P波段3kW GaN功率器件的研制

介绍了一款高压高功率GaN功率器件及其匹配电路。基于国内高压GaN高电子迁移率晶体管(HEMT)的研究基础,选取了GaN HEMT芯片,确定了器件的总栅宽。根据GaN HEMT芯片阻抗,器件内部进行了LC谐振匹配设计,外部采用双边平衡同轴巴伦进行推挽匹配设计。散热方面通过改善封装管壳热沉材料提高热导率。最终成功研制出高压、3 kW的GaN功率器件,该器件在工作电压为60 V、工作频率为0.35~0.45 GHz、脉宽为300μs、占空比为10%条件下,频带内输出功率大于3 kW、功率增益大于16 dB、功率附加效率大于71%、抗负载失配能力不小于10∶1。     

A 120-W Boost Converter Operation Using a High-Voltage GaN-HEMT

A boost converter with a 940-V/4.4 A GaN-HEMT as the main switching device was demonstrated to show the possibility of using high-voltage GaN-HEMTs in power electronic applications. The demonstrated circuit achieved an output power of 122 W and a power efficiency of 94.2% under a drain peak voltage as high as 350 V and a switching frequency of 1 MHz. The dual field-plate structure realized high-voltage switching operation with high power efficiency as dynamic on-resistance was suppressed by an increase of the current collapse phenomena.     

High breakdown Voltage undoped AlGaN-GaN power HEMT on sapphire substrate and its demonstration for DC-DC converter application

Undoped AlGaN-GaN power high electron mobility transistors (HEMTs) on sapphire substrate with 470-V breakdown voltage were fabricated and demonstrated as a main switching device for a high-voltage dc-dc converter. The fabricated power HEMT realized a high breakdown voltage with a field plate structure and a low on-state resistance of 3.9 m/spl Omega//spl middot/cm/sup 2/, which is 10 /spl times/ lower than that of conventional Si MOSFETs. The dc-dc converter operation of a down chopper circuit was demonstrated using the fabricated device at the input voltage of 300 V. These results show the promising possibilities of the AlGaN-GaN power HEMTs on sapphire substrate for future switching power devices.     

寄生电感对低压增强型GaN HEMT开关行为的影响

寄生电感是影响功率管开关特性的重要因素之一,开关频率越高,寄生电感对低压增强型氮化镓高电子迁移率晶体管(GaN HEMT)的开关行为影响越深,使其无法发挥高速开关的性能优势。通过建立数学模型,理论分析了考虑各部分寄生电感后增强型GaN HEMT的开关过程,并推导了各阶段的持续时间和影响因素,然后通过建立双脉冲测试平台,对各部分寄生电感对开关特性的具体影响进行了实验验证。实验结果表明,寄生电感会使开关过程中的电流、电压出现振荡,影响开关速度和可靠性,并且各部分寄生电感对增强型GaN HEMT的开关过程影响程度不同,在实际PCB布局受到物理限制时,需要根据设计目标优化布局,合理分配各部分寄生电感以获得最优的开关性能。     

C波段160W连续波GaN HEMT内匹配功率器件研制

基于GaN功率器件工艺自主研发的大栅宽GaN高电子迁移率晶体管(HEMT)管芯,采用内匹配技术和宽带功率合成技术相结合的方法,研制出了一款C波段160 W连续波GaN HEMT内匹配功率器件。通过优化管芯的结构,设计出了满足连续波使用要求的大功率GaN管芯,然后进行了内匹配器件的设计,在设计中首先采用负载牵引法进行了器件参数提取,并以此为基础设计了阻抗变换网络进行阻抗变换和功率合成。研制出了工作频率为4.4~5.0 GHz、工作电压32 V、连续波输出功率大于160 W、功率附加效率大于50%、功率增益大于12 dB的GaN HEMT内匹配功率管,具有广阔的工程应用前景。     

一个8GHz高功率AlGaN/GaN HEMT VCO

基于中科院微电子所的AlGaN/GaN HEMT工艺研制了一个X波段高功率混合集成压控振荡器（VCO）。电路采用源端调谐的负阻型结构,主谐振腔由开路微带和短路微带并联构成,实现高Q值设计。在偏置条件为VD=20V, VG=-1.9V, ID=150mA时,VCO在中心频率8.15 GHz处输出功率达到28 dBm,效率21%,相位噪声-85 dBc/Hz@100 KHz,-128 dBc/Hz@1 MHz。调谐电压0~5V时,调谐范围50 MHz。分析了器件闪烁噪声对GaN HEMT基振荡器相位噪声性能的主导作用。测试结果显示了AlGaN/GaN HEMT工艺在高功率低噪声微波频率源中的应用前景。     

An 8 GHz high power AlGaN/GaN HEMT VCO

A high power X-band hybrid microwave integrated voltage controlled oscillator(VCO) based on Al-GaN /GaN HEMT is presented.The oscillator design utilizes a common-gate negative resistance structure with open and short-circuit stub microstrip lines as the main resonator for a high Q factor.The VCO operating at 20 V drain bias and-1.9 V gate bias exhibits an output power of 28 dBm at the center frequency of 8.15 GHz with an efficiency of 21%.Phase noise is estimated to be -85 dBc/Hz at 100 kHz offset and -1...     

GaN HEMT器件封装技术研究进展

GaN高电子迁移率晶体管(HEMT)器件由于其宽禁带材料的独特性能,相比硅功率器件具有击穿场强高、导通电阻低、转换速度快等优势,在智能家电、交直流转换器、光伏逆变器以及电动汽车等领域有着广泛的应用前景.但GaN HEMT器件的高功率密度和高频工作特性,给器件封装带来了极大挑战,要使其出色性能得以充分发挥,其封装结构、材...     

GaN功率器件栅驱动电路技术综述

第三代宽禁带半导体GaN晶体管具有低导通阻抗、低寄生参数和更快的开关速度,有望取代传统Si MOSFET,成为未来高性能电源系统实现方案。GaN器件的优势在400 V以上高压系统中更为明显,可以实现更高的开关频率和功率密度,显著提高系统的转换效率,特别适合电源模块小型化发展趋势。介绍了200 V以下低压GaN驱动电路的应用和关键技术。分析了从低压系统拓展到400 V以上高压系统时需要作出的优化与改进。详细介绍了高压GaN系统中基于无磁芯变压器耦合隔离的隔离驱动技术和耗尽型GaN负压栅驱动技术。最后,总结了目前高压GaN驱动电路在工业领域的具体应用。     

氮化镓HEMT器件辐射效应综述

在高频、大功率、高温、高压等领域,氮化镓高电子迁移率晶体管(HEMT)器件因其优异的耐辐射性能而被广泛地应用于卫星、太空探测、核反应堆等领域。尽管从理论和一些试验研究中可以得知,氮化镓材料具有良好的耐辐射特性,但在实际应用中,因其制作工艺及结构等因素的影响,氮化镓HEMT器件的耐辐射特性受到了很大的影响和挑战。本文介绍了氮化镓HEMT器件几种辐射效应,并对氮化镓HEMT器件辐射的研究进行了综述。     

0.5μm AlGaN/GaN HEMT及其应用

报道了采用I线步进光刻实现的76.2 mm SiC衬底0.5μm GaN HEMT.器件正面工艺光刻均采用了I线步进光刻来实现,背面用通孔接地.栅脚介质刻蚀采用一种优化的低损伤RIE刻蚀方法实现了60°左右的侧壁倾斜角,降低了栅脚附近峰值电场强度,提高器件性能和可靠性.研制的GaN HEMT器件fT为15 GHz,fm...     

0.15μm GaN HEMT及其应用

报道了毫米波应用的0.15μm场板结构GaN HEMT。器件研制采用了76.2mm(3英寸)SiC衬底上外延生长的AlGaN/GaN异质结构材料,该材料由MOCVD技术生长并引入了掺Fe GaN缓冲层技术以提升器件击穿电压。器件栅脚和集成了场板的栅帽均由电子束光刻实现,并采用栅挖槽技术来控制器件夹断电压。研制的2×75μm栅宽GaN HEMT在24V工作电压、35GHz频率下的负载牵引测试结果显示其输出功率密度达到了4W/mm,对应的功率增益和功率附加效率分别为5dB和35%。采用该0.15μm GaN HEMT技术进行了Ka波段GaN功率MMIC的研制,所研制的功率MMIC在24V工作电压下脉冲工作时(100μs脉宽、10%占空比),29GHz频点处饱和功率达到了10.64W。     

GaN HEMT的温度特性及其应用

对0.25 μm双场板结构GaN HEMT器件的温度特性进行了研究.负载牵引测试结果显示,GaN HEMT增益的温度系数为-0.02 dB/°C、饱和输出功率系数为-0.004 dB/°C.大的增益温度系数结合GaN HEMT 自热效应引起的高温升对实际应用特别是功率MMIC的设计带来了挑战.按常温设计的GaN功率MM...     

八胞合成X波段140W AlGaN/GaNHEMT的研究与应用

主要研究第三代半导体AlGaN/GaN功率管内匹配问题.采用8个2.5 mm GaN功率芯片设计、合成以及内匹配电路的测试,在漏极电压40 V,脉冲占空比10％,脉宽100μs的条件下进行功率匹配,实现了GaN功率HEMT在X波段8 GHz 140 W功率输出的内匹配电路,并使整个电路的输入、输出电路阻抗提升至50 Ω...     

GaN HEMT栅驱动技术研究进展

GaNHEMT器件由于其击穿场强高、导通电阻低等优越的性能,在高效、高频功率转换领域中有着广泛的应用前景.栅驱动芯片对于GaN HEMT器件应用起着至关重要的作用.介绍了GaN HEMT器件特性和驱动要求,对其栅驱动芯片的典型架构和每种芯片架构各自的关键实现技术研究现状进行了综述.同时介绍了GaN基单片集成功率IC的发...     

A Ka-band 22 dBm GaN amplifier MMIC

A Ka-band GaN amplifier MMIC has been designed in CPW technology,and fabricated with a domestic GaN epitaxial wafer and process.This is,to the best of our knowledge,the first demonstration of domestic Kaband GaN amplifier MMICs.The single stage CPW MMIC utilizes an AlGaN/GaN HEMT with a gate-length of 0.25μm and a gate-width of 2×75μm.Under V_ds=10 V,continuous-wave operating conditions,the amplifier has a 1.5 GHz operating bandwidth.It exhibits a linear gain of 6.3 dB,a maximum output power of 22 dBm and a peak PAE of 9.5%at 26.5 GHz.The output power density of the AlGaN/GaN HEMT in the MMIC reaches 1 W/mm at Ka-band under the condition of V_ds=10 V.     

氮化镓功率半导体器件技术

作为第三代半导体材料的典型代表,宽禁带半导体氮化镓(GaN)具有许多硅材料所不具备的优异性能,是高频、高压、高温和大功率应用的优良半导体材料,在民用和军事领域具有广阔的应用前景。随着GaN技术的进步,特别是大直径硅(Si)基GaN外延技术的逐步成熟并商用化,GaN功率半导体技术有望成为高性能低成本功率技术解决方案,从而受到国际著名半导体厂商和研究单位的关注。总结了GaN功率半导体器件的最新研究,并对GaN功率器件发展所涉及的器件击穿机理与耐压优化、器件物理与模型、电流崩塌效应、工艺技术以及材料发展等问题进行了分析与概述。     

A 97.8% Efficient GaN HEMT Boost Converter With 300-W Output Power at 1 MHz

A 175-to-350 V hard-switched boost converter was constructed using a high-voltage GaN high-electron-mobility transistor grown on SiC substrate. The high speed and low on-resistance of the wide-band-gap device enabled extremely fast switching transients and low losses, resulting in a high conversion efficiency of 97.8% with 300-W output power at 1 MHz. The maximum efficiency was 98.0% at 214-W output power, well exceeding the state of the art of Si-based converters at similar frequencies.     

A 4.69-W/mm output power density InAIN/GaN HEMT grown on sapphire substrate

We report high performance InAlN/GaN HEMTs grown on sapphire substrates.The lattice-matched InAlN/GaN HEMT sample showed a high 2DEG mobility of 1210 cm2/(V.s)under a sheet density of 2.6 ×1013 cm-2.Large signal load-pull measurements for a(2 × 100 μm)× 0.25 μm device have been conducted with a drain voltage of 24 V at 10 GHz.The presented results confirm the high performances reachable by InAlN-based technology with an output power density of 4.69 W/mm,a linear gain of 11.8 dB and a peak power-added efficiency of 48％.This is the first report of high performance InA1N/GaN HEMTs in mainland China.     

High-power monolithic AlGaN/GaN HEMT oscillator

A monolithic X-band oscillator based on an AlGaN/GaN high electron mobility transistor (HEMT) has been designed, fabricated, and characterized. A common-gate HEMT with 1.5 mm of gate width in conjunction with inductive feedback is used to generate negative resistance. A high Q resonator is implemented with a short-circuit low-loss coplanar waveguide transmission line. The oscillator delivers 1.7 W at 9.556 GHz into 50-/spl Omega/ load when biased at V/sub ds/=30 V and V/sub gs/=-5 V, with dc-to-RF efficiency of 16%. Phase noise was estimated to be -87 dBc/Hz at 100-kHz offset. Low-frequency noise, pushing and pulling figures, and time-domain characterization have been performed. Experimental results show great promise for AlGaN/GaN HEMT MMIC technology to be used in future high-power microwave source applications.