Polarization effects in near-field excitation — collection probe optical microscopy of a single quantum dot

We solve numerically the three-dimensional vector form of Maxwell's equation for the situation of near-field excitation and collection of luminescence from a single quantum dot, using a scanning near-field optical fibre probe with sub-wavelength resolution. We highlight the importance of polarization-dependent effects in both the near-field excitation and collection processes. Applying a finite-difference time domain method, we calculate the complete vector fields emerging from a realistic probe structure which is in close proximity to a semiconductor surface. We model the photoluminescence from the quantum dot in terms of electric dipoles of different polarization directions, and determine the near-field luminescence images of the dot captured by the same probe. We show that a collimating effect in the high index semiconductor significantly improves the spatial resolution in the excitation–collection mode. We find that the spatial resolution, image shape and collection efficiency of near-field luminescence imaging strongly depend on the polarization direction as represented by the orientation of the radiating electric dipoles inside the quantum dot.     

Polarization effects in near-field excitation-collection probe optical microscopy of a single quantum dot

We solve numerically the three-dimensional vector form of Maxwell's equation for the situation of near-field excitation and collection of luminescence from a single quantum dot, using a scanning near-field optical fibre probe with subwavelength resolution. We highlight the importance of polarization-dependent effects in both the near-field excitation and collection processes. Applying a finite-difference time domain method, we calculate the complete vector fields emerging from a realistic probe structure which is in close proximity to a semiconductor surface. We model the photoluminescence from the quantum dot in terms of electric dipoles of different polarization directions, and determine the near-field luminescence images of the dot captured by the same probe. We show that a collimating effect in the high index semiconductor significantly improves the spatial resolution in the excitation-collection mode. We find that the spatial resolution, image shape and collection efficiency of near-field luminescence imaging strongly depend on the polarization direction as represented by the orientation of the radiating electric dipoles inside the quantum dot.     

Near-field mapping of surface polariton fields

Using the general approach to image formation in collection near-field optical microscopy, I derive the symmetry relations for the amplitude coupling coefficients in the case of a weakly guiding single-mode fibre terminated with a probe tip possessing axial symmetry. It is shown that, for the symmetrical detection configuration, six elements of the coupling matrix can be expressed by using only three independent coupling coefficients. The obtained relations are further applied to describe near-field mapping of surface plasmon polariton (SPP) fields. I demonstrate that, for the symmetrical detection configuration, the near-field optical image reflects the intensity distribution of the SPP field components parallel to the surface plane, even though the strong perpendicular component is also being detected. This conclusion is supported with numerical simulations that elucidate the influence of symmetry of the fibre probe on the resulting near-field optical image. The near-field optical images simulated for scattering systems typical for SPP microoptics and localization are presented. It is found that the presence of asymmetry in the detection configuration increases the contribution of the perpendicular field component and results in the images approaching the corresponding SPP intensity distributions.     

Smart optical measurement probe for autonomously detecting nano-defects on bare semiconductor wafer surface: Verification of proposed concept

We propose a new method of inspecting a surface for fine defects that combines the optical inspection method with observation of the physical behavior of a liquid. A liquid thin film on a substrate behaves as a near-field physical probe that autonomously captures nano-particulate defects. Optical observation of the interfacial behavior of the liquid thin film is used to detect minute defects. This method combines the characteristics of optical detection (i.e., detection from a remote field and simultaneous detectability on a plane) and the high sensitivity of a physical near-field probe. We examined the basic principles of the proposed method through numerical calculation and applied it in experiments to detect fine particulate defects on a silicon substrate for semiconductor manufacturing to demonstrate the validity of the basic concept of the proposed method.     

Polarization contrast in reflection near-field optical microscopy with uncoated fibre tips

Using cross-hatched, patterned semiconductor surfaces and round 20-nm-thick gold pads on semiconductor wafers, we investigate the imaging characteristics of a reflection near-field optical microscope with an uncoated fibre tip for different polarization configurations and light wavelengths. It is shown that cross-polarized detection allows one to effectively suppress far-field components in the detected signal and to realize imaging of optical contrast on the sub-wavelength scale. The sensitivity window of our microscope, i.e. the scale on which near-field optical images represent mainly optical contrast, is found to be ≈100 nm for light wavelengths in the visible region. We demonstrate imaging of near-field components of a dipole field and purely dielectric contrast (related to well-width fluctuations in a semiconductor quantum well) with a spatial resolution of ≈100 nm. The results obtained show that such a near-field technique can be used for polarization-sensitive imaging with reasonably high spatial resolution and suggest a number of applications for this technique.     

Polarization contrast in reflection near-field optical microscopy with uncoated fibre tips

Using cross-hatched, patterned semiconductor surfaces and round 20-nm-thick gold pads on semiconductor wafers, we investigate the imaging characteristics of a reflection near-field optical microscope with an uncoated fibre tip for different polarization configurations and light wavelengths. It is shown that cross-polarized detection allows one to effectively suppress far-field components in the detected signal and to realize imaging of optical contrast on the subwavelength scale. The sensitivity window of our microscope, i.e. the scale on which near-field optical images represent mainly optical contrast, is found to be approximately 100 nm for light wavelengths in the visible region. We demonstrate imaging of near-field components of a dipole field and purely dielectric contrast (related to well-width fluctuations in a semiconductor quantum well) with a spatial resolution of approximately 100 nm. The results obtained show that such a near-field technique can be used for polarization-sensitive imaging with reasonably high spatial resolution and suggest a number of applications for this technique.     

Three-dimensional analysis of light propagation through uncoated near-field fibre probes

The near-field emission from uncoated tapered fibre probes is investigated for different probe geometries. The three-dimensional model calculations are based on Maxwell's curl equations and describe the propagation of a 10 fs optical pulse (λ = 805 nm) through tapers of different lengths and different diameters of the taper exit. The numerical evaluation is done with a finite difference time domain code. Two tapers with cone angles of 50°, with taper lengths of 1.5 µm and 1.0 µm and exit diameters of 100 nm and 520 nm, respectively, are considered. We find that without sample the short taper with large exit diameter optimizes both light transmission and spatial resolution. In the presence of a sample with a high dielectric constant, however, the spatial near-field distribution changes drastically for both taper geometries. We find a pronounced increase in spatial resolution, down to about 250 nm inside the medium. This collimation of the near-field distribution arises from interferences between emitted and reflected light from the sample surface and from a collimation effect that the field experiences in the high-index semiconductor material. The combination of high spatial resolution and transmission and collection efficiencies makes such probes interesting for spectroscopic investigations, as demonstrated by recent experiments.     

面向冰区航行的近场海冰感知与航向决策

为实现冰区航行时对本船周围近场海冰的实时掌握与避障,研究了基于航海雷达与探冰雷达图像融合的近场海冰感知与航向决策方法。利用融合的雷达图像进行海冰密集度计算,可获得比人工瞭望估算更精确、更可靠的结果;绘制海冰风险热力图与等值线图,有助于快速掌握当前近场海冰的风险分布情况。综合考虑海冰密集度与偏航程度,提出了冰区航向决策方法,可获得适当的航向角。搜集极地科考破冰船“雪龙2”号首航南极的航海雷达与探冰雷达图像后,密集冰场和稀疏冰场等实验结果表明,所提方法可获得近场海冰的风险分布并给出适当的转向建议,从而为极地自主航行安全提供有效支持。     

Investigations of the interference of surface plasmons on rough silver surface by scanning plasmon near-field microscope.

A scanning plasmon near-field microscope with gold and silver tips, operating in tapping mode of atomic force microscope is used to measure the distribution of the near-field intensity of surface plasmons on rough silver surfaces. Using the fast Fourier transformation of near-field images, it is shown that the distribution of the near-field intensity on the surface is the result of the interference between scattering plasmons and the initial plasmon beam. Multiple scattering effects such as backscattering enhancement of surface plasmons are also observed. It is shown that a nonuniformity in the registration of the scattered light leads to some artifacts in near-field images. Several registration modes of the light signal are considered and it is shown that recording the light signal at the second harmonic of the tapping frequency one can pick out the signal associated with an electromagnetic (em) resonance in a tip-surface (sphere-plane) structure. Possible implementations of this em resonance for studies of local permittivities and local nonlinear susceptibilities of intermediate media between the tip and surface with a subtip resolution are discussed.     

State-selective optical near-field resonant ionization spectroscopy of atoms near a dielectric surface

Spin-sensitive optical near-field microscopy and spectroscopy are proposed based on the study on the conserved quantities in optical near-field interactions of atoms with dielectric surfaces. A two-step photoionization spectra of Cs atoms resolving hyperfine structures are demonstrated near a planar dielectric surface by using evanescent waves. These techniques of state/spin-selective excitation and highly sensitive detection, combined with the techniques of optical pumping, will open up possibilities of space- and polarization-sensitive detection of optical near‐fields using atomic probes. This novel method provides us with a useful technique for the observation of polarization nature of the optical near-field and controlling the spin states of mesoscopic electronic systems.     

Near-field fluorescence imaging and simultaneous observation of surface potentials

We present a new detection method to measure simultaneously surface potential and fluorescence intensity distributions using a combined scanning near-field optical microscope-atomic force microscope (SNOM-AFM). A surface potential image of phospholipid monolayers was obtained in non-contact mode using the SNOM-AFM with a thin-step etched optical fibre probe. For applying this technique, a phospholipid of dipalmitoylphosphatidylethanolamine labelled at the head with a nitrobenzoxadiazole group was used as a fluorescent and single component Langmuir–Blodgett film. It is well known that aggregation of the lipid molecules and their fluorescence intensities are very sensitive to its environmental conditions such as humidity and temperature. We demonstrated for the first time the near-field optical imaging and simultaneous observation of surface potentials with Maxwell stress microscopy.     

Comparative imaging of a bacterial surface-located GFP fusion protein by epifluorescence and scanning near-field optical microscopy

IcsA is an autotransporter protein that plays a role in the virulence of Shigella bacteria. We have examined the cellular localization of a fusion of an IcsA fragment to the green fluorescent protein (GFP) expressed in Escherichia coli using a dual epifluorescence and scanning near-field optical microscope. By combining the data obtained from far-field with near-field microscopy of the same sample, discrimination between surface-bound fusion proteins and fusion proteins located in the cellular cytoplasm becomes possible. Furthermore, and for the first time, the inherent advantages in resolution of the near-field images provides highly specific details of the location of a GFP fusion protein on a bacterial cell surface.     

太赫兹近场光学亚表面检测技术研究

研究了太赫兹散射式扫描近场光学显微镜（Terahertz scattering-type scanning near-field optical microscopy,THz s-SNOM）对亚表面金属微纳结构的显微成像检测。首次采用自主搭建的THz s-SNOM系统对表面覆盖了六方氮化硼薄膜的金微米线进行太赫兹近场显微测量,获得了具有纳米量级空间分辨率和较高对比度的近场显微图。结合全波数值模拟,分析了THz s-SNOM探测亚表面金属微纳结构的空间分辨率、近场散射信号强度和成像对比度。研究表明,THz s-SNOM具有优良的亚表面显微成像检测能力,可应用于微纳电子器件的亚表面结构表征和缺陷检测。     

Characterization of reflection scanning near-field optical microscopy and scanning tunnelling optical microscopy/photon scanning tunnelling microscopy working in preliminary approach constant height scanning mode

The resolution in near-field images is currently determined by the visual inspection of recorded images. One of the major questions in near-field optical microscopy is 'what resolution can be reached, the tip-to-sample distance being known?' This knowledge is critical when choosing the scanning step and the distance between the tip and the sample, in a preliminary scan. This preliminary scan is often the only way to detect the interesting parts of the sample, with limited risk of tip crash and topographical artefacts. The method proposed here needs two scans of the same area, of the same sample, in constant height mode, recorded at two tip-to-sample distances. The pseudo-transfer function is the ratio of the Fourier transform of these two data maps. This function enables the evaluation of the limit of resolution. Theoretical considerations are introduced to assess the method.     

Characterization of reflection scanning near-field optical microscopy and scanning tunnelling optical microscopy/photon scanning tunnelling microscopy working in preliminary approach constant height scanning mode

The resolution in near-field images is currently determined by the visual inspection of recorded images. One of the major questions in near-field optical microscopy is 'what resolution can be reached, the tip-to-sample distance being known?' This knowledge is critical when choosing the scanning step and the distance between the tip and the sample, in a preliminary scan. This preliminary scan is often the only way to detect the interesting parts of the sample, with limited risk of tip crash and topographical artefacts. The method proposed here needs two scans of the same area, of the same sample, in constant height mode, recorded at two tip-to-sample distances. The pseudotransfer function is the ratio of the Fourier transform of these two data maps. This function enables the evaluation of the limit of resolution. Theoretical considerations are introduced to assess the method.     

A hybrid defect detection for in-tray semiconductor chip

The requirements for high-speed and high-precision defect inspection in semiconductor chip are growing rapidly because of the complicated surface in semiconductor chip. Due to manufacturing tolerance of IC tray, the misalignment from the chip positioning shift and rotation are always presented for the application of in-tray inspection. In the beginning, this paper focuses on compensating the positioning shift and rotation of in-tray chip by using the proposed image alignment algorithm before the defect detection. After applying the process of image alignment, a hybrid approach of defect detection is applied to detect the defects of in-tray chip. Furthermore, this hybrid approach simultaneously detects the defects based on its surface by the following two categories: (1) the complicated surface in the circuit and (2) the primitive surface on the bump. As mentioned above, the image alignment strategy and the adaptive image difference method are applied in the detection of complicated surface, and the design-rule strategy is adapted to detect the defects on bumps. Finally, the experimental results show that the proposed image alignment strategy and hybrid approach can accurately and rapidly inspect the defects of in-tray chip. This approach is superior to the traditional template matching in defect detection. In addition, the computational complexity can be efficiently reduced by the proposed hybrid strategy.     

Multi-wavelength heterodyne-detected scattering-type scanning near-field optical microscopy

We report on the implementation of a scattering-type scanning near-field optical microscope based on a heterodyne detection scheme, which has the ability to record near-field optical images at multiple wavelengths simultaneously. It is used to map out local field distribution and to investigate the dispersion behavior of plasmon created by nanometer-scale metallic structures. It opens up an unprecedented opportunity to study nano-photonics.     

Optical characterization of probes for photon scanning tunnelling microscopy

The photon scanning tunnelling microscope is a well-established member of the family of scanning near-field optical microscopes used for optical imaging at the subwavelength scale. The quality of the probes, typically pointed uncoated optical fibres, used is however, difficult to evaluate in a direct manner and has most often been inferred from the apparent quality of recorded optical images. Complicated near-field optical imaging characteristics, together with the possibility of topographically induced artefacts, however, has increased demands for a more reliable probe characterization technique. Here we present experimental results obtained for optical characterization of two different probes by imaging of a well-specified near-field intensity distribution at various spatial frequencies. In particular, we observe that a sharply pointed dielectric probe can be highly suitable for imaging when using p-polarized light for the illumination. We conclude that the proposed scheme can be used directly for probe characterization and, subsequently, for determination of an optical transfer function. which would allow one to deduce from an experimentally obtained image of a weakly scattering sample the field distribution existing near the sample surface in the absence of the probe.     

Optical characterization of probes for photon scanning tunnelling microscopy

The photon scanning tunnelling microscope is a well-established member of the family of scanning near-field optical microscopes used for optical imaging at the sub-wavelength scale. The quality of the probes, typically pointed uncoated optical fibres, used is however, difficult to evaluate in a direct manner and has most often been inferred from the apparent quality of recorded optical images. Complicated near-field optical imaging characteristics, together with the possibility of topographically induced artefacts, however, has increased demands for a more reliable probe characterization technique. Here we present experimental results obtained for optical characterization of two different probes by imaging of a well-specified near-field intensity distribution at various spatial frequencies. In particular, we observe that a sharply pointed dielectric probe can be highly suitable for imaging when using p -polarized light for the illumination. We conclude that the proposed scheme can be used directly for probe characterization and, subsequently, for determination of an optical transfer function, which would allow one to deduce from an experimentally obtained image of a weakly scattering sample the field distribution existing near the sample surface in the absence of the probe.     

Near-field optical microscope working on TEM wave

A new type of probe for the near-field optical microscope incorporating metallic strips on the surface of a dielectric cone (microstrip probe) is proposed. The numerical simulation has shown a significant improvement in optical efficiency for this type of probe compared with the conventional probe. It was found theoretically that scanning near-field optics with the microstrip probe is promising for applications in optical information recording and can be employed as optical heating elements in magnetic information recording. Application of the microstrip probe in nonlinear optical research of nanoscaled medium is possible due to strong electric and magnetic field near the aperture and weak dependence of its transmission parameters on the frequency of the incident beam. A model for the near-field strip probe with cleaved apex is proposed. A method is presented to control the distance between the probe apex and sample surface based on mechanical vibrations of the cleaved apex excited by applying voltage pulses. The oscillation amplitude and attenuation can be determined by measuring the amplitude of microwave radiation excited by oscillations of charges with opposite sign at the probe apex. The investigation was based on mathematical models and experiments necessary to confirm the theoretical prediction.