一种新型的压阻式硅微二维加速度计的设计

以压阻检测技术为基础并结合硅微MEMS加工技术设计了一种二维加速度计微结构,期望利用该新型的结构提高加速度计的灵敏度,实现二维方向的加速度检测.该加速度计采用四个相互垂直的悬臂梁支撑中间有刚硬柱体的结构,通过利用合理布置的压敏电阻构成的惠斯通电桥测量水平面内两个方向的加速度.建立了该结构的数学模型并用有限元分析软件ANSYS对敏感弹性元件进行分析.最后对加工出的加速度计进行了相关的测试.测试结果表明:该加速度计水平面内两个方向的灵敏度高、线形度较好,X向灵敏度为0.755 2 mv/g,线性度为0.999 67,Y向灵敏度为0.683 3 mv/g,线性度为0.999 66.     

压阻式微加速度计动态特性与阻尼的关系研究

采用微机械加工工艺制作的压阻式微加速度计在测试过程中经常出现动态特性欠佳甚至于结构损坏的现象，在压阻式微加速度计中，合理设计阻尼参数有助于改善传感器的动态特性。将压阻式微加速度计简化为二阶模型，定性分析了系统动态特性与阻尼之间的关系，研究了压阻式微加速度计结构中阻尼的设计和控制方法，仿真、比较了带不同阻尼参数传感器系统的动态特性，并通过实验验证了仿真分析的正确性。     

一种新型力平衡扭摆式硅MEMS角加速度传感器

在很多控制、监测和导航系统中,不仅需要角位移和角速度信息,同时还需要角加速度信息,为了测量角加速度信息,首次提出了一种力平衡扭摆式硅MEMS角加速度传感器,采用具有大扭转惯量的扭摆式活动极板作为敏感元件,长方形金属电极板作为电容式变换器,静电力实现力平衡反馈回路,文中介绍了扭摆式硅MEMS角加速度传感器的结构及原理,详细推导出传感器的动力学方程和灵敏度,仿真结果验证了理论模型的正确性,传感器灵敏度达到0.388 9 V·(r·s-1)-1.该传感器具有体积小、质量轻、功耗小、零偏稳定性好、噪声小等优点.     

一种新型硅压阻式流速流向传感器的设计

本文设计了一种基于体微机械加工技术、SU-8-光刻胶工艺和压阻检测的新型硅压阻式流速流向传感器.该传感器由立柱和支撑梁构成,这种结构将流体的流速流向信息转化为立柱的倾斜和相应的梁的变形,通过4根正交梁端部的压阻应变计来测量梁的变形.通过测量压电电阻的阻值变化就可以得到流体的流速和流向.利用惠斯通电桥来获得正弦电压输出.理论分析了器件的结构变形和电压输出,并用有限元方法进行了验证.为该传感器设计了一套基于键合技术的体微机械加工工艺.     

压阻式冲击硅微机械加速度传感器的温度补偿

给出了一种压阻式冲击硅微机械加速度传感器的温度补偿与实现方法.该方法采用串并联电阻来补偿加速度传感器的零位温度漂移,采用在电源后串联二极管来补偿加速度传感器的灵敏度温度漂移.具体实现时,采用高低温试验机对加速度传感器的环境温度进行变化,通过检测系统测量出4个压敏电阻在高低温时的电阻值,运用软件计算出补偿电阻值、补偿电阻在桥路中的位置以及串联二极管的数量,并根据计算结果构建出了带温度补偿的传感器检测电路.测试结果表明,这一方法能有效补偿加速度传感器的温度漂移.     

梳齿结构与振动梁复合的硅微谐振式加速度计非线性振动特性

硅微谐振式加速度计的非线性振动可以导致振动幅度噪声耦合到频率输出进而恶化器件的噪声性能,因此有必要对谐振式加速度计的非线性振动特性进行评估及优化,拓展线性振动范围。本文针对所设计的基于梳齿结构与振动梁复合的硅微谐振式加速度计进行了仿真与实验分析。首先对加速度计结构使用COMSOL仿真软件进行了非线性仿真分析,该方法通过在谐振梁的振动方向上施加一个静力,得到力与位移之间的关系,计算出非线性三次项系数k3,eff和线性系数keff的比值约为2.13×10^10 m^-2。然后,对双端固支音叉(DETF)进行扫频测试,得出DETF的非线性振动频响曲线。根据Duffing方程对实验数据进行拟合,得出器件两个DETF的非线性三次项系数k3,eff和线性系数keff的比值分别为2.24×10^10 m^-2和2.19×10^10 m^-2。仿真值与测试值的误差分别为5.2%和2.8%。实验结果与仿真值吻合得较好,印证了仿真方法的有效性和测试数据的可靠性。最后,对所设计的谐振加速度计进行非线性分析,当振幅小于35.4 nm时,DETF工作在线性区,可为后续谐振式加计的控制电路设计提供参考。     

一种集成三轴加速度、压力、温度的硅微传感器

针对恶劣环境和严格空间体积限制条件下的多参数测量问题,利用绝缘体上硅（SOI）材料,采用微型机械电子系统（MEMS）技术,研制了一种可以同时测量三轴加速度、绝对压力、温度参数的单片集成硅微传感器,其中加速度、绝对压力传感器基于掺杂硅压阻效应,温度传感器基于掺杂硅电阻温度效应.结合芯片中各传感器的工作原理,用有限元方法对设计的结构进行了仿真,确定集成传感器的电阻分布和结构参数.根据确定的集成传感器结构,制定了相应的制备工艺步骤.最后给出了集成传感器芯片的性能测试结果.     

Optimised cantilever biosensor with piezoresistive read-out

We present a cantilever-based biochemical sensor with piezoresistive read-out which has been optimised for measuring surface stress. The resistors and the electrical wiring on the chip are encapsulated in low-pressure chemical vapor deposition (LPCVD) silicon nitride, so that the chip is well suited for operation in liquids. The wiring is titanium silicide which-in contrast to conventional metal wiring-is compatible with the high-temperature LPCVD coating process.     

闭环点位置对静电悬浮加速度计性能影响研究

为研究差动电容式静电悬浮加速度计非线性、零偏、标度因数、噪声以及量程与闭环点位置的关系,推导了闭环点位置与上述参数关系的数学模型,分析了闭环点偏移来源。通过仿真和实验对比了闭环点调节前后系统非线性、零偏和量程,通过实验研究了闭环点位置波动对系统噪声的影响。仿真和实验结果表明,将敏感质量闭环点位置调节在机械零点附近可以降低系统非线性、零偏和系统噪声,并能提高理论量程。     

基于多温感测的加速度计组件的系统补偿研究

针对纯惯性激光陀螺快速定位定向仪系统巾石英挠性线加速度计及其转换电路在快速启动条件下.不同环境温度和同一环境温度系统未达到热平衡时输出零偏和当量漂移较大的M题,提出了系统级补偿方案,在实现硬件平台的基础上,通过大量温度实验,研究并采用多温度感测的BP神经网络进行补偿.研究指出,对于系统快速启动的温度补偿方案,温度传感器感温点的选取是实现有效温度补偿的关键之一.实验结果表明,多温感测的系统补偿方案与算法可有效提高补偿效率,缩短准备时间,使不同温度下初始对准姿态精度达到8",满足系统的指标要求.     

Direct and transmission milling of suspended silicon nitride membranes with a focused helium ion beam

Helium ion milling of suspended silicon nitride thin films is explored. Milled squares patterned by scanning helium ion microscope are subsequently investigated by atomic force microscopy and the relation between ion dose and milling depth is measured for both the direct (side of ion incidence) and transmission (side opposite to ion incidence) regimes. We find that direct-milling depth varies linearly with beam dose while transmission-milling depth varies with the square of the beam dose, resulting in a straightforward method of controlling local film thickness.     

Measuring displacement signal with an accelerometer

An effective and simple way to reconstruct displacement signal from a measured acceleration signal is proposed in this paper. To reconstruct displacement signal by means of double-integrating the time domain acceleration signal, the Nyquist frequency of the digital sampling of the acceleration signal should be much higher than the highest frequency component of the signal. On the other hand, to reconstruct displacement signal by taking the inverse Fourier transform, the magnitude of the significant frequency components of the Fourier transform of the acceleration signal should be greater than the 6 dB increment line along the frequency axis. With a predetermined resolution in time and frequency domain, determined by the sampling rate to measure and record the original signal, reconstructing high-frequency signals in the time domain and reconstructing low-frequency signals in the frequency domain will produce biased errors. Furthermore, because of the DC components inevitably included in the sampling process, low-frequency components of the signals are overestimated when displacement signals are reconstructed from the Fourier transform of the acceleration signal. The proposed method utilizes curve-fitting around the significant frequency components of the Fourier transform of the acceleration signal before it is inverse-Fourier transformed. Curve-fitting around the dominant frequency components provides much better results than simply ignoring the insignificant frequency components of the signal.     

Measurement of low shock pressures with piezoresistive carbon gauges

A new sensitive technique which permits the detection of small pressures in shock waves down to 5 bars with good time resolution has been developed. It consists of a pulsed double-compensated Wheatstone bridge in conjunction with piezoresistive carbon gauge transducers. It is shown that the advantages of piezoresistive gauges, such as short rise time, small dimensions, and in-material stress measurement, may be utilized for low shock pressure recording even in explosive environments, an area previously dominated by piezoelectric gauges. Comparative data for the two types of sensors are presented for shock tube side-on and head-on collision experiments and underwater explosions. This new development opens the possibility of PRG applications in classical fields of low shock pressure recording such as gas dynamics and underwater explosions.     

低阻压阻压力变送器的设计及性能测试

采用AD公司的AD693数字信号调理芯片,设计了一款低阻压阻压力变送器,给出了详细的应用电路设计方案,并且进行了相应的静态测试。测试数据表明,该变送器在20℃～60℃范围内具有优良的静态性能,以及非常理想的时漂,稳定性优于0．1％。     

一种新型的光纤光栅高频加速度传感器

提出了一种新型的高频响应光纤光栅加速度传感器,并进行了理论分析和实验研究.传感器由钢管、质量块组成弹性系统.将光纤光栅粘贴于钢管内部来感知应变,利用双光纤光栅匹配滤波解调技术,直接输出光强度信号,取得了谐振频率3 232 Hz、线性测量范围0.1-4 g、线性灵敏度669 mV/g的较好结果.     

Microthermogravimetry using a microcantilever hot plate with integrated temperature-compensated piezoresistive strain sensors

This paper reports thermogravimetric analysis of nanogram samples of paraffin using a microcantilever hot plate. The microcantilever hot plate has an integrated temperature-controlled heater and integrated temperature-compensated strain-sensing piezoresistors. The microcantilever vibration amplitude was measured using either a laser and a position sensitive photodiode, or using the piezoresistors. The cantilever resonance was measured as the cantilever was heated, such that the analyte mass could be measured as a function of temperature. Both optical and piezoresistive methods were employed to generate thermogravimetric curves for analytes in the range of 1-3 ng, and the results of the two methods compared well.     

基于加速度计和磁强计的方位测量与校正技术研究

根据随钻测量的要求,描述了基于三轴加速度计与三轴磁强计测量钻具方位的方法,并针对铁磁性材料造成干扰磁场对方位测量引入的误差,提出了两种利用当地地磁场进行方位校正的方法--直接校正法和间接校正法,前者通过校正公式直接进行校正,后者通过循环递推逐次收敛于真实的方位.在原理分析的基础上,得出具体的校正算法,并通过数据仿真进行验证.结果表明,两种校正方法均能消除钻具干扰磁场的影响,获得准确的方位角,因此可以大大减少无磁钻铤的长度,节省钻进成本.     

Calibration of lateral force measurements in atomic force microscopy with a piezoresistive force sensor

We present here a method to calibrate the lateral force in the atomic force microscope. This method makes use of an accurately calibrated force sensor composed of a tipless piezoresistive cantilever and corresponding signal amplifying and processing electronics. Two ways of force loading with different loading points were compared by scanning the top and side edges of the piezoresistive cantilever. Conversion factors between the lateral force and photodiode signal using three types of atomic force microscope cantilevers with rectangular geometries (normal spring constants from 0.092 to 1.24 N/m and lateral stiffness from 10.34 to 101.06 N/m) were measured in experiments using the proposed method. When used properly, this method calibrates the conversion factors that are accurate to +/-12.4% or better. This standard has less error than the commonly used method based on the cantilever's beam mechanics. Methods such of this allow accurate and direct conversion between lateral forces and photodiode signals without any knowledge of the cantilevers and the laser measuring system.     

振动整流法辨识加速度计非线性误差模型系数

为了研究精确标定加速度计在线振动与高g的环境下的误差模型系数的方法.首先介绍了双轴离心机的特点.在反转平台上设计了双轴夹具,然后精确计算了加速度计3个轴的输入比力.经过主轴和反转平台轴正反角位置静态实验,以及主轴与反转平台轴以等值反方向的匀角速率旋转的动态实验,通过振动整流法,并补偿掉静态均值,精确辨识了加速度计的误差模型系数.依据仿真结果可得:该实验方法能够抑制离心机误差对标定精度的影响,其中反转平台的静动态失准角对标定影响最大,应该提高离心机静动态失准角的测试精度,并加以补偿.