12 μm像元间距1280×1024碲镉汞中波红外焦平面探测器的制备及性能研究

武汉高德红外股份有限公司成功研制了像元尺寸为12 μm×12 μm的1280×1024大面阵碲镉汞中波红外焦平面探测器。在优化提升材料性能的基础上,突破了小像元钝化开孔、高密度小尺寸铟柱制备以及高精度大面阵倒焊等关键技术,成功制备出了1280×1024@12 μm碲镉汞中波红外焦平面芯片及组件。其盲元率小于0.5%,响应率非均匀性小于5%。F2探测器的平均噪声等效温差(Noise Equivalent Temperature Difference, NETD)为15 mK,平均峰值探测率为6×10¹¹ cm·Hzsup>1/2·W^-1。F4探测器的平均NETD为18.5 mK,平均峰值探测率为1.2×10¹² cm·Hzsup>1/2·W^-1。另外还提出了一种不稳定像元测试方法,即通过分析两点校正后的成像数据,并利用模块中值和空域噪声的比较,完成对红外图像中不稳定像元的检测和校正。结果表明,校正后的红外成像画质良好,在120 K时器件性能无明显降低。     

512×8像素级数字化长波红外探测器研究

像素级数字化红外探测器具有更高的性能水平和更强的抗干扰能力,是红外探测器技术发展的重要方向之一。通过突破像素级数字化读出电路设计、低峰谷碲镉汞材料外延、器件制备工艺以及倒装互连等关键技术,研制出了一种512×8像素级数字化长波红外探测器组件,并对其性能进行了测试。此探测器的响应波段为7.85～10.17 μm,平均峰值响应率为1.4×10¹¹ LSB/W,响应率非均匀性为9.13%,有效像元率为97.5%,噪声等效温差(Noise Equivalent Temperature Difference, NETD)为4.4 mK,动态范围为90.6 dB。测试结果表明,该探测器能够满足系统要求。     

10 μm 1 280 × 1 024 HgCdTe中波红外焦平面阵列探测性能提升

对像元尺寸为10 μm的1280×1024碲镉汞（HgCdTe）中波红外焦平面阵列的制备技术和性能进行了研究。通过B⁺注入制备小尺寸n-on-p平面结;采用高平整度HgCdTe外延材料和高精度的倒焊互连技术,实现高的电学连通率;采用多段温度填胶固化和边缘刻蚀工艺减轻HgCdTe器件和读出集成电路（ROICs）之间的热失配,从而降低焦平面器件失效率。在85 K焦平面工作温度下,研制探测器的光谱响应范围为3.67 μm至4.88 μm,有效像元率高达99.95%,并且探测器组件像元的平均噪声等效温差（NETD）和暗电流密度的平均值分别小于16 mK和2.1×10^-8 A/cm²。与像元尺寸为15 μm的探测器相比,10 μm的1280×1024中波红外探测器可获取更加精细的图像,具有更远的识别距离。目前,该技术已成功转移到浙江珏芯微电子有限公司（ZJM）的HgCdTe红外探测器产线。     

长/长波双色二类超晶格红外探测器研究

报道了长/长波双色二类超晶格红外焦平面探测器组件的研制。通过能带结构设计和分子束外延技术,获得了表面质量良好的长/长波双色超晶格外延材料。突破了长波超晶格低暗电流钝化、低损伤干法刻蚀等关键技术,制备出像元中心距30 μm的320×256长/长波双色InAs/GaSb超晶格焦平面探测器芯片。将芯片与双色读出电路互连,采用杜瓦封装,与制冷机耦合形成探测器组件。组件双波段50%后截止波长分别为7.7 μm（波段1）和10.0 μm（波段2）。波段1平均峰值探测率达到8.21×10¹⁰ cmW^-1Hz^1/2,NETD实现28.8 mK;波段2平均峰值探测率达到6.15×10¹⁰ cmW^-1Hz^1/2,NETD为37.8 mK,获得了清晰的成像效果,实现长/长波双色探测。     

InAs/GaSb II类超晶格长波红外焦平面探测器研究

InAs/GaSb II类超晶格材料是第三代红外焦平面探测器的优选材料。报道了一种面阵规模为320×256、像元中心距为30 μm的InAs/GaSb II类超晶格长波红外焦平面器件。在77 K时,该器件的平均峰值探测率为7.6×10¹⁰ cm·Hz^1/2·W^-1,盲元率为1.46%,响应非均匀性为7.55%,噪声等效温差(Noise Equivalent Temperature Difference, NETD)为25.5 mK。经计算可知,这种器件的峰值量子效率为26.2%,50%截止波长为9.1 μm。最后对该器件进行了成像演示。结果表明,该研究为后续的相关器件研制奠定了基础。     

320×256 GaAs/AlGaAs量子阱红外探测器

采用n型GaAs/AlGaAs量子阱材料,反应离子刻蚀RIE设备进行光栅、像元分割刻蚀,制备了320×256格式的长波量子阱红外探测器,像元中心距30 μm,像元光敏面28 μm×28 μm,两像元间距2 μm,达到了目前国际上1k×1k量子阱焦平面探测器像元间距研制水平。通过对320×256阵列上设计的陪管区进行光电性能测试,平均黑体探测率1.66×109 cm·Hz/W-1,响应率89.6 mA/W。     

Ⅱ类超晶格长波红外探测器研究进展

由于具有带隙可调、电子有效质量大、俄歇复合率低等特点,Ⅱ类超晶格在长波红外和甚长波红外探测方面具有独特优势。介绍了长波超晶格探测器制备方面的研究进展,包括能带结构设计、表面缺陷控制、周期结构控制和表面钝化。最后报道了320×256长波超晶格焦平面阵列及其测试性能。结果表明,在77 K工作温度下,该阵列的截止波长为9.6 μm,平均峰值探测率D*为7×10¹⁰ cm·Hz^1/2/W,噪声等效温差 (Noise Equivalent Temperature Difference, NETD)为34 mK,响应非均匀性为7%。     

基于石墨纳米材料的电磁诱导势阱效应的室温太赫兹探测研究

基于石墨纳米材料,成功制备金属-石墨-金属结构电磁诱导势阱效应室温太赫兹探测器,实现了高性能的室温太赫兹探测。器件在0.035 THz的响应率达到20 kV/W,在0.1673 THz的响应率达到11 kV/W,器件在0.035 THz的噪声等效功率达到1.25 ,在0.1673 THz的噪声等效功率达到2.27 。我们的研究结果为石墨烯太赫兹探测器提供新的思路。     

基于二维碲烯的太赫兹光电探测器

制备了金属-碲烯-金属的太赫兹光电探测器,实现了毫米波-太赫兹波下的光探测。结果表明,基于对数天线碲烯的太赫兹光电探测器在零偏压下具有较高的光响应率（40 mA /W,0.12 THz）,响应时间为8 μs,噪声等效功率（NEP）为4 pW·Hz^-0.5。研究结果为高性能室温太赫兹光探测提供了一种新的发展路径。     

甚长波碲镉汞红外焦平面探测器

采用砷离子注入p-on-n平面结技术制备了77 K工作温度下截止波长分别为13.23 μm和14.79 μm、像元中心距为25 μm的甚长波640×512探测器,并对其基本性能和暗电流进行了测试和分析。结果表明,对于截止波长为13.23 μm的甚长波640×512（25 μm）,器件量子效率为55%,NETD平均值为21.5 mK,有效像元率为99.81%;对于截止波长为14.79 μm的甚长波640×512（25 μm）,器件量子效率为45%,NETD平均值为34.6 mK,有效像元率为99.28%。这两个甚长波器件在液氮温度下的R₀A分别为19.8 Ω·cm²和1.56 Ω·cm²,达到了“Rule07”经验表达式的预测值,器件噪声主要受散粒噪声限制,显示出了较好的器件性能。     

Cost-effective test solutions for smart card and other integrated flash applications

From its emergence in the late 1980s as a lower cost alternative to early EEPROM technologies, flash memory has evolved to higher densities and speedsand rapidly growing acceptance in mobile applications.In the process, flash memory devices have placed increased test requirements on manufacturers. Today, as flash device test grows in importance in China, manufacturers face growing pressure for reduced cost-oftest, increased throughput and greater return on investment for test equipment. At the same time, the move to integrated flash packages for contactless smart card applications adds a significant further challenge to manufacturers seeking rapid, low-cost test.     

An improved parallel thinning algorithm with two subiterations

The parallel thinning algorithm with two subiterations is improved in this paper. By analyzing the notions of connected components and passes, a conclusion is drawn that the number of passes and the number of eight-connected components are equal. Then the expression of the number of eight-connected components is obtained which replaces the old one in the algorithm. And a reserving condition is proposed by experiments, which alleviates the excess deletion where a diagonal line and a beeline intersect. The experimental results demonstrate that the thinned curve is almost located in the middle of the original curve connectivelv with single pixel width and the processing speed is high.     

Theoretical analysis of the relationship between the Brillouin gain coefficient and the strain in the optical-fiber sensors

The relation between the power of the Brillouin signal and the strain is one of the bases of the distributed fiber sensors of temperature and strain. The coefficient of the Bfillouin gain can be changed by the temperature and the strain that will affect the power of the Brillouin scattering. The relation between the change of the Brillouin gain coefficient and the strain is thought to be linear by many researchers. However, it is not always linear based on the theoretical analysis and numerical simulation. Therefore, errors will be caused if the relation between the change of the Brillouin gain coefficient and the strain is regarded as to be linear approximately for measuring the temperature and the strain. For this reason, the influence of the parameters on the Brillouin gain coefficient is proposed through theoretical analysis and numerical simulation.     

Novel fiber-optical interferometer with miniaturized probe for in-hole measurements

Today, micro-system technology and the development of new MEMS （Micro-Electro-Mechanical Systems） are emerging rapidly. In order for this development to become a success in the long run, measurement systems have to ensure product quality. Most often, MEMS have to be tested by means of functionality or destructive tests. One reason for this is that there are no suitable systems or sensing probes available which can be used for the measurement of quasi inaccessible features like small holes or cavities. We present a measurement system that could be used for these kinds of measurements. The system combines a fiber optical, miniaturized sensing probe with low-coherence interferometry, so that absolute distance measurements with nanometer accuracy are possible.     

Teleportation of an arbitrary unknown N-qubit entangled state under the controlling of M controllers

A new quantum protocol to teleport an arbitrary unknown N-qubit entangled state from a sender to a fixed receiver under M controllers(M < N) is proposed. The quantum resources required are M non-maximally entangled Greenberger-Home-Zeilinger (GHZ) state and N-M non-maximally entangled Einstein-Podolsky-Rosen (EPR) pairs. The sender performs N generalized Bell-state measurements on the 2N particles. Controllers take M single-particle measurement along x-axis, and the receiver needs to introduce one auxiliary two-level particle to extract quantum information probabilistically with the fidelity unit if controllers cooperate with it.     

Diode-end-pumped Nd:YVO4/LBO lasers with 4.2W continuous-wave output at 457 nm

A continuous-wave (CW) 457 nm blue laser operating at the power of 4.2 W is demonstrated by using a fiber coupled laser diode module pumped Nd: YVO4 and using LBO as the intra-cavity SHG crystal With the optimization of laser cavity and crystal parameters, the laser operates at a very high efficiency. When the pumping power is about 31 W, the output at 457nm reaches 4.2 W, and the optical to optical conversion efficiency is about 13.5% accordingly. The stability of the out putpower is better than 1.2% for 8 h continuously working.     

Call for Papers

正Wireless Body-area Networks The last decade has witnessed the convergence of three giant worlds:electronics,computer science and telecommunications.The next decade should follow this convergence in most of our activities with the generalization of sensor networks.In particular with the progress in medicine,people live longer and the aging of population will push the development of wireless personal networks     

Call for Papers—Feature Topic,Vol.12,No.7,2015

正Information Centric Networking Information-Centric Networking(ICN) is an emerging direction in Future Internet architecture research,gaining significant tractions among academia and industry.Aiming to replace the conventional host-to-host communication model by a data-centric model,ICN treats data content as the first     

JOURNAL OF ELECTRONICS(CHINA)

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NEXT GENERATION WIRELESS NETWORKS–ESPECIALLY THE USE OF MILLI-MICROWAVE BANDS

The global bandwidth shortage of wireless communications has motivated the exploration of the naillimeter wave （ram-wave） frequency spectrum for the next generation wireless communications. Recent advances in RF CMOS technology and high speed baseband signal processing technologies have enabled tile extensive research and development of turn-wave wireless communications. The multi gigabit per second data rate of ram-wave system will lead to applications in many important scenarios, such as WPAN, WLAN,back-haul for cellular system. And the frequency bands include 28 GHz, 38 GHz, 45GHz, 60GHz, E-BAND and even beyond 100 GHz. The propagation and the imitation of the RF circuits design in these frequency bands make the directional antennas be inevitable for mm-wave communications.