共查询到17条相似文献,搜索用时 93 毫秒
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《真空科学与技术学报》2020,(1)
为研究空心阴极在起弧、稳态及熄弧等三个关键过程的放电特性从而改善地面测试试验中供电电源与空心阴极的匹配性,搭建了实验平台进行了试验研究,获得了这三个过程中阴极的典型伏安特性曲线。对阴极组件起弧及稳态工作过程进行监测,通过动态回路平衡方程确定了使用稳压稳流电源时系统的稳态工作点,并通过试验验证了空心阴极在不同流率点下放电特性的变化情况。最后对空心阴极熄弧过程的伏安特性进行了研究,通过拉偏测试试验确定了维持阴极自持放电的最小维持功率。结果表明:空心阴极与供电电源构成的系统具有两个工作点,阴极在起弧至稳态工作过程中将跨过首个工作点并最终稳定在在阻抗更小的工作点上。阴极的稳态工作伏安特性呈现为典型的负阻特性,适当增大气体流量和发射电流可以提升发射效率。维持LHC-5L型BLa_6阴极稳态放电所需最低输入功率为14 W,维持功率低于该值时空心阴极将熄弧。 相似文献
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为验证空心阴极持续工作对阴极关键零件的腐蚀情况,设计试验,使得六硼化镧空心阴极进行额定工况点下的持续放电工作并监测其电参数。试验结束后对阴极组件进行破坏性拆解,测量、拟合阴极关键零件腐蚀后的轮廓并与设计值进行对比,最终确定持续放电对阴极关键零件磨损情况的影响,最终为六硼化镧型阴极的设计改进提供依据。 相似文献
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Various effective and simple constructed plasma sources can be developed by using the hollow cathode effect. The improve of the plasma efficiency is caused by the penetration of two or more glow regions of different parts of the cathode. The equatation p × d ∽ 1 mbar cm is a rule of thumb for the appearance of the hollow cathode effect. The hollow cathode arc discharge is caused by an additional thermal electron emission besides the effectes of the hollow cathode glow discharge. All this effects are the reason for the higher degree of ionization for a hollow cathode source in comparison with the most other plasma sources. Application of the hollow cathode glow discharge for surface finish are technics like plasmacleaning, electron beam ablation or gas flow sputtering. Latters are new technics which allow the development of new sources for the coating technology. The application of the hollow cathode are discharge is possible by using the thermal energy generated by the electron beam (electron beam heating, electron beam melting, and electron beam evaporation) and by using the different possibilities of coating technologies whith the hollow cathode arc source (plasma enhanced evaporation, plasma enhanced reactive PVD and plasma CVD). 相似文献
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The total energy flux density delivered to an electrically isolated substrate in a low-pressure pulsed DC hollow cathode plasma jet sputtering system during TiO2 thin film deposition has been quantified. The plasma source was operated in constant average current mode and in a mixture of argon and oxygen or only in pure argon working gas. A titanium nozzle served as the hollow cathode. The total energy flux density measurements were made using a planar calorimeter probe. The main results from the calorimeter probe showed clearly that the total energy flux density at the electrically isolated substrate decreases significantly with duty cycle from 100% (DC mode) to 10% at a given pulsing frequency 2.5 kHz. A local maximum at duty cycle 60% for only pure argon operation has been observed. In addition, the voltage waveforms on the hollow cathode and before the ballast resistor have been saved for pulsed DC measurements for both pure argon and argon + oxygen mixture. A similar transient phenomenon on the cathode voltage and discharge current as observed recently in mid-frequency pulsed DC magnetron discharge has been discovered in the hollow cathode plasma jet sputtering system. We can conclude from these preliminary measurements that the main asset of the pulsed DC hollow cathode plasma jet discharge as distinct from the DC driving of the same plasma system lies in the possibility to reduce or to increase energy influx on the floating substrate within the change of duty cycle. 相似文献
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Sputtering changes the analytical performance of the hollow cathode as an emission source. Proper conditioning (aging) of the hollow with sputtering greatly improves precision. Conditioning decreases the blank emission signal and changes the shape of the hollow. Micrographs which show the evolution of the bottom of the hollow into a stable bulb shape are presented. The blank emission signal decreases with aging of the hollow and approaches a constant value when the hollow is properly conditioned. A short-term stability (n = 5) of approximately 1.8% RSD has been observed frequently. An average long-term stability over several days (n = 45) of 4.5% for Li and 3.5% for Na in the emission signal from microsamples (less than 50 nL) deposited in the hollow cathode discharge source is reported here. Instrumentation, operation, and sample preparation procedures are described. 相似文献
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《Vacuum》2013
Experimental results on the atmospheric hollow cathode plasma generation and performance, using a special configuration with tunable wall separations, are presented. The influence of the gas and type of the power used for generation on the optimum size of the cathode slit is investigated. The experimental results are in agreement with the hollow cathode model. The plasma source/plasma reactor design is of utmost importance for control of plasma-chemical kinetics. An example of the atmospheric hollow cathode plasma application for the NOx conversion is given. The energy consumption and plasma characteristics are discussed. 相似文献
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Makoto Matsui Tomoyuki Ikemoto Hiroki Takayanagi Kimiya Komurasaki Yoshihiro Arakawa 《Vacuum》2006,80(11-12):1161
Arc-heater plumes generated by various oxygen injection systems were investigated by laser absorption spectroscopy. Firstly, oxygen was directly injected into a high-temperature cathode-jet region through a thoriated-tungsten hollow cathode. Although number density of atomic oxygen was increased, erosion of the cathode was too severe to maintain stable discharge. Then, zirconium was used as a cathode material to reduce cathode erosion by oxidation. As a result, stable discharge was maintained for 3 h with pre-mixed argon–oxygen injection and number density of atomic oxygen was successfully increased. 相似文献
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Generation and features of the radio frequency (rf) hollow cathode discharge (HCD) and its transition into the hollow cathode arc (HCA) are described. Rf linear hollow cathodes for generation of plasma over large areas and suitable for further scale-up are presented. Examples of surface processing and coating by PVD, both by HCD and HCA, are given. The hybrid reactor, combining hollow cathode and microwave plasmas, integrates features of both and provides more options to control plasma characteristics and consequently properties of deposited films. The rf hollow cathodes can be operated in both, PVD and PE CVD regimes, depending on process parameters. These regimes can even be combined within one process. New concepts of fused hollow cathode (FHC), microwave antenna (MWA) and Hybrid hollow electrode activated discharge (H-HEAD) cold atmospheric plasma sources are introduced. The FHC with its modular concept can be used for gas conversion, cleaning and for surface treatment of temperature-sensitive materials at ambient atmosphere. The H-HEAD cold atmospheric plasma source, capable of generating plasma plumes more than 15 cm long, enables treatment of 3-d and complex geometry objects even at low gas flows. 相似文献