Multilayer-coated laminar grating with 16% normal-incidence efficiency in the 150-A wavelength region

We characterized a laminar grating with a Mo/Si multilayer coating by using synchrotron radiation and atomic force microscopy. The grating substrate had 2400 grooves/mm, 40-A groove depth, and 2080-A groove width. The microroughness of the grating substrate was 5 A rms. The multilayer coating was optimized to have peak normal-incidence reflectance at a wavelength near 150 A. For an angle of incidence of 10 degrees the peak grating efficiency was 16.3% in the +1 order and 15.0% in the -1 order. The efficiency in the zero order was lower by a factor of 40 owing to the excellent matching of the groove depth and groove width to the wavelength of the incident radiation. By dividing the grating efficiencies by the measured reflectance of the multilayer coating, we obtained inferred groove efficiencies of 34% and 32% in the +1 and -1 orders, respectively.     

Replication of a holographic ion-etched spherical blazed grating for use at extreme-ultraviolet wavelengths: efficiency

Using synchrotron radiation, we have measured the efficiency at an angle of incidence of 10 degrees of a holographic ion-etched spherical blazed grating and three of its fourth-generation replicas. The measured efficiency profile of replicas 1 and 3 prior to multilayer coating oscillated from thin-film interference produced by the replicas' Al/Al2O3/SiO2 structure. A Mo2C/Si multilayer coating was applied to the master grating and replicas 1 and 2. After coating, the maximum grating efficiency occurred in the -2nd order and the maximum values were 12.4% at 143.8 angstroms for the master and 11.6% at 145.2 angstroms for replicas 1 and 2. On the basis of measurements obtained after coating, the derived groove efficiency was 22.2% for the master, 19.4% for replica 1, and 19.3% for replica 2. The groove efficiency of the uncoated replica 3 was 24.3% at 142.5 angstroms. We find that the replicas are reasonably faithful copies of the ion-etched master, and models based on measured atomic force microscope groove profiles are in general agreement with measured results. However, subtle issues remain regarding the widths of the peak order profile and the location of its maximum wavelength.     

Polarization and efficiency of a concave multilayer grating in the 135-250-Å region and in normal-incidence and SeyaNamioka mounts

A molybdenum/silicon multilayer coating was applied to a holographic ion-etched blazed grating substrate that had 2400 grooves/mm and a radius of curvature of 2.2 m. Scanning probe microscopy yielded the same surface microroughness (5 ? rms) before and after deposition of the multilayer. The efficiency and polarization performance of the grating was measured by synchrotron radiation in the 135-250-? wavelength region. In the second grating order and the second Bragg order of the multilayer coating, the peak normal-incidence efficiency was 7.5% at a wavelength of 147 ?, representing a groove efficiency of 27%. At an angle of incidence of 35°, the polarization performance of the grating was 95%-100% in the 210-250-? wavelength region. In a Seya-Namioka spectrometer mount at an angle of incidence of 30°-40°, the grating is a nearly perfect polarizing optical element in the wavelength bands between 125 and 300 ?, which are covered by the multilayer coating.     

Normal-incidence efficiencies in the 115-340-Å wavelength region of replicas of the Skylab 3600-line/mm grating with multilayer and gold coatings

Multilayer and gold coatings were applied to replicas of the 3600-line/mm ruled grating that was developed for the Naval Research Laboratory S082A spectroheliograph that was flown on the Skylab spacecraft. The Mo-Si multilayer coating had a peak normal-incidence reflectance of 50% at a wavelength of 136 ?. The normal-incidence efficiency of the multilayer-coated grating was measured by the use of synchrotron radiation and was compared with the efficiency of the gold-coated replica grating in the 115-340-? wavelength region. The peak efficiency of the multilayer grating was 1.3% in the 133-137-? region and was a factor of 65 higher than the efficiency of the gold grating. The multilayer and gold coated gratings, as well as an uncoated replica grating substrate, were characterized by the use of a scanning probe microscope. The rms microroughness of the uncoated and multilayer-coated gratings was 10 ?, and the microroughness of the gold grating was 16 ?.     

Investigation of the properties of an ion-etched plane laminar holographic grating

We have measured the efficiency over the range 125-225 A of a bare ion-etched plane laminar holographic grating made of fused silica and with 1000 grooves/mm. The measured efficiency of each order oscillates with wavelength because of constructive and destructive interference between radiation diffracted from the lands and the grooves. We measured the grating groove profile with an atomic force microscope, and the resulting groove depth of 434 ? 6 A agrees well with the values determined independently from the oscillatory behavior of the efficiency measurements. Grating efficiency in the +1 order peaked at values of 0.027%, 0.011%, and 0.005% at wavelengths of 191, 157, and 132 A, respectively; and the derived groove efficiencies are 27%, 25%, and 27%. The irregular shape at the land-groove edges dominates the large grating roughness of 23-45-A rms, but even regions far from the edges have a roughness of 10-18-A rms. The average groove profile was used to model the grating efficiency, and the resulting wavelengths predicted for different order maxima and minima agree well with measured wavelengths, although the calculated efficiencies are greater than the measured results by 10-20%.     

Normal-incidence efficiencies of 4800-grooves/mm-ruled replica gratings with multilayer and gold coatings in the 125-325-A wavelength region

The normal-incidence efficiencies of two 4800-grooves/mm ruled replica gratings, one with a dual-bandpass molybdenum/silicon multilayer coating and the other with a gold coating, were measured by use of synchrotron radiation in the 125-325-A wavelength region. The peak reflectance of the multilayer coating was 22% in the first Bragg order near 235 A and 28% in the second Bragg order near 126 A. The peak efficiency of the multilayer grating was 2.6% in the first diffraction order near 225 A and 0.3% in the second diffraction order near 125 A. The efficiencies of the multilayer grating were much higher than the corresponding efficiencies of the gold grating. The characterization of the surfaces of the gratings by atomic force microscopy indicated rms microroughness values in the 5-18-mum(-1) frequency range of 12-20 A for the multilayer grating and 22-32 A for the gold grating. Both gratings had bumpy surface features larger than the nominal groove height. The rather large surface roughness and groove irregularities had a detrimental effect on the grating efficiencies.     

Mo/Si multilayer-coated ruled blazed gratings for the soft-x-ray region

Two Mo/Si multilayer-coated blazed gratings have been fabricated for operation at soft-x-ray wavelengths above the Si L edge, λ ≥ 12.4 nm, at (near) normal incidence. The sawtooth profile of the grating structure was mechanically ruled into a 200-nm Au film that was deposited onto a plane glass substrate. To smooth the rough Au surface and to prevent interdiffusion of the Au film with the upper Mo/Si multilayer, a carbon film was evaporated onto the Au grating surface of one of the gratings before the deposition of the multilayer coating. We matched the multilayer grating, working on blaze in the third diffraction order, in which an absolute diffraction efficiency of 3.4% at a wavelength of 14 nm was measured, whereas only 1.1% was achieved for a similar grating (without a carbon interlayer). These efficiencies are higher than those obtained for other ruled blazed gratings reported in the literature. As a result of the multilayer and grating periodicity, the wavelength of diffraction can be tuned bya rotation of the grating, which is important for application in a soft-x-ray monochromator.     

大量程纳米级光栅干涉位移测量

针对传统光栅干涉仪中测量范围和分辨率难以同时提高的问题,提出利用单根大长度、低线数光栅实现大量程、高分辨率位移测量的方法.首先利用长度400mm,栅距10μm计量光栅的±5级衍射光生成条纹图,实现了条纹的10倍光学细分.然后提出一种基于傅里叶变换时移特性的条纹细分新方法,利用相邻两帧条纹图同一位置处相位的变化实现了高达1000倍的条纹电子细分.在此过程中,针对能量泄漏对傅里叶变换法相位提取精度的影响,提出条纹图整周期裁剪的方法,使条纹细分精度至少可达到1/1000条纹周期.仿真和实验结果表明,系统具有纳米级的分辨率和优于10nm的测量精度.     

Efficiency and long-term stability of a multilayer-coated, ion-etched blazed holographic grating in the 125-133-Å wavelength region

The efficiency of an ion-etched blazed holographic grating was measured by the use of synchrotron radiation in the 125-133-? wavelength range and at near-normal incidence. The grating had a Mo-Si multilayer interference coating that resulted in a peak normal-incidence efficiency of 13% in the second grating order and at a wavelength of 128 ?. This is the highest efficiency obtained to date from a multilayer-coated grating in this wavelength region and at normal incidence. These measurements are compared with similar measurements performed on the same grating 4.5 years later. Over this time the peak grating efficiency decreased from 13% to 8%, and this result is attributed to the decrease in the reflectance of the multilayer coating from 55% to 42%. Oxidation and contamination of the multilayer with carbon appear to be the causes of these losses. The groove efficiency of the grating substrate in the second order is 23%.     

Skylab 3600 groove/mm replica grating with a scandium-silicon multilayer coating and high normal-incidence efficiency at 38-nm wavelength

A Sc-Si multilayer coating was applied to a replica of the 3600 groove/mm grating, developed for the SO82A spectroheliograph that flew on the Skylab mission, for the purpose of enhancing the normal-incidence efficiency in the extreme-ultraviolet region. The efficiency, measured at an angle of incidence of 6 degrees with synchrotron radiation, had a maximum value of 7.2% at a wavelength of 38 nm and was a factor of 3 higher than the efficiency of the gold-coated Skylab grating. The measured efficiency of the Sc-Si grating was in good agreement with the efficiency calculated by use of the modified integral method.     

Fabrication of three-dimensional polymer quadratic nonlinear grating structures by layer-by-layer direct laser writing technique

We demonstrate the fabrication of a three-dimensional (3D) polymer quadratic nonlinear (χ(2)) grating structure. By performing layer-by-layer direct laser writing (DLW) and spin-coating approaches, desired photobleached grating patterns were embedded in the guest-host dispersed-red-1/poly(methylmethacrylate) (DR1/PMMA) active layers of an active-passive alternative multilayer structure through photobleaching of DR1 molecules. Polyvinyl-alcohol and SU8 thin films were deposited between DR1/PMMA layers serving as a passive layer to separate DR1/PMMA active layers. After applying the corona electric field poling to the multilayer structure, nonbleached DR1 molecules in the active layers formed polar distribution, and a 3D χ(2) grating structure was obtained. The χ(2) grating structures at different DR1/PMMA nonlinear layers were mapped by laser scanning second harmonic (SH) microscopy, and no cross talk was observed between SH images obtained from neighboring nonlinear layers. The layer-by-layer DLW technique is favorable to fabricating hierarchical 3D polymer nonlinear structures for optoelectronic applications with flexible structural design.     

Photoluminescence and lasing from deoxyribonucleic acid (DNA) thin films doped with sulforhodamine

Thin solid films of salmon deoxyribonucleic acid (DNA) have been fabricated by treatment with a surfactant and used as host for the laser dye sulforhodamine (SRh). The DNA films have an absorption peak at approximately 260 nm owing to absorption by the nitrogenous aromatic bases. The SRh molecules in the DNA films have absorption and emission peaks at 578 and 602 nm, respectively. The maximum emission was obtained at approximately 1 wt. % SRh in DNA, equivalent to approximately 100 DNA base pairs per SRh molecule. A distributed feedback grating structure was fabricated on a SiO(2)-Si substrate using interference lithography. The grating period of 437 nm was selected, corresponding to second-order emission at the amplified spontaneous emission wavelength of 650 nm. Lasing was obtained by pumping with a doubled Nd:YAG laser at 532 nm. The lasing threshold was 3 microJ, corresponding to approximately 30 microJ/cm(2) or 4 kW/cm(2). The emission linewidth decreased from approximately 30 nm in the amplified spontaneous emission mode to <0.4 nm (instrument limited) in the lasing mode. The slope efficiency of the lasing was approximately 1.2%.     

Holographic sensor for water in solvents

The diffraction color of a gelatin holographic diffraction grating changed as a function of the water activity when immersed in a "wet" hydrophobic liquid. Quantification of the absorption maximum of the diffracted light showed that it was related, after calibration, to either the water content or the water activity of the solvent. The holographic diffraction grating measured water contents of hydrocarbon solvents at sensitivities comparable to that of the Karl Fischer coulometric titrator and over a wide range of water contents. A grating immersed in xylene revealed a visible color change when the water content was increased from 47 to 120 ppm. Conversely, the holographic grating responded to ethanol in water in the range 0-1% (w/w). The inexpensiveness and simplicity of silver halide holographic reflection gratings, combined with their relatively high sensitivity, suggests that these devices might find widespread application as immersible water activity sensors for hydrophobic liquids.     

Grazing-incidence efficiencies in the 28-42-A wavelength region of replicas of the Skylab 3600-line/mm concave grating with multilayer and gold coatings

The efficiencies of replicas of the Skylab 3600-line/mm concave grating with multilayer and gold coatings were measured by using synchrotron radiation at an angle of incidence of 79 degrees and in the 28-42-A wavelength range. The blaze angle of the grating facets that faced the incident radiation was 3.1 degrees , and the average angle of the opposite facets was 6 degrees . For the gold grating, the -1 outside order had the highest efficiency of any diffracted order (excluding the zero order) over the entire wavelength range. Calculations of the grating efficiency indicated that the high efficiency in the -1 order resulted from the rather small angle (6 degrees ) of the facets opposite the incident radiation. For the multilayer grating, the efficiency in the on-blaze +2 inside order was enhanced in the 30-34-A wavelength region as a result of the high reflectance of the multilayer coating. The maximum efficiency in the +2 order occurred at the wavelength (32 A) corresponding to the peak of the reflectance of the multilayer coating on the facets facing the incident radiation. These results further demonstrate that a multilayer coating can be used to enhance the efficiency, in a selected wavelength range and in the on-blaze order, of a grating operating at a small grazing angle (11 degrees ).     

Analysis of interaction between two SAW modes in Pt grating on langasite cut (0°, 138.5°, 26.6°)

The numerical technique based on a previously developed rational approximation of harmonic admittance of a periodic grating was applied to analysis of SAW behavior in platinum grating on langasite cut with Euler angles (0°, 138.5°, 26.6°). The approximation is able to take into account interaction between surface and bulk waves or between two SAW modes. SAW dispersion was calculated at different values of electrode thickness varying between 1% and 4% of wavelength. It was found that with increasing Pt thickness, SAW behavior in the grating is strongly affected by interaction between two SAW modes propagating in the same orientation. An additional stopband, which results from this interaction, occurs at certain detuning from synchronous reflection condition and can cause spurious resonances of the admittance function. Interaction between two SAW modes is also responsible for anomalously slow growth of reflectivity with increasing platinum thickness.     

Design of a high-efficiency seven-port beam splitter using a dual duty cycle grating structure

In this paper, we propose a compact seven-port beam splitter which is constructed using only a single-layer high-density grating with a dual duty cycle structure. The properties of this grating are investigated by a simplified modal method. The diffraction efficiency can be achieved around 10% more than conventional Dammann gratings while the uniformity can still be maintained at less than 1%. The effect of deviations from the design parameters on the performance of the grating is also presented.     

Thermal Properties Measurement of Micro-electromechanical System Sensors by Digital Moire Method

Abstract:  The thermal properties of a micro-electromechanical system sensor were analysed by a novel digital moiré method. A double-layer micro-cantilever sensor (60  μ m long, 10  μ m width and 2  μ m thick) was prepared by focused ion beam milling. A grating with frequency of 5000 lines mm⁻¹ was etched on the cantilever. The sensor was placed into a scanning electron microscope system with a high temperature device. The observation and recording of the thermal deformation of the grating were realised in real-time as the temperature rose from room temperature to 300 °C at intervals of 50 °C. Digital moiré was generated by interference of the deformed grating and a digital virtual grating. The thermal properties including strain distribution of the sensor and the linear expansion coefficient of polysilicon were accurately measured by the phase-shifted moiré patterns.     

Polarization-independent wideband mixed metal dielectric reflective gratings

A polarization-independent wideband mixed metal dielectric grating with high efficiency of the -1st order is analyzed and designed in Littrow mounting. The mixed metal dielectric grating consists of a rectangular-groove transmission dielectric grating on the top layer and a highly reflective mirror composed of a connecting layer and a metal film. Simplified modal analysis is carried out, and it shows that when the phase difference accumulated by the two propagating modes is odd multiples of π/2, the diffraction efficiency of the -1st order will be high. Selecting grating depth and duty cycle for satisfying the phase difference condition for both TE (electric field parallel to grooves) and TM (magnetic field parallel to grooves) polarizations, a polarization-independent high-efficiency grating can be designed. Using rigorous coupled-wave analysis and a simulated annealing algorithm, geometric parameters of the reflective grating are exactly obtained. The optimized grating for operation around a wavelength of 800 nm exhibits diffraction efficiencies higher than 90% for both TE and TM polarizations over a 120 nm wavelength bandwidth. The simplified modal analysis can be applied in other types of reflective gratings if the top layer is a dielectric transmission grating.     

Design, fabrication, and performance of preferential-order volume grating waveguide couplers

Both a nonfocusing and a focusing preferential-order volume grating waveguide coupler were designed, fabricated, and tested. These volume grating couplers are designed to outcouple a 633-nm wave guided in an adjacent polyimide waveguide film. The slanted-fringe volume gratings are recorded holographically by the interference of two 364-nm waves. The dynamics of the holographic photopolymer HRF600X001 are investigated in relation to the interaction with the guided wave. The fabricated couplers exhibited a preferential coupling of 98%, a spatial coupling rate of 3.6 mm(-1), and a coupling efficiency of 95%. The focusing grating coupler focused the outcoupled beam to a focal line with a full width at half-maximum of 10.49 mum located 25 mm above the grating.     

Development of multilayer laminar-type diffraction gratings to achieve high diffraction efficiencies in the 1-8 keV energy region

W/C and Co/SiO(2) multilayer gratings have been fabricated by depositing a multilayer coating on the surface of laminar-type holographic master gratings. The diffraction efficiency was measured by reflectometers in the energy region of 0.6-8.0 keV at synchrotron radiation facilities as well as with an x-ray diffractometer at 8.05 keV. The Co/SiO(2) and W/C multilayer gratings showed peak diffraction efficiencies of 0.47 and 0.38 at 6.0 and 8.0 keV, respectively. To our knowledge, the peak efficiency of the W/C multilayer grating is the highest measured with hard x rays. The diffraction efficiency of the Co/SiO(2) multilayer gratings was higher than that of the W/C multilayer grating in the energy range of 2.5-6.0 keV. However, it decreased significantly in the energy above the K absorption edge of Co (7.71 keV). For the Co/SiO(2) multilayer grating, the measured diffraction efficiencies agreed with the calculated curves assuming a rms roughness of approximately 1 nm.