Fabrication of curved micro structures on photoresist layer

A novel fabrication process for micro patterns with curvature was introduced. The curved structures were made by compensating rectangular micro structures with liquid photoresist layer. Because of the surface tension of the liquid in micro scale, various shapes of meniscus can be made on the micro channels. The micro channels were made on the silicon substrate in advance, and then the liquid layer was coated on the micro channels. From the nature of liquid behavior, the curved patterns with smooth surface are obtained, which cannot be made easily with the conventional mechanical machining, as well as with the microfabrication processes, such as wet and dry etching. With this principle, it is expected that the smooth and curved surfaces can be made by simple processes and the results can be applied widely, such as optical patterns.     

桌面式水平走丝微细电火花线切割机床的研制

利用直径小于80μm电极丝的微细电火花线切割加工技术,可加工出表面粗糙度好、尺寸精度高的微小复杂零件。以加工带有螺旋结构的微小复杂零件为目标,设计了一套桌面式水平走丝微细电火花线切割加工装置,主要包括具有人机界面、任务规划和运动控制的开放式数控系统,走丝平稳、张力可控的分体式水平走丝机构,以及精确可控微小放电能量的纳秒级脉冲电源。     

基于Pro/E的电火花线切割曲面加工仿真软件开发

阐述了一种用于4轴联动电火花线切割曲面加工的CAD／CAM仿真软件，该软件以Pro／E为开发平台，利用Pro／E自身的二次开发工具TOOLKIT并结合VC＋＋6．0进行二次开发。该仿真软件根据电火花线切割加工的特点，从CAD曲面模型获取加工轨迹点数据，计算出电极丝的位姿，进而生成机床进行曲面加工所需要的NC指令代码，并可在毛坯模型中仿真曲面加工过程。     

微磨料水射流加工脆性玻璃的冲蚀机理研究

微磨料水射流加工技术正成为制造微细结构零件重要的经济高效的微细加工技术。作者在玻璃上进行微磨料水射流微细槽加工的实验基础上,对微磨料水射流加工的表面形貌、材料冲蚀去除机理及加工工艺性能进行了研究。结果表明,玻璃加工表面沿着槽道的方向形成了波纹状形貌,呈非对称或对称的波形,波纹表面很光滑,波纹图案沿着射流冲击区的径向方向发展。由于黏性流体的阻滞作用,脆性玻璃在微磨料水射流加工过程中,在黏性流区域没有发现任何裂纹,材料的冲蚀去除主要是以塑性断裂的方式为主,形成了光滑的加工表面。适当地控制加工工艺参数,在低压下,微磨料水射流加工是一种用于脆性材料上微细通道的加工切实可行的方法,并可获得良好的加工表面质量。     

Fabrication of curved micro structures on photoresist layer

A novel fabrication process for micro patterns with curvature was introduced. The curved structures were made by compensating rectangular micro structures with liquid photoresist layer. Because of the surface tension of the liquid in micro scale, various shapes of meniscus can be made on the micro channels. The micro channels were made on the silicon substrate in advance, and then the liquid layer was coated on the micro channels. From the nature of liquid behavior, the curved patterns with smooth surface are obtained, which cannot be made easily with the conventional mechanical machining, as well as with the microfabrication processes, such as wet and dry etching. With this principle, it is expected that the smooth and curved surfaces can be made by simple processes and the results can be applied widely, such as optical patterns.     

Modeling and fabrication of micro tools by pulsed electrochemical machining

Accurate and precise micro tools are essential for the micromachining of complex micro features in a wide range of engineering materials including metals and ceramics. Existing micro tool fabrication processes suffer from drawbacks such as surface cracks, residual stress and deformations. Electrochemical machining of micro tools is proposed in this work to overcome these limitations. In this research, a mathematical model has been developed to predict the diameter of the micro tool fabricated. Experimental verification of the model using an in-house built micro electrochemical machining system reveals good correlation with theoretical predictions. Using the procedure described in this paper, very high aspect ratio (280–450) tungsten micro tools have been produced.     

Diffusion Bonded EDM Electrode with Micro Holes for Jetting Dielectric Liquid

This paper describes improvement of machining characteristics of electrical discharge machining of deep slots using a tool electrode which has micro holes for jetting dielectric liquid over the working surface. The tool electrode was made by the diffusion bonding of two copper plates, over an interface on which micro grooves for jetting the dielectric fluid were formed using electrolyte jet machining. In conventional machining, it is difficult to drill micro holes at the end of a slim electrode and circulate the dielectric fluid from the other end. Hence a solid tool electrode is used and periodically lifted up during machining to flush debris particles out of the discharge gap. Use of the newly developed tool electrode was found to shorten the processing time and improve machining accuracy significantly compared with the conventional solid tool electrode. Since the holes are micro, the outlet shapes are not replicated onto the bottom surface of the slot machined.     

车铣加工UG-CAM制造技术研究与应用

应用TCL（Tool Command Language）开发了车铣加工中心BUNMOTECS192FT后处理模块,实现了该机床刀具中心点B轴随动的高级功能,利用UG～CAM数控编程技术,使用平头立铣刀,在车铣加工中心进行C、X、y轴联动,完成了零件曲面加工刀轨设计,解决了T型铣刀加工曲面环槽干涉问题,通过将平头立铣刀轴与曲面法线倾斜一定角度,避开平头立铣刀底齿中心切削,达到零件精度要求。     

机床沿曲线高速进给加工的最大安全恒定进给速度的确定

分析了曲线、曲面轮廓数控加工中,刀具路径曲线的几何特性与机床运动学特性的关系,建立了机床沿曲线恒速进给的运动学方程;基于虚功原理推导出刀具路径几何特性、机床特性及电机特性等之间关系的动力学方程.并用解析法,计算了在各坐标轴加速度、伺服电机额定转矩及额定转速约束条件下,机床沿曲线进给时的最大安全恒定进给速度.在最大安全恒定进给速度范围内,选择合适的进给速度,既能使加工表面粗糙度均匀,保证加工表面质量,同时又能获得较高的高速加工效率.     

Influence of Debris Accumulation on Material Removal and Surface Roughness in Micro Ultrasonic Machining of Silicon

Although micro ultrasonic machining (USM) has been successfully applied in generating micro features in hard and brittle materials such as silicon, the influence of machining parameters on the machining performance is not clearly understood. Experimental results show that the machining speed decreases with an increase in the static load beyond a certain level. In this study, the debris accumulation is proposed as the main reason leading to low machining efficiency. A mathematical model is also developed to analyze this phenomenon qualitatively. Experimental results reveal that the particle size is the dominate factor influencing the surface roughness in micro USM.     

微细丝数控电火花线切割加工机床的设计

以加工微小复杂零件为目标,对采用直径0.02 mm的微细电极丝进行数控电火花微精线切割加工技术及工艺研究,开发出了由微细丝走丝系统、细丝导向器和微精加工电源等构成的微细电火花线切割加工系统,研制了具有无电阻防电解电源、高效、高精度、高表面质量的微细丝数控单向走丝电火花线切割机床。     

三轴机床微细异型电极加工与尺寸误差分析

采用直线插补与圆弧插补算法,在三轴卧式微细电火花机床上加工出圆锥台、四棱台以及带有圆弧曲面的微细异型电极,并对加工结果尺寸误差及导致误差产生的原因进行了全面分析。结果表明,微细异型电极的尺寸误差均在2%以内,而放电间隙的随机性、机床运动精度、尺寸测量精度等均是导致误差形成的原因。     

UG二次开发在三阶切触加工刀位规划中的应用

非球头刀五轴数控加工可以通过调整刀具姿态,使得在刀触点处刀具包络曲面充分逼近理论设计曲面,从而显著提高给定精度下的切削带宽.研究了非球头刀宽行五轴加工自由曲面的三阶切触法,通过UG API几何造型的方法,精确计算切削带宽,并利用UG二次开发实现了平底刀加工自由曲面的刀位规划.算例结果表明该软件系统生成的刀具路径能显著提高加工效率.     

Curved surface finishing with flexible abrasive tool

A flexible abrasive tool has been developed for automatic finishing of curved surfaces on three-axes machining centers. The tool is made of thermosetting polyurethane elastomer with an overcoat of aluminum oxide abrasives. The tool is capable of conducting finishing operations and deforming itself in conformity to the shape of work surface. The tool performance such as finishing capability, conformability, and durability is examined during finishing experiments on ball-end milled surfaces of high-alloyed tool steel. It is demonstrated that the tool can finish curved surfaces successfully on three-axes machining centers. The tool/work contact pressure, which influences significantly the tool performance, is analytically estimated and utilized to determine the tool path producing a constant contact pressure. It is experimentally verified that the tool path improves the finished surface roughness.     

数控补加工技术的研究与应用

曲面交线、曲面内凹区域及曲面中浅平面的加工是曲面加工的难点。针对曲面加工中的补加工技术进行了详细的理论和工艺分析,对曲面交线、等高线补加工等的刀具轨迹生成算法进行了探讨,并在塑料瓶模具加工中进行了应用。     

New tool concept for grinding a plateau-like surface for tribological applications

One of the most important factors for energy efficiency is the reduction of friction in machine elements. The grinding process is often the final machining process in machining hardened steel parts and the resulting surface finish influences the tribological behavior. The combination of grinding with a honing process can generate a plateau-like surface to reduce friction and create an oil reservoir to decrease abrasive wear and improve the fluid film stability. Additional processes like laser machining, micro milling or etching are able to generate micro dimples to improve the reduction of friction. Today, grinding processes are limited to machine plateau-like surfaces. Within this paper, a new tool concept will be presented, composed of a grinding tool with two different grain sizes and a metallic bonding. The use of small abrasive grains generates a smooth surface with low roughness values. A few additional larger grains induce stochastic scratches and create the plateau-like surface. Grinding experiments are conducted to analyze the effect of feed rate, feed angle and ratio between small and large grains on the resulting surface.     

影响模具自由曲面加工质量的因素分析

全面分析了模具自由曲面的数控加工过程,介绍了影响曲面精度、表面质量的相关因素。提高模具曲面加工质量、精度需要多种因素的良好配合。     

An analysis of the surface generation mechanics of the elliptical vibration texturing process

The elliptical vibration texturing process is a vibration assisted machining method for the fast generation of micro structured surfaces. It adds a higher order motion component to the cutting tool that leads to periodic changes in the cutting depth during the machining process. This results in the creation of micro-dimples on the machined surface, whose shape is a function of the tool geometry and trajectory. This paper studies the surface generation mechanics of the elliptical vibration texturing process through experimentation and modeling. A surface generation algorithm is presented for this newly developed process. The model fully describes the motion and the 3D geometry of the cutting tool including its rake face, flank face, and the cutting edge, since all these tool features influence the topography of the generated surface. Since the process takes place in the micro/meso-scale cutting regime, the model includes the minimum chip thickness and elastic recovery effects. The experimental results are shown to validate the simulation model. The simulation model is used to characterize the influences of the process parameters on the texture patterns. The effects of the tool geometry on the process, including the cutting edge radius, are also analyzed.     

微细超声加工机床运动控制系统设计

微细超声加工机床设计包括硬件设计与运动控制系统设计,运动控制系统是机床的核心组成部分,直接或者间接地影响到加工质量与加工效率。采用宏微复合的硬件设计结构能有效地保证运动控制精度,针对精密微三维运动平台,基于LabVIEW开发了微细超声加工中的运动控制系统,该系统包括初始化模块、粗对刀模块、精确对刀模块、绝对坐标实时显示模块、数据采集模块与加工模块。将微细工具所受的实时力与微三维运动平台的运动结合形成闭环控制,能有效地实现精确对刀以及恒压力进给加工。最后,对控制系统进行了测试,研究了恒力控制范围与增量位移、进给速度、回退速度之间的关系。     

自由曲面加工仿真的干涉检测研究

利用UG生成的加工路径上的一系列刀位点,计算两相邻刀位点的中点与曲面之间的距离,根据加工精度的要求,对曲面加工进行干涉检测。这不但满足了加工精度的需要,而且使得干涉检测方法更加简单,有效。最后利用VC 和OpenGL对提出的干涉检测方法编程实现,进行了仿真实验,证实了干涉检测方法的合理性和可行性。