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为改善高压功率VDMOS击穿电压和导通电阻之间的平方率关系,采用超结理论及其分析方法,结合电荷平衡理论,计算了超结VDMOS的理想结构参数,并利用仿真软件SILVACO对超结VDMOS的各个工艺参数(外延厚度,P柱掺杂剂量,阈值电压)进行了优化设计,对器件的正向导通特性和反向击穿特性进行了仿真分析。最终设计了一个击穿电压为815V,比导通电阻为23mΩ.cm2的超结VDMOS。 相似文献
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提出一种新型多超结LDMOS功率器件,通过在横向和和纵向P柱区与N柱区之间的相互作用降低器件的导通电阻。在这一结构中,多层超结通过相互反向排列而形成,相比于常规超结的二维耗尽,MSJ由于纵向电场调制的作用形成三维耗尽,并且由于深漏的存在,电流分布更好,在各项条件的作用下,漂移区的掺杂浓度得到了提高,降低了器件导通电阻。底层超结的电场屏蔽效应使得该器件达到电荷平衡,由于衬底辅助耗尽效应效应产生的漏区高电场降低了,在漂移区产生一个均匀分布的电场并且获得高击穿电压。通过数值模拟仿真验证表明:在维持高击穿电压的情况下,长12微米的MSJ功率器件的导通电阻相比于同样大小的常规器件降低了42%。 相似文献
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为了改善超结MOSFET功率器件的终端击穿特性,提出了一种平面结终端技术,应用柱坐标下的泊松方程证明了这种技术的可行性。提出了超结功率器件终端技术的工艺实现方法并分析了终端结构的电压特性,使用这种超结终端技术仿真得到了一个600V的Coolmos。利用2维仿真软件Medici讨论了终端p柱的数量和宽度因素对击穿电压和表面电场的影响。结果发现,采用变间距的超结结构本身就可以很好地实现超结MOSFET功率器件的终端。 相似文献
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随着现代工艺水平的提高与新技术开发的多元化,功率VDMOSFE设计研制朝着高压、高频、大电流方向发展,成为目前新型电力电子器件研究的重点。本文按照功率VDMOSFE正向设计的思路,选取<100>晶向的衬底硅片,采用多晶硅栅自对准工艺,结合MEDICI器件仿真和SUPREM-4工艺仿真软件,实现击穿电压和导通电阻的优化,同时优化元胞结构与结终端结构,兼顾开关特性及其它参数,最终完成工艺产品试制,基本可达到500V/8A高压、大电流VDMOSFET的设计与研制要求。 相似文献
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电荷耦合是适用于中等电压功率MOSFET设计的先进设计理念之一,该设计思想旨在改善器件阻断态下的电场分布从而提高耐压。针对150 V电荷耦合功率MOSFET双外延漂移区(分别为电荷耦合区N1区与非耦合区N2区)电荷匹配问题进行了仿真优化研究,结果表明:N1区和N2区浓度分别约为2.2×1016cm-3和4.5×101 5cm-3时,电场分布更加均匀、耐压更高,且比导通电阻仅为1.306 mΩ·cm2,即击穿电压和比导通电阻间达到最佳匹配。同时,还针对器件不同槽深进行了静态特性和动态特性的整体仿真优化研究,结果表明:槽深在7~9μm时,器件满足耐压要求且击穿电压随双漂移区掺杂浓度匹配程度变化较为平稳。最后,优化结构与传统槽栅MOSFET相比,其栅漏电容和栅电荷大幅降低,器件优值降低了约87%。 相似文献
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Michael Reilly 《半导体技术》2004,29(12)
DUV lithography, using the 248 nm wavelength, is a viable manufacturing option for devices with features at 130 nm and less. Given the low kl value of the lithography, integrated process development is a necessary method for achieving acceptable process latitude. The application of assist features for rule based OPC requires the simultaneous optimization of the mask, illumination optics and the resist.Described in this paper are the details involved in optimizing each of these aspects for line and space imaging.A reference pitch is first chosen to determine how the optics will be set. The ideal sigma setting is determined by a simple geometrically derived expression. The inner and outer machine settings are determined, in turn,with the simulation of a figure of merit. The maximum value of the response surface of this FOM occurs at the optimal sigma settings. Experimental confirmation of this is shown in the paper.Assist features are used to modify the aerial image of the more isolated images on the mask. The effect that the diffraction of the scattering bars (SBs) has on the image intensity distribution is explained. Rules for determining the size and placement of SBs are also given.Resist is optimized for use with off-axis illumination and assist features. A general explanation of the material' s effect is discussed along with the affect on the through-pitch bias. The paper culminates with the showing of the lithographic results from the fully optimized system. 相似文献
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Thomas M.Trexler 《半导体技术》2004,29(5)
From its emergence in the late 1980s as a lower cost alternative to early EEPROM technologies, flash memory has evolved to higher densities and speedsand rapidly growing acceptance in mobile applications.In the process, flash memory devices have placed increased test requirements on manufacturers. Today, as flash device test grows in importance in China, manufacturers face growing pressure for reduced cost-oftest, increased throughput and greater return on investment for test equipment. At the same time, the move to integrated flash packages for contactless smart card applications adds a significant further challenge to manufacturers seeking rapid, low-cost test. 相似文献
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The relation between the power of the Brillouin signal and the strain is one of the bases of the distributed fiber sensors of temperature and strain. The coefficient of the Bfillouin gain can be changed by the temperature and the strain that will affect the power of the Brillouin scattering. The relation between the change of the Brillouin gain coefficient and the strain is thought to be linear by many researchers. However, it is not always linear based on the theoretical analysis and numerical simulation. Therefore, errors will be caused if the relation between the change of the Brillouin gain coefficient and the strain is regarded as to be linear approximately for measuring the temperature and the strain. For this reason, the influence of the parameters on the Brillouin gain coefficient is proposed through theoretical analysis and numerical simulation. 相似文献
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The parallel thinning algorithm with two subiterations is improved in this paper. By analyzing the notions of connected components and passes, a conclusion is drawn that the number of passes and the number of eight-connected components are equal. Then the expression of the number of eight-connected components is obtained which replaces the old one in the algorithm. And a reserving condition is proposed by experiments, which alleviates the excess deletion where a diagonal line and a beeline intersect. The experimental results demonstrate that the thinned curve is almost located in the middle of the original curve connectivelv with single pixel width and the processing speed is high. 相似文献
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Today, micro-system technology and the development of new MEMS (Micro-Electro-Mechanical Systems) are emerging rapidly. In order for this development to become a success in the long run, measurement systems have to ensure product quality. Most often, MEMS have to be tested by means of functionality or destructive tests. One reason for this is that there are no suitable systems or sensing probes available which can be used for the measurement of quasi inaccessible features like small holes or cavities. We present a measurement system that could be used for these kinds of measurements. The system combines a fiber optical, miniaturized sensing probe with low-coherence interferometry, so that absolute distance measurements with nanometer accuracy are possible. 相似文献
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Qi-jiang Ran Pei-de Han Yu-jun Quan Li-peng Gao Fan-ping Zeng Chun-hua Zhao 《光电子快报》2008,4(4):239-242
This paper presents a new method to increase the waveguide coupling efficiency in hybrid silicon lasers. We find that the propagation constant of the InGaAsP emitting layer can be equal to that of the Si resonant layer through improving the design size of the InP waveguide. The coupling power achieves 42% of the total power in the hybrid lasers when the thickness of the bonding layer is 100 nm. Our result is very close to 50% of the total power reported by Intel when the thickness of the thin bonding layer is less than 5 nm. Therefore, our invariable coupling power technique is simpler than Intel's. 相似文献
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Teleportation of an arbitrary unknown N-qubit entangled state under the controlling of M controllers
A new quantum protocol to teleport an arbitrary unknown N-qubit entangled state from a sender to a fixed receiver under M controllers(M < N) is proposed. The quantum resources required are M non-maximally entangled Greenberger-Home-Zeilinger (GHZ) state and N-M non-maximally entangled Einstein-Podolsky-Rosen (EPR) pairs. The sender performs N generalized Bell-state measurements on the 2N particles. Controllers take M single-particle measurement along x-axis, and the receiver needs to introduce one auxiliary two-level particle to extract quantum information probabilistically with the fidelity unit if controllers cooperate with it. 相似文献
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A continuous-wave (CW) 457 nm blue laser operating at the power of 4.2 W is demonstrated by using a fiber coupled laser diode module pumped Nd: YVO4 and using LBO as the intra-cavity SHG crystal With the optimization of laser cavity and crystal parameters, the laser operates at a very high efficiency. When the pumping power is about 31 W, the output at 457nm reaches 4.2 W, and the optical to optical conversion efficiency is about 13.5% accordingly. The stability of the out putpower is better than 1.2% for 8 h continuously working. 相似文献
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《中国通信》2014,(7)
正Wireless Body-area Networks The last decade has witnessed the convergence of three giant worlds:electronics,computer science and telecommunications.The next decade should follow this convergence in most of our activities with the generalization of sensor networks.In particular with the progress in medicine,people live longer and the aging of population will push the development of wireless personal networks 相似文献
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《中国通信》2014,(8)
正Information Centric Networking Information-Centric Networking(ICN) is an emerging direction in Future Internet architecture research,gaining significant tractions among academia and industry.Aiming to replace the conventional host-to-host communication model by a data-centric model,ICN treats data content as the first 相似文献