一种数字光栅无掩模光刻对准方法

针对数字微反射镜装置(DMD)无掩模光刻系统,提出并研究了一种数字光栅无掩模光刻对准方法,将硅片的微位移放大显示在数字光栅与硅片物理光栅叠加产生的叠栅条纹中。建立了基于DMD的数字光栅无掩模光刻对准模型,设计了对准标记以及具体的实现方案,并对模型进行了数值仿真和初步的实验验证。结果表明,采用频率可变、图像干净、具有良好周期性结构的数字光栅代替传统的真实掩模光栅,真正实现了零掩模成本;并且采用变频率数字光栅可以扩大测量范围,减小位移测量误差。最终可以实现深亚微米的对准精度,满足目前无掩模光刻对准精度的要求。     

数字灰度投影光刻技术

随着MEMS和MOEMS技术的发展和器件制作对低成本、灵活、高效的需求,数字灰度无掩模光刻技术已成为人们研究的热点。介绍了一种基于数字微镜器件(DMD)的无掩模数字灰度投影光刻技术,结合电寻址数字微镜阵列的工作方式,分析了DMD的灰度调制机理和投影成像特性;阐述了DMD微镜结构与投影系统的倍数、数值孔径的关系;设计了投影光刻系统,并进行了分辨力和三维面形的曝光实验。实验结果表明,数字灰度投影光刻技术灵活、方便,尤其在三维浮雕微结构的制作方面,可实现光刻灰度的数字化调制,表面粗糙度可达0.1μm。     

基于DMD的步进式无掩模数字曝光方法及装置

随着器件特征尺寸的继续缩小,所需掩模的成本呈直线上升态势,为降低掩模成本,无掩模光刻技术成为人们研究的热点.介绍了一种基于DMD的步进式无掩模数字曝光方法,并对用于实现该曝光方法装置的设计方案和具体实现进行了论述与分析.最后利用厚的光刻胶进行曝光工艺实验,实验结果表明,本装置可以实现亚微米级线条的刻蚀,较高的侧壁陡度,线条拼接结果良好,可以实现大面积数字式曝光.     

双光源DMD数字光刻系统

基于DMD数字光刻系统,建立了一种新型的双光源DMD数字光刻系统.双光源DMD数字光刻系统由光源照明系统、DMD数字微镜、投影物镜以及CCD调焦系统等几个部分组成.实验表明,与DMD数字光刻系统相比,双光源DMD数字光刻系统具有调焦点不被曝光的优点,可用于制作光纤端面微光学器件.     

基于 DMD 的步进式无掩模数字曝光方法及装置

随着器件特征尺寸的继续缩小,所需掩模的成本呈直线上升态势,为降低掩模成本,无掩模光刻技术成为人们研究的热点。介绍了一种基于DMD的步进式无掩模数字曝光方法,并对用于实现该曝光方法装置的设计方案和具体实现进行了论述与分析。最后利用厚的光刻胶进行曝光工艺实验,实验结果表明,本装置可以实现亚微米级线条的刻蚀,较高的侧壁陡度,线条拼接结果良好,可以实现大面积数字式曝光。     

基于DMD的数码全息光刻系统

利用DMD空间光调制器与计算机的良好接口和控制系统的可编程性,将其作为二维图像发生器介入激光直写系统;采用高质量相机镜头,设计了基于DMD数字微镜的激光面阵干涉成像系统和相关的光刻软件,并进行了实验,制作了缩微图像、数字掩模灰度图像和激光数码全息图像等.     

激光直写系统制作掩模和器件的工艺

激光直写系统是国际上９０年代制作集成电路光刻掩模版的新型专用设备。微细加工光学技术国家重点实验室从加拿大引进了国内第一台激光直写系统。利用这台系统，通过高精度激光束在光致抗蚀剂上扫描曝光，将设计图形直接转移到掩模或硅片上。激光直写系统的应用，可以分成一次曝光制作光刻掩模和多次套刻曝光制作器件两个方面。介绍使用激光直写系统制作光刻掩模和套刻器件的具体工艺，并给出利用激光直写工艺做出的一些掩模和器件的实例     

应用于数字光刻机的DMD数据处理及控制系统

无掩膜数字光刻机已在PCB光刻及半导体光刻领域逐渐开始应用,相比传统掩膜式光刻机,可缩减光刻流程,节省光刻成本,使光刻数据在线实时调整变得更为简单。而DMD（数字微镜器件）目前作为数字光刻机常用的一种SLM（空间光调制）图形发生器,对其所需要进行的数据处理及控制较为关键。会直接关系到数字光刻机的曝光效率和产能。文章从DMD的驱动控制原理,探讨研究DMD在数字光刻机中的数据处理和控制流程、方法,实现较高的设备光刻效率。     

基于数字微镜的无掩模数字光刻系统的研制

研究了一种基于数字微镜的无掩模光刻系统.利用数字微镜输出的高精度数字掩模,结合高质量的高倍精缩投影光学系统,理论上完全可实现亚微米级衍射微光学元件的制作.该文从照明系统、数字微镜芯片、精缩物镜设计等方面进行了系统总体设计.利用该系统成功制作了5×5达曼光栅、8台阶闪耀光栅和8台阶菲涅耳透镜,进一步论证了该系统的可行性.     

一种制作凹形聚二甲基硅氧烷微透镜阵列的方法

提出一种制作凹形聚二甲基硅氧烷(PDMS)微透镜阵列的方法。用数字微镜器件(DMD)代替物理掩模,建立数字灰阶无掩模光刻系统,在光刻胶上制作正方形基底凸形微透镜阵列,以此阵列为母板,采用复制方法,制作了高填充因子的正方形基底凹形PDMS微透镜阵列。实验和测试结果表明:数字灰阶无掩模光刻系统制作的微透镜阵列表面光滑,形貌良好;复制的PDMS微透镜阵列边缘清晰,表面光滑,焦面光斑光强均匀。为制作凹形微透镜阵列提供了一条制作简单、效率高、成本低、可大规模制作的新途径。     

Resolution Enhancement Technology:Integrated Process Solutions using OPC

DUV lithography, using the 248 nm wavelength, is a viable manufacturing option for devices with features at 130 nm and less. Given the low kl value of the lithography, integrated process development is a necessary method for achieving acceptable process latitude. The application of assist features for rule based OPC requires the simultaneous optimization of the mask, illumination optics and the resist.Described in this paper are the details involved in optimizing each of these aspects for line and space imaging.A reference pitch is first chosen to determine how the optics will be set. The ideal sigma setting is determined by a simple geometrically derived expression. The inner and outer machine settings are determined, in turn,with the simulation of a figure of merit. The maximum value of the response surface of this FOM occurs at the optimal sigma settings. Experimental confirmation of this is shown in the paper.Assist features are used to modify the aerial image of the more isolated images on the mask. The effect that the diffraction of the scattering bars (SBs) has on the image intensity distribution is explained. Rules for determining the size and placement of SBs are also given.Resist is optimized for use with off-axis illumination and assist features. A general explanation of the material' s effect is discussed along with the affect on the through-pitch bias. The paper culminates with the showing of the lithographic results from the fully optimized system.     

Cost-effective test solutions for smart card and other integrated flash applications

From its emergence in the late 1980s as a lower cost alternative to early EEPROM technologies, flash memory has evolved to higher densities and speedsand rapidly growing acceptance in mobile applications.In the process, flash memory devices have placed increased test requirements on manufacturers. Today, as flash device test grows in importance in China, manufacturers face growing pressure for reduced cost-oftest, increased throughput and greater return on investment for test equipment. At the same time, the move to integrated flash packages for contactless smart card applications adds a significant further challenge to manufacturers seeking rapid, low-cost test.     

Theoretical analysis of the relationship between the Brillouin gain coefficient and the strain in the optical-fiber sensors

The relation between the power of the Brillouin signal and the strain is one of the bases of the distributed fiber sensors of temperature and strain. The coefficient of the Bfillouin gain can be changed by the temperature and the strain that will affect the power of the Brillouin scattering. The relation between the change of the Brillouin gain coefficient and the strain is thought to be linear by many researchers. However, it is not always linear based on the theoretical analysis and numerical simulation. Therefore, errors will be caused if the relation between the change of the Brillouin gain coefficient and the strain is regarded as to be linear approximately for measuring the temperature and the strain. For this reason, the influence of the parameters on the Brillouin gain coefficient is proposed through theoretical analysis and numerical simulation.     

An improved parallel thinning algorithm with two subiterations

The parallel thinning algorithm with two subiterations is improved in this paper. By analyzing the notions of connected components and passes, a conclusion is drawn that the number of passes and the number of eight-connected components are equal. Then the expression of the number of eight-connected components is obtained which replaces the old one in the algorithm. And a reserving condition is proposed by experiments, which alleviates the excess deletion where a diagonal line and a beeline intersect. The experimental results demonstrate that the thinned curve is almost located in the middle of the original curve connectivelv with single pixel width and the processing speed is high.     

Novel fiber-optical interferometer with miniaturized probe for in-hole measurements

Today, micro-system technology and the development of new MEMS （Micro-Electro-Mechanical Systems） are emerging rapidly. In order for this development to become a success in the long run, measurement systems have to ensure product quality. Most often, MEMS have to be tested by means of functionality or destructive tests. One reason for this is that there are no suitable systems or sensing probes available which can be used for the measurement of quasi inaccessible features like small holes or cavities. We present a measurement system that could be used for these kinds of measurements. The system combines a fiber optical, miniaturized sensing probe with low-coherence interferometry, so that absolute distance measurements with nanometer accuracy are possible.     

Study of waveguide coupling efficiency in hybrid silicon lasers

This paper presents a new method to increase the waveguide coupling efficiency in hybrid silicon lasers. We find that the propagation constant of the InGaAsP emitting layer can be equal to that of the Si resonant layer through improving the design size of the InP waveguide. The coupling power achieves 42% of the total power in the hybrid lasers when the thickness of the bonding layer is 100 nm. Our result is very close to 50% of the total power reported by Intel when the thickness of the thin bonding layer is less than 5 nm. Therefore, our invariable coupling power technique is simpler than Intel＇s.     

A rigorous proof of MIMO channel capacity’s increase with antenna number

It is well known that adding more antennas at the transmitter or at the receiver may offer larger channel capacity in the multiple-input multiple-output（MIMO） communication systems. In this letter, a simple proof is presented for the fact that the channel capacity increases with an increase in the number of receiving antennas. The proof is based on the famous capacity formula of Foschini and Gans with matrix theory.     

Teleportation of an arbitrary unknown N-qubit entangled state under the controlling of M controllers

A new quantum protocol to teleport an arbitrary unknown N-qubit entangled state from a sender to a fixed receiver under M controllers(M < N) is proposed. The quantum resources required are M non-maximally entangled Greenberger-Home-Zeilinger (GHZ) state and N-M non-maximally entangled Einstein-Podolsky-Rosen (EPR) pairs. The sender performs N generalized Bell-state measurements on the 2N particles. Controllers take M single-particle measurement along x-axis, and the receiver needs to introduce one auxiliary two-level particle to extract quantum information probabilistically with the fidelity unit if controllers cooperate with it.     

Diode-end-pumped Nd:YVO4/LBO lasers with 4.2W continuous-wave output at 457 nm

A continuous-wave (CW) 457 nm blue laser operating at the power of 4.2 W is demonstrated by using a fiber coupled laser diode module pumped Nd: YVO4 and using LBO as the intra-cavity SHG crystal With the optimization of laser cavity and crystal parameters, the laser operates at a very high efficiency. When the pumping power is about 31 W, the output at 457nm reaches 4.2 W, and the optical to optical conversion efficiency is about 13.5% accordingly. The stability of the out putpower is better than 1.2% for 8 h continuously working.     

Call for Papers

正Wireless Body-area Networks The last decade has witnessed the convergence of three giant worlds:electronics,computer science and telecommunications.The next decade should follow this convergence in most of our activities with the generalization of sensor networks.In particular with the progress in medicine,people live longer and the aging of population will push the development of wireless personal networks