Preparation and characterization of pulsed laser deposited CdTe thin films at higher FTO substrate temperature and in Ar + O2 atmosphere

Pulsed laser deposition (PLD) is one of the promising techniques for depositing cadmium telluride (CdTe) thin films. It has been reported that PLD CdTe thin films were almost deposited at the lower substrate temperatures (<300 °C) under vacuum conditions. However, the poor crystallinity of CdTe films prepared in this way renders them not conducive to the preparation of high-efficiency CdTe solar cells. To obtain high-efficiency solar cell devices, better crystallinity and more suitable grain size are needed, which requires the CdTe layer to be deposited by PLD at high substrate temperatures (>400 °C). In this paper, CdTe layers were deposited by PLD (KrF, λ = 248 nm, 10 Hz) at different higher substrate temperatures (T_s). Excellent performance of CdTe films was achieved at higher substrate temperatures (400 °C, 550 °C) under an atmosphere of Ar mixed with O₂ (1.2 Torr). X-ray diffraction analysis confirmed the formation of CdTe cubic phase with a strong (1 0 0) preferential orientation at all substrates temperatures on 60 mJ laser energy. The optical properties of CdTe were investigated, and the band gaps of CdTe films were 1.51 eV and 1.49 eV at substrate temperatures of 400 °C and 550 °C, respectively. Scanning electron microscopy (SEM) showed an average grain size of 0.3–0.6 μm. Thus, under these conditions of the atmosphere of Ar + O₂ (15 Torr) and at the relatively high T_s (500 °C), an thin-film (FTO/PLD-CdS (100 nm)/PLD-CdTe (~1.5 μm)/HgTe: Cu/Ag) solar cell with an efficiency of 6.68% was fabricated.     

Optical properties of CdxZn(1−x)O films deposited by ultrasonic spray pyrolysis method

Cd_xZn_(1−x)O (x = 0, 0.59, 0.78 and 1) films have been produced by ultrasonic spray pyrolysis technique using aqueous solutions of CdCl₂ H₂O and ZnCl₂ on the microscope glass substrate between 325 and 400 °C. The Cd_xZn_(1−x)O samples have been crystallized both cubic and hexagonal structures. The optical properties of the samples were characterized by transmittance and absorption spectroscopy measurements. Transmissions of the samples have decreased with increasing x values. The optical band gap energies of the Cd_xZn_(1−x)O samples from the absorption spectra have been calculated between 2.48 and 3.23 eV by different Zn contents. The samples were annealed at 350 and 450 °C. The optical band gap energy has decreased at 350 °C whereas it increased at 450 °C.     

Thin film growth of epitaxial, polycrystalline and amorphous SrRuO3

The SrRuO₃ thin films were grown on amorphous fused silica and (100) single crystal LaAlO₃ substrates by pulsed laser deposition method. On fused silica substrates, polycrystalline SrRuO₃ thin film was obtained and below the crystallization temperature, SrRuO₃ thin films show an amorphous phase. For the case of epitaxial growth on (100) single crystal LaAlO₃ substrate, the crystallization temperature of SrRuO₃ thin film was increased by ∼ 100 °C indicating that additional energy is necessary in order to obtain the epitaxial thin film. By using the eclipse method and the control of substrate temperature, the variations of surface morphologies and grain size were observed by atomic force microscope. Below the crystallization temperature, amorphous SrRuO₃ thin film shows hopping transport property of an insulator.     

The structural and electrical properties of Zn-Sn-O buffer layers and their effect on CdTe solar cell performance

Thin films of zinc-tin-oxide (ZTO) have been deposited on SnO₂:F coated glass substrates by co-sputtering of SnO₂ and ZnO. The deposition conditions for ZTO were controlled in order to vary film stoichiometry. The electro-optical and structural properties of ZTO have been studied as a function of their stoichiometric ratio and post-deposition annealing conditions. The same films were subsequently utilized as part of a bi-layer transparent front contact for the fabrication of CdTe solar cells: glass/SnO₂:F/ZTO. The performance of these devices suggested that the ZTO deposition and cell processing conditions can be optimized for enhanced device performance in particular for devices with thin CdS. Specifically, high blue spectral response (> 70% at 450 nm), accompanied by high open-circuit voltages (830 mV), and fill factors (70⁺%) have been demonstrated. Best solar cell performance was obtained for multi-phase ZTO films deposited at substrate temperatures of 400°C and a Zn/Sn ratio of 2.0, and which contained the binary phase of ZnO₂.     

Synthesis and characterization of ferromagnetic cobalt-doped tin dioxide thin films

Co-doped SnO₂ thin films are grown on sapphire (0001) substrates at 600 °C by the technique of dual-beam pulsed laser deposition. The prepared films show preferred orientation in the [100] direction of the rutile structure of SnO₂. Nonequilibrium film growth process results in doping Co into SnO₂ much above the thermal equilibrium limit. A Film with 3% of Co is ferromagnetic at room temperature with a remanent magnetization of ∼ 26% and a coercivity of ∼ 9.0 mT. As Co doping content x increases, the optical band gap absorption edge (E₀) of the Co-doped SnO₂ thin films initially shows a redshift at low x up to x = 0.12 and then increases at the higher x, which are attributed to the sp-d exchange interactions and alloying effects, respectively.     

Grain growth and structural transformation in ZnS nanocrystalline thin films

Fabrication of ZnS thin films having similar stoichiometry at different substrate temperatures (T_S) e.g. 200 °C, 300 °C and 400 °C by means of RF magnetron sputtering method is presented. The films grown at T_S of 200 °C are in cubic zinc-blende phase and textured along (111) plane. The films deposited at T_S of 300 °C and 400 °C are in hexagonal wurtzite phase. The surface roughness and grain size of the films increase with increasing T_S. The ultra-violet and visible absorption studies show that the bandgap of films can be tailored by varying T_S, taking advantage of the structural transformation.     

Photocatalytic activities of TiO2 thin films prepared on Galvanized Iron substrate by plasma-enhanced atomic layer deposition

Titanium dioxide (TiO₂) thin films were prepared on Galvanized Iron (GI) substrate by plasma-enhanced atomic layer deposition (PE-ALD) using tetrakis-dimethylamido titanium and O₂ plasma to investigate the photocatalytic activities. The PE-ALD TiO₂ thin films exhibited relatively high growth rate and the crystal structures of TiO₂ thin films depended on the growth temperatures. TiO₂ thin films deposited at 200 °C have amorphous phase, whereas those with anatase phase and bandgap energy about 3.2 eV were deposited at growth temperature of 250 °C and 300 °C. From contact angles measurement of water droplet, TiO₂ thin films with anatase phase and Activ™ glass exhibited superhydrophilic surfaces after UV light exposure. And from photo-induced degradation test of organic solution, anatase TiO₂ thin films and Activ™ glass decomposed organic solution under UV illumination. The anatase TiO₂ thin film on GI substrate showed higher photocatalytic efficiency than Activ™ glass after 5 h UV light exposure. Thus, we suggest that the anatase phase in TiO₂ thin film contributes to both superhydrophilicity and photocatalytic decomposition of 4-chlorophenol solution and anatase TiO₂ thin films are suitable for self-cleaning applications.     

Optical properties of ZnO thin film on γ-LiAlO2 substrate grown by pulsed laser deposition

Optical properties were investigated of ZnO thin films grown on (100) γ-LiAlO₂ (LAO) substrates by pulsed laser deposition method. C-axis oriented ZnO film was grown on (100) LAO substrate at the substrate temperature of 550 °C. The transmittances of the films were over 85%. Peaks attributed to excitons were seen in the absorption spectra, indicating that the thin films have high crystallinity. Photoluminescence spectra were observed at room temperature; the peak at 550 nm is ascribed to oxygen vacancies in the ZnO films caused by the diffusion of Li from the substrate into the film during deposition.     

Low temperature annealing effects on the structure and optical properties of ZnO films grown by pulsed laser deposition

ZnO thin films were deposited on glass substrates at room temperature (RT) ∼500 °C by pulsed laser deposition (PLD) technique and then were annealed at 150-450 °C in air. The effects of annealing temperature on the microstructure and optical properties of the thin films deposited at each substrate temperature were investigated by XRD, SEM, transmittance spectra, and photoluminescence (PL). The results showed that the c-axis orientation of ZnO thin films was not destroyed by annealing treatments; the grain size increased and stress relaxed for the films deposited at 200-500 °C, and thin films densified for the films deposited at RT with increasing annealing temperature. The transmittance spectra indicated that E_g of thin films showed a decreased trend with annealing temperature. From the PL measurements, there was a general trend, that is UV emission enhanced with lower annealing temperature and disappeared at higher annealing temperature for the films deposited at 200-500 °C; no UV emission was observed for the films deposited at RT regardless of annealing treatment. Improvement of grain size and stoichiometric ratio with annealing temperature can be attributed to the enhancement of UV emission, but the adsorbed oxygen species on the surface and grain boundary of films are thought to contribute the annihilation of UV emission. It seems that annealing at lower temperature in air is an effective method to improve the UV emission for thin films deposited on glass substrate at substrate temperature above RT.     

Studies on the residual stress of fluorine-doped SnO2 film deposited by chemical vapor deposition

Fluorine-doped tin oxide films were deposited on Na-Ca-Si glass substrate at 650 °C by chemical vapor deposition, and then heat treatment was carried out at 200 °C, 400 °C and 600 °C for 4 min in a resistance furnace. The residual stress in SnO₂:F films was systematically measured using the sin²Ψ method based on X-ray diffraction. The incidence angle was adopted as Ψ = 0°, 15°, 20°, 25° and 30°. The results showed that the films were polycrystalline with tetragonal SnO₂ structure, together with a weak peak of SnO phase. All the films exhibited a preferred orientation with the (200) plane. The minimum value of residual stress (− 0.24 ± 0.01 GPa) was obtained when the films were heat-treated at 200 °C.     

YSZ thin films deposited by e-beam technique

YSZ thin films were grown evaporating cubic and tetragonal phase ZrO₂ stabilized by 8 wt.% of Y₂O₃ (8% of YSZ) ceramic powders by using e-beam deposition technique. Operating technical parameters that influence thin film properties were studied. The influence of substrate crystalline structure on growth of deposited YSZ thin film was analyzed there. The YSZ thin films (1.5-2 μm of thickness) were deposited on three different types of substrates: Al₂O₃, optical quartz (SiO₂), and Alloy 600 (Fe-Ni-Cr). The dependence of substrate temperature, electron gun power, and phase of ceramic powder on thin film structure and surface morphology was investigated by X-ray diffraction (XRD) and scanning electron microscopy (SEM). The substrate temperature was changed in the range of 20-600° C (during the YSZ thin film deposition) and its influence on the crystallinity of deposited YSZ thin films was analyzed. It was found that electron gun power and substrate temperature has the influence on the crystallite size, and texture of YSZ thin films. Also, the substrate has no influence on the crystal orientation. The crystallite size varied between 20 and 40 nm and increased linearly changing the substrate temperature. The crystal phase of evaporated YSZ powder has the influence on the structure of the deposited YSZ thin films.     

Temperature dependence of InN film deposition by an RF plasma-assisted reactive ion beam sputtering deposition technique

Indium nitride (InN) films were deposited on Si(100) substrates using a radiofrequency (RF) plasma-assisted reactive ion beam sputtering deposition technique at various substrate temperatures. The X-ray diffraction patterns of the InN films suggest that the InN films deposited at substrate temperatures up to 370 °C were cubic crystalline InN; and at 500 °C, the InN film was hexagonal crystalline InN. In a scanning electron microscope image of the InN film surface, facets of cubic single-crystalline InN grains were clearly observed on the InN film deposited at 370 °C. The inclusion of metallic indium appeared on the InN film deposited at 500 °C.     

Study of Ar + O2 deposition pressures on properties of pulsed laser deposited CdTe thin films at high substrate temperature

Cadmium telluride (CdTe) thin films deposited by pulsed laser deposition (PLD) on fluorine–tin–oxide substrates under different pressures of argon (Ar) + oxygen (O₂) at high substrate temperature (T_s = 500 °C) was reported in this paper. In our work, the CdTe thin films were prepared successfully at high T_s by inputting Ar + O₂. As reported, PLD-CdTe thin films were almost prepared at low substrate temperatures (<300 °C) under vacuum conditions. The deposition of CdTe thin films at high T_s by PLD is rarely reported. The influence of the Ar + O₂ gas pressure on thickness, structural performance, surface morphology, optical property and band gap (E_g) had been investigated respectively by Ambios probe level meter, X-ray diffraction (XRD), scanning electron microscopy (SEM) and UV–Vis spectrometer. Strong dependence of properties on the deposition pressures was revealed. In the range of Ar + O₂ gas pressure from 5 to 12 Torr, the deposition rate and the E_g of CdTe films vary in the range of 41.9–57.66 nm/min then to 35.26 nm/min and 1.51–1.54 eV then to 1.47 eV, respectively. The XRD diagrams showed that the as-deposited films were polycrystalline, and the main phase was cubic phase. However, the preferred orientation peak disappeared when the deposition pressure was higher. SEM images indicated that the CdTe film deposited at a higher deposition pressure was more uniform and had a higher compactness and a lower pinhole density. Furthermore, based on this thorough study, FTO/PLD-CdS (100 nm)/PLD-CdTe (~1.5 μm)/HgTe:Cu/Ag solar cells with an efficiency of 6.68 % and an area of 0.64 mm² were prepared successfully.     

Galvanic deposition of hexagonal ZnO thin films on TCO glass substrate

We report an electrochemical deposition of ZnO thin films on SnO₂:F coated Transparent Conducting Oxide (TCO) glass substrates from a solution of Zn(NO₃)₂. A Zn rod acted as a sacrificial anode, while the TCO glass was the cathode. No external bias was applied. The deposition of ZnO thin films was pH sensitive and a pH between 5 and 6 was found to be optimum for film deposition. The deposition was carried out at 60 and 80 °C, with stirring of the solution. X-ray diffraction studies revealed that the ZnO films were of hexagonal phase. Scanning electron microscope (SEM) images showed prominent hexagonal micro-grains with vertical columnar growth. Optical absorption spectra yielded an energy band gap around 3.3 to 3.4 eV. A.C. current–voltage (I–V) and capacitance–voltage (C–V) measurements were carried out using colloidal silver paste as one of the contact. It was found that the ZnO film formed a Schottky junction and the TCO/ZnO/Ag system could be used as an electrical switching device.     

Synthesis, crystal structure and thermal decomposition of [La2(CH3CH2COO)6·(H2O)3]·3.5H2O precursor for high-k La2O3 thin films deposition

Lanthanum acetylacetonate La(C₅H₇O₂)₃·xH₂O has been used in the preparation of the precursor solution for the deposition of polycrystalline La₂O₃ thin films on Si(1 1 1) single crystalline substrates. The precursor chemistry of the as-prepared coating solution, precursor powder and precursor single crystal have been investigated by Fourier Transformed Infrared Spectroscopy (FTIR), differential thermal analysis coupled with quadrupole mass spectrometry (TG-DTA-QMS) and X-ray diffraction. The FTIR and X-ray diffraction analyses have revealed the complex nature of the coating solution due to the formation of a lanthanum propionate complex. The La₂O₃ thin films deposited by spin coating on Si(1 1 1) substrate exhibit good morphological and structural properties. The films heat treated at 800 °C crystallize in a hexagonal phase with the lattice parameters a = 3,89 Å and c = 6.33 Å, while at 900 °C the films contain both the hexagonal and cubic La₂O₃ phase.     

Phase determination of filtered vacuum arc deposited TiO2 thin films by optical modeling

Thin films of TiO₂ were produced using filtered vacuum arc deposition. Arc currents were 275, 300, 325 A, and the oxygen pressure during deposition was 0.93 Pa. The substrates were glass microscope slides, at temperatures of 25 °C (RT), 200 °C, and 400 °C. Film thickness was in the range 100 to 250 nm, depending on the deposition conditions. Film structure and chemical composition were determined using XRD and XPS analyses, respectively. As-deposited films were amorphous, except to two samples that were found to be crystalline (deposited with 300 A, 325 A at 400 °C), and the crystalline phase was close to that of anatase. All of the films were partially crystallized by annealing in air at 450 °C for 1 h. The O:Ti atomic concentration ratio was in the range 1.6:1-2:1, independent of deposition conditions. The optical parameters, refractive index and the extinction coefficient of the films were determined using variable angle spectroscopic ellipsometry. In addition, the optical transmission of the films were determined in the UV-VIS and IR regions. The average optical transmission in the VIS spectrum was 70-85%, affected by the interference in the film with 90% maxima and 60% minima. The refractive index at λ = 550 nm was in the range 2.4 to 2.7, depending on the deposition conditions and annealing. Using the semi-empirical model of Wemple and DiDomenico for the dielectric function below the interband absorption edge of ionic and covalent solids, the dispersion energy parameters of TiO₂ (E_o, E_d) were calculated. The underlying structural order of the amorphous films was inferred by comparing the dispersion energy parameters of the amorphous films with those of crystalline TiO₂. As expected, the refractive index of the amorphous films depended on the underlying phase of the film. The optical analyses indicated that the underlying phase of the amorphous films deposited on RT substrates was close to anatase, whereas the underlying phase of the amorphous films deposited on 400 °C substrates and annealed at 450 °C for 1 h consisted of both anatase and rutile. Thus, although the XRD analyses could not indicate the underlying phase of the amorphous films, it could be determined by the optical analyses.     

Formation of β-FeSi2 thin films on non-silicon substrates

β-FeSi₂ films were prepared on non-silicon substrates by sputtering. The crystalline growth, stress induced cracks and adhesive ability to the substrate were investigated on substrate temperature and thermal expansion coefficient of substrate materials. It was found that crack formation in β-FeSi₂ films was dependent on the thermal expansion coefficients of CaF₂, MgO and quartz glass insulating materials. High-density cracks were observed from β-FeSi₂ films on CaF₂ and quartz glass substrates with large difference of the thermal expansion coefficient between β-FeSi₂ film and substrate materials, and it was crack-free on MgO substrate with a thermal expansion coefficient close to that of β-FeSi₂ films. Polycrystalline β-FeSi₂ films grew on Mo, Ta, W, Fe and stainless steel (SS) substrates at low substrate temperature around 400 °C. There was no α-FeSi₂ phase confirmed in the films. All the films had continuous structures without noticeable cracks even though they have different thermal expansion coefficients. Capacity-voltage measurements showed that β-FeSi₂ films formed on SS substrates has n-type conductivity, with residual carrier concentrations of about 1.3∼6.4 × 10¹⁸ cm^− 3. Auger electron spectroscopy depth profile measurements identified homogeneous distribution of Fe and Si atoms in the film region, but with a large interface region between the film and the substrate.     

Synthesis and properties of epitaxial SnO2 films deposited on MgO (100) by MOCVD

Epitaxial tin oxide (SnO₂) thin films have been prepared on MgO (100) substrates at 500-600 °C by metalorganic chemical vapor deposition method. Structural and optical properties of the films have been investigated in detail. The obtained films were pure SnO₂ with the tetragonal rutile structure. An in-plane orientation relationship of SnO₂ (110) [010]//MgO (200) [110] between the film and substrate was determined. Two variant structure of SnO₂ were analyzed. The structure of the film deposited at 600 °C was investigated by high-resolution transmission electron microscopy, and an epitaxial structure was observed. The absolute average transmittance of the SnO₂ film at 600 °C in the visible range exceeded 90%. The optical band gap of the film was about 3.93 eV.     

Characterizations of SnO2 and SnO2:Sb thin films prepared by PECVD

Structural characterizations of tin oxide (SnO₂) thin films, deposited by plasma-enhanced chemical vapor deposition (PECVD), were investigated with scanning electron microscope (SEM), X-ray diffraction (XRD), and X-ray photoelectron spectroscopy (XPS). The results show that the films are porous, the crystalline structure transforms from crystalline to amorphous phase as deposition temperature changes from 500°C to 200°C, and the chemical component is non-stoichiometric (Sn:O is 1.0716 prepared at 450°C with a value of O₂ flow 3.5 l/min). Sheet resistance of the thin films decreases with increasing of deposition temperature. Whereas, sheet resistance increases with increasing of oxygen flow. Tin oxide doped with antimony (SnO₂:Sb) thin films prepared by same method have a better selectivity to alcohol than to carbon monoxide; the maximum sensitivity is about 220%. The gas-sensing mechanism of SnO₂ thin films is commentated.     

F-doped SnO2 thin films grown on flexible substrates at low temperatures by pulsed laser deposition

Fluorine-doped tin oxide (SnO₂:F) films were deposited on polyethersulfone plastic substrates by pulsed laser deposition. The electrical and optical properties of the SnO₂:F films were investigated as a function of deposition conditions such as substrate temperature and oxygen partial pressure during deposition. High quality SnO₂:F films were achieved under an optimum oxygen pressure range (7.4-8 Pa) at relatively low growth temperatures (25-150 °C). As-deposited films exhibited low electrical resistivities of 1-7 mΩ-cm, high optical transmittance of 80-90% in the visible range, and optical band-gap energies of 3.87-3.96 eV. Atomic force microscopy measurements revealed a reduced root mean square surface roughness of the SnO₂:F films compared to that of the bare substrates indicating planarization of the underlying substrate.