Effect of gas feeding methods on optical properties of GaN grown by rapid thermal chemical vapor deposition reactor

The origin of the radiative recombination leading to yellow luminescence (YL) has been elucidated by the study of luminescence properties of GaN films grown with two different gas feeding methods. GaN films were grown on a (0001) sapphire substrate in a rapid thermal chemical vapor deposition (RTCVD) reactor. GaN films emitted two different luminescence energies, 2.2 and 3.47 eV, depending on the introducing position of hydrogen gas in the growth reactor. The distribution of the TMGa flow and gas phase reactions in the reactor were investigated to understand the effect of the gas feeding methods on the optical properties of GaN films. The results suggest that YL is related to Ga vacancies in the grown films.     

Influence of dry and wet cleaning on the properties of rapid thermal grown and deposited gate dielectrics

Various silicon surface cleaning processes for rapid thermal in-situ polysilicon/ oxide/silicon stacked gate structures have been evaluated. Metal-oxide-semiconductor capacitors were fabricated to assess the effects of cleaning on the quality of gate oxide structures produced by both rapid thermal oxidation (RTO) and rapid thermal chemical vapor deposition (RTCVD). Excellent electrical properties have been achieved for both RTO and RTCVD gate oxides formed on silicon wafers using either an ultraviole/zone (UV/O₃) treatment or a modified RCA clean. On the contrary, poor electrical properties have been observed for RTO and RTCVD gate oxides formed on silicon wafers using a high temperature bake in Ar, H₂, or high vacuum ambient. It has also been found that the electrical properties of the RTCVD gate oxides exhibit less dependence upon cleaning conditions than those of RTO gate oxides. This work demonstrates that initial surface condition prior to gate oxide formation plays an important role in determining the quality of RTO and RTCVD gate oxides.     

Deposition of tantalum oxide films by dual spectral source assisted metalorganic chemical vapor deposition (MOCVD)

Dual spectral source assisted metalorganic chemical vapor deposition (MOCVD) is an ideal technique for the deposition of high dielectric constant materials. Tungsten halogen lamps and a deuterium lamp are used as the sources of optical and thermal energy. In this paper, we have reported the deposition and characterization of tantalum penta oxide films. Ta₂O₅ films were deposited at 660°C for 15 min and annealed at 400°C for 1 h. The leakage current densities of 10.6 nm thick films are as low as 10₋₁₀ A/cm² for gate voltage under 4V. To the best of our knowledge, these are the best results reported to date by any researcher. The high energy photons used in the in-situ cleaning and deposition process play an important role in obtaining high quality films of Ta₂O₅.     

Low temperature plasma enhanced chemical vapor deposition of silicon oxide films using disilane and nitrous oxide

Silicon oxide films have been deposited between room temperature and 300°C using disilane and nitrous oxide by plasma enhanced chemical vapor deposition. Film deposition was investigated as a function of the gas flow ratio of nitrous oxide to disilane, the substrate temperature, the total gas flow rate, the radio frequency discharge power, and the process pressure. The stoichiometric SiO₂ films were obtained when the gas ratio of nitrous oxide to disilane was in the range of 50-150. The deposition was found to be nearly temperature independent indicating the mass transport limited regime.     

Metalorganic chemical vapor deposition of HgCdTe for photodiode applications

Metalorganic chemical vapor depositon (MOCVD) in situ growth of p-on-n junctions for long wavelength infrared (LWIR) and medium wavelength infrared (MWIR) photodiodes is reported. The interdiffused multilayer process was used for the growth of the HgCdTe junctions on CdTe and CdZnTe substrates. The n-type region was grown undoped while the p-type layer was arsenic doped using tertiarybutylarsine. Following a low temperature anneal in Hg vapor, carrier densities of (0.2-2) x 10¹⁵ cm³ and mobilities of (0.7-1.2) x 10⁵ cm²/V-s were obtained for n-type LWIR (x ~ 0.22) layers at 80K. Carrier lifetimes of these layers at 80 K are ~l-2 μs. For the p-type region arsenic doping was controlled in the range of (1-20) x 10¹⁶ cm^-3. Arsenic doping levels in the junctions were determined by calibrated secondary ion mass spectroscopy depth profile measurements. Composition and doping of the p-on-n heterojunctions could be independently controlled so that the electrical junction could be located deeper than the change in the composition. The graded composition region between the narrow and wide (x = 0.28-0.30) bandgap regions are 1–2 μm depending on the growth temperature. Backside-illuminated variable-area circular mesa photodiode arrays were fabricated on the grown junctions as well as on ion implanted n-on-p MWIR junctions. The spectral responses are classical in shape. Quantum efficiencies at 80K are 42–77% for devices without anti-reflection coating and with cutoff wavelengths of 4.8–11.0 μm. Quantum efficiencies are independent of reverse bias voltage and do not decrease strongly at lower temperatures indicating that valence band barrier effects are not present. 80K R_oA of 15.9 Ω-cm² was obtained for an array with 11.0 μm cutoff. Detailed measurements of the characteristics of the MOCVD in situ grown and implanted photodiodes are reported.     

Metalorganic chemical vapor deposition growth and characterization of InGaP/GaAs superlattices

Lattice-matched In_0.49Ga_0.51P/GaAs superlattices were grown on (001) GaAs substrates using metalorganic chemical vapor deposition. The interface properties were characterized by photoluminescence, transmission electron microscopy, and x-ray diffraction. By varying the growth temperature, the precursor flow rates, and the growth interruption at the interfaces, we found that, while arsenic and phosphorus carry over have some effect on the formation of a low-bandgap InGaAsP quaternary layer at the interfaces, the In surface segregation seems to play an important role in the formation of the interface quaternary layer. Evidence of this indium segregation comes from x-ray and photoluminescence studies of samples grown at different temperatures. These studies show that the formation of an interfacial layer is more prominent when the growth temperature is higher. Growing a thin (∼1 monolayer thick) GaP intentional interfacial layer on top of the InGaP before the growth of the GaAs layer at the P→As transition effectively suppresses the formation of the low-bandgap unintentional interface layer. On the other hand, the growth of a thin GaAsP (or GaP) layer before the growth of the InGaP layer, at the As→P transition increases the formation of a low-bandgap interfacial layer. This nonequivalent effect of a GaP layer at the two interfaces on the PL properties is discussed.     

Metalorganic chemical vapor deposition growth of high optical quality and high mobility GaN

Hall mobilities as high as 702 and 1230 cm²/Vs at 300 and 160K along with low dislocation densities of 4.0 × 10⁸ cm^-2 have been achieved in GaN films grown on sapphire by metalorganic chemical vapor deposition. High growth temperatures have been established to be crucial for optimal GaN film quality. Photoluminescence measurements revealed a low intensity of the deep defect band around 550 nm in films grown under optimized conditions.     

Mechanism of hemispherical-grained Si formation for dynamic random access memory cells by rapid thermal chemical vapor deposition

An uneven coating made of hemispherical-grained Si (HSG) was formed on an amorphous Si layer by a rapid thermal chemical vapor deposition (CVD) (RTCVD) process. The uneven coating increases the effective surface area of a capacitor electrode in dynamic random access memory (DRAM) cells. The formation of the HSG consists of “seeding” and subsequent isothermal annealing stages. During the seeding stage, nanometer size Si single crystals are formed on the surface of the amorphous Si layer. During rapid thermal annealing at 665°C, under high vacuum, the Si grains grow linearly with increasing temperature and reach an average size of 95 nm after 20 sec. The nucleation and growth of the HSG occurs within a narrow range of temperature and time, which is sufficient for a short diffusion path of Si atoms on the surface of the amorphous Si layer, but insufficient for crystallization of the amorphous Si layer: The HSG coating increases the capacitance of a memory cell by a factor of 2.     

The growth of AlInSb by metalorganic chemical vapor deposition

We have grown Al_xIn_1−xSb epitaxial layers by metalorganic chemical vapor deposition using tritertiarybutylaluminum (TTBAl), trimethylindium (TMIn), and triethylantimony (TESb) as sources in a high speed rotating disk reactor. Growth temperatures of 435 to 505°C at 200 Torr were investigated. The V/III ratio was varied from 1.6 to 7.2 and TTBAl/(TTBAl+TMIn) ratios of 0.26 to 0.82 were investigated. Al_xIn_1−xSb compositions from x=0.002 to 0.52 were grown with TTBAl/(TTBAl+TMIn) ratios of 0.62 to 0.82. Under these conditions, no Al was incorporated for TTBAl/(TTBAl+TMIn) ratios less than 0.62. Hall measurements of Al_xIn_1−xSb showed hole concentrations between 5×10¹⁶ cm⁻³ to 2 × 10¹⁷ cm⁻³ and mobilities of 24 to 91 cm²/Vs for not intentionally doped Al_xIn_1−xSb.     

Mass spectroscopy study of GaN metalorganic chemical vapor deposition

Metalorganic chemical vapor phase deposition of GaN on (100) GaAs has been studied using mass spectroscopy. With increasing substrate temperature, the amount of decomposed trimethylgallium (TMGa) was observed to increase exponentially with a characteristic energy of 1.5 eV. The presence of NH₃ was found to suppress the production of CH₃ in the gas phase. This implies that CH₃ of TMGa reacts with the hydrogen atom of NH₃, forming CH₄ as a main gas product. Studies of nitrogen evaporation from the growth surface when TMGa flow was off lead to the conclusion that increased growth rate could result in decreased background electron concentration due to nitrogen vacancy. The presence of NH₃ significantly promotes the decomposition of TMGa. Desorption of excess Ga atoms from the growth surface at low NH₃ flow rates takes place as suggested by the increased ratio of peak intensity of Ga (m/e = 69) to that of DMGa ((CH₃)₂Ga, m/e- 99) with decreasing NH₃ flow rate.     

Ultra-shallow raised p+−n junctions formed by diffusion from selectively depositedIn-situ doped Si0.7Ge0.3

In this paper, a novel raised p⁺−n junction formation technique is presented. The technique makes use ofin- situ doped, selectively deposited Si_0.7Ge_0.3 as a solid diffusion source. In this study, the films were deposited in a tungsten halogen lamp heated cold-walled rapid thermal processor using SiCl₂H₂, GeH₄, and B₂H₆. The microstructure of the Si_0.7Ge_0.3 layer resembles that of a heavily defected epitaxial layer with a high density of misfit dislocations, micro-twins, and stacking faults. Conventional furnace annealing or rapid thermal annealing were used to drive the boron from thein- situ doped Si_0.7Ge_0.3 source into silicon to form ultra-shallow p⁺−n junctions. Segregation at the Si_0.7Ge_0.3/Si interface was observed resulting in an approximately 3:1 boron concentration discontinuity at the interface. Junction profiles as shallow as a few hundred angstroms were formed at a background concentration of 10¹⁷ cm⁻³.     

Realization of intrinsic p-type ZnO thin films by metal organic chemical vapor deposition

P-type ZnO thin films were grown on sapphire substrates with and without nitrous oxide (N₂O) by metal organic chemical vapor deposition (MOCVD). The intrinsic p-type ZnO films were achieved by controlling the Zn:O ratio in the range of 0.05–0.2 without N₂O flow. Secondary ion mass spectroscopy (SIMS) showed that the films contained little or no nitrogen (N) impurities for all samples. The p-type behavior of the samples should be due to the intrinsic acceptor-like defects V_Zn, for ZnO film grown without nitrous oxide, and N, occupying O sites as acceptors for ZnO film grown with nitrous oxide. The best p-type ZnO film has low resistivity of 0.369 Ω-cm, high carrier density of 1.62×10¹⁹ cm⁻³, and mobility of 3.14 cm²/V-s. The obtained p-type ZnO films possess a transmittance of nearly 100% in the visible region and strong near-band-edge emission.     

High-Quality GaN heteroepitaxial films grown by metalorganic chemical vapor deposition

In this paper, we describe the growth and characterization of high-quality GaN heteroepitaxial films grown on basal-plane sapphire substrates using metalorganic chemical vapor deposition. The quality of these films is analyzed by a variety of methods, including high-resolution x-ray diffraction, optical transmission spectroscopy, transmission electron microscopy (TEM), room temperature photoluminescence, and room-temperature Hall measurements. The x-ray diffraction full width at half maximum value of ΔΘ ～37 arc s is the narrowest reported to date for any III-V nitride film on any substrate. The x-ray rocking curves for ～0.48 μm thick GaN/Al₂O₃ heteroepitaxial layers exhibit Pendellösung fringes, indicating that even relatively thin films can be of high quality. High-resolution TEM lattice images further attest to the excellent structural quality, showing the films to be completely free of stacking faults. Furthermore, no evidence of columnar growth is observed.     

InGaAs quantum dots formed in tetrahedral-shaped recesses on GaAs (111)B grown by metalorganic chemical vapor deposition

Novel semiconductor quantum dots (QDs), grown in tetrahedral-shaped recesses (TSRs) formed on a (111)B GaAs substrate, are described from both material science and device application points of view. After explaining the fabrication procedure for TSRs, growth of InGaAs QDs and their optical properties are explained. It is revealed that an InGaAs QD of indium-rich chemical composition is formed spontaneously at the bottom of each TSR. The mechanism of the QD formation is discussed in detail. It is proved from magneto-photoluminescence that the QDs actually have optical properties peculiar to zero-dimensional confinement. Several experimental results indicating excellent growth controllability of the QDs are presented. Finally, recent challenges to apply the QDs to electronic memory devices are reported. Two kinds of devices, where the position of individual QD is artificially controlled, are proposed for the first time and the preliminary experimental results are explained.     

Growth of GaxIn1−xAs1−ySby alloys by metalorganic chemical vapor deposition

The quaternary GaInAsSb alloy system with direct band gaps adjustable in wavelength from 1.7 to 4.3 μm, which may provide the basis for emitters and detectors over this entire region, was studied. Alloys of GaInAsSb were grown lattice-matched on GaSb substrates by metalorganic chemical vapor deposition using a conventional atmospheric pressure horizontal reactor. The properties of the GalnAsSb alloys were characterized by single crystal x-ray rocking curves, the double crystal x-ray rocking curves, the photoluminescence and infrared absorption. A preliminary study of the capabilities of scanning electron acoustic microscopy in the characterization of GaInAsSb alloy has been made, some observations are briefly compared with scanning electron microscopy.     

High performance AlAs/GaXIn1-xAs resonant tunneling diodes by metalorganic chemical vapor deposition

We report on AlAs/Ga_xJn_1−xAs (x = 0.47) quantum well heterostructures grown by metalorganic chemical vapor deposition (MOCVD) on InP substrates. Heterostructure quality was evaluated by high resolution x-ray diffraction for various growth conditions. Double barrier quantum well heterostructures were grown and processed into resonant tunneling diodes (RTDs). Room temperature electrical measurements of the RTDs yielded maximum peak to valley current ratios of 7.7 with peak current density of 96 kA/cm² and 11.3 with peak current density of 12 kA/cm², for devices grown by atmospheric and low pressure MOCVD, respectively.     

Influences of ZnO buffer layers on the quality of ZnO films synthesized by the metal-organic chemical vapor deposition process

High-quality ZnO thin films were prepared by metal-organic chemical vapor deposition (MOCVD) on a sapphire (a-Al₂O₃) substrate. The synthesis of ZnO films was performed over a substrate temperature of 400–700°C and at chamber pressures of 0.1–10 torr. The structural and optical properties of ZnO films were investigated in terms of deposition conditions, such as substrate temperature, working pressure, and the ratio of Zn precursor (Diethylzinc (DEZn)) to oxygen. The ZnO films, preferentially oriented to 34.42° diffraction because of the (002) plane, were obtained under processing conditions of 700°C and 3 torr. This film shows a full-width at half-maximum (FWHM) of 0.4–0.6°. The results of photoluminescence (PL) spectroscopy also show a strong near band-edge emission at 3.36 eV at 10 K as well as a very weak emission at deep levels around 2.5 eV at room temperature. In addition, we are interested in the introduction of ZnO buffer-layer growth by the sputtering process to reduce lattice mismatch stress. This paper addresses how to advance the crystalline and optical properties of film. The ZnO film grown with the aid of a buffer layer shows a FWHM of 0.06–0.1° in the x-ray diffraction (XRD) pattern. This result indicates that crystalline properties were highly improved by the ZnO buffer layers. The PL spectroscopy data of ZnO film also shows a strong near band-edge emission and very weak deep-level emission similar to films synthesized without a buffer layer. Accordingly, synthesized ZnO films with buffer layers indicate fairly good optical properties and low defect density as well as excellent crystallinity.     

A comparison of TMGa and TEGa for low-temperature metalorganic chemical vapor deposition growth of CCI4-doped inGaAs

Factors which influence the alloy composition and doping level of CCl₄-doped In_0.53Ga_04.7As grown at low temperatures (450°C < T_g < 560°C) by low-pressure metalorganic chemical vapor deposition (MOCVD) have been investigated. The composition is highly dependent on substrate temperature due to the preferential etching of In from the surface during growth and the temperature-dependent growth efficiency associated with the Ga source. The lower pyrolysis temperature of TEGa relative to TMGa allows the growth of CCl₄-doped InGaAs at lower growth temperatures than can be achieved using TMGa, and results in improved uniformity. High p-type doping (p ∼ 7 × 10¹⁹ cm^-8) has been achieved in C-doped InGaAs grown at T = 450°C. Secondary ion mass spectrometry analysis of a Cdoping spike in InGaAs before and after annealing at ∼670°C suggests that the diffusivity of C is significantly lower than for Zn in InGaAs. The hole mobilities and electron diffusion lengths in p⁺-InGaAs doped with C are also found to be comparable to those for Be and Zn-doped InGaAs, although it is also found that layers which are highly passivated by hydrogen suffer a degradation in hole mobility. InP/InGaAs heterojunction bipolar transistors (HBTs) with a C-doped base exhibit high-frequency performance (f_t = 62 GHz, f_max=42 GHz) comparable to the best reported results for MOCVD-grown InP-based HBTs. These results demonstrate that in spite of the drawbacks related to compositional nonuniformity and hydrogen passivation in CCl₄-doped InGaAs grown by MOCVD, the use of C as a stable p-type dopant and as an alternative to Be and Zn in InP/ InGaAs HBTs appears promising.     

Metalorganic chemical vapor deposition of HgCdTe p/n junctions using arsenic and iodine doping

We report new results on metalorganic chemical vapor deposition (MOCVD)in situ growth of long wavelength infrared (LWIR) P-on-n and medium wavelength infrared (MWIR) n-on-P HgCdTe heterojunction photodiodes using the interdiffused multilayer process (IMP). The n-type regions are doped with iodine using the precursor ethyl iodide (El). I-doped HgCdTe using El has mobilities higher than that obtained on undoped background annealed films and are comparable to LPE grown In-doped HgCdTe. The p-type layers are doped with arsenic from either tertiarybutylarsine (TBAs) or a new precursor,tris-dimethylaminoarsenic (DMAAs). The substrates used in this work are lattice matched CdZnTe oriented (211)B or (100)4°→«110». Junction quality was assessed by fabricating and characterizing backside-illuminated arrays of variable-area circular mesa photodiodes. This paper presents four new results. First, carrier lifetimes measured at 80K on arsenic doped single HgCdTe layers are generally longer for films doped from the new precursor DMAAs than from TBAs. Second, we present data on the first P-on-n HgCdTe photodiodes grownin situ with DMAAs which have R₀A products limited by g-r current at 80K for λ_co = 7–12 μm, comparable to the best R₀A products we have achieved with TBAs. Third, we report the first experimental data on a new HgCdTe device architecture, the n-on-P heterojunction, with a wide gap p-type layer which allows radiation incident through the substrate to be absorbed in a narrower gap n-type layer, thereby eliminating interface recombination effects. With the n-on-P architecture, MWIR photodiodes were obtained reproducibly with classical spectral response shapes, high quantum efficiencies (70-75%) and R₀A products above 2 x 10⁵ ohm-cm² for λ_co = 5.0 μm at 80K. Fourth, we report 40K data for LWIR P-on-n HgCdTe heterojunction photodiodes (using TBAs), with R₀A values of 2 x 10⁴ ohm-cm² for λ_co = 11.7 μm and 5 x 10⁵ ohm-cm² for λ_co - 9.4 μm. These are the highest R₀A values reported to date for LWIR P-on-n heterojunctions grownin situ by MOCVD.     

Metalorganic chemical vapor deposition and characterization of ZnO materials

Zinc oxide is attracting growing interest for potential applications in electronics, optoelectronics, photonics, and chemical and biochemical sensing, among other applications. We report herein our efforts in the growth and characterization of p- and n-type ZnO materials by metalorganic chemical vapor deposition (MOCVD), focusing on recent nitrogen-doped films grown using diethyl zinc as the zinc precursor and nitric oxide (NO) as the dopant. Characterization results, including resistivity, Hall measurements, photoluminescence, and SIMS, are reported and discussed. Electrical behavior was observed to be dependent on illumination, atmosphere, and heat treatment, especially for p-type material.