An experimental 1.5-V 64-Mb DRAM

Low-voltage circuit technologies for higher-density dynamic RAMs (DRAMs) and their application to an experimental 64-Mb DRAM with a 1.5-V internal operating voltage are presented. A complementary current sensing scheme is proposed to reduce data transmission delay. A speed improvement of 20 ns was achieved when utilizing a 1.5-V power supply. An accurate and speed-enhanced half-V_CC voltage generator with a current-mirror amplifier and tri-state buffer is proposed. With it, a response time reduction of about 1.5 decades was realized. A word-line driver with a charge-pump circuit was developed to achieve a high boost ratio. A ratio of about 1.8 was obtained from a power supply voltage as low as 1.0 V. A 1.28 μm² crown-shaped stacked-capacitor (CROWN) cell was also made to ensure a sufficient storage charge and to minimize data-line interference noise. An experimental 1.5 V 64 Mb DRAM was designed and fabricated with these technologies and 0.3 μm electron-beam lithography. A typical access time of 70 ns was obtained, and a further reduction of 50 ns is expected based on simulation results. Thus, a high-speed performance, comparable to that of 16-Mb DRAMs, can be achieved with a typical power dissipation of 44 mW, one tenth that of 16-Mb DRAMs. This indicates that a low-voltage battery operation is a promising target for future DRAMs     

A 1.5-V DRAM for battery-based applications

Circuit techniques for 1.5-V CMOS DRAMS to be used in battery-based applications are presented. A three-level word pulse and a plate pulse are used to maintain the stored voltage in a memory cell, in spite of the minimized data-line voltage swing for reducing power dissipation. A 3.4- mu m/sup 2/ data-line shielded stacked capacitor (STC) cell is also proposed to enhance signal-to-noise ratio (SNR) in the memory cell array. The 1.5-V read/write operation is observed successfully through a 2-kbit test device. The data-holding time and alpha -particle-induced soft error rate of the device indicate that the possible performances for the 1.5-V DRAM are comparable to those for the existing 5-V DRAMs.<>     

A 29-ns 64-Mb DRAM with hierarchical array architecture

A 29-ns (RAS access time), 64-Mb DRAM with hierarchical array architecture has been developed. For consistent high yields and high speed, a CMOS segment driver circuit is used as a hierarchical word line scheme. To achieve high speed, precharge signal (PC) drivers for equalizing the bit lines pairs, and shared sense amplifier signal (SHR) drivers are distributed in the array. To enhance sense amplifiers speed in low array voltage, an over driven sense amplifier is adopted. A hierarchical I/O scheme with semidirect sensing switch is introduced for high speed data transfer in the I/O paths. By combining these proposed circuit techniques and 0.25-μm CMOS process technologies with phase-shift optical lithography, an experimental 64-Mb DRAM has been designed and fabricated. The memory cell size is 0.71×1.20 μm ², and the chip size is 15.91×9.06 mm². A typical access time under 3.3 V power supply voltage is 29 ns     

256-Mb DRAM circuit technologies for file applications

256-Mb DRAM circuit technologies characterized by low power and high fabrication yield for file applications are described. The newly proposed and developed circuits are a self-reverse-biasing circuit for word drivers and decoders to suppress the subthreshold current to 3% of the conventional scheme, and a subarray-replacement redundancy technique that doubles chip yield and consequently reduces manufacturing costs. An experimental 256-Mb DRAM has been designed and fabricated by combining the proposed circuit techniques and a 0.25-μm phase-shift optical lithography, and its basic operations are verified. A 0.72-μm² double-cylindrical recessed stacked-capacitor (RSTC) cell is used to ensure a storage capacitance of 25 fF/cell. A typical access time under a 2-V power supply voltage was 70 ns. With the proper device characteristics, the simulated performances of the 256-Mb DRAM operating with a 1.5-V power supply voltage are a data-retention current of 53 μA and an access time of 48 ns     

A 30-ns 256-Mb DRAM with a multidivided array structure

A 256-Mb DRAM with a multidivided array structure has been developed and fabricated with 0.25-μm CMOS technology. It features 30-ns access time, 16-b I/Os, and a 35-mA operating current at a 60-ns cycle time. Three key circuit technologies were used in its design: a partial cell array activation scheme for reducing power-line voltage bounce and operating current, a selective pull-up data-line architecture to increase I/O width and reduce power dissipation, and a time-sharing refresh scheme to maintain the conventional refresh period without reducing operational margin. Memory cell size was 0.72 μm². Use of the trench isolated cell transistor and the HSG cylindrical stacked capacitor cells helped reduce chip size to 333 mm²     

New DRAM noise generation under half-Vccprecharge and its reduction using a transposed amplifier

Dynamic RAM (DRAM) data-line interface noise generated during amplification, the key problem in designing 16 Mbit and higher DRAMs, is investigated. It is reported that: (1) in the half-V_cc approach, specific combinations of signal types (high and low) and CMOS sense-amplifier operating sequences cause interference noise during amplification; (2) interference noise exists in sense amplifiers; and (3) the noise results in a detrimental effect on data holding time characteristics. The interference noise is overcome by a transposed amplifier structure combined with a transposed data-line structure     

The impact of data-line interference noise on DRAM scaling

A kind of data-line (DL) interference noise in a scaled DRAM cell array is found and studied through analysis. The dynamic behavior of cell arrays due to sense-amplifier operation is derived analytically. Analysis shows that the amount of interference noise is more than three times larger than expected from simple data-line coupling. A novel experimental technique for precise noise determination is developed to verify the analysis. Analytical results are in good agreement with the experimental data. It is found that the interference noise plays a dominant role in determining the operating margin of the DRAM and that a novel process or a cell array architecture for minimizing the interference noise is indispensable in 16-Mb DRAM and beyond     

Dual-operating-voltage scheme for a single 5-V 16-Mbit DRAM

A dual-operating-voltage scheme (5 V for peripheral circuits and 3.3 V for the memory array) is shown to be the best approach for a single 5-V 16-Mb DRAM (dynamic random-access memory). This is because the conventional scaling rule cannot apply to DRAM design due to the inherent DRAM word-line boosting feature. A novel internal voltage generator to realize this approach is presented. Its features are the switching of two reference voltages, a driver using a PMOS-load differential amplifier, and the word-line boost based on the regulated voltage, which can ensure a wider memory margin than conventional circuits. This approach is applied to an experimental 16-Mb DRAM. A 0.5% supply-voltage dependency and 30-ns recovery time are achieved     

A 1-Mbit BiCMOS DRAM using temperature-compensation circuittechniques

A temperature-compensation circuit technique for a dynamic random-access memory (DRAM) with an on-chip voltage limiter is evaluated using a 1-Mb BiCMOS DRAM. It was found that a BiCMOS bandgap reference generator scheme yields an internal voltage immune from temperature and V_cc variation. Also, bipolar-transistor-oriented memory circuits, such as a static BiCMOS word driver, improve delay time at high temperatures. Furthermore, the BiCMOS driver proves to have better temperature characteristics than the CMOS driver. Finally, a 1-Mb BiCMOS DRAM using the proposed technique was found to have better temperature characteristics than the 1-Mb CMOS DRAM which uses similar techniques, as was expected. Thus, BiCMOS DRAMs have improved access time at high temperatures compared with CMOS DRAMs     

An experimental 1 Mbit DRAM based on high S/N design

The key to achieving 1-Mb is higher signal-to-noise ratio, while maintaining single 5-V operation even for small feature-size MOSTs. To meet this requirement, three developments are proposed: a corrugated capacitor (memory) cell, a multidivided data line structure, and an on-chip voltage limiter. The results include an improvement in signal-to-noise ratio by a factor of about 22 and provision for single 5-V operation. These techniques have been proven to be useful through the design and evaluation of an experimental 21-/spl mu/m/SUP 2/-cell, single-5-V, 1-Mb NMOS DRAM. Its significant features include: an access time of 90 ns, a power dissipation of 295 mW at 260 ns cycle time, and a 46 mm/SUP 2/ chip area.     

A circuit technology for high-speed battery-operated 16-Mb CMOSDRAM's

A battery-operated 16-Mb CMOS DRAM with address multiplexing has been developed by using an existing 0.5-μm CMOS technology. It can access data in 36 ns when powered from a 1.8-V battery-source, and 20 ns at 3.3 V. However, this device requires a mere 57 mA of operating current for an 80-ns cycle time and only 5 μA of standby current at 3.3 V. To achieve both high-speed and low-power operation, the following four circuit techniques have been developed: 1) a parallel column access redundancy (PCAR) scheme coupled with a current sensing address comparator (CSAC), 2) an N&PMOS cross-coupled read-bus-amplifier (NPCA), 3) a gate isolated sense amplifier (GISA) with low V_T, and 4) a layout that minimizes the length of the signal path by employing the lead on chip (LOC) assembly technique     

An SOI-DRAM with wide operating voltage range by CMOS/SIMOXtechnology

An SOI-DRAM test device (64-Kb scale) with 100-nm-thick SOI film has been fabricated in 0.5-μm CMOS/SIMOX technology and the basic DRAM function has been successfully observed. A partially depleted transistor was used to solve the floating-body effect, resulting in improved operation. The newly introduced body-synchronized sensing scheme enhances the lower Vcc margin. The p-n junction capacitance between source/drain and a substrate for SOI structure is reduced by 25%. RAS access time tRAC is 70 ns with a 2.7-V power supply, which is as fast as the equivalent bulk-Si device with a 4-V power supply. The active current consumption is 1.1 mA (Vcc=3.0 V, 260-ns cycle) for this SOI-DRAM, which is a reduction of 65%, compared with 3.2 mA for the reference bulk-Si DRAM. The mean value of data retention time for this chip at 80°C is longer than 20 s (Vcc=3.3 V), which is the same value as mass-produced 16-Mb DRAM's. The SOI-DRAM has an operating Vcc range from 2.3 V to 4.0 V. The observed speed enhancement and the wide operating voltage range indicate high performance at the low voltage operation suitable for battery-operated DRAM's     

A 64-Mb DRAM with meshed power line

A 64-Mb dynamic RAM (DRAM) has been developed with a meshed power line (MPL) and a quasi-distributed sense-amplifier driver (qDSAD) scheme. It realizes high speed, t_RAS=50 ns (typical) at V_cc=3.3 V, and 16-b input/output (I/O). This MPL+qDSAD scheme can reduce sensing delay caused by the metal layer resistance. Furthermore, to suppress crosstalk noise, a V_SS shield peripheral layout scheme has been introduced, which also widens power line widths. This 64-Mb DRAM was fabricated with 0.4-μm CMOS technology using KrF excimer laser lithography. A newly developed memory cell structure, the tunnel-shaped stacked-capacitor cell (TSSC), was adapted to this 64-Mb DRAM     

A 100-MHz 4-Mb cache DRAM with fast copy-back scheme

A 4-Mb cache dynamic random access memory (CDRAM), which integrates 16-kb SRAM as a cache memory and 4-Mb DRAM into a monolithic circuit, is described. This CDRAM has a 100-MHz operating cache, newly proposed fast copy-back (FCB) scheme that realizes a three times faster miss access time over with the conventional copy-back method, and maximized mapping flexibility. The process technology is a quad-polysilicon double-metal 0.7-μm CMOS process, which is the same as used in a conventional 4-Mb DRAM. The chip size of 82.9 mm² is only a 7% increase over the conventional 4-Mb DRAM. The simulated system performance indicated better performance than a conventional cache system with eight times the cache capacity     

An experimental large-capacity semiconductor file memory using16-levels/cell storage

A 4-bit semiconductor file memory using 16-levels (4-bits)/cell storage is described. The device has 1-Mb single-transistor dynamic memory cells which are divided into 4-kb sequential-access blocks. It incorporates a staircase-pulse generator for multilevel storage operations, a voltage regulator to protect against power-supply voltage surge, and a soft-error-correction circuit based on a cyclic hexadecimal code. The device is fabricated using 1.3-μm CMOS technology. It operates with a 5-V single power supply. Random block selection time is 147 μs, while the sequential data rate is 210 ns. A single-incident alpha particle destroys 4-bit data in two or more adjacent cells. The error correction circuit completely corrects these errors. The soft-error rate under actual operating conditions with error correction is expected to be under 100 FIT (10^-7 h^-1)     

A circuit design of intelligent cache DRAM with automaticwrite-back capability

An intelligent cache based on a distributed architecture that consists of a hierarchy of three memory sections-DRAM (dynamic RAM), SRAM (static RAM), and CAM (content addressable memory) as an on-chip tag-is reported. The test device of the memory core is fabricated in a 0.6 μm double-metal CMOS standard DRAM process, and the CAM matrix and control logic are embedded in the array. The array architecture can be applied to 16-Mb DRAM with less than 12% of the chip overhead. In addition to the tag, the array embedded CAM matrix supports a write-back function that provides a short read/write cycle time. The cache DRAM also has pin compatibility with address nonmultiplexed memories. By achieving a reasonable hit ratio (90%), this cache DRAM provides a high-performance intelligent main memory with a 12 ns(hit)/34 ns(average) cycle time and 55 mA (at 25 MHz) operating current     

Concordant memory design: an integrated statistical design approach for multi-gigabit DRAM

Concordant memory design incorporates fluctuation in device parameters statistically into signal-to-noise ratio analysis in DRAM. In this design, the effective signal voltage of all cells in a chip is calculated, and the failed bit count of the chip is estimated. The proposed design approach gives us a quantitative evaluation of the memory array and assures 1.4-V array operation of 100-nm-1-Gb DRAM. Calculated dependence of the failed bit count on the array voltage is in close agreement with measured data for the 512-Mb DRAM chip.     

A 55-ns 16-Mb DRAM with built-in self-test function usingmicroprogram ROM

A single 5-V power supply 16-Mb dynamic random-access memory (DRAM) has been developed using high-speed latched sensing and a built-in self-test (BIST) function with a microprogrammed ROM, in which automatic test pattern generation procedures were stored by microcoded programs. The chip was designed using a double-level Al wiring, 0.55-μm CMOS technology. As a result, a 16-Mb CMOS DRAM with 55-ns typical access time and 130-mm² chip area was attained by implementing 4.05-μm² storage cells. The installed ROM was composed of 18 words×10 b, where the marching test and checkerboard scan write/read test procedures were stored, resulting in successful self-test operation. As the BIST circuit occupies 1 mm² and the area overhead is about 1%, it proves to be promising for large-scale DRAMs     

A 12-ns low-temperature DRAM

A 12-ns access-time 0.5-Mb CMOS DRAM (dynamic random-access memory) operated at liquid-nitrogen temperatures is discussed. Comprehensive measurements, featuring a low-temperature e-beam tester, focused on circuit concerns particularly relevant to high speed. The results, including the first reported measurements of soft error rate (SER) at low temperatures, show that noise, power, and SER do not preclude very high-speed liquid-nitrogen DRAM operation     

Circuit techniques for 1.5-3.6-V battery-operated 64-Mb DRAM

Circuit techniques for battery-operated DRAMs which cover supply voltages from 1.5 to 3.6 V (universal V_cc), as well as their applications to an experimental 64-Mb DRAM, are presented. The universal-V_cc DRAM concept features a low-voltage (1.5 V) DRAM core and an on-chip power supply unit optimized for the operation of the DRAM. A circuit technique for oxide-stress relaxation is proposed to improve high-voltage sustaining characteristics while only scaled MOSFETs are used in the entire chip. This technique increases sustaining voltage by about 1.5 V compared with conventional circuits and allows scaled MOSFETs to be used for the circuits, which can be operated from an external V_cc of up to 4 V. A two-way power supply scheme is proposed to suppress the internal voltage fluctuation within 10% when the DRAM is operated from external power supply voltages ranging from 1.5 to 3.6 V. An experimental 1.5-3.6-V 64-Mb DRAM is designed based on these techniques and fabricated by using 0.3-μm electron-beam lithography. An almost constant access time of 70 ns is obtained. This indicates that battery operation is a promising target for future DRAMs