印刷氧化铝技术在黑硅PERC多晶太阳电池中的应用

黑硅PERC多晶太阳电池采用背抛光工艺,其背面刻蚀深度在4.0±0.2μm,在800～1050 nm的光学波长范围内,其反射率较常规刻蚀制备的黑硅多晶太阳电池提升了10%左右;采用氧化铝及氮化硅钝化制备的黑硅PERC多晶太阳电池,WT-2000测得其少子寿命达到33μs;开路电压提升了15.2 mV,短路电流提高了0.372 A,效率达到20.06%。     

原子层沉积Al_2O_3钝化膜在太阳电池上的应用研究

通过原子层沉积(ALD)法制备晶体硅钝化发射极背面接触(PERC)太阳电池中的Al_2O_3钝化膜,研究ALD工艺三甲基铝(TMA)流量、H_2O流量对Al_2O_3沉积速率的影响。采用不同厚度的Al_2O_3钝化膜制备晶体硅PERC太阳电池,结果显示电池效率随Al_2O_3膜厚的增加呈先升后降趋势,Al_2O_3厚度为7 nm时电池效率最高,达到了19.15%。     

Al2O3/SiOxNy/SiNx叠层钝化膜对PERC太阳电池性能及LID效应的研究

由于等离子体增强化学的气相沉积（PECVD）法制备的SiO_xN_y薄膜中含有大量H原子,因而具有优异的表面钝化性能。通过在PERC太阳电池的Al₂O₃/SiN_x背钝化叠层中间插入一层SiO_xN_y薄膜,形成Al₂O₃/SiO_xN_y/SiN_x结构,可避免SiN_x所带的固定正电荷对Al₂O₃负电荷场钝化效应的负面影响。试验结果表明,硅片少子寿命从原来的130 μs提高至162 μs,电池转换效率增加0.09%。同时,基于Al₂O₃/SiO_xN_y/SiN_x背钝化的PERC太阳电池的LID也得到了改善,由对照组的1.83%下降到实验组的1.09%。     

"SE+PERC"单晶硅太阳电池制绒工艺中微观绒面的研究

制绒是太阳电池表面处理过程中不可或缺的环节,制绒效果的好坏直接决定了太阳电池光电转换效率的高低,而金字塔尺寸的大小与排列的均匀程度是表征制绒效果的重要参数,同样会影响太阳电池的光电转换效率.以采用选择性发射极(SE)及钝化发射极和背接触(PERC)技术的单晶硅太阳电池(即"SE+PERC"单晶硅太阳电池)为例,通过调整...     

PERC太阳电池发射极表面优化设计与模拟

通过模型计算,分析了发射极表面对PERC太阳电池转换效率的影响;然后设计了不同条件下的扩散和热氧化工艺实验,得到了最高转换效率达22.30%的PERC太阳电池;并对实验结果进行拟合,优化后的扩散和热氧化工艺降低了发射极表面复合速率,提高了电池的转换效率。     

不同单晶硅太阳电池机械性能分析

随着太阳电池技术的发展,新电池技术不断出现,太阳电池的主栅数量也在增加。本文采用四点弯曲方式测试不同主栅数量电池、单晶硅钝化发射极背面接触(PERC)电池的机械性能,初步探讨主栅数量及不同生产工艺对电池抗弯强度的影响。研究表明:随着太阳电池主栅数量增加,电池抗弯强度没有明显变化,PERC电池的抗弯强度略低于常规电池,PERC电池不同激光刻槽设计对电池抗弯强度存在影响。     

PERC太阳电池测试分析研究

介绍了PERC太阳电池的基本结构及相关技术发展趋势,针对单晶和多晶PERC太阳电池,采用LED作为光源的太阳模拟器进行测试验证。结果表明:在相同条件下,单晶PERC电池在脉冲100 ms时的转换效率比在10 ms时提升了1.7%;多晶PERC电池在脉冲100 ms时的转换效率比在10 ms时提升了1.5%。进一步验证了PERC技术有利于实现高效晶硅电池的产业化生产,具有很高的实际意义。     

激光开槽对MWT+PERC单晶硅太阳电池性能影响的研究

金属缠绕穿透(MWT)技术和钝化发射极及背接触(PERC)技术叠加应用可获得较高的硅太阳电池转换效率,且可以降低硅材料的损耗,但不同的背面激光开槽工艺会对电池的电性能产生不同影响。在保证同批次单晶硅片的背面开槽率(2.10%)不变时,针对MWT+PERC单晶硅太阳电池工艺中的背面激光开槽工艺进行了研究。通过调节激光功率的大小来改变开槽宽度与开槽线间距的大小,从而探究不同开槽图形对MWT+PERC单晶硅太阳电池电性能的影响;同时在3D显微镜下观察不同开槽宽度时硅片表面的激光光斑质量,并采用扫描电子显微镜(SEM)观察不同开槽宽度时这类电池烧结后局部接触区域的形貌。结果表明,开槽宽度在33～35μm、开槽线间距为0.90±0.05 mm时,MWT+PERC单晶硅太阳电池的电性能及开槽形貌质量最佳。     

光热退火对多晶PERC太阳电池光致衰减效应的影响

针对多晶PERC电池严重的光致衰减问题,研究不同退火方式对多晶PERC太阳电池光诱导衰减效应的影响,通过设计不同退火条件,对退火后的寿命片和电池片光电性能进行系统表征,发现不同退火条件对多晶寿命片和电池片的光衰有较大影响。通过研究对比确定最佳工艺,可较大程度地抑制多晶PERC太阳电池的光衰效应,同时又不影响电池片的转换效率,为探究抑制多晶PERC太阳电池光衰提供了方法和思路。     

“SE+PERC”单晶硅太阳电池发射极方阻均匀性提升工艺的研究

针对“SE+PERC”单晶硅太阳电池制备过程中,管式扩散炉扩散后硅片发射极方阻均匀性差的问题,在扩散工艺的“预沉积”步骤设计小氮气(N₂)流量、氧气(O₂)流量、炉内压强参数变化实验,研究小N₂流量、O₂流量和炉内压强变化对发射极方阻、方阻均匀性及太阳电池电性能的影响。研究结果表明：通过调整小N₂流量、O₂流量及扩散过程中的炉内压强可以有效提高发射极方阻均匀性,并提高太阳电池的光电转换效率。在小N₂流量为1000 sccm、O₂流量为600 sccm、炉内压强为80 kPa的工艺条件下可实现发射极的方阻均匀性最佳,均值为4.94%;此时“SE+PERC”单晶硅太阳电池的光电转换效率为23.11%。     

Large-size multi-crystalline silicon solar cells with honeycomb textured surface and point-contacted rear toward industrial production

In this paper, we present a multi-crystalline solar cell with hexagonally aligned hemispherical concaves, which is known as honeycomb textured structure, for an anti-reflecting structure. The emitter and the rear surface were passivated by silicon nitride, which is known as passivated emitter and rear (PERC) structure. The texture was fabricated by laser-patterning of silicon nitride film on a wafer and wet chemical etching of the wafer beneath the silicon nitride film through the patterned holes. This process succeeded in substituting the lithographic process usually used for fabricating honeycomb textured structure in small area. After the texturing process, solar cells were fabricated by utilizing conventional fabrication techniques, i.e. phosphorus diffusion in tube furnace, deposition of anti-reflection film and rear passivation film by chemical vapor deposition, front and rear electrodes formation by screen printing, and contact formation by furnace. By adding relatively small complicating process to conventional production process, conversion efficiency of 19.1% was achieved with mc-Si solar cells of over 200 cm² in size. The efficiency was independently confirmed by National Institute of Advanced Industrial Science and Technology (AIST).     

Comparison of multicrystalline silicon surfaces after wet chemical etching and hydrogen plasma treatment: application to heterojunction solar cells

The modifications of the surface and subsurface properties of p-type multicrystalline silicon (mc-Si) after wet chemical etching and hydrogen plasma treatment were investigated. A simple heterojunction (HJ) solar cell structure consisting of front grids/ITO/(n)a-Si:H/(p)mc-Si/Al was used for investigating the conversion efficiency. It is found that the optimized wet chemical etching and cleaning processes as a last technological step before the deposition of the a-Si:H emitter are more favorable to HJ solar cells fabrication than the hydrogenation. Solar cells on p-type mc-Si were prepared without high-efficiency features (point contacts, back surface field). They exhibited efficiencies up to 13% for a cell area of 1 cm² and 12% for a cell area of 39 cm².     

Double porous silicon layer on multi-crystalline Si for photovoltaic application

Double porous silicon (d-PS) layers formed by acid chemical etching on a top surface of n⁺/p multi-crystalline silicon solar cells were investigated with the aim to improve the performance of standard screen-printed silicon solar cells. First a macro-porous layer is formed on mc-Si. The role of this layer is texturization of surface. Next, the cells have been manufactured using standard technology based on screen-printing metallization. Finally, a second mezo-porous layer in n⁺ emitter of cell has been produced. The role of this PS layer is to serve as an antireflection coating. In this way, we have obtained d-PS layers on these solar cells. The paper present observation of d-PS microstructure with SEM as well as measurements of its effective reflectance at the level of 2.5% in the 400–1000 nm length wave range. The efficiency of the solar cells with this structure is about 12%.     

烧结曲线对多晶PERC太阳电池光致衰减效应的影响

针对多晶PERC太阳电池其较大的光衰效应会影响功率输出的问题,研究烧结曲线对多晶PERC太阳电池光致衰减效应的影响。在常规烧结曲线1的基础上通过改变烧结曲线峰值温度位置得到优化烧结曲线2和优化烧结曲线3,然后将双面沉积Al2O3/SiNx叠层钝化膜的寿命片和丝网印刷后的多晶PERC电池分别采用不同烧结曲线热处理,最后将样品在70℃、800 W/m2环境下进行45 h光衰处理。结果发现经过烧结曲线1~曲线3处理后的寿命片少子寿命衰减率分别为63%、42%和23%,多晶PERC太阳电池转换效率的衰减率分别为6.46%、3.55%和2.30%,光衰处理后的多晶PERC电池的EL测试结果显示烧结曲线1亮度最小,曲线2次之,曲线3最大。以上结果表明,仅通过烧结炉的烧结曲线优化就可以很明显地减小多晶PERC太阳电池的光致衰减幅度,可为探究抑制多晶PERC太阳电池光致衰减效应的方法提供一种全新的思路。     

Large area 15.8% n-type mc-Si screen-printed solar cell with screen printed Al-alloyed emitter

A record efficiency of 15.8% (independently confirmed at Fraunhofer ISE calibration laboratory) is reported on large area (120 cm²) n-type mc-Si rear junction Si solar cell. Minor modifications to the industrial process for p-type, such as optimization of Al-alloyed screen-printed emitter and phosphorus front surface field, led to an improvement in cell properties. Large improvement in short-circuit current of the cell was possible by decreasing the cell thickness to 130 μm.     

全角度陷光的微-纳复合绒面单晶PERC太阳电池

采用银金属催化化学腐蚀（Ag-MCCE）技术在碱腐蚀的金字塔微米初级绒面结构上制备均匀的纳米次级绒面结构,并研究银纳米颗粒在微米金字塔表面的附着特性及其对纳米结构均匀性和电池性能的影响。结果表明,通过添加聚乙烯吡咯烷酮（PVP）可改善银纳米颗粒在微米金字塔表面的附着均匀性,制备的纳米结构在微米金字塔结构表面分布均匀,且便于后道SiN_x的钝化;制得的单晶PERC电池平均效率达到22.22%,较未改善的对比组提升0.46%;独特的微-纳复合绒面（NOM-texture）可实现单晶太阳电池的全角度陷光,兼顾新型光伏屋顶等光伏建筑一体化（BIPV）场合对电池高转换效率和准全向外观的双重要求。     

Cost effective process for high-efficiency solar cells

A new method for patterning the rear passivation layers of high-efficiency solar cells with a mechanical scriber has been developed and successfully adapted to fabricate high-efficiency passivated emitter and rear cell (PERC). Three types of the rear contact patterns: dot patterns with a photolithography process, line and dashed line patterns with a mechanical scriber process have been processed in order to optimize the rear contact structure. An efficiency of 19.42% has been achieved on the mechanical-scribed (MS)-PERC solar cell on 0.5 Ω cm p-type FZ-Si wafer and is comparable to that of conventional PERC solar cells fabricated by using photolithography process. The mechanical scriber process shows great potential for commercial applications by achieving high efficiency above 20% and by significantly reducing the fabrication costs without an expensive photolithography process. Low-cost Ni/Cu metal contact has been formed by using a low-cost electroless and electroplating. Nickel silicide formation at the interface enhances stability and reduces the contact resistance resulting in an energy conversion efficiency of 20.2% on 0.5 Ω cm FZ wafer.     

加热和水处理共同调控PbI2薄膜形貌及其在钙钛矿太阳电池中的应用研究

该文研究加热和水处理共同作用对PbI₂薄膜形貌的调控和对钙钛矿太阳电池性能的影响。使用的钙钛矿体系为（FAPbI₃）_1-x（MAPbBr₃）_x,并在两步法工艺基础上对PbI₂薄膜进行不同时间加热和短时间水处理可将PbI₂薄膜制备成多孔结构。将双重处理后的PbI₂薄膜制备成钙钛矿薄膜后,可发现钙钛矿薄膜质量明显提升,表现在：钙钛矿的晶粒尺寸明显增大、结晶性增强、吸光能力提升、载流子传输更快。且此种方式能有效调控钙钛矿薄膜中的PbI₂残留量。在器件效率方面,只对PbI₂薄膜进行加热处理制备的电池的开路电压、短路电流、填充因子和效率分别为1.05 V、23.12 mA/cm²、73.81%和17.92%,而在最优双重处理工艺下制备的电池的这4个相应的参数分别为1.09 V、24.75 mA/cm²、77.85%和21.10%。     

Enhancement of photovoltaic properties of multicrystalline silicon solar cells by combination of buried metallic contacts and thin porous silicon

Photovoltaic properties of buried metallic contacts (BMCs) with and without application of a front porous silicon (PS) layer on multicrystalline silicon (mc-Si) solar cells were investigated. A Chemical Vapor Etching (CVE) method was used to perform front PS layer and BMCs of mc-Si solar cells. Good electrical performance for the mc-Si solar cells was observed after combination of BMCs and thin PS films. As a result the current-voltage (I-V) characteristics and the internal quantum efficiency (IQE) were improved, and the effective minority carrier diffusion length (Ln) increases from 75 to 110 μm after BMCs achievement. The reflectivity was reduced to 8% in the 450-950 nm wavelength range. This simple and low cost technology induces a 12% conversion efficiency (surface area = 3.2 cm²). The obtained results indicate that the BMCs improve charge carrier collection while the PS layer passivates the front surface.