硅PIN光电二极管光谱响应特性的数值模拟计算

对硅PIN光电二极管的光谱响应特性作了详细的分析计算,得到了硅PIN光电二极管光谱响应的计算公式;给出了器件光谱响应曲线的绘制方法.实测数据与公式计算结果吻合较好.讨论了器件工艺参数变化对光谱响应的影响.     

表面反型结构的硅(紫)光电探测器

本文分析了常规扩散方法形成的Pn结普通硅光电二极管,光谱响应偏于可见光的长波及近红外区,针对短波响应差的原因提出了表面反型结构的器件设计.实验表明,光谱响应曲线(等能)比较接近人的视见函数,响应峰值移到了5400,在4000时相对灵敏度约70%左右,长波限移到8600～9000范围.     

用于远红外探测的Si:P阻挡杂质带红外探测器研制

提出了全外延技术方案制备阻挡杂质带薄膜,避免了离子注入制备背电极层影响外延薄膜质量的技术难点.基于硅器件工艺设计制作了Si:P阻挡杂质带红外探测器.测量了器件的光电流响应谱和暗电流特性曲线,指认了叠加在光电流响应谱上的尖锐杂质峰对应阻挡层中磷原子的杂质跃迁.研究了器件在低温下小偏压范围内的暗电流起源.通过对计算结果分析,排除了该区域暗电流起源于热激发电导和跳跃式电导的可能,指出暗电流来自器件对冷屏的光电响应.器件工作温度5 K,工作偏压1.6 V时,响应波段覆盖2.5~40μm,峰值波长28.8μm,峰值响应率20.1 A/W,峰值探测率3.7×1013cm·Hz1/2/W(背景光子通量低于1013ph/cm2·s).     

激光退火在硅基光电探测器中的应用

分别对p-i-n和n-i-p两种结构的硅基光电探测器的背面离子注入层进行激光退火处理,辐照功率分别为0.5、1、1.25和1.5 J/cm2.根据激光退火激活载流子模式计算了载流子激活率,获得了载流子浓度和接触电阻的变化量.通过对比器件的电学和光学性能,发现采用1.5 J/cm2的激光,离子注入方式得到的硼离子和磷离子的激活率达到75.0％和92.6％,使得p-i-n和n-i-p结构器件的背接触电阻分别从未退火的22.3 Ω和15.89 Ω降低至7.32Ω和7.63 Ω,显著改善了硅基光电探测器的正向特性.在100 mV反向偏压下激光退火至少降低了10％的暗电流,并增强p-i-n结构峰值处约1％的光谱响应和n-i-p结构峰值处约5％的光谱响应.     

背照式AlGaN/GaN基PIN日盲型紫外探测器的研制

利用MOCVD方法在蓝宝石（0001）衬底上生长PIN型AlGaN/GaN外延材料,研制出背照式AlGaN基PIN日盲型紫外探测器,用紫外光谱测试系统和半导体参数测试仪分别测得了器件的光谱响应和I-V特性曲线。测试结果表明,器件的响应范围为260~280 nm,峰值响应出现在270 nm处,在2.5 V偏压下的最大响应...     

基于InAs/GaAs量子点-石墨烯复合结构的肖特基光电探测器研究

石墨烯具有电子迁移率高、透过率高(T≈97.7%)且费米能级可调的特性。砷化镓的电子迁移率比硅的大5到6倍。引入砷化铟量子点后,光电探测器具有低暗电流、高工作温度、高响应率和探测率的特点,因而可被用于制备响应快、量子效率高和光谱宽的光电探测器。对基于InAs/GaAs量子点-石墨烯复合结构的肖特基结的I-V特性和光电响应进行了研究。结果表明,在0 V偏压下,该器件在400 nm～950 nm均有响应,峰值响应率可达0.18 A/W;在反向偏压下,器件的峰值响应率可达到0.45 A/W。通过对暗电流随温度变化的特性进行分析,得到了InAs/GaAs量子点-石墨烯肖特基结在室温附近以及80 K附近的势垒高度。     

线阵碲镉汞探测器致损单元反常响应机理研究

分别对p-i-n和n-i-p两种结构的硅基光电探测器的背面离子注入层进行激光退火处理,辐照功率分别为0.5、1、1.25和1.5J/cm~2。根据激光退火激活载流子模式计算了载流子激活率,获得了载流子浓度和接触电阻的变化量。通过对比器件的电学和光学性能,发现采用1.5J/cm~2的激光,离子注入方式得到的硼离子和磷离子的激活率达到75.0%和92.6%,使得p-i-n和n-i-p结构器件的背接触电阻分别从未退火的22.3Ω和15.89Ω降低至7.32Ω和7.63Ω,显著改善了硅基光电探测器的正向特性。在100mV反向偏压下激光退火至少降低了10%的暗电流,并增强p-i-n结构峰值处约1%的光谱响应和n-i-p结构峰值处约5%的光谱响应。 更多还原     

n-ZnO/p-GaN异质结紫外探测器及其光电性能研究

利用脉冲激光沉积(PLD)方法在p-GaN衬底上沉积了n-ZnO薄膜,构造了n-ZnO/p-GaN异质结型紫外(UV)光-电探测器原型器件,在(UV)光照条件下测试了器件的光电性能。扫描电镜(SEM)和X射线衍射(XRD)测试结果表明,ZnO薄膜具有很好的结晶质量;I-V曲线显示,器件在黑暗和光照环境下都表现出明显的整流行为;光谱响应曲线表明,器件响应度峰值出现在364nm附近,当反向电压为-5V时光电流达到饱和,此时响应度峰值达到1.19A/W。不同反向工作电压下的光谱探测率曲线表明,器件对364nm附近的UV光有较强的选择性,在-2V偏压下具有最佳的探测率,其探测率峰值达到8.9×1010 cm·Hz1/2/W。     

利用刻蚀工艺制备碲镉汞雪崩光电二极管

碲镉汞雪崩光电二极管是第三代红外焦平面探测器的主要发展方向之一.提出一种利用离子束刻蚀工艺制备碲镉汞雪崩光电二极管器件的方法,并研究了截止波长、耗尽区厚度与器件增益的关系.利用此方法制备截止波长4. 8μm的中波器件在17 V反向偏置下增益可达1 000.对器件进行了噪声频谱测试,计算了其过剩噪声因子.     

伽马射线辐照对硅光电二极管性能的影响

研究了伽马()射线辐照对星上定标用硅光电二极管性能的影响。使用硅光电二极管分别接受20 krad(Si)、35 krad(Si)、50 krad(Si)总剂量的射线辐照,对比了器件在不同辐照剂量下暗电流及光谱响应度的变化。结果显示在35 krad(Si)以下剂量照射下,硅光电二极管暗电流及光谱响应度均未发现明显的变化,在50 krad(Si)剂量照射下,参试样品出现暗电流增加的现象,但该变化在定标器应用过程中带来的影响可以忽略。试验结果表明,参试的硅光电二极管在空间辐照环境下具有良好的稳定性及可靠性,可以作为在轨定标器可见波段探测单元备选器件。     

Resolution Enhancement Technology:Integrated Process Solutions using OPC

DUV lithography, using the 248 nm wavelength, is a viable manufacturing option for devices with features at 130 nm and less. Given the low kl value of the lithography, integrated process development is a necessary method for achieving acceptable process latitude. The application of assist features for rule based OPC requires the simultaneous optimization of the mask, illumination optics and the resist.Described in this paper are the details involved in optimizing each of these aspects for line and space imaging.A reference pitch is first chosen to determine how the optics will be set. The ideal sigma setting is determined by a simple geometrically derived expression. The inner and outer machine settings are determined, in turn,with the simulation of a figure of merit. The maximum value of the response surface of this FOM occurs at the optimal sigma settings. Experimental confirmation of this is shown in the paper.Assist features are used to modify the aerial image of the more isolated images on the mask. The effect that the diffraction of the scattering bars (SBs) has on the image intensity distribution is explained. Rules for determining the size and placement of SBs are also given.Resist is optimized for use with off-axis illumination and assist features. A general explanation of the material' s effect is discussed along with the affect on the through-pitch bias. The paper culminates with the showing of the lithographic results from the fully optimized system.     

Cost-effective test solutions for smart card and other integrated flash applications

From its emergence in the late 1980s as a lower cost alternative to early EEPROM technologies, flash memory has evolved to higher densities and speedsand rapidly growing acceptance in mobile applications.In the process, flash memory devices have placed increased test requirements on manufacturers. Today, as flash device test grows in importance in China, manufacturers face growing pressure for reduced cost-oftest, increased throughput and greater return on investment for test equipment. At the same time, the move to integrated flash packages for contactless smart card applications adds a significant further challenge to manufacturers seeking rapid, low-cost test.     

Theoretical analysis of the relationship between the Brillouin gain coefficient and the strain in the optical-fiber sensors

The relation between the power of the Brillouin signal and the strain is one of the bases of the distributed fiber sensors of temperature and strain. The coefficient of the Bfillouin gain can be changed by the temperature and the strain that will affect the power of the Brillouin scattering. The relation between the change of the Brillouin gain coefficient and the strain is thought to be linear by many researchers. However, it is not always linear based on the theoretical analysis and numerical simulation. Therefore, errors will be caused if the relation between the change of the Brillouin gain coefficient and the strain is regarded as to be linear approximately for measuring the temperature and the strain. For this reason, the influence of the parameters on the Brillouin gain coefficient is proposed through theoretical analysis and numerical simulation.     

An improved parallel thinning algorithm with two subiterations

The parallel thinning algorithm with two subiterations is improved in this paper. By analyzing the notions of connected components and passes, a conclusion is drawn that the number of passes and the number of eight-connected components are equal. Then the expression of the number of eight-connected components is obtained which replaces the old one in the algorithm. And a reserving condition is proposed by experiments, which alleviates the excess deletion where a diagonal line and a beeline intersect. The experimental results demonstrate that the thinned curve is almost located in the middle of the original curve connectivelv with single pixel width and the processing speed is high.     

Novel fiber-optical interferometer with miniaturized probe for in-hole measurements

Today, micro-system technology and the development of new MEMS （Micro-Electro-Mechanical Systems） are emerging rapidly. In order for this development to become a success in the long run, measurement systems have to ensure product quality. Most often, MEMS have to be tested by means of functionality or destructive tests. One reason for this is that there are no suitable systems or sensing probes available which can be used for the measurement of quasi inaccessible features like small holes or cavities. We present a measurement system that could be used for these kinds of measurements. The system combines a fiber optical, miniaturized sensing probe with low-coherence interferometry, so that absolute distance measurements with nanometer accuracy are possible.     

Development of the readout system for waveguide multilayer optical card

Waveguide multilayer optical card （WMOC） is a novel storage device of three-dimensional optical information. An advanced readout system fitting for the WMOC is introduced in this paper. The hardware mainly consists of the light source for reading, WMOC, motorized stages addressing unit, microscope imaging unit, CCD detecting unit and PC controlling ＆ processing unit. The movement of the precision motorized stage is controlled by the computer through Visual Basic （VB） language in software. A control panel is also designed to get the layer address and the page address through which the position of the motorized stages can be changed. The WMOC readout system is easy to manage and the readout result is directly displayed on computer monitor.     

Study of waveguide coupling efficiency in hybrid silicon lasers

This paper presents a new method to increase the waveguide coupling efficiency in hybrid silicon lasers. We find that the propagation constant of the InGaAsP emitting layer can be equal to that of the Si resonant layer through improving the design size of the InP waveguide. The coupling power achieves 42% of the total power in the hybrid lasers when the thickness of the bonding layer is 100 nm. Our result is very close to 50% of the total power reported by Intel when the thickness of the thin bonding layer is less than 5 nm. Therefore, our invariable coupling power technique is simpler than Intel＇s.     

Collinear phase-matching study of terahertz-wave generation via difference frequency mixed in GaAs and Inp

The collinearly phase-matching condition of terahertz-wave generation via difference frequency mixed in GaAs and InP is theoretically studied. In collinear phase-matching, the optimum phase-matching wave hands of these two crystals are calculated. The optimum phase-matching wave bands in GaAs and lnP are 0.95-1.38μm and 0.7-0.96μm respectively. The influence of the wavelength choice of the pump wave on the coherent length in THz-wave tuning is also discussed. The influence of the temperature alteration on the phase-matching and the temperature tuning properties in GaAs crystal are calculated and analyzed. It can serve for the following experiments as a theoretical evidence and a reference as well.     

Effects of the alloy compositions on the phonon-polaritons in ternary mixed crystals

Composition dependence of bulk and surface phonon-polaritons in ternary mixed crystals are studied in the framework of the modified random-element-isodisplacement model and the Bom-Huang approximation. The numerical results for Several Ⅱ - Ⅵ and Ⅲ- Ⅴ compound systems are performed, and the polariton frequencies as functions of the compositions for ternary mixed crystals AlxGa1-xAs, GaPxAS1-x, ZnSxSe1-x, GaAsxSb1-x, GaxIn1-xP, and ZnxCd1-xS as examples are given and discussed. The results show that the dependence of the energies of two branches of bulk phonon-polaritons which have phonon-like characteristics, and surface phonon-polaritons on the compositions of ternary mixed crystals are nonlinear and different from those of the corresponding binary systems.     

New insert layer structure OLEDs

An insert layer structure organic electroluminescent device（OLED） based on a new luminescent material （Zn（salen）） is fabricated. The configuration of the device is ITO/CuPc/NPD/Zn（salen）/Liq/LiF/A1/CuPc/NPD/Zn（salen）/Liq/LiF/A1. Effective insert electrode layers comprising LiF（1nm）/Al（5 nm） are used as a single semitransparent mirror, and bilayer cathode LiF（1 nm）/A1（100 nm） is used as a reflecting mirror. The two mirrors form a Fabry-Perot microcavity and two emissive units. The maximum brightness and luminous efficiency reach 674 cd/m^2 and 2.652 cd/A, respectively, which are 2.1 and 3.7 times higher than the conventional device, respectively. The superior brightness and luminous efficiency over conventional single-unit devices are attributed to microcavity effect.