微谐振式低速气体流速传感器的有限元模拟

提出一种基于昆虫风速接受器的微谐振式仿生传感器,用以测量低速气体流动.由于设计的复杂性,使用有限元模拟对其进行评估.基于有限元模拟得到流体雷诺数与其绕流无限长梁的粘滞系数的数值关系,从而有助于确定该传感器的线性工作范围.使用有限元模拟进行流体结构耦合分析,得到气体流速与固有频率偏移的数值关系.有限元模拟结果证实当雷诺数小于1时,传感器的输入与输出呈现线性关系,其灵敏度为1.6 Hz/(cm·s-1).     

新型谐振式硅微机械加速度计

制作出一种新型结构的谐振式硅微加速度计，其输出频率信号可以克服微机电系统器件输出微弱信号检测的困难、采用双端固定音叉作为谐振器，在加速度作用下，质量块的惯性力通过悬臂梁施加于音叉轴向，利用音叉谐振频率的变化测量加速度．在每个音叉臂上制作了梳齿结构，用梳齿间的静电力激励音叉产生谐振，并利用其构成的电容检测其振动频率．该加速度计采用体硅工艺制作，文中给出了工艺流程、用有限元方法仿真估算，得到传感器的灵敏度约为2／gHz．     

扭摆型谐振式磁强计及其激振与测控系统设计

研究了基于扭摆式结构的谐振式磁强计及其激振与测控系统,设计了扭摆式谐振磁强计的基本结构,其对称式结构能够抑制加速度对磁场检测的干扰．设计了L形梁来释放加工过程中的应力,推导了开环系统和闭环系统的传递函数,通过初步参数设计,对扭矩随线圈匝数的变化进行了仿真,并介绍了基于对被测信号进行调制和同步解调的电容检测原理．结果表明,该谐振式MEMS磁强计灵敏度和分辨率高,多匝线圈方案使器件灵敏度大幅度提高,10匝线圈时的扭矩是单匝线圈的8倍,磁强计分辨率优于30nT．     

三角混合两级杠杆微位移放大机构的设计及性能分析

针对压电执行器和压电驱动平台输出行程有限的问题,设计了一种三角混合两级杠杆微位移放大机构。首先,理论推导了该微位移放大机构的位移放大公式,得到了位移放大比;其次,分析了不同类型两级杠杆结构支点铰链对施加载荷的敏感性;最后,利用ANSYS软件对机构进行静力学和动力学仿真,对机构的相对寄生运动比和固有频率进行了分析。结果表明：当选取直梁形铰链作为两级杠杆结构的支点铰链时,机构对施加载荷的敏感性较强;机构位移放大比理论值与仿真值的相对误差为9.56%,相对寄生运动比为0.348 2,且1阶固有频率最佳。所设计的微位移放大机构具有较小的寄生位移、较强的抗干扰能力和较好的动力学性能。研究结果为压电驱动器或快速反射镜支撑结构实现大量程的位移输出提供了一定的理论指导。     

对称体微机械电容加速度传感器的结构设计

描述了一种用无掩各向异性腐蚀技术制造以称体微机械梁，质量块加速度传感器的结构，由于梁在质量块中心对称位置上，在结构上的消除了加速度传感器的横向灵敏度效应，在对四梁结构及悬臂梁结构加速度计灵敏度及固有频率进行分析的基础上，用灵敏度－频率积取优值的方法进行了加速计的结构参数优化，采用了一种新颖的微力微痊移天平测试方法。初步测量了加速度计结构的静态特性。     

自溯源型MOEMS加速度计谐振子设计仿真研究

MOEMS加速度计是加速度传感器未来的发展趋势之一,光学位移检测手段是决定测量精度的核心因素,与之配套的谐振子设计、匹配关系是充分发挥其性能的关键要素。自溯源光栅干涉仪是一种超精密位移测量方法,具有测量直接溯源、精度高、小型化等优势,非常契合MOEMS加速度计的位移测量需求。结合自溯源光栅干涉仪特性,计算、设计并仿真了自溯源型MOEMS加速度计谐振子。基于谐振子力学理论模型,计算了谐振子刚度和固有频率,采用COMSOL软件仿真了谐振子谐振模态、不同轴向的灵敏度与应力分布,设计了位移灵敏度高达10.01μm/g,同时具有超低横向串扰的谐振子,对直接溯源型高精度加速度测量方案的技术研发与性能优化具有重要意义。     

压电陶瓷驱动的精密微操作平台特性与优化

设计一种结构紧凑、具有大运动空间和响应快的微操作平台,并对其静态和动态特性进行分析和优化.利用杠杆机构和连杆机构设计一种能实现两级放大的微操作平台,结构对称地设计在同一平面,并采用导向机构实现精确的导向运动.利用功能原理,采用伪刚体方法建立反映平台的静态和动态特性封闭形式的理论模型.由理论模型与有限元分析的结果比较分析可知,两者所得的结果误差范围为6.0%~7.2%,说明所推导模型的正确性.基于理论模型分析构型参数和柔性铰链尺寸参数对放大倍数、输出刚度、应力和固有频率的影响.结果表明,结构参数变化对输出刚度与固有频率的影响是矛盾的,对放大倍数和应力的影响也相互矛盾,需要通过优化结构参数以综合平衡其性能指标.提出一种以综合平衡平台的静态和动态特性为目标,并考虑应力、放大倍数和几何尺寸为约束的优化模型.结果表明优化后的固有频率和放大倍数比优化前均提高,而输出刚度降低,说明优化后的平台性能更好.     

微谐振式压力传感器的差动输出设计与建模

提出一种应用于微谐振式压力传感器的敏感结构,其一次敏感元件为矩形硅膜片,膜片的上表面架设有三个两端固支的硅谐振梁,间接感受压力作用,根据膜片上不同位置设置的硅谐振梁的固有频率对于压力变化有不同的变化规律的特点,实现对被测压力的差动输出检测。针对这种结构,建立被测压力与谐振梁固有频率的数学模型。设计实际尺寸参数进行计算分析,得出谐振梁的分布位置和几何参数对其振动特性的影响规律,给出了由差动输出解算压力的公式,验证了所提出的结构的设计思想和优化参数的可行性。     

新型推挽激励的谐振式微机械静电场传感器

为了提高传感器的信噪比(signal-to-noise ratio,SNR),降低器件的耦合干扰,基于表面微机械工艺设计制作了一种新型推挽激励方案的谐振式微型静电场传感器.该传感器敏感结构主要包括静电梳齿激励电极、屏蔽电极和感应电极3部分.工作时,在该传感器敏感结构同一侧梳齿的固定端上加入反相相等的激励信号,实现差分激励,使屏蔽电极在谐振频率处振动,从而在感应电极上感应出差分电流信号,通过相关检测方式检测出传感器该输出信号的二次谐波分量,即可获得被测静电场强度大小.该传感器的新型结构设计和激励检测方案可获得最大电场响应灵敏度,并有效抑制了同频耦合串扰和共模噪声.常压室温(约25℃)测试结果表明,在量程(-15 kV/m～15 kV/m)内,只需要5 Vpp激励电压,其中线性度(端基线性度)达到了1.03%,分辨率优于200 V/m.     

基于不确定度分析方法的硅微传感器设计方法研究

基于谐振式硅微压力传感器敏感结构设计原理,结合不确定度分析方法,分析了各结构尺寸对敏感结构固有频率以及检测灵敏度的影响.建立基于样本的随机模型在考虑尺寸加工误差的同时,评估了谐振敏感结构各个结构尺寸传感器固有频率以及检测灵敏度的影响大小并进行了比较,从而获得了对传感器性能起关键作用的影响因素.以上的结果可以为相应传感器敏感结构设计与优化提供参考.     

A resonant accelerometer with two-stage microleverage mechanisms fabricated by SOI-MEMS technology

We present the design, fabrication, and testing of a push-pull differential resonant accelerometer with double-ended-tuning-fork (DETF) as the inertial force sensor. The accelerometer is fabricated with the silicon-on-insulator microelectromechanical systems (MEMS) technology that bridges surface micromachining and bulk micromachining by integrating the 50-/spl mu/m-thick high-aspect ratio MEMS structure with the standard circuit foundry process. Two DETF resonators serve as the force sensor measuring the acceleration through a frequency shift caused by the inertial force acting as axial loading. Two-stage microleverage mechanisms with an amplification factor of 80 are designed for force amplification to increase the overall sensitivity to 160 Hz/g, which is confirmed by the experimental value of 158 Hz/g. Trans-resistance amplifiers are designed and integrated on the same chip for output signal amplification and processing. The 50-/spl mu/m thickness of the high-aspect ratio MEMS structure has no effect on the amplification factor of the mechanism but contributes to a greater capacitance force; therefore, the resonator can be actuated by a much lower ac voltage comparing to the 2-/spl mu/m-thick DETF resonators. The testing results agree with the designed sensitivity for static acceleration.     

Resonating Frequency of a SAD Circuit Loop and Inner Microcantilever in a Gas Sensor

A self-actuating and detecting (SAD) circuit loop that drives a micro-cantilever in a gas sensor, in which the resonance frequency shifting of the beam is monitored to detect its mass change caused by adsorption of certain gas molecules, is presented. The loop cannot only drive the cantilever but also trace the fundamental resonance frequency shift of the beam. The motivation of the SAD circuit is simplifying structure and process of the microbeam. This paper presents simulation and experiments of the mechanical resonance of the microbeam and resonance of the electric signal in the SAD loop. The relations between the two resonance frequencies are discussed and analyzed. While the beam is driven in resonating mode, the resonance frequency shift of the signal in the SAD circuit is approximately equal to the mechanical resonant frequency shift of the cantilever. The frequency resolution of the SAD with the microbeam is 0.6–0.7 Hz in our work, and theoretical measurement range of the system is 18750 Hz.      

硅微谐振式加速度计的温度效应及补偿

零偏和标度因数稳定性是衡量加速度计性能的两个重要参数.为了降低硅微谐振式加速度计的温度敏感性,对其温度影响机理进行了深入研究.通过温度实验发现,硅微谐振式加速度计的零偏和标度因数与设计理论参数有较大区别,且都具有较大的温度灵敏度,分别为0.72 g/℃和1.5℃-1.对弹性模量和谐振器应力与谐振器频率的关系进行了理论计算和FEA仿真验证,其中弹性模量引起的谐振频率-温度灵敏度为-0.7 Hz/℃,谐振器应力引起的谐振频率-温度灵敏度为180 Hz/℃.阐述了加工过程中键合应力产生的原因以及键合应力与谐振器残余应力的关系,发现谐振器应力是造成加速度计输出随温度漂移的主要因素.提出了一种隔离残余应力的隔离梁的设计方案,可使零偏温度灵敏度降至-35 Hz/℃,为温度补偿指明了方向.     

The effects of agglomerated CNTs as reinforcement on the size-dependent vibration of embedded curved microbeams based on modified couple stress theory

Vibration of an embedded nanocomposite curved microbeam is investigated based on the modified couple stress theory and Timoshenko beam model. The microbeam is reinforced by single-walled carbon nanotubes (SWCNTs) considering agglomeration effects. The structure is subjected to axial magnetic field. Applying Hamilton's principle, the motion equations of structure are derived. The generalized differential quadrature method is applied to obtain the frequency of the nanocomposite curved microbeam. The effects of the SWCNTs' volume percent, agglomeration of SWCNTs, elastic medium, magnetic field, boundary conditions, size effects, and central angle of microbeam on the frequency of the structure are shown.     

静电力非线性对双检测微陀螺谐振频率及灵敏度稳定性的影响

为探究如何避免静电力非线性的影响或利用高电压下的静电力非线性和微梁几何非线性对冲以实现高稳定性和高灵敏度微陀螺的设计。考虑边缘效应下的静电力非线性和刚度立方非线性同时存在时,结构参数对双检测微陀螺动力学性能的影响规律;研究表明,梳齿未交叠长度越小,直流偏置电压越大,则共振频率偏移量越大,静电力的软化效果也越显著;梳齿未交叠长度存在一阀值,大于此值时静电力非线性弱化为零且对幅值的影响存在饱和现象,利用此特性可保持灵敏度的稳定性。通过微梁几何非线性的设计和控制调节驱动刚度非线性导致的硬化特性来平衡静电力带来的软化特征,使幅频曲线呈现理想的线性状态,避免了因硬化、软化特性造成的频率失稳和振幅跳跃现象的发生,同时也获得了较高的灵敏度和稳定性。     

Coupled longitudinal-transverse behaviour of a geometrically imperfect microbeam

Based on the modified couple stress theory, the coupled longitudinal-transverse nonlinear behaviour of an imperfect microbeam is investigated numerically. The equations governing the longitudinal and transverse motions are obtained using Hamilton’s principle for the system with an initial geometric imperfection. The Galerkin scheme is employed to discretize the two partial differential equations of motion, yielding a set of second-order nonlinear ordinary differential equations with coupled terms. This set is cast into new set of first-order nonlinear ordinary differential equations and solved by means of the pseudo-arclength continuation technique. The nonlinear resonant response of the system along with bifurcations are presented via frequency–response curves. Moreover, the effect of different system parameter on the frequency–response curves is highlighted.     

High-frequency, silicon-based ultrasonic nozzles using multiple Fourier horns

This paper presents the design, simulation, and characterization of microfabricated 0.5 MHz, silicon-based, ultrasonic nozzles. Each nozzle is made of a piezoelectric drive section and a silicon resonator consisting of multiple Fourier horns, each with half wavelength design and twice amplitude magnification. Results of finite element three-dimensional (3-D) simulation using a commercial program predicted existence of one resonant frequency of pure longitudinal vibration. Both impedance analysis and measurement of longitudinal vibration confirmed the simulation results with one pure longitudinal vibration mode at the resonant frequency in excellent agreement with the design value. Furthermore, at the resonant frequency, the measured longitudinal vibration amplitude at the nozzle tip increases as the number of Fourier horns (n) increases in good agreement with the theoretical values of 2(n). Using this design, very high vibration amplitude gain at the nozzle tip can be achieved with no reduction in the tip cross-sectional area for contact of liquid to be atomized. Therefore, the required electric drive power should be drastically reduced, decreasing the likelihood of transducer failure in ultrasonic atomization.     

旋转超声内圆磨削砂轮变幅器的设计与试验研究

砂轮变幅器是旋转超声内圆磨削谐振系统的关键部件,其设计质量直接影响超声磨削的工艺效果。但目前内圆磨削砂轮变幅器缺乏较为完善的理论分析模型。为提高砂轮变幅器理论分析模型的通用性,基于非谐振设计理论建立了纵向谐振砂轮变幅器的理论分析模型,并利用砂轮变幅器各振动单元间的力、位移连续条件与边界条件推导了其频率方程。然后,针对频率方程进行编程求解,并通过ANSYS有限元仿真分析进行验证。最后,加工制作了纵向谐振砂轮变幅器,并开展阻抗特性分析试验、超声谐振试验和振动位移测量试验,分析了其谐振特性。试验结果表明,所研制的砂轮变幅器的谐振试验频率与理论设计频率一致,其输出端振动位移的试验值与仿真值的相对误差为7.83%,符合旋转超声内圆磨削的要求,验证了理论分析模型求解的正确性。研究结果为旋转超声内圆磨削砂轮变幅器的设计提供了便捷且有效的方法。     

Nonlinear resonant response of imperfect extensible Timoshenko microbeams

This paper investigates the nonlinear size-dependent dynamics of an imperfect Timoshenko microbeam, taking into account extensibility. Based on the modified couple stress theory, the nonlinear equations of motion for the longitudinal, transverse, and rotational motions are derived via Hamilton’s energy method. A high-dimensional finite degree-of-freedom system of ordinary differential equations is obtained by the application of the Galerkin scheme. This set of equations is solved through use of the pseudo-arclength continuation method. A stability analysis is conducted via use of the Floquet theory. The resonant motion characteristics of the microbeam are examined by plotting the frequency-response and force-response curves. The effect of system parameters on the resonant response of the system is highlighted.