Measurement of residual stresses in thick composite cylinders by the radial-cut-cylinder-bending method

Thick fabric composite cylinders for nozzle parts in solid rocket motors should be designed to endure the extreme temperature and pressure of combustion gas. As the thickness of the composite cylinder increases, fabricational residual stresses due to the anisotropic thermal expansion or shrinkage of fabric composites also increase, which induces inter-laminar failures. Therefore, the accurate estimation of the residual stresses is indispensable for the development of thick fabric composite cylinders.

In this paper, the residual stresses in thick cylinders made of carbon fabric phenolic composites were measured by a new radial-cut-cylinder-bending method. To obtain the residual stresses from the measured relative strains during the radial-cut operation, a bending test of the cylinder with the radial-cut was performed instead of measuring the material properties with respect to radial positions. The thermal residual stresses were also calculated by finite element method considering shear deformation of fabric layers, and compared with the measured residual stresses by the new method, from which it was found that the new simple method estimated the residual stresses pretty well. Also the inter-laminar tensile strength at the position of maximum radial residual stress could be obtained from the bending test.     

Determination of the state parameters of explosive detonation products by computational inverse method

A computational inverse method is presented to determine the state parameters of Jones-Wilkins-Lee (JWL) equation of explosive detonation products based on cylinder test. In this method, the inverse problem of identifying the JWL parameters is formulated through minimizing the errors of the measured radial displacements on the cylinder surface and those computed by the forward solver. An available numerical model simulated by finite element method is built for the sake of obtaining results using the given JWL parameters. Because of the difference of coordinate systems between experiment and numerical model, it is necessary to conduct the transformation between the two coordinate systems. The sensitivity analysis method is adopted to evaluate the influence of the JWL parameters on the responses and find out the parameters those are suitable to be identified. In order to improve the computational efficiency, radial basis function approximate model is constructed to replace the time-consuming numerical model. In the process of constructing approximate model, the truncated singular value decomposition method is used to deal with the ill-condition of the model. At last, the intergeneration projection genetic algorithm is adopted to identify the parameters. The numerical results demonstrate that the proposed inverse method is potentially available to effectively identify the JWL parameters.