3B1束线上LIGA掩模的设计研究

BSRF中的3B1光束线与LIGA实验站过去使用的3W1光束线相比,其同步辐射X光光谱较软、光强较弱,但可实现专用光和兼用光两用.现在LIGA实验站移到3B1光束线,为此必须进行新的LIGA掩模设计、制作.结合此研究目的,本文通过使用XOP和Origin两个软件进行设计、计算,分别得到了专用和兼用时3B1光束线在传输过程中的各级能谱图和传输、吸收数据,并针对这两种不同的用光情况分别设计、研究了两种不同组合的掩模:Au-PI组合和Au-Si组合.     

3B1束线上LIGA掩模的设计研究

BSRF中的381光束线与LIGA实验站过去使用的3W1光束线相比，其同步辐射X光光谱较软、光强较弱，但可实现专用光和兼用光两用。现在UGA实验站移到381光束线，为此必须进行新的LIGA掩模设计、制作。结合此研究目的，本文通过使用XOP和Origin两个软件进行设计、计算，分别得到了专用和兼用时381光束线在传输过程中的各级能谱图和传输、吸收数据，并针对这两种不同的用光情况分别设计、研究了两种不同组合的掩模：Au-PI组合和Au-Si组合。     

浸没式光刻系统中光束传输系统的设计

为实现浸没式光刻照明系统掩模面上高均匀照明性和不同照明模式,对照明系统中的光束传输系统进行了研究。浸没式光刻照明系统中的激光光束传输系统是光刻机中的重要组成部分,直接影响光刻机性能。针对浸没式光刻照明系统特点,提出了采用球面镜和柱面镜组合的光学结构,进行了激光准直扩束系统的光学设计与仿真分析。此外,对设计的准直扩束系统进行了公差分析,以保证在加工和装调完成后光束的发散角和口径均满足设计要求。最后,在系统完成的基础上对不同位置处的光斑尺寸进行测量。设计结果表明,系统能够满足光束在5~20 m传输光路范围内,不需要进行透镜间隔的调节,实现光斑大小和发散角满足设计要求,保证目标光束口径在(28.5±0.5)mm范围内,X方向发散角为1.2 mrad,Y方向发散角为1.84 mrad。通过分析发现,设计结果能够很好地满足指标的精度要求,具有重要的应用价值和实用意义。     

上海光源硬X射线微聚焦光束线站首轮调试暨首台真空波荡器自主研制获得成功

硬X射线微聚焦及应用光束线站（BL15U1）是上海光源工程首批光束线站中．第一条进行调试的真空波荡器光束线站。2月6日下午．科研人员完成了调束前准备工作,晚18：00开始正式调束,随即在光束线荧光靶和丝扫描探测器上分别观测到波荡器辐射光斑和光电流,21：30分在实验站铍窗出口处的电离室上探测到波荡器辐射的5．4keY单色光（3次谐波）,并扫描获得该能量下单色器摇摆曲线,实现了首轮调束目标。     

大气湍流信道中OAM光束与高斯光束传输性能的实验研究

通过实验研究了大气湍流信道下中轨道角动量（OAM）光束与高斯光束的传输性能,并将两种光束的传输性能进行对比。实验以加载调制信号的OAM光束以及高斯光束为传输载波,分别测量了在大气湍流信道下两种光束的光束展宽、指向偏差、功率抖动以及误码率。实验结果表明:在大气湍流信道中传输后,OAM光束相比高斯光束,光束展宽减少10.5%,功率抖动的方差下降0.13,指向偏差的散布圆直径减小30.4%,并且光束中心更集中于接收面中心;OAM光束载波系统的最低探测灵敏度达到?28.97 dBm,相比高斯光束提升2.5 dB。实验结果证明了在大气湍流信道传输中,OAM光束比高斯光束受到湍流的影响更小,并且随着湍流强度的增加,OAM光束恶化程度远小于高斯光束。实验的结论为大气湍流信道下自由空间激光通信的发展和应用提供了参考。     

新型圆筒形轴对称四镜折叠组合腔模式分析

本文提出了一种能够产生中空环形激光光束的新型网筒形轴对称四镜折叠组合腔的设计方案.利用光学传输矩阵方法处理了光束在光谐振腔中的传播,得出腔的稳定性条件.由高斯光束在腔内的白再现条件,描述了腔内腔外光束传输特性,同时对近场和远场光束特性进行了数值计算和模拟.     

贝塞尔晶格中高斯光束的传输（英文）

通过数值仿真研究了高斯光束在贝塞尔晶格中的传输特性,贝塞尔晶格是在光折变晶体中通过光诱导产生的。在有晶格和无晶格的情况下,高斯光束的传输特性有很大差别。高斯光束在均匀介质中传输时会呈现出线性衍射和自聚焦现象,当晶体中存在晶格时,光束可以克服光在均匀介质中的衍射和自聚焦效应,在不同的初始输入条件下,高斯光束在传输的过程中会演变成一个环形孤子或者圆形孤子。     

厄米-高斯光束在饱和非线性介质中的传输特性

为了研究厄米-高斯光束在光折变饱和非线性介质中的传输特性,采用有限差分方法数值求解了光波演化方程,理论分析了厄米-高斯光束的传输特性。结果表明,1维1阶、2阶和3阶厄米-高斯光束在光折变非线性介质中传输时,在合适的非线性条件下,均可以形成呼吸模式的孤子;随着非线性的加大,厄米-高斯光束的光场分量之间的相互分离趋势将逐渐变弱,同时,每个光场分量的振幅起伏效应会更加明显;改变厄米-高斯光束的入射位置、入射角度对其传输特性没有影响;2维厄米-高斯光束的传输特性和1维情况是类似的。厄米-高斯光束的这些特性在光开关领域有一定的应用前景。     

相位共轭与光刻

将一束激光通过变形介质,如透镜或烟团。如果光由原反射镜反射,则合成的光束将出现二次通过介质产生的畸变。反之,当光束第二次作用于介质时,方向相同但相位相反的原共轭光波就完全不发生畸变。相位共轭技术可用于核聚变、能量传输、通讯、以及其他需要解决信号畸变问题的领域。相位共轭技术的一个重要应用领域是生产大规模集成电路。离子束加工系统用下述方法可制造极精确的图象:光通过带母模的掩模传播,并在称为“共轭晶体”的光学介质中与两束反向的激光束互相干涉,干涉产生的一束新的光束与发自掩模的光精确重叠。     

空潜信道中基于多光束阵列的二维图案传输

提出了一种利用多光束阵列在复杂散射信道中进行二维图案传输的理论模型。与传统多光束传输方案思路不同,该模型有效利用信道的强散射特性,使各光束充分扩散,在接收面形成交迭区域,成像光学系统在该区域内接收光信号并恢复各发射光束的空间位置信息,完成二维图案信息在空潜信道中的多通道传输。视在参数的引入使光束原本在两个不同折射率介质中的传输简化为仅在一种介质中传输的简单问题。实验采用直径为15 mm的微透镜阵列以及长为12.65 m的海水、大气信道来模拟实际信道中的强散射作用,结果表明该模型具有较好的可行性。     

XAFS光束线的安装调试

最近第一条Ｘ射线光束线在合肥光源上安装调试成功,表明同步辐射一个极为重要的研究领域——ＸＡＦＳ测量在国家同步辐射实验室建成,即将向用户开放。本文从安装基准、工艺要求、试验方法、测量结果描述了光源前端区的安装、光束线上各光学元件的准直及双晶单色仪的调整。     

High-resolution pattern replication using soft X rays

A soft X ray lithographic technique capable of contactless replication of submicrometre linewidth planar-device patterns is described. Special soft X ray exposure masks have been developed for the 4?14 ? wavelength region. Elastic-surface-wave-transducer patterns with 1.3 ?m electrode spacings were fabricated onto such masks using electron-beam techniques, and were successfully replicated.     

Mesostructured Arrays of Nanometer‐spaced Gold Nanoparticles for Ultrahigh Number Density of SERS Hot Spots

A novel one‐trough synthesis via an air‐water interface is demonstrated to provide hexagonally packed arrays of densely spaced metallic nanoparticles (NPs). In the synthesis, a mesostructured polyoxometalate (POM)‐silicatropic template (PSS) is first self‐assembled at the air‐water interface; upon UV irradiation, anion exchange cycles enable the free‐floating PSS film to continuously uptake gold precursors from the solution subphase for diffusion‐controlled and POM‐site‐directed photoreduction inside the silica channels. NPs ≈ 2 nm can hence be homogeneously formed inside the silica‐surfactant channels until saturation. As revealed via X‐ray diffraction, small‐angle X‐ray scattering (SAXS), grazing incidence SAXS, and transmission electron microscopy, the Au NPs directed by the PSS template are arrayed into a 2D hexagonal lattice with inter‐channel spacing of 3.2 nm and a mean along‐channel NP spacing of 2.8 nm. This corresponds to an ultra‐high number density (≈10¹⁹ NPs cm^?3) of narrowly spaced Au NPs in the Au‐NP@PSS composite, leading to 3D densely deployed hot‐spots along and across the mesostructured POM‐silica channels for surface‐enhanced Raman scattering (SERS). Consequently, the Au‐NP@PSS composite exhibits prominent SERS with 4‐mercaptobenzoic acid (4‐MBA) adsorbed onto Au NPs. The best 4‐MBA detection limit is 5 nm , with corresponding SERS enhancement factors above 10⁸.     

析薄电薄膜J—V曲线温度特性的研究

用准分子激光扫描原位淀积法制备了极薄膜BIT／p-Si(100)和PZT／p-Si(100),借助于X－射线衍射（XRD）和扫描电镜（SEM）研究了薄膜的显微结构,并对这两种极薄铁电薄膜Au/BIT/p-Si(100)和Au/PZT/p-Si(100)的J－V曲线温度特性进行了拟合分析讨论。模拟分析结果表明,在负温区,电流密度J对温度T有较强的依赖关系,但与通常欧姆电流温度关系不同。而在正温区,服从J＝KV^2关系,ε和SCLC电流密度J则与温度T无关。     

Targeted Tumor Hypoxia Dual‐Mode CT/MR Imaging and Enhanced Radiation Therapy Using Dendrimer‐Based Nanosensitizers

The efficacy of radiation therapy (RT) is often limited by the poor response of hypoxia inside most solid tumors. The development of a theranostic nanoplatform for precision‐imaging‐guided sensitized RT for tumor hypoxia is still challenging. Herein, the creation of hypoxia‐targeted dendrimer‐entrapped gold nanoparticles complexed with gadolinium(III) (Gd‐Au DENPs‐Nit) for dual‐mode CT/MR imaging and sensitized RT of hypoxic tumors is reported. In this work, generation 5 poly(amidoamine) dendrimers are partially conjugated with Gd(III) chelator, entrapped with Au nanoparticles, and conjugated with hypoxia‐targeting agent nitroimidazole via a polyethylene glycol linker, and ending with chelation of Gd(III) and conversion of their leftover amine termini to acetamides. The designed dendrimer‐based nanohybrids with 3.2 nm Au cores exhibit an excellent X‐ray attenuation effect, acceptable r₁ relaxivity (1.32 mM^?1 s^?1), and enhanced cellular uptake in hypoxic cancer cells, affording efficient dual‐mode CT/MR imaging of tumor hypoxia. Under X‐ray irradiation, the Gd‐Au DENPs‐Nit nanohybrids can produce reactive oxygen species, promote DNA damage, and prevent DNA repair, facilitating sensitized RT of hypoxic cancer cells in vitro and tumor hypoxia in vivo. The developed hypoxia‐targeted dendrimer‐based nanohybrids may be employed as both contrast agents and nanosensitizers for precision tumor hypoxia imaging and sensitized tumor RT.     

fs激光与固体靶相互作用的X射线发射研究

将针孔透射光栅谱仪和Ｘ射线ＣＣＤ相结合,探测到超短脉冲激光（＜６０ｆｓ）与多种固体平面靶相互作用而产生的、波长范围在１～１５ｎｍ之间的高重复频率Ｘ射线发射,随着入射激光能量的增加,各种靶不同的Ｘ射线带的发射呈线性增长,并发现在超短脉冲激光作用下,Ｌ带发射效率最高元素的原子序数比长脉冲打靶时要来得小。     

Understanding the Mechanism of Solvent‐Mediated Adhesion of Vacuum Deposited Au and Pt Thin Films onto PMMA Substrates

The adhesion of vapor deposited Au and Pt thin films onto poly(methyl methacrylate) (PMMA) substrates can be significantly enhanced by either spin‐casting or vapor‐exposure to hydrohalocarbon solvents prior to metal deposition. X‐ray photoelectron spectroscopy (XPS) and evolved gas analysis Fourier transform infrared spectroscopy detect residual halogenated solvent at the PMMA surface which chemically activates the surface. Density functional theory (DFT) calculations show that the solvent molecules form a Lewis acid‐base adduct with the ester oxygens in PMMA. DFT predicts that the deposited metal atom (M) inserts into the C–halogen (X) bond on either CHCl₃ or CHBr₃ to form a O–M–X interaction. This is consistent with M–X bonding observed in high resolution XPS. A model is proposed in which the bond energy of the C–X bond of the solvent must be weak enough so that it can be cleaved by the metal atom to form a M–X bond. A negative control of PMMA exposed to CHF₃ is shown to have no effect on Au or Pt adhesion since the bond dissociation energy of the C–F bond is stronger than the C–Cl and C–Br bond energy compared to the metal halide bond energies.     

A Rapid and Efficient Method to Deposit Gold Particles onto Catalyst Supports and Its Application for CO Oxidation at Low Temperatures

A rapid, simple, and efficient method for the preparation of highly dispersed supported Au catalysts has been developed. In the preparation, NaBH₄ is used to reduce the Au precursor, lysine is employed to cap the formed Au colloids, and a short sonication time is applied to facilitate dispersion and deposition of the Au colloids onto the catalyst support, which has been mixed with the precursor beforehand. The end‐point pH value of the solution and the isoelectric points (IEPs) of the catalyst supports have an influence on the size of the Au particles and their deposition. The optimum value for the end‐point pH is 7.5–10.0, and the IEP should be 5–10. The amino acid capping agent is easily removed at the catalyst activation stage at 200 °C, and the Au particles are thermally stable against sintering, even at 500 °C for 3 h. It is also proven that the method is applicable to the preparation of supported Pt catalysts. The catalytic activity of the prepared Au catalysts for CO oxidation in the absence/presence of H₂ is comparable to that of a Au catalyst prepared by the co‐precipitation (CP) method, and to that of the standard catalyst from the World Gold Council (WGC). X‐ray photoelectron spectroscopy (XPS) results show that only metallic Au exists in the catalysts before and after activation, and also after the catalysis reaction.     

深亚微米同步辐射x射线光刻技术

报道了我们制作深亚微米 x射线掩模的工艺和同步辐射 x射线曝光工艺 ,并报道了我们在北京同步辐射装置 (BSRF) 3B1 A光刻束线所获得的深亚微米 x射线光刻图形的实验结果     

同步辐射X射线光刻实验研究

同步辐射X射线光刻是一种很好的深亚微米图形复制技术。本文报道了北京同步辐射装置3BlA光刻束线上的曝光结果，并对X射线掩模的制作工艺作了简要介绍。