Fabrication of high-performance InGaAsN ridge waveguide lasers with pulsed anodic oxidation

We have demonstrated high-performance InGaAsN triple-quantum-well ridge waveguide (RWG) lasers fabricated using pulsed anodic oxidation. The lowest threshold current density of 675 A/cm/sup 2/ was obtained from a P-side-down bonded InGaAsN laser, with cavity length of 1600 /spl mu/m and contact ridge width of 10 /spl mu/m. The emission wavelength is 1295.1 nm. The transparency current density from a batch of unbonded InGaAsN RWG lasers was 397 A/cm/sup 2/ (equivalent to 132 A/cm/sup 2/ per well). High characteristic temperature of 138 K was also achieved from the bonded 10/spl times/1600-/spl mu/m/sup 2/ InGaAsN laser.     

InGaAs-GaAs 980-nm stripe-geometry and circular ring ridge waveguide lasers fabricated with pulsed anodic oxidation

In/sub 0.22/Ga/sub 0.78/As-GaAs quantum-well stripe-geometry and circular ring lasers have been fabricated with pulsed anodic oxidation (PAO). The relationship between ridge heights and laser performance was first studied in the fabrication of stripe lasers. The lowest transparency current density (J/sub tr/) of 61.20 A/cm/sup 2/ was obtained from the stripe laser with a ridge height of 1.23 /spl mu/m, corresponding to an etching depth where all the p-doped layers above active region were removed. With the PAO process, when the ridge height (1.77 /spl mu/m) extended below the active region, J/sub tr/ is 76.03 A/cm/sup 2/, only increased by 24.2%. Based on the experimental results, the circular ring laser, which needs deep etching (below active region) and subsequent PAO, has been fabricated. The fabricated circular ring laser worked under continuous-wave operation at room temperature. Longitudinal mode spacing analysis clearly indicates that the ring resonator is a functional part of the whole circular ring laser.     

High-power (200 mW) singlemode operation of InGaAsN/GaAs ridge waveguide lasers with wavelength around 1.3 /spl mu/m

High-power narrow ridge waveguide lasers emitting with a wavelength around 1.3 /spl mu/m were realised with a single In/sub 0.36/GaAsN/sub 0.022/ quantum well with GaAs barriers. A narrow vertical far-field angle of 35/spl deg/ was obtained. Single lateral mode continuous-wave operation with slope efficiency of 0.57 W/A, series resistance of 2.6 /spl Omega/, and kink-free output power of 210 mW was achieved.     

High-power operation in 0.98-μm strained-layer InGaAs-GaAssingle-quantum-well ridge waveguide lasers

High power strained-layer InGaAs-GaAs graded-index separate confinement heterostructure (GRIN-SCH) single-quantum-well (SQW) lasers at an emission wavelength of 0.98 μm have been fabricated. A light power as high as 270 mW and a maximum front power conversion efficiency of 51.5% have been obtained for the antireflective and highly-reflective coated laser with 9-μm-wide ridge and 600-μm-long cavity     

High-power pulsed xenon ion lasers

Output and threshold characteristics of small-bore pulsed xenon ion lasers are presented in detail as a function of current and gas pressure for ranges of these parameters that are consistent with high optical power output in the green-blue spectral region. It has been found that six wavelengths characteristic of xenon exhibit peak output powers greater than 100 watts, from a 5-foot laser tube over a limited (8-24 mtorr) range of xenon tube pressure. Laser action has also been obtained at high peak powers for longer current pulse (5-50 mus) operation of the tube. In addition, observation of three new laser wavelengths 5340, 5501, and 5590 Å is reported. These lines are only observed at very low tube pressures and very high peak currents.     

Low-divergence single-mode ridge waveguide diode lasers

Ridge waveguide laser diodes of a GaAs-AlGaAs separate-confinement graded-index monolithically stacked triple-quantum-well structure have been fabricated. Chemically assisted ion beam etching (CAIBE) was used to etch a 4- mu m-wide mesa which serves as the waveguide for the device. Results for 4- mu m-wide by 600- mu m-long optically coated devices are presented. Single-longitudinal mode, CW output power in excess of 90 mW and a far-field divergence of 21 degrees *3.5 degrees are demonstrated.<>     

High-efficiency native-oxide-passivated high-index-contrast ridge waveguide lasers

A GaAs-based high-index-contrast ridge waveguide laser is fabricated using a self-aligned process of deep dry etching plus oxygen-enhanced wet thermal oxidation of low Al-content AlGaAs. Lasers operating at /spl lambda/=813 nm (CW, 300 K) with external differential quantum efficiencies as high as 78% are demonstrated, indicating effective passivation of the directly-oxidised etched active region sidewall surface.     

Airbridged high-speed AlGaAs-GaAs ridge waveguide lasers

The design of a high modulation response multiple-quantum-well ridge waveguide laser in AlGaAs-GaAs, with low parasitics is discussed. The device was fabricated on a semi-insulating substrate with a wide top contact, and airbridges have been used to connect the ridge top contact to the bonding pads on the semi-insulating substrate. The 3-dB frequency response of the laser has been measured to be 21 GHz, which is a record for unstrained quantum-well AlGaAs-GaAs lasers.     

High-power long-wavelength room-temperature MOVPE-grown quantum cascade lasers with air-semiconductor waveguide

Quantum cascade lasers grown by metal organic vapour phase epitaxy (MOVPE) with high peak output power of 1.3 W at 300 K emitting a wavelength of 9.8 mum are reported. The devices are processed in wide ridge waveguide structures with an air-semiconductor interface to confine the laser optical mode. This design increases the optical overlap factor and reduces waveguide losses.     

High power 980 nm ridge waveguide lasers with etch-stop layer

For the first time, the use of an etch-stop layer to precisely control the mesa height in ridge waveguide InGaAs/GaAs lasers is reported. These 980 nm devices emit up to 180 mW of total power in the fundamental spatial mode and lase in a single frequency with sidemode suppression ratios of greater than 25 dB.<>     

High-performance 980-nm ridge waveguide lasers with a nearly circular beam

We report high-performance 980-nm ridge waveguide quantum-well lasers with extremely low vertical beam divergence of 13/spl deg/. A very small aspect ratio of 1.6 is obtained at high operating power of 900 mW. In addition to the more circular beam, low threshold, high efficiency, high characteristic temperature, and high output power of over 1.18 W are achieved. The fiber coupled output power can be as high as 680 mW with fiber Bragg grating stabilization. Excellent wavelength and power stability are also demonstrated.     

Stress-induced effects by the anodic oxide in ridge waveguide laserdiodes

This paper studies, both theoretically and experimentally, stress-induced effects on the lateral far-field behavior for ridge-type semiconductor laser diodes where anodic oxide is used for the definition of the stripe width. These effects consist of antiguiding under the stripe region, and of two positive waveguiding features near the stripe edges. For low-threshold devices, these effects may be more important than thermal effects, depending on the stress in the oxide. They put a lower limit on the built-in index guiding to be introduced by lateral etch outside the ridge region in order to maintain fundamental mode operation for wider stripes. The magnitude of these effects may be as large as Δn_ef=1×10^-3. An analytical mathematical model is deduced for computing stresses and strains for a certain ridge-shaped interface which bounds the elastic medium     

Design and fabrication of ridge waveguide folded-cavity in-planesurface-emitting lasers

A 45° angled reactive ion etching combined with an in situ monitoring technique was used to fabricate ridge waveguide folded-cavity in-plane surface-emitting lasers. This laser structure, with two 45°C angle-etched internal total-reflection mirrors and an epitaxially grown distributed Bragg reflector, is very promising for OEIC applications. Laser-structure design and laser fabrication are addressed. A continuous-wave threshold current of 8 mA, the lowest reported in the literature, was achieved on 3-μm-wide, 350-μm long devices     

Dual-wavelength InGaAs-GaAs ridge waveguide distributed Bragg reflector lasers with tunable mode separation

The design and operation of integrated dual-wavelength sources are reported. These InGaAs-GaAs ridge waveguide (RW) distributed Bragg reflector (DBR) lasers consist of a common gain section and two, separate DBR sections. Multiple current injection is not necessary for these lasers to operate in dual-wavelength. Dual-wavelength operation is easily achieved by simply biasing the gain section. A relatively low coupling coefficient /spl kappa/ in the front grating reduces the added cavity loss for the back grating mode. Therefore, the back grating mode reaches threshold easily. Also, the addition of a spacing section lowers the current induced thermal interaction between the two uniform grating sections, significantly reducing the inadvertent wavelength drift. As a result, biasing the front DBR section results in tunable mode pair separations (/spl Delta//spl lambda/) as small as 0.3 nm and as large as 6.9 nm.     

低阈值电流、高量子效率脊形波导激光器

研制了低阈值电流、高量子效率670nm压缩应变单量子阱GaInP/AIGalnP脊形波导激光器。测量解理成的激光器条,腔长为300μm时,阈值电流为12．8mA,双面外部量子效率之和达到94．6％。     

Low threshold voltage vertical-cavity lasers fabricated byselective oxidation

Novel vertical-cavity surface emitting lasers fabricated using selective oxidation to form a current aperture under a top monolithic distributed Bragg reflector mirror are reported. Large cross-sectional area lasers (259 μm²) exhibit threshold current densities of 150 A/cm² per quantum well and record low threshold voltage of 1.33 V. Smaller lasers (36 μm²) possess threshold currents of 900 μA with maximum output powers greater than 1 mW. The record performance of these oxidised vertical-cavity lasers arises from the low mirror series resistance and very efficient current injection into the active region     

Low-threshold InGaAsP ridge waveguide lasers at 1.3 µm

The ridge waveguide configuration is shown to provide reliable low-threshold fundamental-transverse-mode lasers that are readily fabricated. Two variants are described: in the simple ridge laser, the 1.3 μm bandgap active layer is sandwiched between InP layers and in the cladded ridge, the active layer is surrounded by 1.1 μm bandgap InGa AsP. Thresholds as low as 34 mA and efficiencies as high as 66 percent are observed. Output power is linear to more than 12 mW. Several lasers have been operated at 30°C for over 1500 h without measurable degradation. Selected lasers exhibit stabilized longitudinal mode behavior over extended temperature and current ranges. The potential manufacturability of this device is its most attractive feature.     

High-power operation and scaling behavior of CW optically pumped FIR waveguide lasers

High-power far infrared (FIR) laser operation at the 10- 100 mW level is described for wavelengths throughout the 40 μm-1.22 mm spectral region. These data correspond to order of magnitude improvements in converting CO2laser energy into FIR laser output. This improved FIR laser performance is attributed to a waveguide laser geometry with reduced losses for the CO2pump and also to a new method of output coupling. The basic design concept of the efficient laser resonator is discussed as well as the prospect for further increases in laser performance through improved efficiency and sealing.     

Integratable, high speed buried ridge DFB lasers fabricated on semi-insulating substrates

The fabrication of buried ridge DFB lasers on semi-insulating substrates is described. A novel contacting mechanism was employed to give a series resistance of less than 4 Omega . Devices were fabricated at both 1.3 and 1.53 mu m with lasing thresholds as low as 16 mA. Single longitudinal mode operation was achieved with SMSR greater than 30 dB at both wavelengths. The structure gives an inherently low capacitance, which together with low threshold currents, low series resistance and fabrication on SI substrates makes these devices suitable for integration and high speed applications.<>     

High-quality extended cavity ridge lasers fabricated by impurity-free vacancy diffusion with a novel masking technique

By using phosphorous doped (5% wt P) silica as masking material and standard silica capping to promote quantum well interdiffusion, GaAs-AlGaAs ridge waveguide QW lasers with integrated transparent waveguides were fabricated. With a selective differential blue-shift of 30 nm in the absorption edge, devices with 400-/spl mu/m/2.73-mm-long active/passive sections exhibited threshold currents of 8 mA in CW operation, only 1 mA higher than that for normal lasers of the same active length and from the same chip. This 14% increase in threshold current was accompanied by a slope efficiency decrease of 40%. Losses of 3.2 cm/sup -1/ were measured in the passive waveguides at the lasing wavelength using the Fabry-Perot resonance method. This value is among the lowest reported so far using an impurity-free disordering technique.