薄膜AlGaInP发光二极管中不同反光镜的研究

本文计算了GaP/Au 反光镜, GaP/SiO2/Au 三层ODR and GaP/ITO/Au 三层ODR的反射率随角度的变化值。制作了GaAs衬底的AlGaInP LED,Au反光镜、SiO2 ODR和ITO ODR的薄膜AlGaInP LED。在20mA下,四种样品光输出功率分别为1.04mW, 1.14mW, 2.53mW and 2.15mW。制作工艺退火后,Au扩散使Au/GaP反光镜的反射率降至9％。1/4波长的ITO和SiO2透射率不同造成了两种薄膜LED光输出功率不同。ITO ODR中加入Zn可以大大降低LED的电压,但并不影响LED的光输出。     

隧道结AlGaInP发光二极管

报道了通过隧道结将衬底的导电类型从n型转变到p型,从而可以利用n型GaP作为以n型GaAs为衬底的AlGaInP发光二极管的电流扩展层.n型电流扩展层的电阻率低于p型电流扩展层的电阻率,这种结构改善了电流扩展层的作用,从而提高了发光二极管的光提取效率.对3μm GaP电流扩展层的发光二极管,实验结果表明,隧道结发光二极管的发光功率与具有相同基本结构的传统发光二极管相比,20mA时发光功率提高了50%,100mA时提高了66.7%.     

Absorption of photons in the thin film AlGalnP light emitting diode

The path of photons in the thin film(TF) light emitting diode(LED) was analyzed.The reflectivity of reflector in AlGaInP TF LED with and without the AlGaInP layer was contrasted.The absorption of the AlGaInP layer was analyzed and then the light extraction was calculated and shown in figure.The TF AlGaInP LED with 8μm and 0.6μm GaP was fabricated.At the driving current of 20 mA,the light output power of the latter is 33% higher.For the 0.6μm GaP LED,the etching of heavily doped GaP except the ohmic contact dot area is advised. The design and optimizing of current spreading between the n-type electrode and the p-type ohmic contact dot need further research.     

隧道结AlGaInP发光二极管

报道了通过隧道结将衬底的导电类型从n型转变到p型,从而可以利用n型GaP作为以n型GaAs为衬底的AlGaInP发光二极管的电流扩展层.n型电流扩展层的电阻率低于p型电流扩展层的电阻率,这种结构改善了电流扩展层的作用,从而提高了发光二极管的光提取效率.对3μm GaP电流扩展层的发光二极管,实验结果表明,隧道结发光二极管的发光功率与具有相同基本结构的传统发光二极管相比,20mA时发光功率提高了50%,100mA时提高了66.7%.     

p-GaN与ITO欧姆接触的研究

针对GaN基发光二极管中p-GaN与透明导电薄膜ITO之间的接触进行研究,尝试找出透明导电层ITO的优化制程条件。将在不同氧流量、ITO厚度及退火温度下制备的透明电极ITO薄膜应用于GaN基发光二极管,来增加电流扩展,减小ITO与p-GaN欧姆接触电阻,降低LED工作电压及提高透过率、增强LED发光亮度。将ITO薄膜应用于218μm×363μm GaN基发光二极管LED,分析其在20 mA工作电流条件下正向电压和光输出功率的变化,在优化条件下制得的蓝光LED在直流电流20 mA下的正向电压3.23 V,光输出效率为23.25 mW。     

透明导电ITO欧姆接触的AlGaInP薄膜发光二极管

提出了一种透明导电氧化铟锡(ITO)欧姆接触的AlGaInP薄膜发光二极管(LED)的结构和制作工艺.在这个结构里,ITO还作为窗口层材料,增强电流扩展,并应用了高反射率的金属作为反光镜.用Au-Sn合金(Au∶Sn＝8∶2,重量比)作为焊料,把带有金属反光镜的AlGaInP LED(RS-LED)外延片倒装键合到GaAs基板上,并去掉外延GaAs衬底,把被GaAs衬底吸收的光反射出去.与常规AlGaInP吸收衬底LEDs(AS-LED)和带有分布布拉格反光镜(DBR)的AlGaInP吸收衬底LEDs(DBR-AS-LED)电、光特性的比较,用透明导电ITO做欧姆接触的AlGaInP薄膜RS-LED结构能极大提高光输出功率和发光强度.正向电流20 mA时,RS-LED的光输出功率分别是AS-LED和DBR-AS-LED的2.4倍和1.7倍;RS-LED 20 mA下峰值波长624 nm的轴向光强达到了179.6 mcd,分别是AS-LED 20 mA下峰值波长627 nm和DBR-AS-LED 20 mA下峰值波长623 nm轴向光强的2.2倍和1.3倍.     

具有ITO/Ti3O5薄膜结构的高亮度AlGaInP LED

采用ITO/Ti_3O_5薄膜结构作为高亮度AlGaInP LED的电流扩展层、窗口层、电流阻挡层和增透膜层。通过在电极下形成肖特基结,避免电极下方无效电流注入,提高局域电流密度。通过ITO/Ti_3O_5增透膜设计提升LED的光提取效率。具有该ITO/Ti_3O_5薄膜结构的主波长621 nm的高亮度AlGaInP LED芯片(150μm×150μm)较传统结构芯片发光强度提升40%,20 mA注入电流下,电压均值在2.1 V左右。     

GaP表面粗化对AlGaInP发光二极管光电特性的影响

采用湿法溶液粗化AlGaInP基红光LED表面GaP层 ,并在粗化后的GaP表面沉积ITO,研究了粗化时间对GaP表面形貌的影响,并利用SEM、半导 体 芯片测试机、X射线衍射仪、X射线光电子能谱对LED器件表面形貌、光电特性曲 线、界面晶向、元素特性进行表征,比较了粗化前后的LED亮度和光电特性变 化。测试结果表明:采用HIO₄、I₂、HNO₃系列粗化液在室温、粗化时间为30 S 时,有效增加了光在通过GaP面与ITO界面时的出光角度,使AlGaInP发光二极管 的发光效率提高21.4%,同时引起界面处的缺陷密度升高,费米能级 远离价带,主波长蓝移0.36 nm,正向电压上升0.04 V。     

表面粗化提高倒装AlGaInP发光二极管的光提取效率

对发光二极管进行表面粗化能够大幅度的提高其光提取效率。利用晶片键合技术并采用湿法刻蚀的办法粗化n面AlGaInP表面制作了一种带表面粗化的倒装薄膜发光二极管。刻蚀后的表面形貌呈现金字塔状。270μm x 270μm管芯裸装在TO-18金属管座上,在20mA的注入电流下,粗化了的LED-I光强达到了315mcd,输出光功率达到了4.622mW,比没有粗化的LED-II的光功率高1.7倍。光功率增加的原因在于粗化后形成的这种金字塔状表面,其不但减少了背部镜面系统和半导体-空气接触面的反射,而且能有效的将光从LED中散射出去。     

带有锥状反射结构的AlGaInP键合衬底LED

本研究通过光辅助化学腐蚀技术在衬底键合AlGaInP反极性发光二极管中制备出锥状反射镜结构提升器件的光提取效率。首先利用氢氟酸与双氧水在532nm激光的辐射下载GaP:Mg层制备出锥状腐蚀结构,然后将金属反射镜蒸镀在锥状结构之上制备锥状的反射镜结构。在完成全部芯片工艺后,测试结果表明锥状反射镜结构可以显著提升光提取效率,并在光通量测量中与表面粗化集成平板反射镜LED相比较,得到了18.55%的增强。     

Resolution Enhancement Technology:Integrated Process Solutions using OPC

DUV lithography, using the 248 nm wavelength, is a viable manufacturing option for devices with features at 130 nm and less. Given the low kl value of the lithography, integrated process development is a necessary method for achieving acceptable process latitude. The application of assist features for rule based OPC requires the simultaneous optimization of the mask, illumination optics and the resist.Described in this paper are the details involved in optimizing each of these aspects for line and space imaging.A reference pitch is first chosen to determine how the optics will be set. The ideal sigma setting is determined by a simple geometrically derived expression. The inner and outer machine settings are determined, in turn,with the simulation of a figure of merit. The maximum value of the response surface of this FOM occurs at the optimal sigma settings. Experimental confirmation of this is shown in the paper.Assist features are used to modify the aerial image of the more isolated images on the mask. The effect that the diffraction of the scattering bars (SBs) has on the image intensity distribution is explained. Rules for determining the size and placement of SBs are also given.Resist is optimized for use with off-axis illumination and assist features. A general explanation of the material' s effect is discussed along with the affect on the through-pitch bias. The paper culminates with the showing of the lithographic results from the fully optimized system.     

Cost-effective test solutions for smart card and other integrated flash applications

From its emergence in the late 1980s as a lower cost alternative to early EEPROM technologies, flash memory has evolved to higher densities and speedsand rapidly growing acceptance in mobile applications.In the process, flash memory devices have placed increased test requirements on manufacturers. Today, as flash device test grows in importance in China, manufacturers face growing pressure for reduced cost-oftest, increased throughput and greater return on investment for test equipment. At the same time, the move to integrated flash packages for contactless smart card applications adds a significant further challenge to manufacturers seeking rapid, low-cost test.     

Theoretical analysis of the relationship between the Brillouin gain coefficient and the strain in the optical-fiber sensors

The relation between the power of the Brillouin signal and the strain is one of the bases of the distributed fiber sensors of temperature and strain. The coefficient of the Bfillouin gain can be changed by the temperature and the strain that will affect the power of the Brillouin scattering. The relation between the change of the Brillouin gain coefficient and the strain is thought to be linear by many researchers. However, it is not always linear based on the theoretical analysis and numerical simulation. Therefore, errors will be caused if the relation between the change of the Brillouin gain coefficient and the strain is regarded as to be linear approximately for measuring the temperature and the strain. For this reason, the influence of the parameters on the Brillouin gain coefficient is proposed through theoretical analysis and numerical simulation.     

An improved parallel thinning algorithm with two subiterations

The parallel thinning algorithm with two subiterations is improved in this paper. By analyzing the notions of connected components and passes, a conclusion is drawn that the number of passes and the number of eight-connected components are equal. Then the expression of the number of eight-connected components is obtained which replaces the old one in the algorithm. And a reserving condition is proposed by experiments, which alleviates the excess deletion where a diagonal line and a beeline intersect. The experimental results demonstrate that the thinned curve is almost located in the middle of the original curve connectivelv with single pixel width and the processing speed is high.     

Novel fiber-optical interferometer with miniaturized probe for in-hole measurements

Today, micro-system technology and the development of new MEMS （Micro-Electro-Mechanical Systems） are emerging rapidly. In order for this development to become a success in the long run, measurement systems have to ensure product quality. Most often, MEMS have to be tested by means of functionality or destructive tests. One reason for this is that there are no suitable systems or sensing probes available which can be used for the measurement of quasi inaccessible features like small holes or cavities. We present a measurement system that could be used for these kinds of measurements. The system combines a fiber optical, miniaturized sensing probe with low-coherence interferometry, so that absolute distance measurements with nanometer accuracy are possible.     

Development of the readout system for waveguide multilayer optical card

Waveguide multilayer optical card （WMOC） is a novel storage device of three-dimensional optical information. An advanced readout system fitting for the WMOC is introduced in this paper. The hardware mainly consists of the light source for reading, WMOC, motorized stages addressing unit, microscope imaging unit, CCD detecting unit and PC controlling ＆ processing unit. The movement of the precision motorized stage is controlled by the computer through Visual Basic （VB） language in software. A control panel is also designed to get the layer address and the page address through which the position of the motorized stages can be changed. The WMOC readout system is easy to manage and the readout result is directly displayed on computer monitor.     

Study of waveguide coupling efficiency in hybrid silicon lasers

This paper presents a new method to increase the waveguide coupling efficiency in hybrid silicon lasers. We find that the propagation constant of the InGaAsP emitting layer can be equal to that of the Si resonant layer through improving the design size of the InP waveguide. The coupling power achieves 42% of the total power in the hybrid lasers when the thickness of the bonding layer is 100 nm. Our result is very close to 50% of the total power reported by Intel when the thickness of the thin bonding layer is less than 5 nm. Therefore, our invariable coupling power technique is simpler than Intel＇s.     

Collinear phase-matching study of terahertz-wave generation via difference frequency mixed in GaAs and Inp

The collinearly phase-matching condition of terahertz-wave generation via difference frequency mixed in GaAs and InP is theoretically studied. In collinear phase-matching, the optimum phase-matching wave hands of these two crystals are calculated. The optimum phase-matching wave bands in GaAs and lnP are 0.95-1.38μm and 0.7-0.96μm respectively. The influence of the wavelength choice of the pump wave on the coherent length in THz-wave tuning is also discussed. The influence of the temperature alteration on the phase-matching and the temperature tuning properties in GaAs crystal are calculated and analyzed. It can serve for the following experiments as a theoretical evidence and a reference as well.     

Effects of the alloy compositions on the phonon-polaritons in ternary mixed crystals

Composition dependence of bulk and surface phonon-polaritons in ternary mixed crystals are studied in the framework of the modified random-element-isodisplacement model and the Bom-Huang approximation. The numerical results for Several Ⅱ - Ⅵ and Ⅲ- Ⅴ compound systems are performed, and the polariton frequencies as functions of the compositions for ternary mixed crystals AlxGa1-xAs, GaPxAS1-x, ZnSxSe1-x, GaAsxSb1-x, GaxIn1-xP, and ZnxCd1-xS as examples are given and discussed. The results show that the dependence of the energies of two branches of bulk phonon-polaritons which have phonon-like characteristics, and surface phonon-polaritons on the compositions of ternary mixed crystals are nonlinear and different from those of the corresponding binary systems.     

New insert layer structure OLEDs

An insert layer structure organic electroluminescent device（OLED） based on a new luminescent material （Zn（salen）） is fabricated. The configuration of the device is ITO/CuPc/NPD/Zn（salen）/Liq/LiF/A1/CuPc/NPD/Zn（salen）/Liq/LiF/A1. Effective insert electrode layers comprising LiF（1nm）/Al（5 nm） are used as a single semitransparent mirror, and bilayer cathode LiF（1 nm）/A1（100 nm） is used as a reflecting mirror. The two mirrors form a Fabry-Perot microcavity and two emissive units. The maximum brightness and luminous efficiency reach 674 cd/m^2 and 2.652 cd/A, respectively, which are 2.1 and 3.7 times higher than the conventional device, respectively. The superior brightness and luminous efficiency over conventional single-unit devices are attributed to microcavity effect.