自由电子激光器用极紫外波段平面变栅距光栅

针对极紫外波段自由电子激光器(大连相干光源,DCLS)对高分辨能力平面变栅距光栅的需求,基于光程差以及像差原理构建了极紫外平面变栅距全息光栅。采用改进的局部优化算法给出了平面变栅距光栅的记录参数,利用全息曝光技术在硅光栅基底上制作了中心刻线密度为600gr/mm、占宽比为0.46、槽深为550nm、有效刻划面积为30mm×30mm的极紫外平面变栅距全息光栅。采用Littrow衍射法测量了平面变栅距光栅的刻线密度,并基于像差理论分析了平面变栅距光栅的理论分辨能力。结果表明:制作的600gr/mm平面变栅距光栅在有效面积内的刻线密度误差小于0.175gr/mm,在极紫外波段(50~150nm)的分辨能力大于12 000,满足自由电子激光器的设计要求。提出的设计及制作方法为制作高质量平面变栅距光栅提供了理论及技术保障。     

基于LED阵列光源的太阳模拟器

针对目前LED太阳模拟器辐照度低、光谱匹配性差等不足,提出一种由LED阵列光源,菲涅尔透镜、光学积分器、准直物镜组成的LED太阳模拟器。首先根据多光谱拟合理论,在400~1 100nm优选15种不同波段的LED光源,计算出光源所需功率,实现太阳光谱的精确匹配。其次优化设计了菲涅尔透镜、光学积分器以及准直物镜,校正了太阳模拟器的像差,提高了太阳模拟器的能量利用效率以及辐照均匀性,并利用LightTools软件对所设计的光学系统进行仿真分析。最后搭建了光学系统实验装置,测试结果表明:100mm×100mm内的辐照度达到1 376.3 W/m~2;拟合的太阳光谱匹配度达到AM1.5条件中的A级,辐照不均匀度为±1.73%,辐照不稳定度为±0.82%,综合性能指标达到太阳模拟器中的3A级水平。     

窄光谱带宽X射线刻蚀多层膜光栅

结合X射线荧光分析和同步辐射单色器对窄光谱带宽多层膜的需求,开展了窄光谱带宽刻蚀多层膜光栅的理论和实验研究.用平均密度法从理论上阐明将多层膜刻蚀成不同刻蚀比的多层膜光栅后,光谱分辨率将得到提高.用磁控溅射方法制备了W/C多层膜,并用常规的光刻工艺对其进行刻蚀,得到了刻蚀后的多层膜光栅.掠入射X射线衍射测量表明,刻蚀后多层膜的衍射峰位置向小角方向移动,多层膜光栅没有改变剩余多层膜的结构,而且带宽减小,光谱分辨率得到提高,说明实验采用的工艺方法和工艺路线可以满足制作窄光谱带宽刻蚀多层膜光栅的要求,为今后进一步研究实用化元件打下了基础.     

Spectroscopic comparison between 1200 grooves/mm ruled and holographic gratings of a flat-field spectrometer and its absolute sensitivity calibration using bremsstrahlung continuum

A flat-field extreme ultraviolet (EUV) spectrometer with a varied line spacing groove grating (1200 grooves/mm at grating center) has been developed to study the emission spectra from highly ionized medium Z impurities in large helical device (LHD). It covers a wavelength range of 50-500 A using a mechanically ruled grating, which was later replaced by a newly developed laminar-type holographic grating for comparative studies. Differences in spectral resolution, intensities of higher order spectra, and sensitivities of the spectrometer were studied between the two gratings by observing the emission spectra of LHD plasmas. Although the achieved resolution was alike between them, i.e., deltalambda approximately 0.24 A at 200 A, the holographic grating was much superior in suppressing the higher order light than the ruled grating. The relative sensitivity between the two gratings was evaluated using continuum radiation from LHD plasmas. As a result, it was found that the holographic grating has a flat response in the full wavelength range, but the sensitivity of the ruled grating drops sharply below 200 A. A new technique for the absolute calibration of the EUV holographic grating spectrometer was tried by combining the continuum radiation with a branching ratio of C IV lines (3p-3s: 5800 A/3p-2s: 312 A), and an accurate absolute sensitivity has been successfully obtained.     

Determination of Zeeman Shifts of Spectral Structures in a Nonuniform Magnetic Field

The variation in the shift of spectral structures due to the Zeeman effect in a spatially nonuniform magnetic field has been studied. It has been found that this shift can be varied by changing the width and shape of spectral structures, their forms, and methods and conditions of recording. A method of accounting for magnetic-field nonuniformity for optically thin and thick media has been proposed.     

用于1 m Seya-Namioka单色仪的 1 200 lp/mm Laminar光栅

针对国家同步辐射实验室燃烧与火焰实验站中1 m Seya-Namioka 单色仪对光栅的需求,采用全息离子束刻蚀工艺制作了1 200 lp/mm Laminar光栅。首先,通过光刻胶灰化技术调节光刻胶光栅掩模占空比,在理论设计的误差允许范围内,对此光栅掩模进行扫描离子束刻蚀;然后,将光栅图形转移到光栅基底中去除残余光刻胶;最后,采用离子束溅射法镀制厚约40 nm的金反射膜,采用热蒸发法镀制厚约60 nm的铝反射膜。用原子力显微镜分析光栅微结构,结果显示光栅槽深为40 nm,占空比为0.45。同步辐射在线波长扫描测试结果表明,镀铝光栅效率明显高于镀金光栅,获得的实验结果与理论计算结果基本符合。镀金光栅已替代进口光栅在线使用3 年,其寿命大大超过复制光栅,基本满足了燃烧实验站的实验研究需求。     

Development of two-channel prototype ITER vacuum ultraviolet spectrometer with back-illuminated charge-coupled device and microchannel plate detectors

A vacuum ultraviolet (VUV) spectrometer of a five-channel spectral system is designed for ITER main plasma impurity measurement. To develop and verify the system design, a two-channel prototype system is fabricated with No. 3 (14.4-31.8 nm) and No. 4 (29.0-60.0 nm) among the five channels. The optical system consists of a collimating mirror to collect the light from source to slit, two holographic diffraction gratings with toroidal geometry, and two different electronic detectors. For the test of the prototype system, a hollow cathode lamp is used as a light source. To find the appropriate detector for ITER VUV system, two kinds of detectors of the back-illuminated charge-coupled device and the microchannel plate electron multiplier are tested, and their performance has been investigated.     

三维物体全视差全息体视图的快速计算

针对传统全息技术对三维数据源要求高、计算量大以及实现速度慢等问题,提出了一种三维物体全视差全息体视图的快速计算方法。该方法对全息面和再现面分别进行空间分割和频谱采样,通过迭代傅里叶变换算法计算多个基元全息图,叠加构成全息图单元。由摄像机获取三维物体不同角度的二维视差图像,基于人眼双目视差立体视觉原理,构建视差图像与全息图单元的对应关系。最后,利用全视差图像调制全息图单元中对应衍射方向的基元全息图,快速合成三维物体全视差全息体视图。基于液晶空间光调制器构建的光学系统对全息体视图进行了再现实验。结果表明,与传统全息图计算方法相比,本文方法容易获取数据源,计算量较小,能够快速计算全息体视图,实现三维物体不同视角图像的再现。     

聚合物分散液晶（PDLC）光开关研究

聚合物分散液晶材料具有电控开关特性 ,利用材料的这一特性制成聚合物分散液晶光栅则具有衍射特性的电场可调性。理论和实验表明 ,采用一定的材料配方和工艺 ,可以获得理想的聚合物分散液晶全息光栅 ,若干个不同频率的光栅叠加可以制成实现多点光切换的光开关     

面向可见光波段的非周期悬空GaN薄膜光栅

基于严格耦合波理论,提出了一种在可见光波段能调控入射光相位的非周期悬空氮化镓(GaN)薄膜光栅。首先,采用有限差分时域(FDTD)方法,通过改变光栅的周期、占空比等参数仿真计算非周期悬空GaN薄膜光栅的光响应。然后,采用双面加工工艺和氮化物背后减薄技术在硅基GaN晶圆上制备非周期悬空GaN薄膜光栅,控制入射光束的相移。最后,通过角分辨微反射谱实验和光致发光测量实验表征了该薄膜光栅的光学性能。角分辨微反射谱实验结果显示非周期悬空GaN薄膜光栅的光学性能与FDTD的理论分析一致;光致发光测量实验显示其光致发光(PL)强度比硅衬底GaN光栅大大增强,峰值从364.3nm转移到378.7nm。另外,在可见光波段内,该悬空非周期GaN光栅有较大的入射角容忍度,为-25°~25°。得到的结果表明,研制的悬空非周期GaN光栅有助于提高光提取效率。     

高光谱短波红外地物光谱仪的光机设计

基于平场凹面光栅分光和线列阵探测器探测的最新设计方案,进行了短波红外波段地物光谱仪的光机设计。仪器采用光纤导光,两个独立单元分别探测,最大限度地简化了光学及结构设计。更换前置光学系统改变探测视场, 视场内的辐射经过前置光学系统均匀地照亮入射光纤,保证了两探测单元的视场相同。根据入射光通量、光谱分辨率和狭缝的关系确定入射狭缝的大小,仪器光谱覆盖900~2 400 nm,光谱分辨率优于12 nm,适合野外短波红外波段的探测。     

利用激光全息技术校正大口径光学成像系统像差

基于光学全息原理,分析了激光全息技术校正光学成像系统像差的机理和方法,建立了全息记录实验系统,用于校正口径500 mm、低质量球面反射镜光学系统对有限远物体成像时的像差。采用原光路再现的方法,通过比较像差校正前后的干涉图样和成像结果,验证了该校正方法的可行性。实验结果表明,校正后该系统剩余波像差约为λ/8。     

大面积软X射线自支撑金透射光栅的研制

针对等离子体诊断及空间环境探测等领域对软X射线透射光栅的需要,采用全息光刻和微电镀技术制作了自支撑软X射线金透射光栅.在基底与光刻胶之间增加减反膜层以降低高反射基底引起的驻波效应对掩模槽形的影响,使用全息光刻技术获得了侧壁陡直的光栅掩模.然后,在掩模顶部镀保护层并使用反应离子刻蚀获得电镀掩模,通过改变保护层厚度来调节电...     

高效平面全息衍射光栅的获取方法

从全息衍射光栅的制作原理出发,介绍了全息光栅的主要制作方法,并与刻划光栅对比分析了全息衍射光栅的诸多优点。通过利用光栅设计的耦合波理论对全息衍射光栅槽型、槽深及槽间距等进行了优化设计,同时利用离子束刻蚀技术获得了高效率全息光栅。文中全面分析了制作高效率平面全息光栅的各项关键技术。     

大孔径面视场PG成像光谱仪的光学设计

针对成像光谱仪通过狭缝进行线视场成像时存在的孔径较小、光学透过率较低等问题,研究了一种基于棱镜-光栅型分光结构的大孔径面视场成像光谱仪。该棱镜-光栅成像光谱仪采用表面浮雕型透射光栅,极大地降低了光栅的制作难度与成本。大孔径面视场的成像光谱仪相较于线视场成像光谱仪有较高光学效率和时间效率。但是面视场成像光谱仪的色畸变与谱线弯曲较难校正。本文将前端望远系统与分光系统进行一体化设计,满足远心光路匹配和孔径匹配,较好地校正了面视场光谱成像系统中的谱线弯曲和色畸变。并且通过加入非球面反射镜及校正镜很好的校正了由于大孔径面视场所引入的非对称性离轴像差。结果表明,设计的大孔径面视场PG成像光谱仪光谱波段范围400~1 000nm,光学调制传递函数达到0.65以上,光谱分辨率达2.5nm,全谱段不同视场的谱线弯曲小于5μm,色畸变小于8μm。     

Effect of temperature on properties of polarization holographic gratings formed in liquid crystal composites

The dependence of the diffraction efficiency of polarization holographic gratings on the temperature of their formation is presented. The temperature range corresponding to the maximum diffraction efficiency of such gratings is determined. The possibility of thermo-optical switching of recorded gratings is demonstrated.     

Advanced experimental applications for x-ray transmission gratings spectroscopy using a novel grating fabrication method

A novel fabrication method for soft x-ray transmission grating and other optical elements is presented. The method uses focused-ion-beam technology to fabricate high-quality free standing grating bars on transmission electron microscopy grids. High quality transmission gratings are obtained with superb accuracy and versatility. Using these gratings and back-illuminated CCD camera, absolutely calibrated x-ray spectra can be acquired for soft x-ray source diagnostics in the 100-3000 eV spectral range. Double grating combinations of identical or different parameters are easily fabricated, allowing advanced one-shot application of transmission grating spectroscopy. These applications include spectroscopy with different spectral resolutions, bandwidths, dynamic ranges, and may serve for identification of high-order contribution, and spectral calibrations of various x-ray optical elements.     

变栅距衍射光栅的原理及应用

变栅距衍射光栅(VLS)在像差校正等方面具有突出优点,采用不同的栅距变化规律的变栅距光栅具有不同的光谱特性,因而在众多的高技术领域获得了广泛应用.本文从VLS的像差校正原理出发,较全面地阐述了VLS在真空紫外和软X射线、高分辨率光电探测器、表面干涉计量以及光纤通讯等领域的应用,并针对其技术特点指出了它的发展趋势.     

零差移频式干涉图形相位锁定系统的超精密控制

利用全息曝光法制造大口径全息平面光栅时,常引入零差移频式干涉图形相位锁定系统来提高全息曝光质量。本文针对直接影响最终干涉曝光精度的系统控制精度开展研究。首先,介绍了新型的零差移频式干涉图形锁定系统的原理和结构,在系统理论建模及模型辨识的基础上,针对非线性系统模型进行了高阶线性化拟合,并结合系统振动测试实验结果,设计了系统控制器。然后,对设计的控制器进行了实际控制调试,实现了系统的超精密控制。最后,针对系统控制误差纹波,采用频域分析方法揭示了影响系统控制精度的主要因素,提出了未来提升系统控制精度的方法。测试结果显示:系统相位锁定控制精度可达±0.046 1rad(3σ)且以高频误差纹波形式呈现。分析了高频误差纹波的成因,指出受系统噪声、延迟、控制器参数等因素限制,控制器很难完全抑制频段跨度大而连续的高频微振动引起的干涉图形相位漂移。     

基于反射型全息光栅的温度响应特性研究

针对全息材料的热膨胀,研究了温度变化时,全息光栅条纹结构的变化情况并对多块不同制备条件下记录的反射型全息光栅进行20℃到80℃间的温度特性测量。测量结果表明,反射型全息光栅的衍射布拉格峰随温度变化而平移,最大衍射效率也因此改变。此外,反射型全息光栅对温度变化的敏感性与其条纹周期有关。