高性能MEMS电容压力传感器的设计及其热分析

为了进一步提高接触式电容压力传感器的性能,设计了一种高性能双凹槽结构的接触式电容压力传感器,并对该传感器在高温环境中的总体性能进行了分析。推导了热传导和热弹性理论,并对影响传感器热分析的各个因素与温度的依赖关系进行了描述;在整个分析过程中,使用ANSYS软件并结合有限元方法对全尺寸传感器的热效应进行模拟。结果表明,在接触工作状态双凹槽接触式电容压力传感器的温度对输入(压力)-输出(电容)特性的影响是线性的,且线性范围内初始压力随温度的升高而降低;当温度载荷为550 K时,双凹槽结构的灵敏度为1.21×10-6pF/Pa,比传统单凹槽的0.8×10-6pF/Pa高出50%,表明该压力传感器有着非常优异的高温特性。     

新型运载火箭中电容式液位传感器接口专用集成电路

为了提高新型航天运载火箭中电容式液位传感器系统的电容检测性能,设计了一款适用于航天运载火箭中电容式液位传感器的接口专用集成电路(Application Specitic Integrated Circuit,ASIC)芯片。首先,完成了整体电路的系统级设计,实现了对电容式液位传感器输出电容的线性检测,将传感器输出电容量转化为与之呈线性关系的电压量输出。然后,对接口ASIC芯片的线性度、噪声特性和温度环境适应性进行了理论分析与研究。最后,采用0.5μm CMOS工艺完成接口ASIC的流片,并进行了芯片的性能测试。实际测试结果显示,芯片电容检测非线性为0.005%,输出噪声密度3.7aF/Hz~(1/2)(待测电容40pF),电容测量稳定性7.4×10-5 pF(参考电容40pF,待测电容40pF,1σ,1h),输出零位温度系数4.5μV/℃。测试结果证明,该接口ASIC的电容检测性能已经达到国外最高性能的电容式液位传感器液位测量芯片的水准,可以广泛应用到多种电容式检测传感器中。     

Sensor configuration and test for fault diagnoses of subway braking system based on signed digraph method

Fault diagnosis of various systems on rolling stock has drawn the attention of many researchers. However, obtaining an optimized sensor set of these systems, which is a prerequisite for fault diagnosis, remains a major challenge. Available literature suggests that the configuration of sensors in these systems is presently dependent on the knowledge and engineering experiences of designers, which may lead to insufficient or redundant development of various sensors. In this paper, the optimization of sensor sets is addressed by using the signed digraph （SDG） method. The method is modified for use in braking systems by the introduction of an effect-function method to replace the traditional quantitative methods. Two criteria are adopted to evaluate the capability of the sensor sets, namely, observability and resolution. The sensors configuration method of braking system is proposed. It consists of generating bipartite graphs from SDG models and then solving the set cover problem using a greedy algorithm. To demonstrate the improvement, the sensor configuration of the HP2008 braking system is investigated and fault diagnosis on a test bench is performed. The test results show that SDG algorithm can improve single-fault resolution from 6 faults to 10 faults, and with additional four brake cylinder pressure （BCP） sensors it can cover up to 67 double faults which were not considered by traditional fault diagnosis system. SDG methods are suitable for reducing redundant sensors and that the sensor sets thereby obtained are capable of detecting typical faults, such as the failure of a release valve. This study investigates the formal extension of the SDG method to the sensor configuration of braking system, as well as the adaptation supported by the effect-function method.     

发动机压力传感器技术方案应用研究

随着排放法规的升级,发动机上进气、排气、冷却、燃油等相关系统的压力参数需要被精准的采集和控制,导致越来越多的传感器被应用在发动机上,这些传感器的故障情况将会直接影响到发动机的可靠性.针对不同的技术方案研究表明:轨压传感器测量范围一般在1600bar以上,只能用玻璃微熔或薄膜溅射技术;机油压力和冷却水压力传感器测量范围是...     

基于海绵介质层的电容式三维力触觉传感器

为了提高电容式触觉传感器在较大量程范围内的灵敏度,应用PDMS(聚二甲基硅氧烷)海绵微结构作为介质层,设计了电容式三维力触觉传感器。利用有限元软件对海绵介质层和普通薄膜介质层进行性能对比,同等压力作用下,海绵微结构触觉传感器拥有更高的灵敏度。对传感器单元进行有限元分析,得到传感器在三维力作用下的形变情况和电容变化趋势。制备了传感器单元,并进行三维力加载实验,采集和分析实验数据,计算出了传感器的灵敏度。样机实测结果表明,该传感器可以实现在0~10 N法向力和0~4 N切向力较大的量程范围内的检测,且法向和切向的平均灵敏度都较高,分别可以达到0.065 pF/N、0.071 pF/N和0.076 pF/N。     

Lamb波压差式微流量传感器

为提高微流体系统中的流量检测灵敏度,增大动态检测范围,实现温度补偿,提出了一种基于Lamb波的压差式微流量传感系统.该传感系统主要由两个Lamb波压力传感器和微通道组成,它利用Lamb波薄膜内应力的敏感特性,以频率计量的方式间接测量微通道两端的压力差;并采用双Lamb波压力传感器构成差动式测量结构进行温度补偿.对长20 mm,宽1 mm,高50 μm的微通道进行了流量测试实验,结果表明:在流量测试范围内,微通道两端的频率差与流量基本呈线性变化,其线性相关系数为0.999 9;在微流量传感器未进行优化的前提下,最小检测量为0.627 μL/s.     

基于51单片机为核心的智能压力传感器

在现代科技领域中,传感器技术的地位越来越重要.本文主要论述了51单片机在智能压力传感器设计中的应用,以及对其发展的影响.研究的重点是智能压力传感器本身的稳定性,结合51单片机和压力传感器,对压力感器本身抗干扰能力有了改善的作用,也对压力传感器的智能化和标准化有了促进作用.     

High resolution gas volume change sensor

Changes of gas quantity in a system can be measured either by measuring pressure changes or by measuring volume changes. As sensitive pressure sensors are readily available, pressure change is the commonly used technique. In many physiologic systems, however, buildup of pressure influences the gas exchange mechanisms, thus changing the gas quantity change rate. If one wants to study the gas flow in or out of a biological gas pocket, measurements need to be done at constant pressure. In this article we present a highly sensitive sensor for quantitative measurements of gas volume change at constant pressure. The sensor is based on optical detection of the movement of a droplet of fluid enclosed in a capillary. The device is easy to use and delivers gas volume data at a rate of more than 15 measurements/s and a resolution better than 0.06 microl. At the onset of a gas quantity change the sensor shows a small pressure artifact of less than 15 Pa, and at constant change rates the pressure artifact is smaller than 10 Pa or 0.01% of ambient pressure.     

硅光微电机械系统:光学元件与传感器

1 Introduction Using Micro-Electro-Mechanical System(MEMS)technology, many devices and systems can be miniaturized. Micro pressure sensors and micro accelerometers(air-bag sensor) are examples that are widely commercialized. In the case of optical system,some optical components need to be combined to implement the function desired for optical processing.     

Application of Fabry-Pérot and fiber Bragg grating pressure sensors to simultaneous measurement of liquid level and specific gravity

An approach is proposed for obtaining simultaneous measurements of the level and specific gravity of a liquid using a dual-pressure-sensor system comprising a fiber Bragg grating (FBG) pressure sensor and a Fabry-Pérot (FP) pressure sensor. In the FBG sensor, the pressure is derived from the FBG wavelength shift induced when the sensor is immersed in the liquid. Meanwhile, in the FP sensor, the pressure is calculated from the change in cavity length which takes place when the sensor is immersed. The advantageous concept of the dual-pressure-sensor system is atmospheric pressure compensation. The experimental results show that the FBG and FP pressure sensors have sensitivities of 0.1495 nm/kPa and 0.1569 μm/kPa, respectively. Analytical formulae are derived for the level and specific gravity of the liquid in terms of the FBG wavelength shift, the change in cavity length, and the vertical separation distance between the two sensors.     

真空微电子传感器研究及进展

介绍真空微电子传感器的研究和发展概况,着重叙述了真空微电子压力传感器和真空微电子磁传感器的发展,并就其研究、发展和应用前景阐述了个人的观点。     

光纤光栅压力传感器的研究进展与趋势

由于在灵敏度、绝缘性、抗腐蚀和分布式测量等方面具有优势,光纤光栅压力传感器在能源化工、航空航天和土木工程等领域中逐渐地受到人们关注,并成为研究热点。通过综述近年来迅速发展的光纤光栅压力传感器的研究进展,介绍了利用光纤布拉格光栅(FBG)轴向应变构建压力传感器的工作原理、结构和特点,并按照光纤光栅安装方式对此类压力传感器进行了分类,同时概述了光纤光栅横向压力传感的实验研究,并对光纤光栅压力传感器的发展趋势进行了述评。     

基于PXI平台的传感器自动测试系统

文章以压力传感器为例,描述了基于PXI平台的传感器自动测试系统,利用PXI高速多路可复用开关模块、高精度万用表模块以及数据采集模块,结合自行设计的程控电压源及电流源,实现了对大批量压力传感器、变送器的合格性测试及特性分析。     

Evaluation of high temperature pressure sensors

It is becoming more important to measure the pressure in high temperature environments in many industrial fields. However, there is no appropriate evaluation system and compensation method for high temperature pressure sensors since most pressure standards have been established at room temperature. In order to evaluate the high temperature pressure sensors used in harsh environments, such as high temperatures above 250 °C, a specialized system has been constructed and evaluated in this study. The pressure standard established at room temperature is connected to a high temperature pressure sensor through a chiller. The sensor can be evaluated in conditions of changing standard pressures at constant temperatures and of changing temperatures at constant pressures. According to the evaluation conditions, two compensation methods are proposed to eliminate deviation due to sensitivity changes and nonlinear behaviors except thermal hysteresis.     

膜片式微型F-P腔光纤压力传感器

为满足工业和生物医学领域对微型化传感器的需求,实验研究了基于Fabry-Perot(F-P)干涉仪原理的膜片式微型光纤压力传感器的制作工艺.在单模光纤端面上直接熔接外径约175 μm的毛细石英管,在石英管的另一端制作敏感膜片,从而使光纤端面与膜片内表面之间形成F-P干涉腔.采用电弧熔接、切割、腐蚀膜片等方法制作了石英膜片式压力传感器,该传感器在0～3.1 MPa内F-P腔的腔长变化灵敏度为41.09 nm/MPa,压强测量分辨率为681 Pa,并具有很小的温度敏感系数.在30～140 ℃,温度交差敏感＜1.07 kPa/℃.为了克服石英膜片减薄困难的缺点,选用聚合物材料(PSQ)作为压力敏感膜片制作了F-P传感器.室温下在0.1～2.1 MPa,PSQ膜片的F-P腔长变化灵敏度达到1 886.85 nm/MPa,压强测量分辨率达到53 Pa,十分接近人类或其他动物的体内压强测量水平.     

压阻传感器信号调理的解决方案

近几年来，压阻传感器（如硅压力传感器）得到了更为广泛的应用，到目前为止，尚我论文全面地介绍这类应用的解决方案，就目前普遍使用的压阻传感器，给出了一系列全面的传感器信号调理的解决方案，这些设计方案分别基于运算放大器，仪表放大器以及集成一体化的传感器信号调理器等集成电路，分别满足不同档次的产品要求。     

在工业应用中日趋重要的微传感器

本文将以几个实例阐明微传感器在近年来的发展以及在工业上的典型应用。文中涉及一个3mbar的微压传感器，一个数字化可编程、有校正功能的1bar集成压力传感器，一个利用热传导原理的微机械气体传感器和一个可测压26GHz的功率传感器。最后这二例充分说明了利用再工程（re-engineening)技术从传统传感器产生的新型传感器的显而易见的优越性。     

Performance evaluation of piezoelectric and differential pressure sensor for vortex flowmeters

Piezoelectric and transient differential pressure sensors are two among the most widely employed sensors for vortex flowmeter application. The present study evaluates the performance of these two techniques under fully developed and disturbed flow conditions. Firstly, the location of the transient differential pressure sensor is optimized to obtain high amplitude signals and good linearity in Strouhal number. Empirical mode decomposition method in combination with autocorrelation decay is successfully employed at high Reynolds numbers to identify the vortex shedding frequency in presence of hydrodynamic noise. The performance of the differential pressure sensor deteriorates significantly under disturbed flow conditions at low Reynolds number due to the presence of low frequency components. This deterioration in the signal quality limits the lower operating range of the flowmeter with differential pressure sensor. The output signals of the piezoelectric sensor and differential pressure sensor under no flow condition are compared to obtain the background noise due to piping vibrations and electrical interferences. These results will help a designer to suggest robust signal processing algorithms for vortex frequency detection.     

Dynamic calibration method of high-pressure transducer based on quasi-δ function excitation source

This paper presents a dynamic calibration method of frequency response characteristics of high-pressure sensor. In this method, the pressure sensor was under high hydrostatic pressure in advance, then use the bullet impacted Hopkinson bar and generated quasi-δ function signal with small amplitude, which excited the sensor being calibrated. The excitation signal of sensor are collected, at the same time, output signal of the sensor are collected, and at last, the collected data are processed according to calibration principle and calculated the frequency response of the sensor being calibrated. This calibration method realized dynamic calibration of high pressure sensor under actual working pressure; it can realize the low limit frequency of the calibrated frequency range strictly reaches to zero frequency. This method can also be applied to acceleration sensor, transient high-temperature sensor, and other types of sensors. In this paper, the calibration principle of quasi-δ function dynamic calibration method is introduced. The relationship among pulse width of excitation signal, frequency range that can be calibrated and calibration precision is analyzed. The experimental results are also shown.     

基于加速应力法的压力传感器泄漏检测

通过加速泄漏试验,对使用条件下压力传感器基准腔O型密封圈的气密性能进行检验,识别出密封结构存在潜在泄漏故障的产品。通过稳定产品温度、固定观测姿态、控制检测时间等方法改进了测量系统,以精确地检测泄漏结果。在既保证加速效果,又不造成产品损伤的前提下,对压力传感器施加温度、压力激发应力,经过多组温度和压力参数组合的加速泄漏试验,将试验后压力传感器的泄漏量与实际工作中的泄漏量相比较,计算得到加速泄漏试验的加速倍率,确定了压力传感器加速泄漏试验合格判据。通过试验比较,最终选定高温70℃、加压0.3 MPa、保持48 h的试验方案。加速泄漏试验方法可作为压力传感器的寿命试验方法,验证产品的使用期限。