用交流电化学腐蚀法制备隧道电流型原子力显微镜微悬臂

隧道电流型原子力显微镜是在扫描隧道显微镜基础上发展起来的一种表面分析技术。微悬臂是原子力显微镜的关键元件，它的制备与安装质量直接影响隧道电流型原子力显微镜的实验结果，本文简单介绍隧道电流型原子力显微镜微悬臂的工作原理，讨论对微悬臂的要求，提出一种简单有效的微悬臂制作方法－交流电化学腐蚀法，给出了用交流电化学腐蚀法制备的微悬臂得到的石墨标样表面原子结构图象。     

卧式原子力显微镜的研制

提出原子力显微镜 (AFM)的新设计 ,讨论卧式 AFM的工作原理及其性能特点 ,简要介绍 AFM的控制电路系统及其图像扫描和图像处理软件系统 ,给出 AFM扫描获得的部分样品的图像结果。     

基于光点偏转方法的原子力显微镜的研制

讨论了光点偏转方法检测微小位移的原理，建立了相应的光电检测系统，用于检测微悬臂（针尖）的微位移，并在此基础上研制了纳米级分辨率的原子力显微镜。仪器最大扫描范围可达2×2μm2。文中给出了部分样品的测试结果。     

扫描隧道显微镜和原子力显微镜

介绍了扫描隧道显微镜(STM)和原子力显微镜(AFM)的原理和目前情况。     

扫描隧道显微镜在电化学研究中的改进及应用

扫描隧道显微镜 (STM )在电化学领域有广泛应用。但由于STM是通过感应非常微弱的隧穿电流来反映表面状况 ,而隧穿效应是在一定条件下才能发生的量子效应 ,所以在实际应用中受到不少限制。针对STM在电化学研究中的局限性 ,国内外作了许多改进 ,出现了一些新的装置 ,如电化学扫描隧道显微镜、电化学原子力显微镜、扫描电化学显微镜等。本文介绍STM在电化学研究中的改进及其应用 ,并就发展趋势作简短讨论     

一种高精度原子力显微镜的设计及应用

简述了重庆大学研制的原子力显微镜(AFM)样机的工作原理和应用，重点介绍了其镜体的独特设计。该样机采用扫描隧道显微镜检测微悬臂的起伏，通过四维机械驱动和双压电陶瓷扫描，有效提高了扫描精度，扩大了扫描范围，简单适用的微悬臂使操作大大简化。给出了用该机检测到的具有代表性的4种样品的表面形貌图。     

原子力显微镜探针振动信号检测电路设计

针对基于模拟电路的原子力显微镜探针振动检测系统噪声高,抗干扰能力差,以及基于数字集成电路的检测系统对不同控制系统兼容性差,成本高的缺点,且探针位移小,频率高的特点以及光电信号检测的准确度和精确度都对成像质量有直接影响,文中设计一种高增益、宽频带的基于运算放大器的探针信号运算处理电路,实现对原子力显微镜四象限微弱光电信号的检测、放大、逻辑运算以及滤波功能。实验表明:电路可以对四象限微弱电流信号进行I-V转换,放大增益可以达到40 d B以上,同时逻辑运算电路可检测共振频率为70 k Hz～2 MHz的探针振动信号,涵盖了原子力显微镜的探针振动工作范围。该电路很好地抑制寄生电容的影响,检测系统整体热噪声低于■。     

日本精工SAP400原子力显微镜性能的改进

日本精工公司(SEIKO)生产的原子力显微镜的功能多、性能好,国内已经有近百台的拥有量。它的信号放大、处理主要由锁相放大器完成。但其内部的锁相放大器灵敏度不够高,外加一台高性能、高灵敏度的锁相放大器,可大大提高其性能。用美国斯坦福公司产的SR830锁相放大器对本实验室的日本SEIKO公司SPA400原子力显微镜进行性能改进,可使其性能有很大提高。     

基于原子力显微镜的纳米加工研究

以原子力显微镜(AFM)作为加工工具对单晶硅进行了基于金刚石针尖的纳米加工试验,运用不同的方法对纳米加工区域的特性、材料在不同垂直载荷下的去除机理及切屑形成特征进行了系统的研究和分析,提出了一种在纳米尺度下研究加工机理的新方法。在此基础上,应用有限元法对AFM纳米加工中存在于金刚石针尖和被加工材料之间的接触作用机制进行了计算仿真。     

原子力显微镜传感器的微机械加工技术的研究

分析了现有的AFM力传感器的工艺特点及问题。在此基础上研究用KOH溶液两步法P+自停止腐蚀制作厚度精确可控的单晶硅悬臂梁;以SiO2为掩模,SF6刻蚀硅,用RIE与各向同性湿法化学腐蚀相结合使悬臂梁探针一次成形和用湿法腐蚀锐化探针,针尖半径约50nm.制定了适于批量生产的AFM力传感器加工工艺。     

无线控制式原子力显微镜系统

提出了一种基于嵌入式系统和WiFi无线控制的接触模式原子力显微镜(AFM)系统。该AFM系统直接由迷你型移动电源给扫描与反馈电路及嵌入式系统等供电;嵌入式系统由微型电脑树莓派和微小型ADDA模块构成,通过WiFi与笔记本电脑实现无线数据通信。利用这一方法,成功研发了无线控制式AFM系统,并开展了微纳米样品的扫描成像实验。实验结果表明,该AFM系统的横向分辨率达到纳米量级,纵向分辨率达到0.1nm,最大扫描范围为3.6μm×3.6μm。该系统的显著特点是无需交流市电供电,无需直流高压电源,也无需与计算机之间的线缆连接,可在约100m远处通过无线控制的方式实现AFM的扫描成像。这一新型AFM系统,不仅能够在微纳米技术的常规领域得到应用,而且在野外考察、隔离环境、真空条件、气体氛围环境及星际探测等特殊领域具有广阔的应用前景。     

Lateral force microscope calibration using a modified atomic force microscope cantilever

A proof-of-concept study is presented for a prototype atomic force microscope (AFM) cantilever and associated calibration procedure that provide a path for quantitative friction measurement using a lateral force microscope (LFM). The calibration procedure is based on the method proposed by Feiler et al. [Rev. Sci. Instrum. 71, 2746 (2000)] but allows for calibration and friction measurements to be carried out in situ and with greater precision. The modified AFM cantilever is equipped with lateral lever arms that facilitate the application of normal and lateral forces, comparable to those acting in a typical LFM friction experiment. The technique allows the user to select acceptable precision via a potentially unlimited number of calibration measurements across the full working range of the LFM photodetector. A microfabricated version of the cantilever would be compatible with typical commercial AFM instrumentation and allow for common AFM techniques such as topography imaging and other surface force measurements to be performed.     

Ferrule-top atomic force microscope

Ferrule-top cantilevers are a new generation of all-optical miniaturized devices for utilization in liquids, harsh environments, and small volumes [G. Gruca et al., Meas. Sci. Technol. 21, 094033 (2010)]. They are obtained by carving the end of a ferruled fiber in the form of a mechanical beam. Light coupled from the opposite side of the fiber allows detection of cantilever deflections. In this paper, we demonstrate that ferrule-top cantilevers can be used to develop ultra compact AFMs for contact mode imaging in air and in liquids with sensitivity comparable to that of commercial AFMs. The probes do not require any alignment procedure and are easy to handle, favoring applications also outside research laboratories.     

A novel atomic force microscope operating in liquid for in situ investigation of electrochemical preparation of porous alumina

A novel atomic force microscope (AFM) operating in liquid is described in this article. The specially designed AFM probe involves a tip attached to a cantilever, a tip holder, and a circular Plexiglas window. When the probe dives into the fluid, a circular meniscus is established around the Plexiglas window, preventing the tip from being affected or destroyed by surface tension of the liquid. In this setup, the whole scanning probe and the sample can completely dive into fluid. Meanwhile, the probe tip scans over the sample surface when the instrument works. These advantages enable the instrument to scan comparatively large or heavy samples with a high speed. The highest scan rate is about 30 lines/s or 14 s for a 400 x 400-pixel, 3 x 3 microm image. Using the new AFM, we carry out in-situ investigation of the formation processes of porous alumina during electrochemical anodic oxidation. A lead ring and an aluminum foil serve as cathode and anode, respectively. They are entirely immersed in the bath electrolyte, which is oxalic acid solution. During anodic oxidation, the AFM images of the sample surface are successively acquired without elevating the sample out of the solution. Experiments reveal that electrochemical reactions take place soon after the power supply is switched on, and with the progression of anodization, nanostructures of porous alumina gradually occur on the aluminum substrate, finally yielding ordered arrays of nanopores. As a typical example of applications, the results of this work show that the new AFM is an ideal and powerful tool for in-situ observation and study of materials or samples in aqueous solutions.     

Print your atomic force microscope

Progress in scanning probe microscopy profited from a flourishing multitude of new instrument designs, which lead to novel imaging modes and as a consequence to innovative microscopes. Often these designs were hampered by the restrictions, which conventional milling techniques impose. Modern rapid prototyping techniques, where layer by layer is added to the growing piece either by light driven polymerization or by three-dimensional printing techniques, overcome this constraint, allowing highly concave or even embedded and entangled structures. We have employed such a technique to manufacture an atomic force microscopy (AFM) head, and we compared its performance with a copy milled from aluminum. We tested both AFM heads for single molecule force spectroscopy applications and found little to no difference in the signal-to-noise ratio as well as in the thermal drift. The lower E modulus seems to be compensated by higher damping making this material well suited for low noise and low drift applications. Printing an AFM thus offers unparalleled freedom in the design and the rapid production of application-tailored custom instruments.     

Optimizing AC-mode atomic force microscope imaging

We have operated an atomic force microscope in ambient air with several oscillating cantilever modes to establish the optimal scanning parameters to maximize image resolution and to minimize probe and sample damage. This was done by scanning a surface in air and correlating scan parameters such as oscillation amplitude and damping with image resolution. We also examined the geometry of the probe with a scanning electron microscope, before and after scanning, in order to determine whether the scanning technique had an effect on the geometry of the probe tip. If the probe is oscillated such that it contacts the surface on each oscillation, substantial damage or “wear” to the probe occurs and significant degradation of image quality was observed. In ambient air, the optimal conditions are achieved when the probe penetrates the contamination layer and reverses direction before touching the surface. Under these “near-contact” conditions no probe damage is observed and high-image resolution can be maintained indefinitely.     

多模态动态原子力显微镜系统

动态原子力显微镜(atomic force microscope,AFM)是通过检测悬臂谐振状态的变化来对物体表面形貌进行测量的。通过对谐振状态的三种因素即振幅、相位、频率的检测,动态AFM可以分为三种工作模式,即振幅反馈、相位反馈与频率反馈模式,这三种反馈模式有着不同的扫描特点。基于硅悬臂具有高阶谐振的特性,动态原子力显微镜可以在悬臂工作于高阶谐振状态时对物体进行扫描。综合上述工作模式研制了一套多模态动态AFM,可以在三种反馈模式、不同阶谐振状态下对物体进行扫描测量。利用该系统在不同反馈模式、不同阶谐振状态下进行了扫描测试,结果显示,系统在各模式下具有亚纳米分辨力,其中在相位反馈模式,悬臂二阶谐振时可达到最优灵敏度与分辨力,分别为17.5V/μm和0.29nm,在最优灵敏度与分辨力状态下对光栅试样进行了三维扫描,得到光栅的三维形貌图。     

X轴分离式高速原子力显微镜系统设计

为了提高原子力显微镜(Atomic Force Microscope,AFM)的成像速度,本文提出了一种新的AFM结构设计方案并搭建了相应的实验系统。在该方案中,Y、Z扫描器集成于测头内驱动探针进行慢轴扫描和形貌反馈;X扫描器与测头分离,驱动样品做快轴扫描。X扫描器采用高刚性的独立一维纳米位移台,能够承载尺寸和质量较大的样品高速往复运动而不易发生共振;同时Z扫描器的载荷实现最小化,固有频率得以显著提高。为了避免测头的扫描运动引起检测光束与探针相对位置的偏差,设计了一种随动式光杠杆光路;为了便于装卸探针以及精确调整激光在探针上的反射位置,设计了基于磁力的探针固定装置和相应的光路调节方案。对所搭建的AFM系统的初步测试结果表明,该系统在采用三角波驱动和简单PID控制算法的情况下,可搭载尺寸达数厘米且质量超过10g的较大样品实现13μm×13μm范围50Hz行频的高速成像。     

Environmental chamber for an atomic force microscope

A commercial atomic force microscope (AFM), originally designed for operation in ambient conditions, was placed inside a compact aluminum chamber, which can be pumped down to high vacuum levels or filled with a desired gaseous atmosphere, including humidity, up to normal pressure. The design of this environmental AFM is such that minimal intrusion is made to the original setup, which can be restored easily. The performance inside the environmental chamber is similar to the original version.