TCOs for nip thin film silicon solar cells

Substrate configuration allows for the deposition of thin film silicon (Si) solar cells on non‐transparent substrates such as plastic sheets or metallic foils. In this work, we develop processes compatible with low T_g plastics. The amorphous Si (a‐Si:H) and microcrystalline Si (µc‐Si:H) films are deposited by plasma enhanced chemical vapour deposition, at very high excitation frequencies (VHF‐PECVD). We investigate the optical behaviour of single and triple junction devices prepared with different back and front contacts. The back contact consists either of a 2D periodic grid with moderate slope, or of low pressure CVD (LP‐CVD) ZnO with random pyramids of various sizes. The front contacts are either a 70 nm thick, nominally flat ITO or a rough 2 µm thick LP‐CVD ZnO. We observe that, for a‐Si:H, the cell performance depends critically on the combination of thin flat or thick rough front TCOs and the back contact. Indeed, for a‐Si:H, a thick LP‐CVD ZnO front contact provides more light trapping on the 2D periodic substrate. Then, we investigate the influence of the thick and thin TCOs in conjunction with thick absorbers (µc‐Si:H). Because of the different nature of the optical systems (thick against thin absorber layer), the antireflection effect of ITO becomes more effective and the structure with the flat TCO provides as much light trapping as the rough LP‐CVD ZnO. Finally, the conformality of the layers is investigated and guidelines are given to understand the effectiveness of the light trapping in devices deposited on periodic gratings. Copyright © 2008 John Wiley & Sons, Ltd.     

Analysis of the p+/p window layer of thin film solar cells by simulation

正The application of a p~+/p configuration in the window layer of hydrogenated amorphous silicon thin film solar cells is simulated and analyzed utilizing an AMPS-ID program.The differences between p~+-p-i-n configuration solar cells and p-i-n configuration solar cells are pointed out.The effects of dopant concentration, thickness of p~+-layer,contact barrier height and defect density on solar cells are analyzed.Our results indicate that solar cells with a p~+-p-i-n configuration have a better performance.The open circuit voltage and short circuit current were improved by increasing the dopant concentration of the p~+ layer and lowering the front contact barrier height.The defect density at the p/i interface which exceeds two orders of magnitude in the intrinsic layer will deteriorate the cell property.     

A novel way of texturing glass for microcrystalline silicon thin film solar cells application

In this paper, we present a novel way of texturing glass facilitated by ZnO:Al thin film as sacrificial layer for thin film silicon solar cell application. We name this technique zinc oxide‐induced texturing (ZIT). The texturing of glass was achieved by wet etching of ZnO:Al covered glass with HF and HNO₃ as etchants. We investigated the influence of the ZnO:Al layer sputtering condition, the layer thickness, and the etchant composition on the surface morphology of the textured glass. We demonstrate that we are able to control the roughness of the ZIT glass over a wide roughness range, ranging from 20 to 400 nm. Highly efficient microcrystalline silicon n‐i‐p solar cells were deposited on ZIT glass. The influence of the substrate morphology on the solar cell performance is also discussed. The highest efficiency for a single junction n‐i‐p microcrystalline silicon solar cell obtained in this work is 10.64% (Active area). Copyright © 2014 John Wiley & Sons, Ltd.     

引入微晶硅底电池的PIN型三结Si基薄膜太阳电池的制备

为充分利用太阳光谱能量,在玻璃衬底的PIN型a-Si/a-SiGe电池中直接引入了微晶硅(μc-Si:H)底电池.从透明导电氧化物(TCO)衬底的光透过率估算了PIN型a-Si:H/a-SiGe:H/μc-Si:H三结电池实现高转化效率的可行性.通过调整μc-Si:H底电池厚度考察三结电池的性能变化,结果发现,受中间电...     

种子层对微晶硅锗太阳电池的影响

Using plasma enhanced chemical vapor deposition（PECVD） at 13.56 MHz,a seed layer is fabricated at the initial growth stage of the hydrogenated microcrystalline silicon germanium(μc-Si_1-xGe_x:H) i-layer.The effects of seeding processes on the growth ofμc-Si_1-xGe_x:H i-layers and the performance ofμc-Si_1-xGe_x:H p-i-n single junction solar cells are investigated.By applying this seeding method,theμc-Si_1-xGe_x:H solar cell shows a significant improvement in short circuit current density(J_sc) and fill factor（FF） with an acceptable performance of blue response as aμc-Si:H solar cell even when the Ge content x increases up to 0.3.Finally,an improved efficiency of 7.05%is achieved for theμc-Si_0.7Ge_0.3:H solar cell.     

Enhanced infrared transmission of GZO film by rapid thermal annealing for Si thin film solar cells

Ga doped ZnO (GZO) films prepared by sputtering at room temperature were rapid thermal annealed (RTA) at elevated temperatures. With increasing annealing temperature up to 570°C, film transmission enhanced significantly over wide spectral range especially in infrared region. Hall effect measurements revealed that carrier density decreased from ∼8 × 10²⁰ to ∼ 3 × 10²⁰ cm⁻³ while carrier mobility increased from ∼15 to ∼28 cm²/Vs after the annealing, and consequently low film resistivity was preserved. Hydrogenated microcrystalline Si (µc‐Si:H) and microcrystalline Si_1‐xGe_x (µc‐Si_1‐xGe_x:H, x = 0.1) thin film solar cells fabricated on textured RTA‐treated GZO substrates demonstrated strong enhancement in short‐circuit current density due to improved spectral response, exhibiting quite high conversion efficiencies of 9.5% and 8.2% for µc‐Si:H and µc‐Si_0.9Ge_0.1:H solar cells, respectively. Copyright © 2011 John Wiley & Sons, Ltd.     

Experimental and simulation study of thin film silicon solar cells with intermediate reflector

Optical and electrical simulations were carried out for thin film silicon solar tandem cells with intermediate reflector layer (IRL) between top and bottom cell and compared with experimental external quantum efficiency and current voltage characteristics results. Reference data were collected from a series of tandem cells with different thicknesses of the top cell absorber layer (160–240 nm), the bottom cell absorber layer (1750–2100 nm), and the transparent conductive oxides based IRL (10–80 nm). It turned out that for capturing correctly the influence of the IRL on the light management as a function of the IRL thickness, the conventional semicoherent approach is not sufficient. Whereas the optical properties of a very thin IRL are governed by interference effects that are best calculated using a fully coherent model, increasingly thicker IRL show a more and more incoherent behavior. By taking into account, the interface morphology and angular light distribution within the cell stack an algorithm for the effective IRL reflectivity was proposed that explains the experimental findings very well. The consecutive electrical simulations were carried out with the device simulator ASA. The dependence of short circuit current density j_sc and fill factor FF on the thickness d_IRL of the IRL is in qualitative agreement between simulation and experiment showing coincident extrema in j_sc(d_IRL) and FF(d_IRL) at the current matching point. Copyright © 2013 John Wiley & Sons, Ltd.     

n-Doped-layer free amorphous silicon thin film solar cells fabricated with the CuMg alloy as back contact metal

The feasibility of using CuMg alloy as back contact metal for n⁺-doped-layer free a-Si:H thin film solar cell (TFSC) has been investigated in this work. The ohmic-contact characteristic has been achieved by using the CuMg alloy as back contact metal. The proposed structure showed the typical solar cell current-voltage (I-V) characteristic. An initial efficiency of 4.3% has been obtained with a open-circuit voltage V_oc = 0.79 V, short-circuit current J_sc = 13.4 mA/cm² and fill factor F.F. = 0.40. Furthermore, the experimental results also showed the CuMg alloy was suitable for the replacement of n⁺-doped-layer with the production cost reduction of a-Si:H TSFC.     

PI衬底柔性透明硅薄膜太阳能电池的制备及性能

利用硬质玻璃为载板,采用传统硅薄膜太阳能电池生产设备,在聚酰亚胺(PI)塑料薄膜衬底上沉积了B掺杂的ZnO(BZO)薄膜,并以此作为前电极制备了单节电池结构及多节串联一体结构的非晶硅(a-Si)太阳能电池;研究了PI衬底上BZO薄膜的光学及电学性能。结果表明,PI衬底上沉积BZO薄膜后在300~1 200 nm波长范围的透光率为76.63%,方块电阻19.7?/□。所制备的单节和多节串联一体结构的a-Si薄膜太阳能电池的转化效率分别达到6.45%和5.1%,封装后电池组件具有一定的透光性,透光率约达到30.2%。     

Optimization of n/i and i/p buffer layers in n-i-p hydrogenated microcrystalline silicon solar cells

Hydrogenated microcrystalline silicon （μc-Si：H） intrinsic films and solar cells with n-i-p configuration were prepared by plasma enhanced chemical vapor deposition （PECVD）. The influence of n/i and i/p buffer layers on the μc-Si：H cell performance was studied in detail. The experimental results demonstrated that the efficiency is much improved when there is a higher crystallinity at n/i interface and an optimized a-Si：H buffer layer at i/p interface. By combining the above methods, the performance of μc-Si：H single-junction and a-Si：H/μc-Si：H tandem solar cells has been significantly improved.     

Optimization of n/i and i/p buffer layers in n-i-p hydrogenated microcrystalline silicon solar cells

Hydrogenated microcrystalline silicon (μc-Si:H) intrinsic films and solar cells with n-i-p configuration were prepared by plasma enhanced chemical vapor deposition (PECVD). The influence of n/i and i/p buffer layerson the μc-Si:H cell performance was studied in detail. The experimental results demonstrated that the efficiency is much improved when there is a higher crystallinity at n/i interface and an optimized a-Si:H buffer layer at i/p interface. By combining the above methods, the performance ofμc-Si:H single-junction and a-Si:H/μc-Si:H tandemsolar ceils has been significantly improved.     

Analysis of the p+/p window layer of thin film solar cells by simulation

The application of a p⁺/p configuration in the window layer of hydrogenated amorphous silicon thin film solar cells is simulated and analyzed utilizing an AMPS-1D program. The differences between p⁺-p-i-n configuration solar cells and p-i-n configuration solar cells are pointed out. The effects of dopant concentration, thickness of p⁺-layer, contact barrier height and defect density on solar cells are analyzed. Our results indicate that solar cells with a p⁺-p-i-n configuration have a better performance. The open circuit voltage and short circuit current were improved by increasing the dopant concentration of the p⁺ layer and lowering the front contact barrier height. The defect density at the p/i interface which exceeds two orders of magnitude in the intrinsic layer will deteriorate the cell property.     

Structural analyses of seeded thin film microcrystalline silicon solar cell

This contribution investigates the effect of seeding the growth of thin film microcrystalline silicon (µc‐Si : H) deposited by radio frequency plasma‐enhanced chemical vapor deposition on the material properties of µc‐Si : H film and the device performance of p‐i‐n and n‐i‐p µc‐Si : H solar cells. By means of Raman measurement, x‐ray diffraction (XRD) and transmission electron microscopy (TEM), we investigate the structure of seeded µc‐Si : H. In particular, the effect of seed layers on the crystallinity development is investigated. Measurements of the depth profile of the crystalline mass fraction using Raman spectroscopy show that seed layers lead to a more rapid and uniform crystallinity development in growth direction. The amorphous incubation layer is suppressed and crystallization begins directly from onset of film growth without evolving through the intermediate growth phases. From TEM analyses, we observe that crystal sizes are not affected by seed layers. Horizontal cracks are however observed to dominate the early growth of µc‐Si : H in p‐i‐n solar cell and this is reduced upon seeding. For the n‐i‐p cells, these cracks are not affected by seeding. XRD results also indicate that the use of seed layers does not affect the crystal sizes but affects the direction of preferential orientation. Solar cell external parameters show that seeding of p‐i‐n solar cells leads mainly to increase in short‐circuit current density, J_sc with a slight drop in open‐circuit voltage, V_oc. For the n‐i‐p cells, a reverse effect is observed. In this case, the V_oc increases and the J_sc decreases. Copyright © 2012 John Wiley & Sons, Ltd.     

Optical characterization of hydrogenated amorphous silicon thin films deposited at high rate

The aim of this paper is to provide a better understanding of hydrogenated amorphous silicon thin films (a-Si:H) in relation to their optical properties: refractive index, optical gap, absorption coefficient, thickness and surface roughness. The transmission spectrum of the films, deposited with various rf discharge power densities by an optimized plasma enhanced chemical vapor deposition (PECVD) method, at a high rate (>10 Å/sec), was measured over a range in wavelength from 500 to 1100 nm. An approximate model is utilized to describe the surface roughness. In this model, the surface roughness is modeled as a mixed layer of 50 percent of a-Si:H and 50 percent of air and the optical constant of the rough layer is derived using the Bruggemann effective medium approximation (EMA). The gradient iteration method of numerical analysis is used to solve the nonlinear equations in the study. Our results show that the potential underestimation of refractive index and resulting overestimation of film thickness can be overcome by considering the reflection of the rough surface. The method is carried out on the transmission data and the influence of rf discharge power density on the properties of the film is discussed in detail.     

Sunrise to sunset optimization of thin film antireflective coatings for encapsulated,planar silicon solar cells

We present an approach for the optimization of thin film antireflective coatings for encapsulated planar silicon solar cells in which the variations in the incident spectra and angle of incidence (AOI) over a typical day are fully considered. Both the angular and wavelength dependences of the reflectance from the surface, absorptance within the coating, and transmittance into the device are calculated for both single‐ and double‐layer antireflection coatings with and without thin silicon oxide passivation layers. These data are then combined with spectral data as a function of time of day and internal quantum efficiency to estimate the average short‐circuit current produced by a fixed solar cell during a day. This is then used as a figure of merit for the optimization of antireflective layer thicknesses for modules placed horizontally at the equator and on a roof in the UK. Our results indicate that only modest gains in average short‐circuit current could be obtained by optimizing structures for sunrise to sunset irradiance rather than AM1·5 at normal incidence, and fabrication tolerances and uniformities are likely to be more significant. However, we believe that this overall approach to optimization will be of increasing significance for new, potentially asymmetric, antireflection schemes such as those based on subwavelength texturing or other photonic or plasmonic technologies currently under development especially when considered in combination with modules fixed at locations and directions that result in asymmetric spectral conditions. Copyright © 2009 John Wiley & Sons, Ltd.     

a-Si/μc-Si叠层电池中间层材料SiO_x:H制备研究

为提高a-Si/μc-Si叠层太阳电池的效率,采用射频等离子体增强化学气相沉积(RF-PECVD)技术,制备了系列n型掺磷硅氧(SiOx:H)薄膜作为中间层,研究了CO2/Si H4气体流量比、沉积功率和PH3掺杂浓度等工艺参数对材料光电特性的影响,获得了折射率、电导率和禁带宽度能够在较大范围内调控的SiOx:H薄膜。     

P-silicon thin film fabricated by magnetron sputtering and aluminium induced crystallization for Schottky silicon solar cells

Solar cells consist of n-Si wafer and p-Si polycrystalline thin film, which was solely fabricated by magnetron sputtering, and aluminium induced crystallization, are presented in this paper. Firstly, the material and electrical properties of the fabricated p-Si thin films including the crystallization ratio, grain size, morphology, carrier density and mobility were studied by Raman spectroscopy, X-ray diffraction (XRD), scanning electron microscopy and Hall Effect measurement, respectively. The p-Si polycrystalline thin film formed under optimal process conditions had the crystallization ratio of ~ 99% and the grain size of ~ 64.6 nm, determined from the data of Raman spectroscopy and XRD. The hole concentration in the fabricated p-Si polycrystalline thin films was mainly in the order of 10¹⁷ cm⁻³ to 10¹⁹ cm⁻³, and their corresponding mobility values ranged from 15 cm²/V s to 65 cm²/V s. Then solar cells with the device structure of Al electrode/n-Si wafer/p-Si thin film/Al electrode were fabricated, and their electrical properties were measured both under dark and illumination conditions by the semiconductor performance tester and solar simulator. The measured J-V curves under dark condition confirmed the creation of a p-n junction with the ideality factor of 1.55, rectification ratio of 410 at ± 1 V, and the reverse saturation current of 246 nA/cm². The efficiency of 2.19%, with an open circuit voltage of 448 mV and a short circuit current density of 11.2 mA/cm², was achieved under AM1.5G standard illuminations.     

Broadband light trapping with disordered photonic structures in thin‐film silicon solar cells

We theoretically investigate light trapping with disordered 1D photonic structures in thin‐film crystalline silicon solar cells. The disorder is modelled in a finite‐size supercell, which allows the use of rigorous coupled‐wave analysis to calculate the optical properties of the devices and the short‐circuit current density J_sc. The role of the Fourier transform of the photonic pattern in the light trapping is investigated, and the optimal correlation between size and position disorder is found. This result is used to optimize the disorder in a more effective way, using a single parameter. We find that a Gaussian disorder always enhances the device performance with respect to the best ordered configuration. To properly quantify this improvement, we calculate the Lambertian limit to the absorption enhancement for 1D photonic structures in crystalline silicon, following the previous work for the 2D case [M.A. Green, Progr. Photovolt: Res. Appl. 2002; 10 (4), pp. 235–241]. We find that disorder optimization can give a relevant contribution to approach this limit. Finally, we propose an optimal disordered 2D configuration and estimate the maximum short‐circuit current that can be achieved, potentially leading to efficiencies that are comparable with the values of other thin‐film solar cell technologies. Copyright © 2013 John Wiley & Sons, Ltd.     

Boron‐doped hydrogenated silicon carbide alloys containing silicon nanocrystallites for highly efficient nanocrystalline silicon thin‐film solar cells

Boron‐doped hydrogenated silicon carbide alloys containing silicon nanocrystallites (p‐nc‐SiC:H) were prepared using a plasma‐enhanced chemical vapor deposition system with a mixture of CH₄, SiH₄, B₂H₆ and H₂ gases. The influence of hydrogen dilution on the material properties of the p‐nc‐SiC:H films was investigated, and their roles as window layers in hydrogenated nanocrystalline silicon (nc‐Si:H) solar cells were examined. By increasing the R_H (H₂/SiH₄) ratio from 90 to 220, the Si―C bond density in the p‐nc‐SiC:H films increased from 5.20 × 10¹⁹ to 7.07 × 10¹⁹/cm³, resulting in a significant increase of the bandgap from 2.09 to 2.23 eV in comparison with the bandgap of 1.95 eV for p‐nc‐Si:H films. For the films deposited at a high R_H ratio, the Si nanocrystallites with a size of 3–15 nm were formed in the amorphous SiC:H matrix. The Si nanocrystallites played an important role in the enhancement of vertical charge transport in the p‐nc‐SiC:H films, which was verified by conductive atomic force microscopy measurements. When the p‐nc‐SiC:H films deposited at R_H = 220 were applied in the nc‐Si:H solar cells, a high conversion efficiency of 8.26% (V_oc = 0.53 V, J_sc = 23.98 mA/cm² and FF = 0.65) was obtained compared to 6.36% (V_oc = 0.44 V, J_sc = 21.90 mA/cm² and FF = 0.66) of the solar cells with reference p‐nc‐Si:H films. Further enhancement in the cell performance was achieved using p‐nc‐SiC:H bilayers consisting of highly doped upper layers and low‐level doped bottom layers, which led to the increased conversion efficiency of 9.03%. Copyright © 2015 John Wiley & Sons, Ltd.     

High‐efficiency microcrystalline silicon single‐junction solar cells

This short communication highlights our latest results towards high‐efficiency microcrystalline silicon single‐junction solar cells. By combining adequate cell design with high‐quality material, a new world record efficiency was achieved for single‐junction microcrystalline silicon solar cell, with a conversion efficiency of 10.69%, independently confirmed at ISE CalLab PV Cells. Such significant conversion efficiency could be achieved with only 1.8 µm of Si. Copyright © 2013 John Wiley & Sons, Ltd.