CXS chemical dry vacuum pump brings smart vacuum to the process industry

The chemical sector as a whole has been quick to recognise the clear advantages of dry vacuum pumps over traditional wet technologies, and dry vacuum pumps are now well established around the world as an efficient, reliable option. A new trend is now emerging: for vacuum to be seen as a ‘utility’. In response, dry vacuum technology is being developed by manufacturers to be available on demand in a ‘plug and pump’ system that requires minimum set‐up and maintenance. The most advanced chemical dry vacuum pumps, such as the new CXS pump from Edwards, deliver exceptional energy efficiency and performance, are cost‐effective to run, and are environmentally sound.     

Selbsttrocknende Membran‐ Vakuumpumpen für feuchte Gase

Diaphragm vacuum pumps have proved their superiority as dry‐running systems over other types of vacuum pumps in many applications, and in particular in the medical, analysis, and process engineering sectors, as well as in the chemical industry. These pumps deliver the media without any contamination of content, have a high gas tightness, and can be designed as chemically resistant with regard to those parts which come in contact with the media. Although they are in principle relatively insensitive towards condensates which may be formed or conveyed with the media, liquids in the vapor or gas flow may be the cause for the prolongation of a vacuum process, which can be considerable and is certainly undesirable. This applies in particular to applications involving multi‐user vacuum systems in chemical laboratories, which under certain circumstances may contain very substantial volumes of condensates, and to the use of pumps in steam sterilizers (autoclaves) and vacuum drying cabinets. These examples of applications will be considered in greater detail hereinafter. The condensates which occur in the pump head of a diaphragm vacuum pump cause interference in that — due to re‐evaporation during the suction cycle — they incur a substantial reduction in the usable suction capacity of the pump. This problem can be resolved by means of a drying system for diaphragm vac uum pump heads. The drying system makes use in this case of the pressure differential which pertains between the pump chamber and the atmosphere outside the pump. The function of the drying system can be described as follows: A solenoid valve vents the pump head in a cyclic manner, with the result that liquid in the pump head will be blown out, while the process vacuum in the process engineering system will continue to be maintained. Diaphragm vacuum pumps equipped with this drying system have provided excellent results, for example in the chem ical laboratory, both in individual diaphragm vacuum pumps as well as in multi‐user vacuum systems. Extremely good experience has also been gained in the evacuation of sterilizer autoclaves and vacuum drying cabinets with the use of diaphragm vacuum pumps fitted with the drying system. When using the drying system on steam sterilizer autoclaves, another favorable effect is also encountered: The vapor fraction in the pumping medium is cooled in the diaphragm pump head to below the evaporation or boiling temperature, with the result that the vapour condenses. This reduces its volume to a fraction of the initial value, which is the equivalent of an additional suction capacity, in the same manner as with a condenser. The condensate which occurs with this process is blown out of the pump heads by the drying system, and, as a result, can no longer cause interference due to re‐evaporation.     

Experimental Study of Oil‐Free Claw Vacuum Pump Characteristics

Experimental study of pumping characteristics of a pilot model of a claw single‐stage vacuum pump with identical rotors was carried out. The curves of pumping speed vs. pressure at different rotary speed and the ultimate pressure at different rotors speed were determined on a test unit. Indicator pressure diagrams in working chambers of claw vacuum pump were obtained with the help of special sensors. Thus, an experimental data bank concerning the pumping characteristics of claw vacuum pump was created. It may be used for estimation of mathematical model adequacy and further development of the pump design.     

Wolfgang Gaede ‐ Wegbereiter der Vakuumtechnik

The inventions of Wolfgang Gaede were the beginning of the extensive industrial application of vacuum technology: the 1905 invented high vacuum mercury pump simplified the production of electric bulbs. From this time Gaede joined the company E. Leybold's Nachfolger research & development activities for 40years. Three of his inventions, the diffusion pump, the (turbo‐) molecular pump and the principle of “gas ballast” are worldwide in use even today. The most important stations of Gaede's biography are reported.     

Kenngrößen von Turbo‐Molekularpumpen

Graphs of “high‐vacuum pressure as a function of backing pressure” (“p_HV versus p_VV”) and “compression as a function of backing pressure” (“K versus p_VV”) are presented in this article. The performance of any turbomolecular pump can be fully and reliably evaluated with the aid of these graphs. Until now these graphs have only seldom been shown in catalogs. The catalogs generally lack the so‐called “limit lines” (“Q as a function of p_{VV, Kmax}”). For a prescribed gas throughput Q, the limit line indicates what minimum pressure must be generated by the backing pump at the fore‐line port of the turbomolecular pump so that a stable pressure exists at the high‐vacuum side of the turbomolecular pump. Using the gas‐type‐specific limit line and the corresponding, usually well‐documented pumping‐speed curve, one can already describe the functional proficiency and performance of a selected combination of turbomolecular pump plus backing pump in an approximate manner – but not yet completely. In this article we also indicate analytical functions which excellently describe the pressure dependence of the compression and pumping speed.     

Geräuscharme Flüssigkeitsring‐ Vakuumpumpen

Besides the requirements for processing, increasing investment charges and working expenses gain more and more importance during the past years as well as the noise level and noise development. Within this work new information's elaborated with regards to noise development were presented for liquid ring vacuum pumps. Based on these test and design data and its interpretation, a new pump type was designed. These studies resulted in a new type range, which corresponds to now‐a‐days standards with regards to increasing requirements on noise development. Combining new knowledge with the up‐to‐now experiences makes us considerably reduce the emissions at source. Latest technologies and production methods enabled us to create a robust construction at a favourable price.     

100 Jahre HV‐Pumpe von Wolfgang Gaede. 100th Anniversary of Gaede's High Vacuum Pump

In 1905 Wolfgang Gaede invented a sturdy, quickly operating high vacuum pump, which was easy to use. It was produced and distributed under licence from E. LEYBOLD’s Nachf. This firstly allowed the application of high vacuum technique to industriel production. Gaede continued to work with Leybold just to the end of his life in 1945.     

Non‐contact vacuum pumps

Non‐contact oil‐free vacuum pumps are widely used in different technological processes such as nanomaterials industry, pharmaceuticals industry, food industry, medicine, etc., thanks to absence of oil seal, high discharge, long operating life, yet low energy consumption. Scroll pumps are of particular interest as they make it possible to isolate bearing assemblies with grease from the working volume of the pump with the help of bellows. Pumping characteristics of non‐contact vacuum pumps are greatly influenced by backward leakage through slot channels of the rotor mechanism. The conductance is the main value characterizing backward leakage. In this paper an efficient method for prompt conductance calculation of slot channels with any geometry with the minimal clearance at a certain point along gas flow direction is presented. The calculation error of the presented method does not exceed 6%. The presented method was used in mathematical models for the pumping process of scroll pumps, claw pumps and Roots pumps. This method is recommended for pumping characteristics calculation of different non‐contact pumps and gas flow rates in vacuum systems channels.     

New Turbomolecular Pump with Central Opening for Free Axial Access. Eine neue Turbomolekularpumpe mit zentraler Öffnung für freien axialen Zugang

Standard turbomolecular pumps show typically one annular active intake area on the high vacuum flange side (single‐flow pumps). The central circular part of the inlet of the compressor turbine is blind for pumping. The new design proposes a central opening of a turbomolecular pump all along the axis. This central bore can be used e.g. for mounting of feed throughs, manipulators, windows or for coupling to further vacuum devices, in particular also for enclosing tube‐like vacuum systems. This design allows a multi‐use of a pumping port at a vacuum vessel without reducing there the pumping speed. Moreover, the new design is ideal for axial or radial differential pumping arrangements as e.g. needed for all gas jet like set‐ups or other pressure reduction stages.     

Abpumpverhalten von Roots‐ und Schraubenvakuumpumpen

Pump down characteristic of Roots pump combinations Combinations of roots pumps and screw type vacuum pumps are often used in industrial vacuum applications because of their high pumping capacity, their compact dimensions and their good energy efficiency. In load lock applications, the type of load control has a high influence on the evacuation time as well as on the energy efficiency of the pump combination. The operation limits of roots pumps are discussed and means to prevent an overload of the pump are introduced.     

Weitbereich-Turbomolekularpumpen und Membranvorvakuumpumpen als trockene HV- und UHV-Pumpsysteme

The development of new turbomolecular pumps with increased critical backing pressures up to 30 mbar made it possible to use oilfree diaphragm pumps as backing pumps. The combination of a wide-range turbomolecular pump with a diaphragm pump represents an inexpensive, compact and technical dry vacuum pumping system for high and ultrahigh vacuum applications. The interaction of wide-range turbomolecular pumps with diaphragm pumps is discussed in terms of gas throughput, compression ratio, ultimate pressure and power consumption of the turbomolecular pump and selection criteria for the diaphragm backing pump are shown.     

Vakuum‐Drehdurchführungen mit Magnetflüssigkeitsdichtungen. Magnetic‐liquid‐sealed vacuum rotary feedthrough

Most vacuum manufacturing processes require some type of motion to take place within the chamber. A magnetic liquid sealed feedthrough is a device that transmits rotary motion into a vacuum chamber with minimal torque requirements and minimal contamination level. The are widely employed in high and ultra‐high vacuum conditions, such as: semiconductor fabrication industry, coating equipment, high power X‐ray generators, robotics applications and the others. In the paper is given principle of operation of a magnetic liquid seal and various standard and special designs of vacuum rotary feedthroughs, sealed with magnetic liquid are described.     

Ventillose Flüssigkeitsring‐Vakuumpumpen

Valveless liquidring‐vacuumpumps Besides the procedural requirements in recent years, investment‐ and operation costs become more and more important. In the context of this essay concerning the simplification of the construction and reduction of the costs of wear the latest technical expertises to the processes in liquid ring vacuum pumps have been presented. The analysis of present single stage liquid ring vacuum pumps with valve technology over the whole pressure range was source for a new development. Result of the examinations is now a product range, which sets new standards concerning the more and more important cost consciousness. The combination of latest perceptions with existing experiences lead to a considerable simplification of the construction and an improvement of the operating behaviour. Latest technologies and possibilities of production made possible a robust and low‐cost construction.     

Thermal Deposition of Intact Tetrairon(III) Single‐Molecule Magnets in High‐Vacuum Conditions

A tetrairon(III) single‐molecule magnet is deposited using a thermal evaporation technique in high vacuum. The chemical integrity is demonstrated by time‐of‐flight secondary ion mass spectrometry on a film deposited on Al foil, while superconducting quantum interference device magnetometry and alternating current susceptometry of a film deposited on a kapton substrate show magnetic properties identical to the pristine powder. High‐frequency electron paramagnetic resonance spectra confirm the characteristic behavior for a system with S = 5 and a large Ising‐type magnetic anisotropy. All these results indicate that the molecules are not damaged during the deposition procedure keeping intact the single‐molecule magnet behavior.     

Neue Vorvakuumpumpe: Schnelles Evakuieren dank Membran‐ Stabilisierungssystem. New roughing pump: Fast Evacuation thanks to Diaphragm Stabilization System

Diaphragm pumps are used at turbomolecular pumps to generate rough vacuum. They are characterized by high suction speed, which however deteriorate when the working pressure decreases. This is caused by the difference between the working pressure of the pump and the ambient pressure. The larger the pressure difference, the more the elastic diaphragm bulges, lowering the effective input volume of the pump. This problem is alleviated by a newly developed diaphragm stabilization system. Diaphragm roughing pumps equipped with this system pump down faster than pumps without the system. Due to the enhanced suction speed, they also ensure greater process reliability. The first application of the diaphragm stabilization system (patent applied for) is in a newly developed diaphragm roughing pump. This pump is driven by a compact, brushless DC motor with very great efficiency. The pump is available in 24‐volt DC and 90‐ to 264‐volt, 50/60‐Hz AC versions. OEM and portable versions are available.     

High Detectivity Graphene‐Silicon Heterojunction Photodetector

A graphene/n‐type silicon (n‐Si) heterojunction has been demonstrated to exhibit strong rectifying behavior and high photoresponsivity, which can be utilized for the development of high‐performance photodetectors. However, graphene/n‐Si heterojunction photodetectors reported previously suffer from relatively low specific detectivity due to large dark current. Here, by introducing a thin interfacial oxide layer, the dark current of graphene/n‐Si heterojunction has been reduced by two orders of magnitude at zero bias. At room temperature, the graphene/n‐Si photodetector with interfacial oxide exhibits a specific detectivity up to 5.77 × 10¹³ cm Hz^1/2 W^‐1 at the peak wavelength of 890 nm in vacuum, which is highest reported detectivity at room temperature for planar graphene/Si heterojunction photodetectors. In addition, the improved graphene/n‐Si heterojunction photodetectors possess high responsivity of 0.73 A W^?1 and high photo‐to‐dark current ratio of ≈10⁷. The current noise spectral density of the graphene/n‐Si photodetector has been characterized under ambient and vacuum conditions, which shows that the dark current can be further suppressed in vacuum. These results demonstrate that graphene/Si heterojunction with interfacial oxide is promising for the development of high detectivity photodetectors.     

Reinigung von Vakuumbauteilen für UHV‐ und UCV‐Anwendungen

Cleaning of vacuum components for UHV and UCV applications Ultra‐clean vacuum components and assemblies are fundamental to some cutting edge high‐tech sectors like semiconductor industry, particle accelerators, and surface analytics. Exceptionally critical for these applications are particles that stick at the vacuum facing surfaces as well as desorption of water and hydrocarbons from the surfaces into the system, because this may interfere with the sensitive ultra‐high vacuum (UHV) and ultra‐clean vacuum (UCV) processes. In this contribution, some established cleaning methods and surface treatments are discussed with respect to their effect on reducing particle contamination and outgassing of water and organic compounds from stainless steel surfaces. It is clarified that the resulting cleanliness severely depends on the detailed steps during the surface treatment and subsequent cleaning. As a consequence, the discussed methods should be chosen and adapted with great care according to the specific demands of the final application area.     

螺杆真空泵单头变螺距螺杆转子型线的研究

本文介绍了一种用于无油螺杆真空泵的单头变螺距螺杆转子型线，给出了型线方程和抽速计算公式，并说明了参数确定原则。     

关于真空除气使用的真空泵情况分析与讨论

为使真空泵的抽气能力能最大程度适应除气过程,在选用真空泵时需考虑到搅拌气体数量、设备表面放气和设备的漏气率.随着钢液真空处理技术的发展,能保证高效率、有效地脱除钢液中的气体成为迫切的问题.由于抽出气体有灰尘,维修次数多等综合因素,应采用抽气能力大、运转可靠性强、结构简单的蒸汽喷射泵而非机械泵.但近年来,钢液真空处理真空...     

MoS2/ta‐C‐Kombinationsschichten hergestellt durch Laser‐Arc‐Technologie

MoS₂/ta‐C coatings produced by laserarc‐technology A series of MoS₂ and combined MoS₂/ta‐C coatings were prepared by lasercontrolled arc evaporation (Laser‐Arc) in order to study the tribological coating behaviour under vacuum and atmospheric conditions. Very low friction coefficients down to 0.005 were measured under high vacuum. By using a ta‐C underlayer beneath the MoS₂ a increased lifetime up to 5×10⁵ load cycles could be obtained. Also under atmospheric conditions the underlayer had a beneficial effect on coating performance.