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Umut Aydemir İlke Taşçıoğlu Şemsettin Altındal İbrahim Uslu 《Materials Science in Semiconductor Processing》2013,16(6):1865-1872
We have fabricated Au/n-Si and Au/PVA:Zn/n-Si Schottky barrier diodes (SBDs) to investigate the effect of organic interfacial layer on the main electrical characteristics. Zn doped poly(vinyl alcohol) (PVA:Zn) was successfully deposited on n-Si substrate by using the electrospinning system and surface morphology of PVA:Zn was presented by SEM images. The current–voltage (I–V) characteristics of these SBDs have been investigated at room temperature. The experimental results show that interfacial layer enhances the device performance in terms of ideality factor (n), zero-bias barrier height (ΦB0), series resistance (Rs), and shunt resistance (Rsh) with values of 1.38, 0.75 eV, 97.64 Ω, and 203 MΩ whereas those of Au/n-Si SBD are found as 1.65, 0.62 eV, 164.15 Ω and 0.597 MΩ, respectively. Also, this interfacial layer at metal/semiconductor (M/S) interface leads to a decrease in the magnitude of leakage current and density of interface states (Nss). The values of Nss range from 1.36×1012 at Ec—0.569 eV to 1.35×1013 eV?1 cm?2 at Ec—0.387 eV for Au/PVA:Zn/n-Si SBD and 3.34×1012 at Ec—0.560 eV to 1.35×1013 eV?1 cm?2 at Ec—0.424 eV for Au/n-Si SBD. The analysis of experimental results reveals that the existence of PVA:Zn interfacial layer improves the performance of such devices. 相似文献
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The oxidation of single-crystal silicon wafers has been investigated using an industrial thermal oxidation system. The growth characteristics and electrical properties of the oxides resulting from pure hydrogen/oxygen (H2/O2), trichloroethane/oxygen (TCA/O2) and hydrogen chlorid/oxygen (HCl/O2) mixtures have been investigated and compared. The addition of both HCl and TCA to oxygen produces higher growth rates and improved electrical characteristics. It is shown that the oxidation rate for TCA/O2 is approximately 30%–40% higher than for HCl/O2 and that comparable electrical properties can be readily obtained. A TCA/O2 ratio of 1 mol% gives the optimum process for VLSI applications, though 3 mol% HCl/O2 gives comparable results. It is suggested that the overall mechanisms governing the processes are similar. However, the TCA process is a safer and cleaner alternative because it generates HCl in situ in the oxidation chamber. 相似文献
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We have identically prepared Au-Be/p-InSe:Cd Schottky barrier diodes (SBDs) (21 dots) on the InSe:Cd substrate. The electrical analysis of Au-Be/p-InSe:Cd structure has been investigated by means of current-voltage (I-V), capacitance-voltage (C-V) and capacitance-frequency (C-f) measurements at 296 K temperature in dark conditions. The effective barrier heights and ideality factors of identically fabricated Au-Be/p-InSe:Cd SBDs have been calculated from their experimental forward bias current-voltage (I-V) characteristics by applying a thermionic emission theory. The BH values obtained from the I-V characteristics have varied between 0.74 eV and 0.82 eV with values of ideality factors ranging between 1.49 and 1.11 for the Au-Be/p-InSe:Cd SBDs. It has been determined a lateral homogeneous barrier height value of approximately 0.82 eV for these structures from the experimental linear relationship between barrier heights and ideality factors. The Schottky barrier height (SBH) value has been obtained from the reverse-bias C-V characteristics of Au-Be/p-InSe:Cd SBD for only one diode. At high currents in the forward direction, the series resistance effect has been observed. The value of series resistance has been determined from I-V measurements using Cheung’s and Norde’s methods. 相似文献
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The dielectric properties of Ni/n-GaP Schottky diode were investigated in the temperature range 140–300 K by capacitance–voltage (C–V) and conductance–voltage (G/ω–V) measurements. The effect of temperature on series resistance (Rs) and interface state density (Nss) were investigated. The dependency of dielectric constant (ε′), dielectric loss (ε′′), loss tangent (tan δ), ac conductivity (σac), real (M′) and imaginary (M′′) parts of the electric modulus over temperature were evaluated and analyzed at 1 MHz frequency. The temperature dependent characteristics of ε′ and ε′′ reveal the contribution of various polarization effects, which increases with temperature. The Arrhenius plot of σac shows two activation energies revealing the presence of two distinct trap states in the chosen temperature range. Moreover, the capacitance–frequency (C–f) measurement over 1 kHz to 1 MHz was carried out to study the effect of localized interface states. 相似文献
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Control of the threshold voltage and the subthreshold swing is critical for low voltage transistor operation. In this contribution, organic field-effect transistors (OFETs) operating at 1 V using ultra-thin (∼4 nm), self-assembled monolayer (SAM) modified aluminium oxide layers as the gate dielectric are demonstrated. A solution-processed donor–acceptor semiconducting polymer poly(3,6-di(2-thien-5-yl)-2,5-di(2-octyldodecyl)-pyrrolo[3,4-c]pyrrole-1,4-dione)thieno[3,2-b]thiophene) (PDPP2TTT) is used as the active layer. It is shown that the threshold voltage of the fabricated transistors can be simply tuned by carefully controlling the composition of the applied SAM. The optimised OFETs display threshold voltages around 0 V, low subthreshold slopes (150 ± 5 mV/dec), operate with negligible hysteresis and show average saturated field-effect mobilities in excess of 0.1 cm2/V s at 1 V. 相似文献
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Haziret Durmuş 《International Journal of Electronics》2019,106(4):507-520
The main electrical characteristics of current-voltage (I-V) and capacitance-voltage (C-V) measurements at room temperature of the Re/n-type Si Schottky barrier diodes prepared by pulsed laser deposition (PLD) method have been examined. The values of the basic electrical properties such as forward saturation current (Io), ideality factors (n), barrier heights (Фbo), rectification ratio (RR) and series resistances (RS) were obtained from I-V and C-V measurements using different calculation methods. At low voltages (V ≤ 0.3 V), the electrical conduction was formed to take place by thermionic emission, whereas at high voltages (V > 0.3 V), a space charge limited conduction mechanism was shown. Furthermore, the interface state densities (NSS) as a function of energy distribution (ESS- EV) was obtained from the I-V data by taking into account the bias dependence of the effective barrier height (Φb) for the Re/n-type Si Schottky barrier diodes. 相似文献
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In this study, a gold/poly(3-hexylthiophene):[6,6]-phenyl C61 butyric acid methyl ester/n-type silicon (Au/P3HT:PCBM/n-Si) metal-polymer-semiconductor (MPS) Schottky barrier diode (SBD) was fabricated. To accomplish this, a spin-coating system and a thermal evaporation were used for preparation of a P3HT/PCBM layer system and for deposition of metal contacts, respectively. The forward- and reverse-bias current–voltage (I–V) characteristics of the MPS SBD at room temperature were studied to investigate its main electrical parameters such as ideality factor (n), barrier height (ΦB), series resistance (Rs), shunt resistance (Rsh), and density of interface states (Nss). The I–V characteristics have nonlinear behavior due to the effect of Rs, resulting in an n value (3.09) larger than unity. Additionally, it was found that n, ΦB, Rs, Rsh, and Nss have strong correlation with the applied bias. All results suggest that the P3HT/PCBM interfacial organic layer affects the Au/P3HT:PCBM/n-Si MPS SBD, and that Rs and Nss are the main electrical parameters that affect the Au/P3HT:PCBM/n-Si MPS SBD. Furthermore, a lower Nss compared with that of other types of MPS SBDs in the literature was achieved by using the P3HT/PCBM layer. This lowering shows that high-quality electronic and optoelectronic devices may be fabricated by using the Au/P3HT:PCBM/n-Si MPS SBD. 相似文献
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Polymer substrates are essential components of flexible electronic applications such as OTFTs, OPVs, and OLEDs. However, high water vapor permeability of polymer films can significantly reduce the lifetime of flexible electronic devices. In this study, we examined the water vapor permeation barrier properties of Al2O3/HfO2 mixed oxide films on polymer substrates. Al2O3/HfO2 films deposited by plasma-enhanced atomic layer deposition were transparent, chemically stable in water and densely amorphous. At 60 °C and 90% relative humidity (RH) accelerated condition, 50-nm-thick Al2O3/HfO2 had water vapor transmission rate (WVTR) = 1.44 × 10−4 g m−2 d−1, whereas single layers of Al2O3 had WVTR = 3.26 × 10−4 g m−2 d−1 and of HfO2 had WVTR = 6.75 × 10−2 g m−2 d−1. At 25 °C and 40% RH, 50-nm-thick Al2O3/HfO2 film had WVTR = 2.63 × 10−6 g m−2 d−1, which is comparable to WVTR of conventional glass encapsulation. 相似文献
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Tuncay Tunç ?emsettin Altindal ?brahim Uslu ?lbilge Dökme Habibe Uslu 《Materials Science in Semiconductor Processing》2011,14(2):139-145
Current–voltage (I–V) characteristics of Au/PVA/n-Si (1 1 1) Schottky barrier diodes (SBDs) have been investigated in the temperature range 80–400 K. Here, polyvinyl alcohol (PVA) has been used as interfacial layer between metal and semiconductor layers. The zero-bias barrier height (ΦB0) and ideality factor (n) determined from the forward bias I–V characteristics were found strongly dependent on temperature. The forward bias semi-logarithmic I–V curves for different temperatures have an almost common cross-point at a certain bias voltage. The values of ΦB0 increase with the increasing temperature whereas those of n decrease. Therefore, we have attempted to draw ΦB0 vs. q/2kT plot in order to obtain evidence of a Gaussian distribution (GD) of the barrier heights (BHs). The mean value of BH and standard deviation (σ0) were found to be 0.974 eV and 0.101 V from this plot, respectively. Thus, the slope and intercept of modified vs. q/kT plot give the values of and Richardson constant (A?) as 0.966 eV and 118.75 A/cm2K2, respectively, without using the temperature coefficient of the BH. This value of A* 118.75 A/cm2K2 is very close to the theoretical value of 120 A/cm2K2 for n-type Si. Hence, it has been concluded that the temperature dependence of the forward I–V characteristics of Au/PVA/n-Si (1 1 1) SBDs can be successfully explained on the basis of the Thermionic Emission (TE) theory with a GD of the BHs at Au/n-Si interface. 相似文献
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Thin film encapsulation (TFE) with high barrier performance and mechanical reliability is essential and challenging for flexible organic light-emitting diodes (OLEDs). In this work, SF6 plasma treatments were introduced for surface modifications of acrylic in Al2O3/acrylic laminates fabricated by atomic layer deposition (ALD) and ink-jet printing (IJP). It was found that micro-/nano-structures and surface fluoridation appeared on the surface of acrylic, and could be modulated by the discharge power and irradiation of plasma treatment. The water vapor transmission rates (WVTR) of Al2O3/acrylic multi-layers decreased evidently because of reducing surface polarity and strong cross-link of acrylic after plasma treatments. Furthermore, the rugged surface and relieved residual stress resulted from etching and heating of acrylic could enhance the mechanical property remarkably. The plasma treated Al2O3/acrylic multi-layers with only 3 dyads exhibited a low WVTR value of 1.02 × 10−6 g/m2/day and more stable mechanical property under 200 iterations blending test by comparative measurements, proving that the introduction of SF6 plasma surface modifications could improve simultaneously the barrier performance and mechanical reliability prominently of the inorganic/organic multi-layers with no need of extra neutral axis design. 相似文献
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D.E. Y?ld?z 《Microelectronic Engineering》2008,85(2):289-294
The capacitance-voltage-temperature (C-V-T) and conductance-voltage-temperature (G/w-V-T) characteristics of metal-semiconductor (Al/p-Si) Schottky diodes with thermal growth interfacial layer were investigated by considering series resistance effect in the wide temperature range (80-400 K). It is found that in the presence of series resistance, the forward bias C-V plots exhibit a peak, and experimentally shows that the peak positions shift towards higher positive voltages with increasing temperature, and the peak value of the capacitance has a maximum at 80 K. The C-V and (G/w-V) characteristics confirm that the Nss and Rs of the diode are important parameters that strongly influence the electric parameters in (Al/SiO2/p-Si) MIS Schottky diodes. The crossing of the G/w-V curves appears as an abnormality when seen with respect to the conventional behaviour of the ideal MS or MIS Schottky diode. It is thought that the presence of a series resistance keeps this intersection hidden and unobservable in homogeneous Schottky diodes, but it appears in the case of inhomogeneous Schottky diode. In addition, the high frequency (Cm) and conductance (Gm/w) values measured under both reverse and forward bias were corrected for the effect of series resistance to obtain the real diode capacitance. 相似文献
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The electrical and dielectric properties of Al/SiO2/p-Si (MOS) structures were studied in the frequency range 10 kHz-10 MHz and in the temperature range 295-400 K. The interfacial oxide layer thickness of 320 Å between metal and semiconductor was calculated from the measurement of the oxide capacitance in the strong accumulation region. The frequency and temperature dependence of dielectric constant (ε′), dielectric loss (ε″), dielectric loss tangent (tan δ) and the ac electrical conductivity (σac) are studied for Al/SiO2/p-Si (MOS) structure. The electrical and dielectric properties of MOS structure were calculated from C-V and G-V measurements. Experimental results show that the ε′ and ε″ are found to decrease with increasing frequency while σac is increased, and ε′, ε″, tan δ and σac increase with increasing temperature. The values of ε′, ε″ and tan δ at 100 kHz were found to be 2.76, 0.17 and 0.06, respectively. The interfacial polarization can be more easily occurred at low frequencies, and the number of interface state density between Si/SiO2 interface, consequently, contributes to the improvement of dielectric properties of Al/SiO2/p-Si (MOS) structure. Also, the effects of interface state density (Nss) and series resistance (Rs) of the sample on C-V characteristics are investigated. It was found that both capacitance C and conductance G were quite sensitive to temperature and frequency at relatively high temperatures and low frequencies, and the Nss and Rs decreased with increasing temperature. This is behavior attributed to the thermal restructuring and reordering of the interface. The C-V and G/ω-V characteristics confirmed that the Nss, Rs and thickness of insulator layer (δ) are important parameters that strongly influence both the electrical and dielectric parameters and conductivity in MOS structures. 相似文献
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To characterize the electrical properties of epoxy resin filled with different contents of Indium Tin Oxides (ITO) nanoparticles (In2O3 doped with 15% Sn). We study and discuss the Polarization and Depolarization Current tests (PDC). Using the depolarization current obtained at room temperature under several applied electric field, we perform the time to frequency domain transformation. Our results indicate that the transient currents behavior of the epoxy resin is affected by the presence of ITO nanoparticles. The obtained data were first analyzed in terms of the dielectric permittivity and then transformed to electric modulus to highlight conduction process. In the low frequency region, a weak MWS effect is recorded. This relaxation is ascribed to polarization phenomena taking place at the interfaces between the nano-ITO and the epoxy matrix. 相似文献
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The frequency and voltage dependence of capacitance–voltage (C–V) and conductance-voltage (G/ω−V) characteristics of the Cr/p-Si metal semiconductor (MS) Schottky barrier diodes (SBDs) were investigated in the frequency and applied bias voltage ranges of 10 kHz to 5 MHz and (−4 V)−(+4 V), respectively, at room temperature. The effects of series resistance (Rs) and density distribution of interface states (Nss), both on C–V and G/ω−V characteristics were examined in detail. It was found that capacitance and conductance, both, are strong functions of frequency and applied bias voltage. In addition, both a strong negative capacitance (NC) and an anomalous peak behavior were observed in the forward bias C–V plots for each frequency. Contrary to the behavior of capacitance, conductance increased with the increasing applied bias voltage and there happened a rapid increase in conductance in the accumulation region for each frequency. The extra-large NC in SBD is a result of the existence of Rs, Nss and interfacial layer (native or deposited). In addition, to explain the NC behavior in the forward bias region, we drew the C–I and G/ω−I plots for various frequencies at the same bias voltage. The values of C decrease with increasing frequency at forward bias voltages and this decrease in the NC corresponds to an increase in conductance. The values of Nss were obtained using a Hill–Coleman method for each frequency and it exhibited a peak behavior at about 30 kHz. The voltage dependent profile of Rs was also obtained using a Nicollian and Brews methods. 相似文献
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This study uses a dipole embedded in Al2O3 layer to excite a symmetric surface plasmon polariton (SPP) mode in Au/Al2O3/Au waveguide to investigate its profile properties by using finite-difference tim... 相似文献
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中频溅射技术沉积镱铒共掺Al2O3薄膜光致发光 总被引:9,自引:1,他引:9
用中频孪生靶溅射法在硅片上制备了镱铒共掺氧化铝薄膜(2 cm×2 cm),在室温下检测到薄膜的位于1 535 nm的很强的光致发光光谱(PL),讨论了泵浦功率、镱铒共掺比例、退火温度对光致发光光谱强度的影响.扫描电镜(SEM)观察分析表明,中频孪生靶溅射法沉积的薄膜致密、均匀、光学缺陷少.实验结果表明镱铒共掺薄膜的荧光强度不随泵浦功率的增加而饱和,最佳的镱铒共掺杂比例9∶1,最佳退火温度850 ℃,对各种实验结果给出了理论的解释. 相似文献
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采用传统陶瓷制备方法,制备出一种钙钛矿结构无铅新压电陶瓷材料(1-x)(Na1/2Bi1/2)TiO3-x(Na1/2Bi1/2)(Sb1/2Nb1/2)O3(x=0~1.4%,摩尔分数)。研究了(Na1/2Bi1/2)TiO3(NBT)陶瓷B位复合离子(Sb1/2Nb1/2)4 取代对介电和压电性能的影响。X-射线衍射分析表明,所研究的组成均能形成纯钙钛矿(ABO3)型固溶体。陶瓷材料的介电常数-温度曲线显示陶瓷在升温过程中存在两个介电常数温度峰,不同频率下陶瓷材料的介电常数-温度曲线显示该体系材料具有明显的弛豫铁电体特征。检测了不同组成陶瓷的压电性能,发现材料的压电常数d33、厚度机电耦合系数kt和介电常数rε随着x值的增加先增加后降低,在x=0.8%时,陶瓷的d33=97 pC/N,kt=0.50,为所研究组成中的最大值,介电损耗tanδ则随x值的增加而增加。 相似文献