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SOI高温压力传感器的研究 总被引:2,自引:0,他引:2
介绍了SOI压力传感器的制作工艺,并且通过有限元软件对传感器输出特性进行模拟,模拟结果与实际测得结果是相符的.对SOI压力传感器测量结果表明,当温度增加到220℃传感器仍然能保持很好线性.另外对SOI压力传感器和多晶硅压力传感器进行比较,发现单晶硅SOI高温压力传感器灵敏度比多晶硅高温压力传感器灵敏度有较大提高. 相似文献
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平膜片式薄膜压力传感器的线性度与灵敏度分析 总被引:5,自引:2,他引:3
针对薄膜应变片在圆平膜片上的两种基本布置方式,导出了平膜片式薄膜压力传感器的线性度和灵敏度的实用计算公式;分析了膜片的厚径比、薄膜应变比在膜片上的布置方式和位置对传器的线性度与灵敏度的影响,给出了部分研制的薄膜压力传感器的线性度和灵敏度的实测结果与理论计算结果的比较。 相似文献
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分析了导致平膜片式压力传感器非线性的三个因素:弯曲应变、薄膜应变以及电桥输出非线性,导出了该传感器的输出特征函数,进而通过非线性工作区的分析得出传感器非线性最小的设计方法。 相似文献
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针对标准体硅在CMOS和PD SOI CMOS两种工艺下的nMOSFETs,研究了沟道长度和宽度缩减对热载流子效应的影响。实验结果表明,在两种工艺下,热载流子的退化均随着沟道长度的减小而增强;然而,宽度的减小对两种工艺热载流子退化的影响却截然不同:体硅工艺的热载流子退化随宽度的减小而增强,SOI工艺的热载流子退化随宽度的减小而减小。基于界面态对热载流子效应的影响深入分析了长度减小导致两种工艺下热载流子退化均加重的原因;同时基于边缘电场分布对热载流子效应的影响解释了宽度减小导致两种工艺下热载流子退化规律截然相反的现象。研究结果对于实际深亚微米工艺下,集成电路设计中器件工艺尺寸和版图结构的选择具有一定指导意义。 相似文献
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高温压力传感器温度漂移补偿研究 总被引:1,自引:0,他引:1
针对高温压力传感器耐高温和高压的测量的要求,设计了压阻式压力传感器硅杯式芯片版图,采用SIMOX(separationbyimplantedoxygen)技术SOI(silicononinsulator)晶片,在微加工平台上制作了该芯片,获得了差动等臂等应变的惠斯登检测电桥。对采用耐高温封装后的传感器的热零点漂移、热灵敏度漂移和零位输出的补偿作了研究,设计了补偿电路,推导了热灵敏度漂移补偿的计算公式,在通用型高温压力传感器的研发中证明其可行性和实用性,并总结出了经验公式。 相似文献
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Xuefeng Zhuang Der-Song Lin Oralkan O. Khuri-Yakub B.T. 《Journal of microelectromechanical systems》2008,17(2):446-452
Flexible transducer arrays are desired to wrap around catheter tips for side-looking intravascular ultrasound imaging. We present a technique for constructing flexible capacitive micromachined ultrasonic transducer (CMUT) arrays by forming polymer-filled deep trenches in a silicon substrate. First, we etch deep trenches between the bottom electrodes of CMUT elements on a prime silicon wafer using deep reactive ion etching. Second, we fusion-bond a silicon-on-insulator (SOI) wafer to the prime silicon wafer. Once the silicon handle and buried oxide layers are removed from the back side of the SOI wafer, the remaining thin silicon device layer acts as a movable membrane and top electrode. Third, we fill the deep trenches with polydimethylsiloxane, and thin the wafer down from the back side. The 16 by 16 flexible 2-D arrays presented in this paper have a trench width that varies between 6 and 20 ; the trench depth is 150 ; the membrane thickness is 1.83 ; and the final substrate thickness is 150 . We demonstrate the flexibility of the substrate by wrapping it around a needle tip with a radius of 450 (less than catheter size of 3 French). Measurements in air validate the functionality of the arrays. The 250- by 250- transducer elements have a capacitance of 2.29 to 2.67 pF, and a resonant frequency of 5.0 to 4.3 MHz, for dc bias voltages ranging from 70 to 100 V. 相似文献
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简介了一种新型绝缘体上硅(SOI)高声压噪声传感器.主要对提升噪声传感器关键指标的感声膜结构的设计过程进行了仿真和计算,利用ANSYS软件对设计尺寸进行了模拟仿真.对设计的噪声传感器进行了频响以及线性度测试:在高声压级135~200 dB动态范围内的线性度小于1%,频率响应为20~100000 Hz;工作温度范围在-40~260℃,传感器的输出为标准电压信号,可组成被动式声测量阵列,用于测量高声压级的噪声信号. 相似文献
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安全阀阀瓣膜传感器标定的理论与实验研究 总被引:2,自引:1,他引:2
通过对安全阀阀瓣膜传感器进行ANSYS数值模拟和相关实验研究,从理论和实验两方面探索了对阀瓣膜传感器进行标定问题,经过实验验证后,提出了一种准确可行的标定方案.首先,采用ANSYS软件模拟了阀瓣膜传感器承受不同载荷下的应变与压力的关系;同时也设计了一套阀瓣膜传感器的标定实验装置,利用该实验装置对阀瓣膜传感器进行了标定实验.标定实验结果分析表明,阀瓣在承受不同载荷的情况下,应变与压力呈良好的线性关系,线性度达到99.9%,并与相同载荷情况下ANSYS分析结果完全吻合,从而验证了这一标定实验方案的可靠性;通过对阀瓣膜传感器的灵敏度、线性度、重复性、滞后性等指标进行分析,结果显示其参数满足一般传感器的标准,验证了该传感器的可行性. 相似文献
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Fuzzy cognitive mapping is commonly used as a participatory modelling technique whereby stakeholders create a semi-quantitative model of a system of interest. This model is often turned into an iterative map, which should (ideally) have a unique stable fixed point. Several methods of doing this have been used in the literature but little attention has been paid to differences in output such different approaches produce, or whether there is indeed a unique stable fixed point. In this paper, we seek to highlight and address some of these issues. In particular we state conditions under which the ordering of the variables at stable fixed points of the linear fuzzy cognitive map (iterated to) is unique. Also, we state a condition (and an explicit bound on a parameter) under which a sigmoidal fuzzy cognitive map is guaranteed to have a unique fixed point, which is stable. These generic results suggest ways to refine the methodology of fuzzy cognitive mapping. We highlight how they were used in an ongoing case study of the shift towards a bio-based economy in the Humber region of the UK. 相似文献
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Paul Benjamin Lowry Nathan W. Twyman Matt Pickard Jeffrey L. Jenkins Quang “Neo” Bui 《Information & Management》2014
We adapt the Affect Infusion Model and propose the Affect-Trust Infusion Model (ATIM), which explains and predicts how and when cognition, through perceived Web site performance (PWP), and positive emotion (PE) each influence Web vendor trust. The ATIM explains the underlying causal mechanisms that determine the degree of affect infusion and the subsequent processing strategy that a user adopts when interacting with a new Web site. Under high affect infusion, PE acts as a mediator between PWP and vendor trust; under low affect infusion, PWP primarily affects trust, and PE is disintermediated. We review two distinct, rigorously validated experiments that empirically support the ATIM. To conclude, we detail several promising research opportunities that can leverage the ATIM and show how the ATIM can help to guide user-centered design (UCD) as an example practical application. 相似文献
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Amr Elmasry 《Information Processing Letters》2010,110(16):655-658
Given a sequence of n elements, we introduce the notion of an almost-increasing subsequence as the longest subsequence that can be converted to an increasing subsequence by possibly adding a value, that is at most a fixed constant, to each of the elements. We show how to optimally construct such subsequence in time, where k is the length of the output subsequence. 相似文献
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设计制作了一种集成信号调理电路的高温压阻式压力传感器,包含倒装式的压敏敏片、无源电阻温度补偿电路和信号调理电路组成;压敏芯片的制作采用SOI材料和MEMS标准工艺,温度补偿和信号调理电路采用高温电子元件;试验表明,无源电阻温度补偿具有显著的效果;此外,采用了高温信号调理电路来提高传感器的输出灵敏度,通过温度补偿来降低输出灵敏度;与传统的经验算法相比,所提出的无源电阻温度补偿技术具有更小的温度漂移,在220℃条件下传感器输出灵敏度为4.93 mV/100 kPa,传感器灵敏度为总体测量精度为±2%FS;此外,由于柔性传感器的输出电压可调,因此不需要使用一般的电压转换器随动压力变送器,这大大降低了测试系统的成本,有望在恶劣环境下的压力测量中得到高度应用。 相似文献