Influence of non-uniform electric field distribution on the atmospheric pressure air dielectric barrier discharge

The dielectric barrier discharge(DBD) in air at atmospheric pressure is not suitable for industrial applications due to its randomly distributed discharge filaments. In this paper, the influence of the electric field distribution on the uniformity of DBD is theoretically analyzed and experimentally verified. It is found that a certain degree of uneven electric field distributions can control the development of electron avalanches and regulate their transition to streamers in the gap. The discharge phenomena and electrical characteristics prove that an enhanced Townsend discharge can be formed in atmospheric-pressure air with a curved-plate electrode. The spectral analysis further confirms that the gas temperature of the plasma produced by the curved-plate electrode is close to room temperature, which is beneficial for industrial applications. This paper presents the relationship between the electron avalanche transition and the formation of a uniform DBD, which can provide some references for the development and applications of the DBD in the future.     

Characteristics of RF Cold Plasma at Atmospheric Pressure

The characteristics of a stable discharge at atmospheric pressure is investigated. The plasma source consisted of two closely spaced parallel-plated perforated electrodes, driven by a radio frequency power to generate a uniform cold plasma in Helium at atmospheric pressure. Both alpha and gamma modes were clearly observed. The hollow cathode effects were found in the discharge. The influence of the dielectric barrier on the discharge was also investigated by utilizing a surface-anodized aluminium electrode as the anode.     

Theoretical Study on the Characteristics of Atmospheric Radio Frequency Discharges by Altering Electrode Gap

In this paper, we present a theoretical study on the discharge characteristics of radio-frequency discharges at atmospheric pressure driven by a higher frequency of 40.68 MHz while the electrode gap is altered. Based on the analytical equations and simulation data from a one-dimensional fluid model, an optimal gap between electrodes, at which the largest electron density is obtained, can be observed under a constant power condition; however, as the electrode gap increases the time-averaged electron temperature decreases, and the underpinning physics is also discussed based on the simulation results. This study indicates that at a constant power by choosing an appropriate electrode spacing, the rf discharge can be effectively optimized at atmospheric pressure.     

Diagnostics of a microhollow cathode discharge at atmospheric pressure

Based on a sandwich-like structure, a microhollow cathode discharge device is designed, and a stable discharge is realized by injecting helium into the discharge region of the device at atmospheric pressure. A wall probe is used to determine the relevant parameters of the plasma generated by the device, such as particle density, electron temperature, and the electron distribution function. At the same time, a sink parameter is used to correct the electron distribution function of the wall-probe diagnostics, and to further study the relationship between electron density and the electron temperature of the corrected electron distribution function.     

The influence of grounded electrode positions on the evolution and characteristics of an atmospheric pressure argon plasma jet

An atmospheric pressure plasma jet (APPJ) in Ar with various grounded electrode arrangements is employed to investigate the effects of electrode arrangement on the characteristics of the APPJ.Electrical and optical methods are used to characterize the plasma properties.The discharge modes of the APPJ with respect to applied voltage are studied for grounded electrodepositions of 10 mm,40 mm and 80 mm,respectively,and the main discharge and plasma parameters are investigated.It is shown that an increase in the distance between the grounded electrode and high-voltage electrode results in a change in the discharge modes and discharge parameters.The discharges transit from having two discharge modes,dielectric barrier discharge (DBD) and jet,to having three,corona,DBD and jet,with increase in the distance from the grounded to the high-voltage electrodes.The maximum length of the APPJ reaches 3.8 cm at an applied voltage of 8 kV.The discharge power and transferred charges and spectral line intensities for species in the APPJ are influenced by the positions of the grounded electrode,while there is no obvious difference in the values of the electron excited temperature (EET) for the three grounded electrode positions.     

Exploration to generate atmospheric pressure glow discharge plasma in air

Atmospheric pressure glow discharge (APGD) plasma in air has high application value.In this paper,the methods of generating APGD plasma in air are discussed,and the characteristics of dielectric barrier discharge (DBD) in non-uniform electric field are studied.It makes sure that APGD in air is formed by DBD in alternating current electric field with using the absorbing electron capacity of electret materials to provide initial electrons and to end the discharge progress.Through designing electric field to form two-dimensional space varying electric field and three-dimensional space varying electric field,the development of electron avalanches in airgap is suppressed effectively and a large space of APGD plasma in air is generated.Further,through combining electrode structures,a large area of APGD plasma in air is generated.On the other hand,by using the method of increasing the density of initial electrons,millimeter-gap glow discharge in atmospheric pressure air is formed,and a maximum gap distance between electrodes is 8 ram.By using the APGD plasma surface treatment device composed of contact electrodes,the surface modification of high polymer materials such as aramid fiber and polyester are studied and good effect of modifications is obtained.The present paper provides references for the researchers of industrial applications of plasma.     

Study on an Atmospheric Pressure Plasma Jet and its Application in Etching Photo-Resistant Materials

An atmospheric pressure radio-frequency plasma jet that can eject cold plasma has been developed. In this paper, the configuration of this type of plasma jet is illustrated and its discharge characteristics curves are studied with a current and a voltage probe. A thermal couple is used to measure the temperature distribution along the axis of the jet stream. The temperature distribution curve is generated for the He/O2 jet stream at the discharge power of 150 W. This jet can etch the photo-resistant material at an average rate of 100 nm/min on the surface of silicon wafers at a right angle.     

Frequency dependence of plasma characteristics at different pressures in cylindrical inductively coupled plasma source

The effects of driving frequency on plasma parameters and electron heating efficiency are studied in cylindrical inductively coupled plasma (ICP) source. Measurements are made in an Ar discharge for driving frequency at 13.56/2 MHz, and pressures of 0.4–1.2 Pa. In 13.56 MHz discharge, higher electron density (n_e) and higher electron temperature (T_e) are observed in comparison with 2 MHz discharge at 0.6–1.2 Pa. However, slightly highern_e andT_e are observed in 2 MHz discharge at 0.4 Pa. This observation is explained by enhanced electron heating efficiency due to the resonance between the oscillation of 2 MHz electromagnetic field and electron-neutral collision process at 0.4 Pa. It is also found that the variation ofT_e distribution is different in 13.56 and 2 MHz discharge. For ICP at 13.56 MHz, T_e shows an edge-high profile at 0.4–1.2 Pa. For 2 MHz discharge,T_e remains an edge-high distribution at 0.4–0.8 Pa. However, the distribution pattern involves into a center-high profile at 0.9–1.2 Pa. The spatial profiles ofn_e remain a center-high shape in both 13.56 and 2 MHz discharges, which indicates the nonlocal kinetics at low pressures. Better uniformity could be achieved by using 2 MHz discharge. The effects of gas pressure on plasma parameters are also examined. An increase in gas pressure necessitates the rise ofn_e in both 13.56 and 2 MHz discharges. Meanwhile, T_e drops when gas pressure increases and shows a flatter distribution at higher pressure.     

Atmospheric Pressure Cold Argon/Oxygen Plasma Jet Assisted by Preionization of Syringe Needle Electrode

An atmospheric pressure nonequilibrium argon/oxygen plasma jet assisted by the preionization of syringe needle electrode discharge is reported. With the syringe needle plasma as its pre-ionization source, the hybrid barrier-jet was shown to generate uniform discharge with a lower breakdown voltage and a relatively low gas temperature varying from 390 to 440 ºK, even when the vol. % oxygen in argon was up to 6%. Utilizing the actinometry method, the concentration of atomic oxygen was estimated to be about in an orders of magnitude of 1017/cm3. The argon/oxygen plasma jet was then employed to clean out heat transfer oil, with a maximum cleaning rate of 0.1 mm/s achieved.     

A two-dimensional air streamer discharge modified model based on artificial stability term under non-uniform electric field at low temperature and sub-atmospheric pressure

In this paper, an improved air discharge fluid model under non-uniform electric field is constructed based on the plasma module COMSOL Multiphysics with artificial stability term, and the boundary conditions developed in the previous paper are applied to the calculation of photoionization rate. Based on the modified model, the characteristics of low temperature subatmospheric air discharge under 13 kV direct current voltage are discussed, including needle-plate and needle-needle electrode structures. Firstly, in order to verify the reliability of the model, a numerical example and an experimental verification were carried out for the modified model respectively. Both verification results show that the model can ensure the accuracy and repeatability of the calculation. Secondly, according to the calculation results of the modified model, under the same voltage and spacing, the reduced electric field under low temperature subatmosphere pressure is larger than that under normal temperature and atmospheric pressure. The high electric field leads to the air discharge at low temperature and sub atmospheric pressure entering the streamer initiation stage earlier, and has a faster propagation speed in the streamer development stage, which shortens the overall discharge time. Finally, the discharge characteristics of the two electrode structures are compared, and it is found that the biggest difference between them is that there is a pre-ionization region near the cathode in the needle-needle electrode structure. When the pre-ionization level reaches 10~(13) cm~(-3), the propagation speed of the positive streamer remains unchanged throughout the discharge process, and is no longer affected by the negative streamer. The peak value of electric field decreases with the increase of pre-ionization level, and tends to be constant during streamer propagation. Based on the previous paper, this paper constructs the air discharge model under non-uniform electric field, complements with the previous paper, and forms a relatively complete set of air discharge simulation system under low temperature and sub atmospheric pressure, which provides a certain reference for future research.     

Influence of Ti3C2Tx(MXene)on the generation of dielectric barrier discharge in air

The formation of homogeneous dielectric barrier discharge(DBD)in air is a key scientific problem and core technical problem to be solved for the application of plasmas.Here,we report the effect of two-dimensional(2D)nanomaterial Ti3C2Tx(Tx=-F,-O and/or-OH)on regulating the electrical discharge characteristics.The field emission and weak bound state property of Ti3C2Tx can effectively increase the seed electrons and contribute to the generation of atmospheric pressure homogeneous air DBD.The electron avalanche development for the uneven electrode structure is calculated,and the discharge mode transition is modeled.The comparative analyses of discharge phenomena validate the regulation of Ti3C2Tx on the discharge characteristics of DBD.The light emission capture and the voltage and current waveforms verify that the transition of Townsend discharge to streamer discharge is effectively inhibited.The optical emission spectra are used to characterize the plasma and confirm that it is in a non-equilibrium state and the gas temperature is at room temperature.This is the first exploration of Ti3C2Tx on the regulation of electrical discharge characteristics as far as we know.This work proves the feasibility of Ti3C2Tx as a source of seed electrons to form homogeneous DBD,establishing a preliminary foundation for promoting the application of atmospheric pressure non-equilibrium plasma.     

Effects of direct current discharge on the spatial distribution of cylindrical inductively-coupled plasma at different gas pressures

Stable operations of single direct current(DC) discharge, single radio frequency(RF) discharge and DC?+?RF hybrid discharge are achieved in a specially-designed DC enhanced inductivelycoupled plasma(DCE-ICP) source. Their plasma characteristics, such as electron density,electron temperature and the electron density spatial distribution profiles are investigated and compared experimentally at different gas pressures. It is found that under the condition of single RF discharge, the electron density distribution profiles show a ‘convex' shape and ‘saddle' shape at gas pressures of 3 m Torr and 150 m Torr respectively. This result can be attributed to the transition of electron kinetics from nonlocal to local kinetics with an increase in gas pressure.Moreover, in the operation of DC?+?RF hybrid discharge at different gas pressures, the DC discharge has different effects on plasma uniformity. The plasma uniformity can be improved by modulating DC power at a high pressure of 150 m Torr where local electron kinetics is dominant,whereas plasma uniformity deteriorates at a low pressure of 3 m Torr where nonlocal electron kinetics prevails. This phenomenon, as analyzed, is due to the obvious nonlinear enhancement effect of electron density at the chamber center, and the inherent radial distribution difference in the electron density with single RF discharge at different gas pressures.     

Study on Glow Discharge Plasma Used in Polyester Surface Modification

To achieve an atmospheric pressure glow discharge(APGD)in air and modify the surface of polyester thread using plasma,the electric field distribution and discharge characteristics under different conditions were studied.We found that the region with a strong electric field,which was formed in a tiny gap between two electrodes constituting a line-line contact electrode structure,provided the initial electron for the entire discharge process.Thus,the discharge voltage was reduced.The dielectric barrier of the line-line contact electrodes can inhibit the generation of secondary electrons.Thus,the transient current pulse discharge was reduced significantly,and an APGD in air was achieved.We designed double layer line-line contact electrodes,which can generate the APGD on the surface of a material under treatment directly.A noticeable change in the surface morphology of polyester fiber was visualized with the aid of a scanning electron microscope(SEM).Two electrode structures–the multi-row line-line and double-helix line-line contact electrodes–were designed.A large area of the APGD plasma with flat and curved surfaces can be formed in air using these contact electrodes.This can improve the efficiency of surface treatment and is significant for the application of the APGD plasma in industries.     

Atmospheric Pressure Plasma Jet in Ar and O2/Ar Mixtures： Properties and High Performance for Surface Cleaning＊

An atmospheric pressure plasma jet generated in Ar and O2/Ar mixtures has been investigated by specially designed equipment with double power electrodes at 20~32 kHz, and their effects on the cleaning of surfaces have been studied. Properties of the jet discharge are studied by electrical diagnostics, including the waveform of discharge voltage, discharge current and the Q-V Lissajous figures. The optical emission spectroscopy is used to measure the plasma parameters, such as the excitation temperature and the gas temperature. It is found that the consumed power and the excitation temperature increase with increase of the discharge frequency. On the other hand, at the same discharge frequency, these parameters in O2/Ar mixture plasma are found to be much larger. The effect on surface cleaning is studied from the changes in the contact angle. For Ar plasma jet, the contact angle decreases with increase of the discharge frequency. For O2/Ar mixture plasma jet, the contact angle decreases with increase of discharge frequency up to 26 kHz, however, further increase of discharge frequency does not show further decrease in the contact angle. At the same discharge frequency, the contact angle after O2/Ar mixture plasma cleaning is found to be much lower compared to the case of pure Ar. From the results of quadrupole mass-spectrum analysis, we can identify more fragment molecules of CO and H2O in the emitted gases after O2/Ar plasma jet treatment compared with Ar plasma jet treatment, which are produced by the decomposition of surface organic contaminants during the cleaning process.     

Properties of the acrylic acid polymers obtained by atmospheric pressure plasma polymerization

Plasma polymers of acrylic acid were obtained using an atmospheric pressure discharge system. The plasma polymerization reactor uses a dielectric barrier discharge, with the polyethylene terephthalate dielectric acting as substrate for deposition. The plasma was characterized by specific electrical measurements, monitoring the applied voltage and the discharge current. Based on the spatially resolved optical emission spectroscopy, we analyzed the distribution of the excited species in the discharge gap, specific plasma temperatures (vibrational and gas temperatures) being calculated with the Boltzmann plot method. The properties of the plasma polymer films were investigated by contact angle measurements, infrared and UV-Vis spectroscopy, scanning electron microscopy. The films produced by plasma polymerization at atmospheric pressure showed a hydrophilic character, in correlation with the strong absorbance of OH groups in the FTIR spectrum. Moreover, the surface of the plasma polymers at micrometric scale is smooth and free of defects without particular features.     

Preliminary Study of a Hybrid Helicon-ECR Plasma Source

A new type of hybrid discharge is experimentally investigated in this work. A helicon source and an electron cyclotron resonance(ECR) source were combined to produce plasma. As a preliminary study of this type of plasma, the optical emission spectroscopy(OES) method was used to obtain values of electron temperature and density under a series of typical conditions. Generally,it was observed that the electron temperature decreases and the electron density increases as the pressure increased. When increasing the applied power at a certain pressure, the average electron density at certain positions in the discharge does not increase significantly possibly due to the high degree of neutral depletion. Electron temperature increased with power in the hybrid mode.Possible mechanisms of these preliminary observations are discussed.     

Plasma characteristics of direct current enhanced cylindrical inductively coupled plasma source

Experimental results of a direct current enhanced inductively coupled plasma (DCE-ICP) source which consists of a typical cylindrical ICP source and a plate-to-grid DC electrode are reported.With the use of this new source,the plasma characteristic parameters,namely,electron density,electron temperature and plasma uniformity,are measured by Langmuir floating double probe.It is found that DC discharge enhances the electron density and decreases the electron temperature,dramatically.Moreover,the plasma uniformity is obviously improved with the operation of DC and radio frequency (RF) hybrid discharge.Furthermore,the nonlinear enhancement effect of electron density with DC + RF hybrid discharge is confirmed.The presented observation indicates that the DCE-ICP source provides an effective method to obtain high-density uniform plasma,which is desirable for practical industrial applications.     

Non-Thermal Equilibrium Atmospheric Pressure Glow-Like Discharge Plasma Jet

Non-thermal equilibrium atmospheric pressure plasma jet (APPJ) is a cold plasma source that promises various innovative applications,and the uniform APPJ is more favored.Glow discharge is one of the most effective methods to obtain the uniform discharge.Compared with the glow dielectric barrier discharge (DBD) in atmospheric pressure,pure helium APPJ shows partial characteristics of both the glow discharge and the streamer.In this paper,considering the influence of the Penning effect,the electrical and optical properties of He APPJ and Ar/NH3 APPJ were researched.A word "Glow-like APPJ" is used to characterize the uniformity of APPJ,and it was obtained that the basic characteristics of the glow-like APPJ are driven by the kHz AC high voltage.The results can provide a support for generating uniform APPJ,and lay a foundation for its applications.     

Generation of atmospheric pressure diffuse dielectric barrier discharge based on multiple potentials in air

In order to achieve atmospheric pressure diffuse dielectric barrier discharge (DBD) in air, a helical–helical electrode structure with a floating-voltage electrode is proposed in this paper. Results from an electric field distribution simulation indicate that strong electric fields are formed where the helical-contact electrodes’ insulating layers are in contact with each other, as well as near the floating-voltage electrode, which contributes to the production of a large number of seed electrons. The electric field within the air gap is weak (< 3×10⁶ Vm⁻¹), which inhibits the rapid development of electron avalanches and the formation of filament discharge. The experimental result shows that a 3.0 mm width diffuse DBD is generated in air. Moreover, based on the study of the helical–helical electrode with a floating-voltage electrode, a threedimensional electrode structure is presented, and a three-dimensional diffuse discharge is generated in air by adopting this electrode structure. The plasma studied is stable and demonstrates good diffusion characteristics, and therefore has potential applications in the field of exhaust gas treatment and air purification.     

Experimental study on plasma actuation characteristics of nanosecond pulsed dielectric barrier discharge

Combining high-speed schlieren technology and infrared imaging technology, related research has been carried out on the influence of parameters such as actuation voltage, repetition frequency, and electrode size of an actuator on the discharge characteristics, induced flow field characteristics, and thermal characteristics of nanosecond pulsed dielectric barrier discharge. The results show that increasing the value of the actuation voltage can significantly increase the actuation intensity, and the plasma discharge area is significantly extended. Increasing the repetition frequency can increase the number of discharges per unit time. Both will cause more energy input and induce more changes in the flow field. The effect of temperature rise is more significant. The width of the covered electrode will affect the potential distribution during the discharge process, which in turn will affect the extension process of the plasma discharge filament. Under the same actuation intensity, the wider the covered electrode, the larger range the induced flow field and temperature rise is. Preliminary experimental analyses of high-frequency actuation characteristics, temperature field characteristics, flow field characteristics and actuation parameter settings provide support for the parameter selection and partial mechanism analysis of plasma anti-icing.