聚焦电子束辐照诱导喷金SiOx纳米线新型结构加工

在纳米加工技术中,利用透射电子显微镜(TEM)中的电子束辐照诱导低维纳米材料制备异质结构的加工方式因具有广阔的应用前景而备受瞩目.利用成熟的聚焦电子束原位辐照技术,通过改变电子束辐照时的强度和位置对喷金非晶SiOx纳米线进行原位辐照,诱导其结构发生变化,从而实现结构加工.实验结果显示,当束斑直径大于纳米线直径的聚焦电子...     

聚焦电子束辐照原位制备单晶纳米棒

低维纳米材料相对于传统材料因其独特的物理化学性能已经成为研究热点。其制备方法主要有气相沉积法、电化学沉积法、模板法和聚焦电子束诱导沉积法等。所谓聚焦电子束诱导沉积法是指将电子束汇聚到几纳米区域的基材上，同时注入适当气氛，进而在基材上生成纳米线、纳米锥、纳米棒和纳米点等低纳纳米材料的方法。     

电子束纳米焊接与纳米切割

对小到1 nm大到100 nm的"纳米尺度",目前并没有成熟的原位物理加工技术.我们演示高强度电子束技术在纳米尺度上应用于原位物理加工的潜力,将高亮度场发射透射电子显微镜的电子束汇聚到直径1 nm左右,可得到强度为1096 A/cm2量级的电子束.这样的电子束可被用来在直径几十纳米的单根金属或硅纳米线上实现结构修饰,切割出小孔、窄桥及缝隙等各类纳米尺度的图案结构.强度稍弱的电子束则可被用来实现在金属纳米线之间,或者金属纳米线与硅纳米线之间的焊接,也可被用于去除纳米线表面的氧化层.这些物理加工机制涉及高能电子穿越固体时各类非弹性散射造成的加热、非晶化、溅射、等离子气化等非线性效应.作为一项无污染且作用范围非常局域化的原位技术,它可直接应用于纳米结和纳米器件的修饰与制备.     

碳纳米管卷层结构的TEM研究

碳纳米管发现以来,其结构的研究一直是人们普遍关心的课题。至今为止,已有不少有关碳纳米管结构的报道[1]。给出了一些结构模型,其中以Iijima给出的模型最具有代表性,即认为碳纳米管是由碳原子组成的层面卷成筒状后形成的管状纤维。层面内的碳原子之间以sp2键结合,每个碳原子连接二个碳原子形成一系列连续的六边形(以下简称六圆环)。单层碳纳米管即是由一层卷成筒状的碳原子六圆环组成。而多层碳纳米管则是由多个碳原子六圆环组成的圆筒套在一起组成的。而这些圆筒之间的间距与石墨中碳原子层面间距相等,均为0.34nm。此外还认为碳纳米管的…     

飞秒激光诱导多壁碳纳米管与金属电极连接的实验研究

碳纳米管因其独特的电学特性及一维纳米结构成为取代硅材料的重要电子材料,利用碳纳米管制备的微纳米电子器件具有尺寸小、响应快、功耗低等优点,但如何实现碳纳米管与金属电极之间可靠及有效的连接一直是构筑碳纳米管电子器件的难点与重点。针对该问题,首先,采用飞秒脉冲激光辐照技术诱导多壁碳纳米管与不同金属电极(金、镍)产生不同形式的连接;然后,通过测试互连前后多壁碳纳米管与金属电极之间的伏安特性曲线和界面接触电阻验证了该连接方法的可重复性及有效性,为后续大规模制备高性能碳纳米管场效应晶体管提供了一定的基础。     

电子束致沉积手控生长碳纳米线

用电子束致沉积(EBID)来制备各种纳米尺寸的结构在纳米材料的制备和器件构建方面有着良好的应用前景。相对于聚焦离子束(FIB),它具有对样品损伤小和所得结构尺寸更小等优点。此前,电子束致沉积的工作大多数在扫描电镜中完成,而在透射电镜中沉积直到近两年才发展起来。本文尝试在普通热发射透射电镜中,手动控制生长碳纳米线、点等结构。对碳纳米线的生长过程进行了原位观测,并对电子束斑的大小、形状和辐照时间对沉积物形状的影响作了初步的研究。最后对电子束致沉积可控生长无定型碳纳米线可能的应用作了一些探索。     

CuO纳米线中的取向畴

通过简单的热氧化法,可以得到不同取向畴的CuO纳米线结构.利用群论的知识,从理论上推导出CuO纳米线中存在11种畴壁结构,其中5种已经被实验证实.同时,在800℃下得到直径较大的CuO纳米线,利用透射电子显微学相关技术分析发现,这种纳米线中存在一种新的畴壁结构,而且也属于理论上得到的11种畴壁之一.本文利用群论分析,解释了CuO纳米线中取向畴结构的生成机制,对调控CuO纳米材料的生长具有指导作用.     

弯曲应变下单根GaAs纳米线的电学性能的原位透射电子显微镜研究

在透射电子显微镜下,对单根GaAs纳米线实施了原位弯曲变形并获得了其弯曲变形下的电输运性能特性。本研究中,利用扫描透射探针系统和电子束诱导碳沉积技术,选取了单根GaAs纳米线并将纳米线两端与两根钨针尖连接固定。控制可移动的钨针尖,使GaAs纳米线发生弯曲变形同时获得相应的电流-电压曲线。有限元分析表明当纳米线的两端都固定时,纳米线同时承受了压缩应变和拉伸应变,其中压缩应变分布更为广泛。随着变形增加,GaAs纳米线的电导率增加了55%,这可能归因于弯曲变形下压缩与拉伸应变对GaAs纳米线能带结构的共同作用。     

“镍纳米线／多壁碳纳米管／非晶碳纳米管”一维轴向异质结的结构与伏安特性

将电化学沉积方法和化学气相沉积（CVD）方法结合起来，以多孔阳极氧化铝（AAO）为模板，开发出一种用于制备一维金属／半导体轴向异质结阵列的普适性方法，成功制备多种不同种类的一维金属，半导体轴向异质结的整齐阵列。其中，由单晶Ni纳米线、多壁碳纳米管（MWCNT）和非晶碳纳米管（a-CNT）首尾连接而成Ni／MWCNT／a-CNT一维轴向异质结。     

碳纳米管非对称接触结构制作及电学性能研究

实验研究了多根或单根单壁碳纳米管与非对称金属电极接触结构的制作方法。先用介电泳方法(DEP)将碳纳米管定向排列在Au电极对之间,再用电子束光刻(EBL)在碳纳米管的一端加工Al电极,获得多根碳纳米管与金铝电极的非对称接触结构。先用EBL在Au电极对一端覆盖Al电极,再用DEP排列碳纳米管,实现单根碳管与金铝电极的非对称接触结构。非对称结构器件的电学测试研究表明,器件的I-V曲线不再对称,呈现出整流特性。     

Cover Picture: Fabrication and Electrical and Mechanical Properties of Carbon Nanotube Interconnections (Adv. Funct. Mater. 11/2005)

The fabrication of carbon nanotube (CNT) structures, including simple tube–tube connections, crossed junctions, T‐junctions, zigzag structures, and even nanotube networks, has been achieved by cutting and soldering CNTs using electron‐beam‐induced deposition of amorphous carbon (a‐C), as detailed in the work of Peng and co‐workers on p. 1825. These CNT structures have been constructed with a high degree of control, and it is found that the electric conductance and mechanical strength of the junctions can be improved by the deposition of a‐C and by increasing the contact area of the junctions. Individual carbon nanotubes (CNTs) have been cut, manipulated, and soldered via electron‐beam‐induced deposition of amorphous carbon (a‐C) and using a scanning tunneling microscope inside a transmission electron microscope. All CNT structures, including simple tube–tube connections, crossed junctions, T‐junctions, zigzag structures, and even nanotube networks, have been successfully constructed with a high degree of control, and their electrical and mechanical properties have been measured in situ inside the transmission electron microscope. It is found that multiple CNTs may be readily soldered together with moderate junction resistance and excellent mechanical resilience and strength, and the junction resistance may be further reduced by current‐induced graphitization of the deposited a‐C on the junction.     

Fabrication and Electrical and Mechanical Properties of Carbon Nanotube Interconnections

Individual carbon nanotubes (CNTs) have been cut, manipulated, and soldered via electron‐beam‐induced deposition of amorphous carbon (a‐C) and using a scanning tunneling microscope inside a transmission electron microscope. All CNT structures, including simple tube–tube connections, crossed junctions, T‐junctions, zigzag structures, and even nanotube networks, have been successfully constructed with a high degree of control, and their electrical and mechanical properties have been measured in situ inside the transmission electron microscope. It is found that multiple CNTs may be readily soldered together with moderate junction resistance and excellent mechanical resilience and strength, and the junction resistance may be further reduced by current‐induced graphitization of the deposited a‐C on the junction.     

利用化学气相沉积法在SiO2小球基底上制备纳米碳管的研究

利用匀胶机将经过超声混合的二氧化硅小球的酒精溶液旋涂在洗净的硅片上,获得了具有曲面的纳米碳管生长基底.利用以二茂铁和二甲苯作为反应前驱体的化学气相沉积法在该基底上实现了碳管在二氧化硅与硅之间的选择性生长,并在不同的沉积温度条件下,可以分别获得球状和束状碳管产物.通过扫描电镜观察分析经过退火处理的原始基底的表面形貌,讨论了碳管产物与反应温度之间的关系.     

图案化定向碳纳米管阵列的场发射性能研究

考虑到碳纳米管的几何形貌会在一定程度上影响其场发射性能,如驱动电场,发射电流强度等,因此本文设计了三种不同的几何图案,并采用热气相化学沉积（TCVD）法制备出了相应几何结构的定向碳纳米管阵列;通过模拟计算和场发射测试实验,我们对以上三种结构的场发射性能进行比较,发现具有规则六边形蜂窝形状的碳纳米管阵列具有最强的边缘效应,最小的屏蔽效应,以及相同电场下最大的发射电流。     

Destructive constructions of nanostructures with carbon nanotubes through nanorobotic manipulation

Nanostructures are constructed with destructively fabricated nano building blocks based on multiwalled carbon nanotubes through three-dimensional nanorobotic manipulation in free space. In situ mechanical property characterization is applied for the selection of a nanotube with desired elasticity. Destructive fabrication is demonstrated as an effective way to obtain layered and/or sharpened structures of nanotubes for the applications as nanobearings and probe tips, linear nanobearing motion has been observed, and a method is shown by using surface clamping van der Waals forces for the better control of the geometries of the nanotubes with destructive fabrication. The prepared building blocks are positioned together with nanorobotic manipulators under real-time observation with a field-emission scanning electron microscope, and are constructed through electron-beam-induced deposition.     

三极碳纳米管场发射显示屏的制作研究

利用碳纳米管作为阴极材料的场致发射显示屏是一种新型的平板器件。介绍了三极结构碳纳米管场致发射显示屏的工作原理,基本结构以及寻址方式。重点讨论了在制作器件方面所存在的真空封装问题,荧光粉制作问题以及绝缘隔离层问题。在提出一种新型结构栅极制作工艺的基础上,成功地制作了三极碳纳米管场发射显示屏器件。     

纳米碳管的电子衍射及其螺旋度测量

本文对电弧放电和催化剂热解碳氢气法制备的多层直形纳米碳管的倒空间及其螺旋度，采用电子衍射进行了研究。结果表明：尽管制备方法不同，两类多层管的结构相似，皆由螺旋和非螺旋的单层石墨管组成；对其倒空间的分析以及系列倾转电子衍射实验证明，衍射图中测得的表观螺旋度值随和射条件而改变，只有在垂直入射条件下该值才代表碳管的真实螺旋度；     

Shaping Carbon Nanotubes and the Effects on Their Electrical and Mechanical Properties

A method is developed and shown to be able to shape a carbon nanotube (CNT) into a desired morphology while maintaining its excellent electrical and mechanical properties. Single, freestanding nanotubes are bent by a scanning tunneling microscopy probe, and their morphology is fixed by electron‐beam‐induced deposition (inside a transmission electron microscope) of amorphous carbon on the bent area. It is shown that the mechanical strength of the bent CNT may be greatly enhanced by increasing the amount of carbon glue or the deposition area, and the electrical conduction of the nanotube shows hardly any dependence on the bending deformation or on the deposition of amorphous carbon. Our findings suggest that CNTs might be manipulated and processed as interconnections between electronic devices without much degradation in their electrical conductance, and be used in areas requiring complex morphology, such as nanometer‐scale transport carriers and nanoelectromechanical systems.     

Molecular dynamics study of bamboo-like carbon nanotube nucleation

Molecular dynamics (MD) simulations based on an empirical potential energy surface were used to study the nucleation of bamboo-like carbon nanotubes (BCNTs). The simulations reveal that inner walls of the bamboo structure start to nucleate at the junction between the outer nanotube wall and the catalyst particle. In agreement with experimental results, the simulations show that BCNTs nucleate at higher dissolved carbon concentrations (i.e., feedstock pressures) than those where nonbamboo-like carbon nanotubes are nucleated.