Process repeatability in abrasive jet micro-machining

Abrasive jet micro-machining (AJM) is a useful process for the fabrication of channels and holes in micro-fluidic and microelectronic devices. The small scale of these features and the need to achieve a high degree of accuracy has revealed several problems inherent with traditional abrasive jet equipment. Poor repeatability of the erosion rate in a pressure feed AJM system was traced to uncontrolled variation in the abrasive particle mass flux caused by particle packing and local cavity formation in the reservoir. The introduction of a mixing device within the pressure reservoir ensured that the powder remained loose and able to flow through the orifice to the air stream. This produced a significant improvement in AJM repeatability. Additional factors affecting erosion repeatability such as particle size stratification and the effect of powder level in the reservoir were also examined.     

Simulation of erosive smoothing in the abrasive jet micro-machining of glass

Abrasive jet micro-machining (AJM) is a promising technique to machine micro-features in brittle and ductile materials. However, the roughness of micro-channels machined using AJM is generally greater than that from other methods of micro-machining such as wet etching. Previous investigators have suggested that the surface roughness resulting from AJM can be reduced by post-blasting with abrasive particles at a relatively low kinetic energy. This approach was investigated in the present work by measuring the roughness reduction of a reference unmasked channel in borosilicate glass as a function of post-blasting particle size, velocity, dose, and impact angle. Post-blasting the reference channels reduced the roughness by up to 60%. It was observed that post-blasting at shallower angles was more efficient, probably due to the increased amount of edge chipping as opposed to cratering, which contributed to the enhanced removal of profile peaks, leaving a smoother surface. Moreover, post-blasting with smaller particles ultimately resulted in smoother surfaces, but at the penalty of requiring a relatively large particle dose, and consequently a significantly increased channel depth, before reaching the steady-state roughness. Hence, finishing with smaller particles until reaching the steady-state roughness may not be practical when a shallow channel is desired. A previously developed numerical model was modified and used to simulate the post-blasting process leading to the creation of smooth channels as a function of particle size, velocity, dose, impact angle, and target material properties. The model simulated both crater formation (due to growth of lateral cracks) and the chipping of facet edges. Comparisons with centerline roughness measurements for channels in borosilicate glass showed that the model can predict the transient roughness reduction with post-blasting particle dose with a 7% average error.     

Abrasive slurry jet micro-machining of holes in brittle and ductile materials

This paper investigated the effects of elasticity and viscosity, induced by a dilute high-molecular-weight polymer solution, on the shape, depth, and diameter of micro-holes drilled in borosilicate glass and in plates of 6061-T6 aluminum alloy, 110 copper, and 316 stainless steel using low-pressure abrasive slurry jet micro-machining (ASJM). Holes were machined using aqueous jets with 1 wt% 10 μm Al₂O₃ particles. The 180 μm sapphire orifice produced a 140 μm diameter jet at pressures of 4 and 7 MPa. When the jet contained 50 wppm of dissolved 8 million molecular weight polyethylene oxide (PEO), the blind holes in glass were approximately 20% narrower and 30% shallower than holes drilled without the polymer, using the same abrasive concentration and pressure. The addition of PEO led to hole cross-sectional profiles that had a sharper edge at the glass surface and were more V-shaped compared with the U-shape of the holes produced without PEO. Hole symmetry in glass was maintained over depths ranging from about 80–900 μm by ensuring that the jets were aligned perpendicularly to within 0.2°. The changes in shape and size were brought about by normal stresses generated by the polymer. Jets containing this dissolved polymer were observed to oscillate laterally and non-periodically, with an amplitude reaching a value of 20 μm. For the first time, symmetric ASJM through-holes were drilled in a 3-mm-thick borosilicate glass plate without chipping around the exit edge.The depth of symmetric blind holes in metals was restricted to approximately 150 μm for jets with and without PEO. At greater depths, the holes became highly asymmetric, eroding in a specific direction to create a sub-surface slot. The asymmetry appeared to be caused by the extreme sensitivity of ductile materials to jet alignment. This sensitivity also caused the holes in metals to be less circular when PEO was included, apparently caused by the random jet oscillations induced by the polymer. Under identical conditions, hole depths increased in the order: borosilicate glass > 6061-T6 aluminum > 110 copper > 316 stainless steel. The edges of the holes in glass could be made sharper by machining through a sacrificial layer of glass or epoxy.     

Abrasive enhanced electrochemical slurry jet micro-machining: Comparative experiments and synergistic effects

Abrasive enhanced electrochemical slurry-jet machining (ESJM) is presented as a new approach to the micro-machining of metals using a combination of abrasive slurry-jet machining (ASJM) and electrochemical jet machining (ECJM). A novel ESJM prototype was developed to generate a charged slurry jet consisting of a mixture of Al₂O₃ abrasive particles and an electrolytic solution of NaCl and NaNO₃. A DC potential of 30 V was applied between the nozzle and specimen. A series of micro-channels were machined in Stellite 12 using ASJM, ECJM and ESJM processes to investigate the relative effects of erosion and anodic dissolution on the material removal rate and surface finish in the combined process of ESJM. The results illustrated that the ESJM process results in significantly greater target mass loss rate than the separate erosion and corrosion processes. The magnitude of the synergistic effect on the rate of mass loss was found to vary from positive to negative as the erosion component increased with increasing particle kinetic energy (jet pressure) and particle concentration. The roughness of the channels machined using ESJM was between that obtained with ASJM and ECJM. The roughness decreased as the erosion component of the total mass loss increased.     

Characteristics of abrasive slurry jet micro-machining: A comparison with abrasive air jet micro-machining

Abrasive slurry jet micro-machining (ASJM) uses a well-defined jet of abrasive slurry to erode features in a solid target. Compared with abrasive water jet machining (AWJM), the present ASJM system operates at pressures that are roughly two orders of magnitude lower and uses a premixed slurry of relatively low concentration. The objective of the present study was to gain a better understanding of the mechanics of erosion in ASJM by comparing its performance in the micro-machining of holes and channels in borosilicate glass with that of abrasive air jet micro-machining (AJM), a process that is simpler and relatively well understood. A new ASJM system was developed and used to machine blind holes and smooth channels of relatively uniform depth that did not suffer from the significant waviness previously reported in the literature. The effect of particle velocity, particle concentration, jet traverse speed and jet impact angle were examined. A direct comparison of ASJM and AJM results was possible since novel measurements of the crushing strength of the aluminum oxide abrasive particles used in both experiments proved to be unaffected by water. Brittle erosion was shown to be the dominant material removal mechanism in both ASJM and AJM in spite of the significant flow-induced decrease in the local impact angles of many of the particles in ASJM. A new model of the rapid particle deceleration near the target surface helped explain the much smaller erosion rates of ASJM compared with those in AJM. The modeling of the erosion process during the micro-machining of channels showed that the effect of the local impact angle at the leading edge of the advancing jet was much more significant in ASJM than in AJM, primarily due to the narrower focus of the jet impact zone in ASJM. The differences in the water and air flow fields and associated particle trajectories were used to explain the steeper side walls and flatter bottoms of the holes and channels machined with unmasked ASJM compared to those with masked AJM. The respective structures of the water and air jets also explained the much sharper definition of the edges of these features using ASJM compared with maskless AJM. The results of the study show that ASJM can be used to accurately micro-machine channels and holes with a width of 350–500 μm and an aspect ratio of 0.5–1.3 without the use of masks.     

Modelling of surface evolution in abrasive jet micro-machining including particle second strikes: A level set methodology

A previous implementation of narrow band level set methodology for the modelling of the surface evolution of masked features in abrasive jet micro-machining (AJM) including the effect of mask erosive wear was extended to include the effect of particle second strikes. The model uses a ray tracing/node tracking algorithm to allow the prediction of the effect of particle ricochets from the mask edges and the sidewalls of the machined feature on the resulting surface evolution of high aspect ratio features. Using the model, for the first time, the prediction of the particle second strike effects from inclined masked features is made possible. When compared to previous models that did not account for mask wear and second strike effects, the present model significantly improved the prediction of measured masked micro-channels machined using AJM in glass. When compared to previous particle tracking computer simulations, the present model was found to have a much shorter execution time, and in some cases also showed an improved prediction. The model can be useful in predicting the feature shape in the AJM of brittle targets for aspect ratios greater than 1, and hence for the micro-fabrication of microfluidic and MEMS devices.     

Laser shadowgraphy measurements of abrasive particle spatial, size and velocity distributions through micro-masks used in abrasive jet micro-machining

In abrasive jet micromachining (AJM), a jet of particles is passed through narrow mask openings in order to define the features to be micro-machined. The size and shape of the micro-machined features depends on the distribution of the particle velocity and mass flux through the mask openings. In this work, a high speed laser shadowgraphy technique was used to demonstrate experimentally, for the first time, the significant effect that the mask opening size and powder shape and size have on the resulting distribution of particle mass flux and velocity through the mask opening. In particular, it was found that the velocity through the mask was approximately constant, but different in magnitude than the velocity in the free jet incident to the mask. The measured mass flux distributions were in excellent agreement with a previously developed analytical model, thus directly confirming its validity. Additional measurements also showed that an existing numerical model could be used to predict the velocity distribution in free jets of spherical particles, and, if a modification to the particle drag coefficient is made, in free jets of angular particles. The direct experimental verification of these models allows for their use in surface evolution models that can predict the evolving shape of features micro-machined using AJM.     

Abrasive water jet machining of glass with stagnation effect

Abrasive water jet processes of glass are presented for crack-free machining of micro grooves and fluid polishing of micro channels with CFD analysis. In machining of the micro grooves, the abrasive is supplied to flow through intended machining area using the tapered masks. Stagnation under the jet and the horizontal flow on the machining area are controlled to generate crack-free surfaces by the mask shape. The same effect can be applied to polishing of the micro channels pre-machined by milling. Stagnation controlled by the inner wall of the channel changes the flow direction while keeping high fluid velocities.     

Abrasive waterjet micro-machining of channels in metals: Comparison between machining in air and submerged in water

Abrasive water jet technology can be used for micro-milling using recently developed miniaturized nozzles. Abrasive water jet (AWJ) machining is often used with both the nozzle tip and workpiece submerged in water to reduce noise and contain debris. This paper compares the performance of submerged and unsubmerged abrasive water jet micro-milling of channels in 316L stainless steel and 6061-T6 aluminum at various nozzle angles and standoff distances. The effect of submergence on the diameter and effective footprint of AWJ erosion footprints was measured and compared. It was found that the centerline erosion rate decreased with channel depth due to the spreading of the jet as the effective standoff distance increased, and because of the growing effect of stagnation as the channel became deeper. The erosive jet spread over a larger effective footprint in air than in water, since particles on the jet periphery were slowed much more quickly in water due to increased drag. As a result, the width of a channel machined in air was wider than that in water. Moreover, it was observed that the instantaneous erosion rate decreased with channel depth, and that this decrease was a function only of the channel cross-sectional geometry, being independent of the type of metal, the jet angle, the standoff distance, and regardless of whether the jet was submerged or in air, in either the forward or backward directions. It is shown that submerged AWJM results in narrower features than those produced while machining in air, without a decrease in centerline etch rate.     

磨料水射流抛光技术及其发展

磨料水射流抛光技术是应用于表面抛光加工的新技术.利用含有细小磨料粒子的抛光液在高压作用下,与工件表面发生冲击、冲蚀而微去除材料,以达到抛光目的.论述了磨料水射流抛光技术的基本原理和特点,以及影响抛光效果的主要工艺参数,并对其发展趋势进行了展望.     

Quantitative evaluation of abrasive contamination in ductile material during abrasive water jet machining and minimising with a nozzle head oscillation technique

In the area of grit blasting, it is well known that microscopically small abrasive debris gets trapped on the surface, and due to impact this grit might cause the surface to fracture and a fraction of it to embed. The same problem appears in abrasive aqua jet machining (AAJM), especially in the so-called deformation wear zone or striation zone. An experimental study was undertaken on a commonly used ductile material, aluminium Al–Mg4, 5Mn, which is used as a base material for manufacturing most of the aircraft/aerospace components. The results indicated that as the depth of cut increases the grit contamination decreases. A comparison was made between straight cutting and oscillation cutting, and it was observed that oscillation cutting is 10 times better than straight cutting for ductile material with respect to particle contamination. Alternative technology is suggested to overcome the grit contamination problem.     

喷砂嘴冲蚀寿命与磨料关系的研究

用碳化硅、白刚玉和棕刚玉三种磨料对硬质合金(YT15)喷嘴、SG4陶瓷喷嘴和B4C陶瓷喷嘴进行冲蚀磨损试验,研究了磨料性能对喷嘴寿命的影响,为工程应用中喷砂嘴的选用提供了理论指导.     

On the machining of alumina and glass

Machining of electrically non-conducting materials like alumina and glass is still a major problem. Electrochemical spark machining (ECSM) process is a potential process for machining these materials. However, ECSM has its own inherent limitations. So far, only ordinary cutting tools have been used during ECSM by previous researchers, but the results obtained are not as good as anticipated. In the present work, electrochemical spark abrasive drilling (ECSAD) experiments have been conducted using abrasive cutting tools, with a view to enhance the capabilities of the process. Use of an abrasive cutting tool, when compared to a conventional cutting tool, has been found to improve the process performance, viz. enhanced material removal and increased machined depth. The workpiece materials used are alumina and borosilicate glass.     

高压磨料射流中流体因素的影响研究

依据固液两相流理论,应用FLUENT流体分析软件对高压磨料射流喷嘴内外流场进行数值模拟和仿真,通过改变流体的黏度、流量、密度等,讨论了各参数对出口处的切削力和速度分布的影响。结果表明：增加流体的密度对射流速度和切削力的提高效果明显;而增加其黏度作用正好相反,由于流动阻力加大,使射流的出口速度快速衰减,出口界面切削力下降;工作介质流量的改变对入口速度和射流效果也有较大的影响;在工作环境和设备允许的情况下,可以适当提高进口流量。     

Modelling of abrasive particle energy in water jet machining

A phenomenological model of the three-phase flow inside an abrasive water jet machining cutting head has been developed. Several improvements over previously presented models such as taking into account the abrasive particle size distribution, and the effect of breakage of particles on the energy flux have been made. The model has been validated using an extensive set of experimental data with wide variations in cutting-head geometry, operating pressure, and abrasive mass flow rates. The cross-sectional averaged abrasive particle velocity at the exit of the focussing tube has been predicted with good accuracy over the whole range of experiments. In particular, the Pearson correlation between the model and the experimental results is found to be more than 95%, implying the utility of this model in design.     

Wear behavior of the abrasive grains used in optical glass polishing

In this work the wear behavior of cerium oxide abrasive grains during the glass polishing was studied. Polishing tests have been done by different types of cerium oxide abrasive grains. The grains have been recovered and examined during the operation. The morphology, the granulometric distribution, the chemical composition and the agglomeration phenomenon of recovered grains have been studied.     

Modelling of the micro-channelling process on glasses using an abrasive slurry jet

A study of the micro-channelling process on a brittle amorphous glass using an abrasive slurry jet is presented. The mechanisms of the micro-channel formation process are discussed first, followed by the development of predictive models for material removal rate and the dimensions of the micro-channels produced. The models account for a variety of slurry and target material properties as well as other process parameters and have been verified by an experimental study. It is shown that the model predictions are in good agreement with the experimental data.     

The effects of system and geometric parameters on abrasive water jet nozzle wear

Nozzle wear dependence on abrasive water jet system parameters and nozzle geometry is experimentally investigated. Experimental procedures for evaluating long term and accelerated nozzle wear are discussed. Accelerated wear tests are conducted to study the effects of nozzle length, inlet angle, diameter, orifice diameter, abrasive flow rate, and water pressure on wear. An empirical model for nozzle weight loss rate is developed and is shown to correlate well with experimental measurements.     

基于混合策略的磨料水射流切割工艺参数的优化

提出了一种模糊逻辑理论与遗传算法相结合的混合方法,该方法可以优化在给定材料厚度的条件下,磨料水射流切割各种材料的工艺参数。本文以理论为基础,应用实验数据建立了模糊控制模型。这个特殊的模糊控制模型可以预测在任何给定一组加工参数时,可获得的切割深度。遗传算法结合模糊模型可以自动确定磨料水射流切割各种材料时的最佳参数组合。通过对磨料水射流切割黑色花岗岩这一实例的研究,验证了该混合方法是有效的。     

A Taguchi and experimental investigation into the optimal processing conditions for the abrasive jet polishing of SKD61 mold steel

This study introduces an abrasive jet polishing (AJP) technique in which the pneumatic air stream carries not only abrasive particles, but also an additive of either pure water or pure water with a specified quantity of machining oil. Taguchi design experiments are performed to identify the optimal AJP parameters when applied to the polishing of electrical discharge machined SKD61 mold steel specimens. A series of experimental trials are then conducted using the optimal AJP parameters to investigate the respective effects of the additive type and the abrasive particle material and diameter in achieving a mirror-like finish of the polished surface. The Taguchi trials indicate that when polishing is performed using pure water as an additive, the optimal processing parameters are as follows: an abrasive material to additive ratio of 1:2, an impact angle of 30°, a gas pressure of 4 kg/cm², a nozzle-to-workpiece height of 10 mm, a platform rotational velocity of 200 rpm, and a platform travel speed of 150 mm/s. Applying these processing parameters, it is found that the optimal polishing effect is attained using #8000SiC abrasive particles and a 1:1 mixture of water-solvent machining oil and pure water. The experimental results show that under these conditions, the average roughness of the electrical discharge machined SKD61 surface is reduced from an original value of R_a=1.03 μm (R_max: 7.74 μm) to a final value of R_a=0.13 μm (R_max: 0.90 μm), corresponding to a surface roughness improvement of approximately 87%.