超纯Ge中剩余浅施主的光热电离光谱

报道了高纯Ge单晶中剩余浅施主的高分辨率光热电离光谱。不仅观察到P、As和D(Li,O)复合施主化较低基态到各激发态的一系列较强尖锐跃迁谱线还观察到P及As从三重基态1S(T_2)到各激发态的较弱跃迁谱线。由此更精确地得出P、As的1S基态分裂值4A分别为22.74cm~(-1)(2.82meV)和33.980m~(-1)(4.21meV)。     

高纯硅中新的浅施主中心

报道了N型高纯区熔硅单晶的高分辨率光热电离光谱(PTIS),观察到2个新的谱线系列。结果表明新的谱线系列可能与2个“类氢”复合型浅施主中心(NSD)有关,其浓度低达～10~9cm~(-3),电离能分别为36.61meV和36.97meV。另外,对P和NSD(1)都观察到以前未能分辨的与6p±以上杂质激发态有关的谱线,分析表明,NSD可能是晶体生长过程中产生的,氧可能在其中起重要作用。     

高纯硅中新的浅施主中心

报道了N型高纯区熔硅单晶的高分辨率光热电离光谱（PTIS），观察到2个新的谱线系列，结果表明新的谱线系列可能与2个“类氢”复合型浅施主中心（NSD）有关，其浓度低达－10^9cm^-3，电离能分别为36．61meV和36．97meV，另外，对P和NSD（1）都观察到以前未能分辨的与6p±以上杂质激发态有关的谱线，分析表明，NSD可能是晶体生长过程中产生的，氧可能在其中起重要作用。     

Ⅲ、Ⅴ族杂质对硅中热施主性质的影响

首次利用导纳谱技术研究了450℃处理后的CZ-Si.导纳谱、DLTS和霍耳测量的结果表明:热施主有四个施主能级,即 E_c-(330～280)meV、E_c- 120meV、E_c-52meV和E_c- 30 meV.同时证明:Ⅲ族和Ⅴ族杂质对这些能级的影响不同.对Ⅲ族杂质增强热施主形成的效应和目前已报道的有关热施主能级的分歧进行了详细研究和讨论.本文指出,用一个统一微观模型说明热施主的各种性质似乎不妥,并对这四个施主能级可能的缺陷结构进行了简单探讨.     

硅价带自旋-轨道分裂的高分辨率光电导谱测定

采用高分辨率光电导谱观察到高纯区熔硅单晶中剩余硼受主从基态到各共振激发态的p_(1/2)系列跃迁谱线.考虑裂开P_(1/2)价带的非抛物线性,精确得到了硼杂质从基态到P_(1/2)价带的电离能E_1~*(硼)=88.45±0.01meV,进而获得硅价带的自旋-轨道分裂为△_o=42.62±0.01meV.     

NTDCZSi中辐照施主的研究

本文对中子嬗变掺杂直拉硅(NTDCZSi)中辐照施主(ID)的退火行为和性质进行了研究,并探讨了不同中子辐照剂量和氧、碳含量对辐照施主形成的影响。首次报道了低于750℃热处理所产生的施主平台现象,并分别利用低温Hall测量和透射电镜对其进行了研究。结果表明,ID在禁带中产生～20meV的浅施主能级,其电活性起源于硅和二氧化硅沉淀的界面态。     

纳米ZnO光学性质研究进展

介绍了纳米ZnO常见发光谱的发光机制。在室温光致发光谱(PL)中,一般在380 nm处出现紫外发光,也有报道在357和377 nm处的紫外发光,列举了几种不同的发光解释。对于深能级发光,一般在400～550 nm出现连续的发光带,也有观察到深能级的声子伴线和声子复制现象。在低温光致发光谱的紫外发射中,一般观察到由自由激子发射(FX)、中性施主束缚激子发射(D0X)、施主-受主对跃迁峰(DAP)、中性施主束缚激子对应的双电子卫星峰(TES)以及声子伴线。综述了纳米ZnO的喇曼光谱、透射光谱、电致发光谱(EL)的特征,最后展望了纳米ZnO的光学性能研究前景。     

掺铒硅光致发光激子传递能量机制

铒离子在硅中呈现弱施主特性,O、Er双掺杂可提高施主浓度两个数量级.氧杂质与铒离子形成复合体,其施主能级可能是铒离子发光能量转换的重要通道.提出了掺铒硅光致发光激子传递能量模型,建立了发光动力学速率方程,并进行了详细推导.发光效率与光激活铒离子浓度、激发态寿命及自发辐射寿命等因素有关.指出铒离子-束缚激子复合体的热离化和激发态铒离子能量反向传递是引起铒离子发光温度猝灭的主要原因.拟合PL测量实验结果表明：它们对应的激活能分别为6.6meV和47.4meV.     

硅中磷的基态分裂的PTIS谱研究

本文报道掺磷浓度为10~(13)cm~(-3)的N型Si中磷杂质基态分裂的PTIS光谱实验结果,精确测定了P的基态分裂值为6△_c=12.95meV;通过计算P的基态布居数随温度的变化,得到了不同基态跃迁谱线相对强度与温度的关系,结果与实验吻合.     

硅基氧化锌薄膜中的发光和复合中心

报道了用MOCVD方法制备的硅基ZnO薄膜中的中性施主-价带D0h发光.ZnO/p-Si结构经空气中700 ℃退火1h,然后进行X射线衍射(XRD)、光致发光(PL)谱和I-V特性测量.实验得到不同载气流量制备的样品都具有整流特性.深能级瞬态谱(DLTS)测量探测到各样品中存在两个施主深能级E1和E2.相应的室温PL谱测量显示样品近带边发射包含不同的发光线.利用高斯拟合方法,样品S2a的PL谱分解为三条发光线b,c和d,其中发光线b可归结为ZnO中的激子发射;DLTS测量得到的施主能级E1与发光线c和d的局域态电离能Ed相关,为D0h中心.此外,实验揭示E2能级的相对隙态密度与PL谱的发光强度成反比,表明深能级E2具有复合中心性质.     

Resolution Enhancement Technology:Integrated Process Solutions using OPC

DUV lithography, using the 248 nm wavelength, is a viable manufacturing option for devices with features at 130 nm and less. Given the low kl value of the lithography, integrated process development is a necessary method for achieving acceptable process latitude. The application of assist features for rule based OPC requires the simultaneous optimization of the mask, illumination optics and the resist.Described in this paper are the details involved in optimizing each of these aspects for line and space imaging.A reference pitch is first chosen to determine how the optics will be set. The ideal sigma setting is determined by a simple geometrically derived expression. The inner and outer machine settings are determined, in turn,with the simulation of a figure of merit. The maximum value of the response surface of this FOM occurs at the optimal sigma settings. Experimental confirmation of this is shown in the paper.Assist features are used to modify the aerial image of the more isolated images on the mask. The effect that the diffraction of the scattering bars (SBs) has on the image intensity distribution is explained. Rules for determining the size and placement of SBs are also given.Resist is optimized for use with off-axis illumination and assist features. A general explanation of the material' s effect is discussed along with the affect on the through-pitch bias. The paper culminates with the showing of the lithographic results from the fully optimized system.     

Cost-effective test solutions for smart card and other integrated flash applications

From its emergence in the late 1980s as a lower cost alternative to early EEPROM technologies, flash memory has evolved to higher densities and speedsand rapidly growing acceptance in mobile applications.In the process, flash memory devices have placed increased test requirements on manufacturers. Today, as flash device test grows in importance in China, manufacturers face growing pressure for reduced cost-oftest, increased throughput and greater return on investment for test equipment. At the same time, the move to integrated flash packages for contactless smart card applications adds a significant further challenge to manufacturers seeking rapid, low-cost test.     

Theoretical analysis of the relationship between the Brillouin gain coefficient and the strain in the optical-fiber sensors

The relation between the power of the Brillouin signal and the strain is one of the bases of the distributed fiber sensors of temperature and strain. The coefficient of the Bfillouin gain can be changed by the temperature and the strain that will affect the power of the Brillouin scattering. The relation between the change of the Brillouin gain coefficient and the strain is thought to be linear by many researchers. However, it is not always linear based on the theoretical analysis and numerical simulation. Therefore, errors will be caused if the relation between the change of the Brillouin gain coefficient and the strain is regarded as to be linear approximately for measuring the temperature and the strain. For this reason, the influence of the parameters on the Brillouin gain coefficient is proposed through theoretical analysis and numerical simulation.     

An improved parallel thinning algorithm with two subiterations

The parallel thinning algorithm with two subiterations is improved in this paper. By analyzing the notions of connected components and passes, a conclusion is drawn that the number of passes and the number of eight-connected components are equal. Then the expression of the number of eight-connected components is obtained which replaces the old one in the algorithm. And a reserving condition is proposed by experiments, which alleviates the excess deletion where a diagonal line and a beeline intersect. The experimental results demonstrate that the thinned curve is almost located in the middle of the original curve connectivelv with single pixel width and the processing speed is high.     

Novel fiber-optical interferometer with miniaturized probe for in-hole measurements

Today, micro-system technology and the development of new MEMS （Micro-Electro-Mechanical Systems） are emerging rapidly. In order for this development to become a success in the long run, measurement systems have to ensure product quality. Most often, MEMS have to be tested by means of functionality or destructive tests. One reason for this is that there are no suitable systems or sensing probes available which can be used for the measurement of quasi inaccessible features like small holes or cavities. We present a measurement system that could be used for these kinds of measurements. The system combines a fiber optical, miniaturized sensing probe with low-coherence interferometry, so that absolute distance measurements with nanometer accuracy are possible.     

Development of the readout system for waveguide multilayer optical card

Waveguide multilayer optical card （WMOC） is a novel storage device of three-dimensional optical information. An advanced readout system fitting for the WMOC is introduced in this paper. The hardware mainly consists of the light source for reading, WMOC, motorized stages addressing unit, microscope imaging unit, CCD detecting unit and PC controlling ＆ processing unit. The movement of the precision motorized stage is controlled by the computer through Visual Basic （VB） language in software. A control panel is also designed to get the layer address and the page address through which the position of the motorized stages can be changed. The WMOC readout system is easy to manage and the readout result is directly displayed on computer monitor.     

Study of waveguide coupling efficiency in hybrid silicon lasers

This paper presents a new method to increase the waveguide coupling efficiency in hybrid silicon lasers. We find that the propagation constant of the InGaAsP emitting layer can be equal to that of the Si resonant layer through improving the design size of the InP waveguide. The coupling power achieves 42% of the total power in the hybrid lasers when the thickness of the bonding layer is 100 nm. Our result is very close to 50% of the total power reported by Intel when the thickness of the thin bonding layer is less than 5 nm. Therefore, our invariable coupling power technique is simpler than Intel＇s.     

Collinear phase-matching study of terahertz-wave generation via difference frequency mixed in GaAs and Inp

The collinearly phase-matching condition of terahertz-wave generation via difference frequency mixed in GaAs and InP is theoretically studied. In collinear phase-matching, the optimum phase-matching wave hands of these two crystals are calculated. The optimum phase-matching wave bands in GaAs and lnP are 0.95-1.38μm and 0.7-0.96μm respectively. The influence of the wavelength choice of the pump wave on the coherent length in THz-wave tuning is also discussed. The influence of the temperature alteration on the phase-matching and the temperature tuning properties in GaAs crystal are calculated and analyzed. It can serve for the following experiments as a theoretical evidence and a reference as well.     

Effects of the alloy compositions on the phonon-polaritons in ternary mixed crystals

Composition dependence of bulk and surface phonon-polaritons in ternary mixed crystals are studied in the framework of the modified random-element-isodisplacement model and the Bom-Huang approximation. The numerical results for Several Ⅱ - Ⅵ and Ⅲ- Ⅴ compound systems are performed, and the polariton frequencies as functions of the compositions for ternary mixed crystals AlxGa1-xAs, GaPxAS1-x, ZnSxSe1-x, GaAsxSb1-x, GaxIn1-xP, and ZnxCd1-xS as examples are given and discussed. The results show that the dependence of the energies of two branches of bulk phonon-polaritons which have phonon-like characteristics, and surface phonon-polaritons on the compositions of ternary mixed crystals are nonlinear and different from those of the corresponding binary systems.     

New insert layer structure OLEDs

An insert layer structure organic electroluminescent device（OLED） based on a new luminescent material （Zn（salen）） is fabricated. The configuration of the device is ITO/CuPc/NPD/Zn（salen）/Liq/LiF/A1/CuPc/NPD/Zn（salen）/Liq/LiF/A1. Effective insert electrode layers comprising LiF（1nm）/Al（5 nm） are used as a single semitransparent mirror, and bilayer cathode LiF（1 nm）/A1（100 nm） is used as a reflecting mirror. The two mirrors form a Fabry-Perot microcavity and two emissive units. The maximum brightness and luminous efficiency reach 674 cd/m^2 and 2.652 cd/A, respectively, which are 2.1 and 3.7 times higher than the conventional device, respectively. The superior brightness and luminous efficiency over conventional single-unit devices are attributed to microcavity effect.