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基于精确探针模型的AFM图像重构研究 总被引:2,自引:1,他引:2
原子力显微镜技术已在纳米成像中得到了普遍应用.但实验表明,AFM图像在水平方向分辨率较低,其中探针针尖形貌是影响扫描图像分辨率的关键因素之一.为了提高AFM扫描图像的分辨率,改善成像质量,一种可行的方法是通过建立探针模型后,重构扫描图像.在已有的探针建模方法中,普遍采用盲建模算法.针对目前盲建模算法中降噪阈值难以优化问题,提出了一种降噪阈值最优估计新方法.该方法可以使盲建模算法更准确地建立扫描方向上的探针形貌轮廓,进而完成3D探针模型.通过应用AFM探针扫描多空铝和标准栅格实验,介绍了探针针尖形貌精确建模的方法.然后使用数学形态学的腐蚀运算对标准栅格的AFM成像进行了重构,验证了上述方法的有效性.实验结果证明,重构后的图像中降低了探针针尖形貌的失真影响,可以显著改善扫描探针显微镜成像的水平分辨率. 相似文献
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《测试科学与仪器》2021,(3)
扫描探针显微镜(Scanning probe microscopy, SPM)是显微镜的一个分支,它利用物理探针扫描标本形成样本表面图像。而原子力显微镜(Atomic force microscopy, AFM)是SPM中一种多功能的表面成像和测量工具,对导电、不导电、真空中、空气中或流体中的各种样本均可测量。原子力显微镜最面临的最大挑战之一是评估其在表面测量过程中所伴随的不确定度。本研究通过XYZ Phase的标定,对一台光学原子力显微镜进行了校准。该方法旨在克服在评估一些无法实验确定的不确定部件时遇到的困难,如尖端表面相互作用力和尖端几何。运用蒙特卡罗方法来确定根据相关容差和概率密度函数(PDFs)随机绘制参数而引起的相关不确定度。整个过程遵循《测量不确定度表示指南》(GUM)补编2。经本方法验证,原子力显微镜的评估不确定度为10 nm左右。 相似文献
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扫描探针显微镜(Scanning probe microscopy,SPM)是显微镜的一个分支,它利用物理探针扫描标本形成样本表面图像.而原子力显微镜(Atomic force microscopy,AFM)是SPM中一种多功能的表面成像和测量工具,对导电、不导电、真空中、空气中或流体中的各种样本均可测量.原子力显微镜最面临的最大挑战之一是评估其在表面测量过程中所伴随的不确定度.本研究通过XYZ Phase的标定,对一台光学原子力显微镜进行了校准.该方法旨在克服在评估一些无法实验确定的不确定部件时遇到的困难,如尖端表面相互作用力和尖端几何.运用蒙特卡罗方法来确定根据相关容差和概率密度函数(PDFs)随机绘制参数而引起的相关不确定度.整个过程遵循《测量不确定度表示指南》(GUM)补编2.经本方法验证,原子力显微镜的评估不确定度为10nm左右. 相似文献
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采用聚偏氟乙烯(PVDF)压电薄膜和压电陶瓷(PZT),并结合由电化学研磨得到的钨探针,研制了一种具有对称结构的新型轻敲模式扫描测头。在该测头中,PVDF压电薄膜作为振动梁,其下方中间位置固定有钨探针,在PZT的驱动下,PVDF和探针处于谐振振动状态,同时,PVDF作为微力传感器检测探针顶端原子与试样表面原子间的作用力。所构建测头结合三维纳米定位台、控制程序等构成了新型扫描探针显微镜系统。介绍了测头的构成、工作原理、特性以及SPM系统的整体结构、测量原理、三维工作台的定位控制、信号处理过程和整系统特性测试,并以一维标准光栅为试样进行三维图像扫描,证明了该新型扫描探针显微镜系统的可行性和有效性。 相似文献
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SPM通用平台是一套扫描探针显微镜开发工具系统,它提供了一种开发生产SPM新的思路和方法。使SPM成为通用、开放、兼容的仪器体系。本文介绍了SPM通用平台的原理、指标和在其上扩展扫描隧道显微镜、原子力显微镜等功能模块的方法,以及智能型SPM通用平台的研究思路。希望与相关领域的专家开展合作。 相似文献
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探讨了木材缺陷计算机视觉识别技术研究的现状,提出了基于DSP的木材缺陷图像处理系统的硬件结构以及图像处理的算法:系统的介绍了由TMS320C80为数字信号处理器的图像采集系统,概述了TMS320C80MVP并行处理器的系统结构与主要特点,并给出上述系统的处理结果. 相似文献
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为满足光电经纬仪跟踪实时性的要求,保证跟踪的精度与可靠性,设计并研制了符合多指令多数据流(MIMD)架构的计算系统,采用卡尔曼滤波方式,对多个脱靶量信息进行数据融合。简要介绍了经纬仪的工作原理,对含有多个成像系统的经纬仪数据融合问题进行了数学推导,该推导证明对数据融合求解需要大量的数值计算。为满足上述计算要求,保障实时性,开发出一套的具有双DSP+单FPGA的三个运算单元的专用并行计算系统。描述了三个运算单元的连接方式,分析了每个运算单元的实时运算的时间开销。对专用计算系统进行了硬件仿真,结果表明,在具有三个成像系统的光电经纬仪中,CCD采样频率为50Hz时,光电编码器采样频率为800hz时,该系统可以满足1.25ms的实时性要求。 相似文献
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Abdelbadia CHAKER Abdelfattah MLIKA Med Amine LARIBI Lotfi ROMDHANE Sa?d ZEGHLOUL 《Frontiers of Mechanical Engineering》2012,7(2):150
This paper deals with the design and the analysis of a spherical parallel manipulator (SPM) for a haptic minimally invasive surgery application. First the medical task was characterized with the help of a surgeon who performed a suture technique called anastomosis. A Vicon system was used to capture the motion of the surgeon, which yielded the volume swept by the tool during the anastomosis operation. The identified workspace can be represented by a cone with a half vertex angle of 26°. A multi objective optimization procedure based on genetic algorithms was then carried out to find the optimal SPM. Two criteria were considered, i.e., task workspace and mechanism dexterity. The optimized SPM was then analyzed to determine the error on the orientation of the end effector as a function of the manufacturing errors of the different links of the mechanism. 相似文献
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High-resolution electron beam induced current (EBIC) analyses were carried out on a shallow ion implanted p+–n silicon junction in a scanning electron microscope (SEM) and a scanning probe microscope (SPM) hybrid system. With this scanning near-field EBIC microscope, a sample can be conventionally imaged by SEM, its local topography investigated by SPM and high-resolution EBIC image simultaneously obtained. It is shown that the EBIC imaging capabilities of this combined instrument allows the study of p–n junctions with a resolution of about 20 nm. 相似文献
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本文的主要目的是通过具体示例的详细讲解,来降低自制扫描探针显微镜的门槛.本文用简约易懂的 LabVIEW编程实现了复杂的扫描探针显微镜的控制与图像处理的功能.本控制程序由三大模块用顺序结构完成.它们分别是设备初始化模块、扫描控制与显像模块和设备安全关机模块.控制程序中最复杂、最关键的扫描控制与显像模块采用完全并行处理的方式实现.这种模块化设计,使主控程序简单明了;既方便修改又方便维护.并行处理模块主要有扫描区域调整与像素调整模块、Y方向扫描控制模块、X方向扫描控制与图像传输模块、扫描过程中参数再调整模块、扫描中断与紧急停机模块等组成.FPGA模块的主要功能是完成控制信号的输出与Z方向的实时反馈控制,在主控程序发出紧急停机命令时,FPGA 模块将消除系统可能的振荡,把扫描探针恢复到初始位置以及关闭高压控制信号等等.文章最后,介绍了如何使用该控制器.杂乱无章、横七竖八的连线是 LabVIEW编程中的最大的诟病.当程序复杂时,这一问题更加严重.本文向读者展示了用 LabVIEW实现完全结构化与并行编程的方法;读者可以按照本文描述的编程技巧,用简单、易懂、易维护的模块化程序实现复杂的虚拟仪器应用. 相似文献
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利用计算机控制理论、仿人智能控制算法和面向对象编程技术开发了一套基于工控机实现的通用型智能锅炉控制系统。介绍了系统的软硬件实现以及控制算法,并重点介绍了利用软件配置的方式实现对不同的锅炉系统的通用性。系统具有成本低、自动化程度高、通用性强等特点,只需进行简单配置就可以适应大多数的中小型燃油、燃气锅炉系统。 相似文献
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In this article, we develop an image-based approach to model and control the dynamics of scanning probe microscopes (SPMs) during high-speed operations. SPMs are key enabling tools in the experimental investigation and manipulation of nano- and subnanoscale phenomena; however, the speed at which the SPM probe can be positioned over the sample surface is limited due to adverse dynamic effects. It is noted that SPM speed can be increased using model-based control techniques. Modeling the SPM dynamics is, however, challenging because currently available sensing methods do not measure the SPM tip directly. Additionally, the resolution of currently available sensing methods is limited by noise at higher bandwidth. Our main contribution is an iterative image-based modeling method which overcomes these modeling difficulties (caused by sensing limitations). The method is applied to model an experimental scanning tunneling microscope (STM) system and to achieve high-speed imaging. Specifically, we model the STM up to a frequency of 2000 Hz (corresponds to approximately 23 of the resonance frequency of our system) and achieve approximately 1.2% error in 1 nm square images at that same frequency. 相似文献
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Dietz C Röper S Scherdel S Bernstein A Rehse N Magerle R 《The Review of scientific instruments》2007,78(5):053703
An approach for automated nanotomography, a layer-by-layer imaging technique based on scanning probe microscopy (SPM), is presented. Stepwise etching and imaging is done in situ in a liquid cell of an SPM. The flow of etching and rinsing solutions after each etching step is controlled with solenoid valves which allow for an automated measuring protocol. The thermal drift and the drift of the piezo scanner is corrected by applying offsets calculated from the cross correlation coefficients between successive images. As an example, we have imaged human bone with approximately 10 nm resolution using tapping mode SPM and successive etching with hydrochloric acid. 相似文献
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Esch F Dri C Spessot A Africh C Cautero G Giuressi D Sergo R Tommasini R Comelli G 《The Review of scientific instruments》2011,82(5):053702
We present the design and the performance of the FAST (Fast Acquisition of SPM Timeseries) module, an add-on instrument that can drive commercial scanning probe microscopes (SPM) at and beyond video rate image frequencies. In the design of this module, we adopted and integrated several technical solutions previously proposed by different groups in order to overcome the problems encountered when driving SPMs at high scanning frequencies. The fast probe motion control and signal acquisition are implemented in a way that is totally transparent to the existing control electronics, allowing the user to switch immediately and seamlessly to the fast scanning mode when imaging in the conventional slow mode. The unit provides a completely non-invasive, fast scanning upgrade to common SPM instruments that are not specifically designed for high speed scanning. To test its performance, we used this module to drive a commercial scanning tunneling microscope (STM) system in a quasi-constant height mode to frame rates of 100 Hz and above, demonstrating extremely stable and high resolution imaging capabilities. The module is extremely versatile and its application is not limited to STM setups but can, in principle, be generalized to any scanning probe instrument. 相似文献