反应等离子喷涂TiN/AlN涂层的性能研究

TiN涂层可以通过传统的物理或者化学气相沉积（PVD及CVD）工艺制备,但其缺点是沉积速率低,涂层厚度过薄;这些都严重地限制了TiN涂层材料在磨、蚀服役条件下的应用.本文利用反应等离子喷涂的方法制备了TiN/AlN涂层并研究分析了涂层的组织及摩擦磨损性能.结果表明：TiN/AlN涂层韧性比TiN涂层有所提高;TiN/AlN涂层不仅有较低的摩擦系数,且在高载下的磨损性能比TiN涂层有较大的提高.     

不同温度下沉积TiN/TiCN/Al_2O_3/TiN复合涂层的物相结构和性能

采用高温化学气相沉积技术,于1 000～1 100℃在WC-6%Co硬质合金基体表面制备了TiN/TiCN/Al2O3/TiN复合陶瓷涂层,研究了复合涂层的物相、表面和横截面形貌、显微硬度、界面结合强度和耐磨损性能。结果表明:沉积温度为1 000℃时,复合涂层中Al2O3层为κ相和α相共存;当沉积温度升至1 050℃和1 100℃时,Al2O3层为单一的α相;1 050℃下沉积复合涂层的表面平整、结构致密,1 000℃沉积复合涂层中的TiCN层存在少量孔洞,1 100℃下沉积复合涂层中TiCN层的柱状晶沿某一方向生长比较明显,较高的沉积温度加速了钛元素向Al2O3层的外扩散;1 050℃下沉积复合涂层的显微硬度最大,为1 828HV,该涂层的耐磨损性能最佳,其与基体间的结合强度最高,临界载荷为135.2N。     

Al2O3纤维填充PTFE复合材料摩擦磨损性能分析

利用M-200型摩擦磨损试验机考察了填料含量及载荷对粉状Al2O3纤维填充PTFE复合材料摩擦磨损性能的影响，采用扫描电子显微镜观察分析磨损表面形貌及磨损机理。结果表明：Al2O3纤维填料可提高PTFE的硬度，从而可提高PTFE的耐磨性，但复合材料中Al2O3含量较高时会导致磨粒磨损，且AL2O3含量越高相应的磨粒磨损越严重。在本试验条件下，当Al2O3的质量分数为20%左右时，PTFE复合材料的耐磨性最佳；PTFE复合材料同钢对磨时的摩擦系数比纯PTFE大，且随Al2O3含量的增加而增大。     

氧化镧掺杂对等离子喷涂Al_2O_3-40%TiO_2涂层组织和耐磨性能的影响

在45#钢基体上大气等离子喷涂制备了Al2O3-40%TiO2(AT40)以及添加不同含量La2O3稀土的陶瓷涂层,利用X射线衍射和扫描电镜对涂层的组织结构和形貌进行了研究,并分析了涂层的显微硬度和磨损性能.研究结果表明:添加稀土的AT40涂层主要是由Al2O3、Al2TiO5和LaAl11O8相组成.基体与粘结层以及陶瓷层与粘结层之间形成良好的机械结合界面.添加稀土的涂层孔隙率降低,显微硬度和断裂韧性略有增加.在相同的摩擦磨损试验条件下,稀土/AT40涂层比AT40涂层具有更好的耐磨性,磨损机制都主要是脆性剥落磨损和粘着磨损.     

TiN涂层在一般零件表面的摩擦磨损性能

摩擦磨损现象存在于各类机械设备中,造成了很大的经济损失。选用了一般零件最常用的45#钢作为实验材料,研究45#钢表面沉积TiN涂层后,在摩擦磨损试验机上的摩擦磨损性能。通过实验比较不同载荷、不同转速对TiN涂层的摩擦磨损性能影响,由结果显示,TiN涂层不能降低摩擦系数,但能有效降低基体表面的磨损率。     

化学气相沉积Ti(CN)/TiC/Al_2O_3多层涂层的结构和耐磨性能

采用化学气相沉积技术在42CrMo钢基体表面制备了Ti(CN)/TiC/Al2O3多层涂层,分析了多层涂层的断面形貌、元素分布和物相组成,并研究了多层涂层的显微硬度及其与基体的界面结合力、耐磨性能。结果表明:Ti(CN)/TiC/Al2O3多层涂层的结构较致密,主要由TiC0.2N0.8、TiC、α-Al2O3和Ti2O3组成,厚度约10μm,其显微硬度约2 654HV,涂层与基体间的界面结合力可达62N;与基体相比,多层涂层的平均摩擦因数约降低了23%,磨损量约减少了50%,其磨损机制为疲劳磨损和磨粒磨损。     

辉光合成TiN/TiB2复合渗镀层摩擦性能的研究

利用等离子尖端放电、空心阴极效应和反应气相沉积技术，在碳钢表面形成具有扩散层和沉积层的TiN渗镀层，然后在此渗镀层表面沉积（PVD法）TiB2薄膜，形成TiN／TiB2复合渗镀层。并且将其与在碳钢基体表面直接沉积（PVD法）TiB2薄膜进行表面形貌、硬度、摩擦磨损性能对比。结果表明：TiN／TiB2复合渗镀层厚度可达十几微米，成分和硬度呈梯度分布，与基体是冶金结合，结合力好，无剥落现象。表面是均匀、致密、细小的胞状组织。表面平均硬度HV 2600，平均摩擦因数小，耐磨性好。     

等离子体浸没离子注入与沉积TiN/Ti复合涂层高温微动磨损特性研究

采用等离子体浸没离子注入与沉积技术（PIII＆D）,在T225NG钛合金基材上制备了TiN/Ti复合涂层.对沉积涂层的组织和化学成分作了XPS和AES分析,用扫描电镜SEM、能谱仪EDS和激光共焦扫描显微镜（LCSM）对该涂层大气氛围中室温（25 ℃）,200 ℃和400 ℃的微动磨损特性与基材进行了对比研究.结果表明：复合涂层中的组织为TiN和TiO2;在部分滑移区和混合区,PIII＆D TiN/Ti复合涂层摩擦因数随温度升高而降低,在滑移区,涂层摩擦因数波动较大,温度对基材摩擦因数影响不明显.在部分滑移区磨损轻微,在混合区和滑移区,涂层磨损机制以剥层和氧化磨损为主,局部存在磨粒磨损.     

表面处理对TiAlSiN涂层刀具表面完整性及切削性能的影响研究

涂层刀具在高速干切削钛合金时容易出现刀具磨损严重、刀具寿命短等问题,对涂层刀具进行表面处理能改善涂层刀具的表面完整性,是提高涂层刀具耐磨性和切削寿命的有效途径。选取TiAlSiN涂层刀具,分别进行深冷处理、微喷砂处理和深冷+微喷砂处理,研究不同处理方法对涂层刀具表面完整性(包括表面形貌、表面粗糙度、显微硬度和表面残余应力等)的影响,并进行钛合金高速干切削试验,分析不同处理方法对涂层刀具切削性能的影响,探究提高涂层刀具耐磨性和切削寿命的方法。结果表明：与单一深冷处理和微喷砂处理相比,深冷+微喷砂处理后涂层刀具表面完整性明显改善,刀具寿命显著提高。深冷+微喷砂处理能减少刀具崩刃、月牙洼磨损和磨粒磨损,有效提高涂层刀具耐磨性。     

润滑条件对Al_2O_3基陶瓷材料摩擦磨损性能的影响

本文对Al2O3基陶瓷材料/45＃钢摩擦副的摩擦系数与45＃钢/45＃钢的摩擦系数作了对比滑动摩擦试验研究,观测分析了Al2O3基陶瓷材料磨痕形貌,并就干摩擦,油润滑状态下Al2O3基陶瓷材料的磨损机理进行了分析。结果表明,分别在干摩擦和20＃机油润滑下,Al2O3基陶瓷材料/45＃钢的摩擦系数均比45＃钢自配副时的低。在干摩擦条件下,Al2O3基陶瓷材料的磨损机理是脆性微剥落和磨粒磨损,油润滑条件下,该材料的磨损机理是脆性脱落和耕犁,但磨损量小于干摩擦条件下的磨损量,说明油润滑对Al2O3基陶瓷材料有明显的减磨作用。     

Comparison of tribological characteristics of nanostructured TiN,MoN, and TiN/MoN Arc-PVD coatings

The tribological properties of TiN, MoN, and TiN/MoN coatings have been investigated. It has been shown that, for multilayer (alternate) TiN/MoN coatings, a maximum hardness reaches 29–31 GPa that is significantly less than the hardness of MoN coatings (36.0–40.2 GPa) when changing the deposition conditions. MoN coatings possess lower coefficients of friction compared to TiN coatings, in particular at the initial stages of a scratch test. Two mechanisms of destruction are revealed by the adhesion tests, i.e., a cohesive failure with a minimum critical loading L _C1 and an adhesive test (plastic abrasion) with the appearance of a first crack L _C2. The resistance of multilayer (nanoscale) nanostructured TiN/MoN coatings with a total thickness of up to 8 μm is greater than that of TiN coatings.     

Formation of wear-resistant nanostructured TiN/Cu coatings

Results of studying the structural and physicomechanical properties of TiN/Cu coatings deposited from multicomponent separated vacuum-arc plasma are presented. Specific features of the formation of the nanostructured TiN-based coatings, which are alloyed with an element that does not form chemical compounds with titanium and nitrogen under the selected conditions of deposition, are considered. It is shown that alloying of the coating with this element leads to refinement of its structure. Regularities of variations in the microhardness and the tribological characteristics of TiN/Cu coatings of different elemental compositions are investigated. It has been found that the coatings that contain 2–4% of Cu have the highest microhardness (39–40 GPa) and the lowest coefficient of friction (0.2–0.4). Main factors responsible for the high wear resistance of the coatings are determined.     

Tribological Properties of TiN/Ag Nanocomposite Coatings

Morphology, structure, and tribological behavior of magnetron co-sputtered TiN/Ag nanocomposite coatings deposited at 150 °C with an Ag content in the range of 7–45 at.% were characterized. The coatings show a columnar structure with embedded Ag crystallites of 3–50 nm in diameter, where the columns are characterized by a layered structure with Ag-poor and Ag-rich layers. These layers originate from sample rotation during deposition, where the layer thickness increases with increasing Ag content. These Ag layers become continuous over a critical Ag content. At room temperature the friction coefficient is determined by the film structure, whereas friction and wear at high temperature depend on segregation of Ag to the surface.     

Tribology and oxidation behavior of TiN/AlN nano-multilayer films

In this study, a series of TiN/AlN nano-multilayer films were prepared using a new sputtering setup, which features a medium frequency (MF) twin unbalanced magnetron sputtering system (UBMS) and a DC balanced magnetron sputtering system (BMS). The MF (6.78 MHz) twin UBMS, which is a modification of single RF power source system, is a special design of this deposition machine. The UBMS was employed to deposit the AlN film, and the BMS the TiN film. The aim of this study was to obtain, through controlling the deposition conditions, a group of TiN/AlN nano-multilayer films with various periods (λ). Then a series of experiments were conducted to understand their wear and oxidation properties.The results revealed that through controlling of the deposition parameters, the TiN/AlN nano-multilayer films with λ ranging from 2.4 to 67.6 nm were obtained. At λ3.6 nm, the nano-multilayers had extremely high hardness and excellent adhesion. The oxidation tests found that the multilayers had obviously better anti-oxidation property, as compared with the single-layer TiN film. The high hardness and good oxidation resistance contributed to very good wear performance of the TiN/AlN nano-multilayer films.     

Nanowear of ultrathin TiN/NbN superlattices deposited on silicon

TiN/NbN ultrathin superlattices deposited on silicon by physical vapor deposition technique were tested. The test were performed for superlattices with constant thickness (5.84 nm) of NbN layer and varied thickness (2.2–13 nm) of TiN layer. The nanowear tests on 5 × 5 m scan size were carried out. The effect of the construction of the film on its wear resistance was observed. The specific energy of wear was estimated. The nanoscratch tests were performed additionally to estimate the friction force during the wear and to calculate the energy of friction. The results of the nanowear studies were also compared with the results of nanoindentation tests. The wetting studies by contact angles measurements were also carried out. The smallest wear was found for the thinnest TiN layer.     

Sliding friction and wear properties of CNX/TiN composite films

A combined dc magnetron sputtering and multi-arc deposition system was used to grow CN_X/TiN composite films on a high-speed-steel (HSS) substrate. The thickness of these films is about 3 μm, the hardness of the coating exceeds 50 GPa. The sliding friction properties were studied by ball-on-disc tests under different loads and speeds. The wear mode of the films was observed and analyzed. There exist spallation, abrasion and micro-ploughing wear modes under different loads. The critical load value was theoretically determined and tested to be 55 N. The results show that the alternating films have good wear resistance under heavy load and high speed.     

刀具表面超晶格TiN／AIN纳米多层膜的制备和研究

采用脉冲多弧离子镀技术制备TiN／AIN纳米多层膜，随着调制周期的减小，稳定态六方AIN相逐渐转变成亚稳态立方AIN相，形成以TiN／AIN超晶格结构为主的超硬薄膜。与标准图谱的对比可知，TiN／AIN超晶格是AIN在模板立方TiN材料的影响下，在TiN层上以亚稳态相立方结构外延生长所形成。试验表明TiN／AIN薄膜具有良好的耐腐蚀性能以及使用寿命。     

刀具表面超晶格TiN/AlN纳米多层膜的制备和研究

采用脉冲多弧离子镀技术制备TiN/AlN纳米多层膜,随着调制周期的减小,稳定态六方AlN相逐渐转变成亚稳态立方AlN相,形成以TiN/AlN超晶格结构为主的超硬薄膜。与标准图谱的对比可知,TiN/AlN超晶格是AlN在模板立方TiN材料的影响下,在TiN层上以亚稳态相立方结构外延生长所形成。试验表明TiN/AlN薄膜具有良好的耐腐蚀性能以及使用寿命。     

Substrate Effects on the Micro/Nanomechanical Properties of TiN Coatings

Nanoindentation and nanoscratch tests were performed for titanium nitride (TiN) coatings on different tool steel substrates to investigate the indentation/scratch induced deformation behavior of the coatings and the adhesion of the coating–substrate interfaces and their tribological property. In this work, TiN coatings with a thickness of about 500 nm were grown on GT35, 9Cr18 and 40CrNiMo steels using vacuum magnetic-filtering arc plasma deposition. In the nanoindentation tests, the hardness and modulus curves for TiN/GT35 reduced the slowest around the film thickness 500 nm with the increase of indentation depth, followed by TiN/9Cr18 and TiN/40CrNiMo. Improving adhesion properties of coating and substrate can decrease the differences of internal stress field. The scratch tests showed that the scratch response was controlled by plastic deformation in the substrate. The substrate plays an important role in determining the mechanical properties and wear resistance of such coatings. TiN/GT35 exhibited the best load-carrying capacity and scratch/wear resistance. As a consequence, GT35 is the best substrate for TiN coatings of the substrate materials tested.     

电弧离子镀沉积TiN/AlN-TiAlN复合膜的耐磨性

采用高纯铝、钛靶材,通过电弧离子镀工艺在TC4基材上沉积制备了TiN/AlN-TiAlN复合多层膜,用HV-1000型显微硬度计测试了膜层的硬度,用球盘磨损试验对比研究了膜层和基材的耐磨性。结果表明:膜层硬度为2856HV,耐磨性相比基材提高6倍以上。