共查询到19条相似文献,搜索用时 93 毫秒
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微米级电化学加工关键技术研究 总被引:2,自引:0,他引:2
针对微米级电化学加工的关键技术问题,研制了用于微米级电化学加工的纳秒脉冲电源,并利用电化学腐蚀方法,在自制的电化学加工机床上连续实现了微细工具电极的制作和工件的加工。基于试验提出了微细电化学加工间隙的检测控制方法,提高了加工过程的稳定性,增强了定域蚀除能力。在低浓度酸性电解液中实现了微米级的电化学加工,利用研制的纳秒脉冲电源,根据加工电流将极间间隙控制在5μm左右,加工出了“NUAA”字形,每个字母高90μm,宽60μm,字母线条的宽度只有20μm。 相似文献
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纳秒脉冲微细电化学加工的理论及试验 总被引:2,自引:1,他引:1
根据电化学反应原理,探讨纳秒脉冲电化学加工的特点及其实现微细加工的机理.建立纳秒脉冲微细电化学加工的理论模型,并分析电解液浓度、加工间隙、脉冲参数和加工电压等因素对微细电解加工的影响作用.构建微细电化学加工系统,包括微细加工机床、纳秒脉冲电源、电解液循环系统、运动控制部分和加工检测部分.试验研究了超短脉冲的电压幅值和脉冲宽度对侧面加工间隙的影响,结果表明减小脉冲宽度和降低加工电压可以提高微细电解加工的精度.在自制的微细电化学机床上,实现工具电极和工件微结构的连续加工.将加工间隙控制在5 μm以内,加工出中间有20 μm×30 μm×30 μm棱台的微型腔和30 μm槽宽的十字形孔,分析加工起始点对成形精度的影响,并提出解决方法.试验证明纳秒脉冲微细电解加工可以很好地满足微机电系统(Micro electromechanical system,MEMS)微器件的加工要求. 相似文献
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电解加工在微细制造技术中的应用研究 总被引:3,自引:0,他引:3
电解加工是利用阳极金属电化学溶解原理来去除材料的制造技术,这种微去除方式使得电解具有微细加工的可能,这里着重探讨了高频窄脉冲微细电解加工技术、电液束微细电解加工技术和利用电解制备微细电极的工作原理,技术特点,应用领域和加工精度,并详细的讨论了目前微细电解加工脉冲电源和加工设备的研制和发展。 相似文献
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Fabrication of multiple electrodes and their application for micro-holes array in ECM 总被引:1,自引:1,他引:0
M. H. Wang D. Zhu 《The International Journal of Advanced Manufacturing Technology》2009,41(1-2):42-47
In this study, a two-step composite processing technology combining the EDM process and electrochemical etching is introduced to fabricate a micro-electrodes array. Firstly, rectangular columns measuring 0.2×0.2 mm are machined by the wire-EDM (electrical discharge machining) machine tool, then electrochemical etching is used to erode the microelectrodes array into cylindrical columns. Results show that microelectrodes ranging from hundreds of micrometers to several millimeters could be prepared. Then the machined microelectrodes are used as a cathode tool for electrochemical drilling of micro-hole arrays in electrochemical micromachining (EMM). Furthermore, various parameters affecting the performance of EMM are discussed in detail. Results indicate that the production of EMM improves by using multiple microelectrodes. The pulse current shows strong localization in micro-hole drilling and improves the machining accuracy. 相似文献
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Maskless electrochemical micromachining (EMM) is a prominent and unique surface texturing method to fabricate the arrays of microslots. This article investigates the generation of microslot arrays using maskless EMM method. The developed prototype maskless EMM setup consists of EMM cell, power supply connections, electrode holding devices and constricted vertical cross flow electrolyte system for the fabrication of microslot arrays economically. One textured cathode tool with SU-8 2150 mask is used to produce 22 microslot arrays. Influences of EMM process parameters including voltage, electrolyte concentration, inter electrode gap, flow rate and machining time on the machining performance that is, width overcut, depth and surface roughness (Ra) of microslot arrays are investigated. For lower width overcut, controlled depth, and lower surface roughness, machining with lower voltage, lower electrolyte concentration, lower inter electrode gap, higher flow rate and lower machining time are recommended. From the analysis, it is observed that the best machining conditions including inter electrode gap of 50?μm, applied voltage of 6 V, electrolyte concentration of 20?g L?1, flow rate of 5.35 m3 hr?1 and machining time of 1?min fabricate regular microslot array with mean width overcut of 24.321?μm, mean machining depth of 10.7?μm and mean surface roughness of 0.0101?μm. 相似文献
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高频窄脉冲电流微细电解加工 总被引:6,自引:2,他引:4
微细电解加工是微细加工领域很有发展前景的微细加工技术之一。适合于微细电解加工的装置被研制出来, 它包括机床进给机构、线电极电火花磨削在线制作微细电极装置、短路检测模块、脉冲电源及其他一些辅助装置, 其中,高频窄脉冲电源是微细电解加工最重要的核心技术之一。根据微细电解加工的特点,设计了微细电解加工 MOSFET脉冲电源,该微能脉冲电源能很好地满足微细电解加工的要求。运用该微细电解加工装置进行加工试验, 在低的加工电压和低的钝化电解液浓度条件下,利用高速旋转的微细电极加工微小孔和像小铣刀一样进行微细电解铣削加工微结构,得到了满意的工艺效果,因而进一步说明电解加工在微细加工领域很有发展潜力。 相似文献
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The most used processes for generation of high aspect ratio microchannels are Nd: YAG laser technology on silica substrate and ultra violate lithography (UV-LIGA) process on metals. There are a few micromachining technologies such as micro mechanical milling, micro electro discharge machining (EDM) and electrochemical micromachining (EMM) for production of high-aspect-ratio micro features on highly stressed and anticorrosive metal like stainless steel. This paper discusses the micro fabrication of high aspect ratio micro features at the intended location on high strength stainless steel sheet of very small thickness to high thickness with highest average aspect ratio 14.33 achieved during microchannel generation by EMM with the help of coated microtool. Mathematical model relating aspect ratio with various parameters and machining conditions is derived to explore the ways to increase the aspect ratio of micro features. Experimental investigations were carried out to know the effect of vibration of microtool, frequency of pulsed voltage, microtool tip shape, thickness of work piece and non-conducting layer coated microtool on high aspect ratio micro features. Vibration of microtool with very small amplitude improved the stability of micromachining due to improved flow of electrolyte. 相似文献
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Yong Liu Di Zhu Yongbin Zeng Hongbing Yu 《The International Journal of Advanced Manufacturing Technology》2011,55(1-4):195-203
Electrochemical micromachining (EMM) has become more and more important in micro machining in recent years. Microelectrode as the tool of EMM is an essential cell in the machining process. In this study, microelectrodes with various end shapes are fabricated by different processing techniques. First, the different end shape forming methods for microelectrode, such as electrochemical etching, single electric discharge, and electrochemical micromachining are investigated. Second, microelectrodes with various end shapes fabricated above are simulated, analyzed, and then used in EMM process. At last, micro holes array with diameter of less than 10???m, three micro holes with no taper and a 3D microstructure are machined on metallic materials by above three types of microelectrodes. 相似文献
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E. S. Lee S. Y. Baek C. R. Cho 《The International Journal of Advanced Manufacturing Technology》2007,31(7-8):762-769
Electrochemical micromachining (EMM) has traditionally been used in highly specialized fields, such as those of the aerospace
and defense industries. It is now increasingly being applied in other industries, where parts with difficult-to-cut material,
complex geometry and tribology, and devices of microscopic-scale are required. EMM, which is not normally considered as a
precision process, is presented in this paper. The application of voltage pulses between a tool electrode and a workpiece
in an electrochemical environment allows the three-dimensional machining of conducting materials with micrometer precision.
In this paper, tool electrodes (5 μm in diameter, 1 mm in length) are developed by EMM and microholes are manufactured using
these tool electrodes. Microholes with a size of below 50 μm in diameter can be accurately achieved by using ultrashort voltage
pulses (1–5 μs). 相似文献
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Hui Zhang Sansan Ao Weidong Liu Zhen Luo Wenjie Niu Ke Guo 《The International Journal of Advanced Manufacturing Technology》2017,91(9-12):2965-2973
With the outbreak of product miniaturization, there is an increasing demand for the fabrication of micro-tools in recent years. However, fabrication of accurate micro-tools with high aspect ratio is a great challenge for traditional processes due to their mechanical-thermal effects. Electrochemical micro-machining (EMM) has many advantages over other machining processes, which makes it a potential method to manufacture micro-tools. This paper proposes a novel EMM fabrication method of micro-tools with high aspect ratio, in which an agarose hydrogel of high intensity is employed as quasi-solid electrolyte. During the machining process, a tungsten rod is inserted into the quasi-solid electrolyte which is partially immersed into working electrolyte (2 mol/L NaOH solution) to maintain mass balance. The shapes of micro-tools fabricated in liquid electrolyte and quasi-solid electrolyte under same machining conditions are analyzed. Compared to liquid electrolyte, quasi-solid electrolyte has the advantages of improved precision and ability to manufacture high aspect ratio micro-tools. Besides, effects of main parameters, including vertical distance, duty factor, and pulse peak voltage, on the machining accuracy and efficiency are investigated experimentally. Finally, optimum parameters of 12 mm vertical distance, 50% duty factor, and 5 V pulse peak voltage are selected based on experiments. Using these parameters, a cylindrical micro-tool with an average diameter of 12 μm and aspect ratio of 408.33 is successfully fabricated. 相似文献
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用一个动态变化的电容模型来描述电化学加工过程,从一个全新的角度———电容,来解释电化学加工的机理。利用电极体系的等效阻抗的变化来解释脉冲电解中线性电解液非线性化的现象;通过界面双电层电容值的变化来解释脉冲电化学光整加工提高精度的根本原因;在脉冲电化学蚀刻中由于保护膜产生的类似电解电容效应,使该处的电容值显著变化,从而解决了在纯化学蚀刻中出现的侧向腐蚀问题。 相似文献