共查询到20条相似文献,搜索用时 9 毫秒
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Device and interconnect electrical failures often occur in the form of short or open circuits which produce hot or cold spots under voltage bias. With the minimum device feature size shrinking to 0.25 μm and less, it is impossible to locate the exact position of defects by traditional thermal or optical techniques such as infra-red emission thermometry, liquid crystals or optical beam induced current. We have used a temperature-sensing probe in an atomic force microscope to locate a hot spot created by a short-circuit defect between the gate and the drain of a Si MOSFET with a spatial resolution of about 0.5 μm. The technique has the potential to produce spatial resolutions in the range of 0.05 μm and efforts are underway to reach this goal 相似文献
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Characteristics of local nanolithography on oxidative titanium dots and wires were studied using an amplitude modulation atomic force microscopy in the non-contact mode. Nanolithographic experiments were conducted to investigate the influence that different experimental parameters had on the height, the width, the growth rate, the morphology, and the composition of the nanostructures using Auger electron spectroscopy. The results indicate that anodization time, applied voltage, and tip-sample distance are proportional to the heights and widths of the dots. When the tip-sample distance was too close during continued anodization, concave dots appeared because the oxide that enclosed the tip. Carbon nanotube probe fabricated dots are also presented and compared. 相似文献
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《Mechatronics》2022
Contact mode is a versatile and widely used technique for imaging samples using the Atomic Force Microscope (AFM). When contact mode imaging is performed in constant-height mode, it enables linear and faster response but leads to uncontrolled tip-sample forces. Here, a control strategy based on magnetic actuation is proposed to achieve high-bandwidth control of the tip-sample forces in constant-height contact mode AFM. A magnetic particle attached to the AFM probe is actuated by an external solenoid and employed for force regulation. A quasi-static model has been proposed and employed to develop the control strategy. Likewise, the contact natural-frequency, which decides the limit of achievable speed, has been shown to be significantly higher relative to the free probe and to be relatively insensitive to the particle size. Subsequently, a setup is developed to validate the control strategy and demonstrate reduction of tip-sample force variation by over a factor of 12 compared to conventional constant-height mode operation. Likewise, in comparison with conventional contact mode AFM, an improvement of linearity by over a factor of 9 and improvement in response speed by a factor of 100 have been demonstrated while imaging hard samples. The system has been shown to image topography at speeds of 2.44 frames per second while regulating the interaction force. Finally, the stiffness of a sample has also been characterized using the developed system and simultaneous estimation of topography has also been demonstrated. They are shown to agree well with theoretical expectations. 相似文献
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Yoshino T Sotome I Ohtani T Isobe S Oshita S Maekawa T 《Journal of electron microscopy》2000,49(3):483-486
Barley cells cut from a sprout were exposed to either air or high-pressure xenon gas for 3 days and the surface of those cells was observed by atomic force microscopy (AFM) to examine the effect of the gas treatment. This method enabled the direct observation of the fresh surface of the barley cells in solution at high resolution. The cuticle layer was preserved on the primary cell wall of 0.48 MPa xenon gas-treated barley cells, while air-treated barley cells lost the cuticle layer from the primary cell wall. These findings indicate that the high-pressure xenon gas treatment is effective to preserve the cuticle layer attached to the primary cell wall. AFM is a powerful tool for the observation of the surface structure of living plant cells in solution. 相似文献
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M. Nagase H. Namatsu K. Kurihara K. Iwadate K. Murase T. Makino 《Microelectronic Engineering》1996,30(1-4):419-422
The resist pattern fluctuations on the nano-scale are successfully observed using a dynamic force mode AFM. A scaling analysis based on the fractals applies to the AFM images for quantitative evaluation of the fluctuations. The standard deviation of width fluctuations in a ZEP resist pattern is 2.8 nm. The scaling analysis confirms that the surface morphology of the pattern sidewall is almost the same as that of the resist film lightly exposed by an electron beam. The main cause of the fluctuation is structures with a diameter of 20–30 nm which are composed of large groups of molecules. 相似文献
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Watari F 《Journal of electron microscopy》1999,48(5):537-544
Atomic force microscopy was applied to the in-situ observation of the etching process of human teeth by acid agents. The change of surface morphology was observed consecutively before and during etching for the same area in the same specimen. The course of the etching process in enamel from dissolution of smear layer just after injection of acid agent, appearance of enamel prisms and progress of demineralization were quantitatively analysed for three fundamental acid agents of 2% phosphoric acid, 10% citric acid and 10% polyacrylic acid. Then the depth profile, etching amount, etching rate and thickness of smear layer were evaluated. Observation by scanning electron microscopy was also done and compared with the results by atomic force microscopy. 相似文献
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原子力显微镜( AFM)广泛应用于纳米尺度的成像和操纵,其较低的扫描速度严重影响了测试的效率。为此,许多研究人员通过设计先进的Z向控制算法改善系统的响应速度,达到提高扫描速度的目的,而先进的控制算法的实现首先需要对AFM的Z向反馈系统进行建模。为此,本文提出一种简单准确的系统辨识方法,通过对系统输入输出数据的分析,得到AFM的Z向反馈系统模型,并利用该模型验证先进控制算法的控制性能。实验表明该方法能为先进控制算法的设计和实现建立有效的仿真模型。 相似文献
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Atomic force microscopy (AFM) was performed for the analysis of the fine structure of rice starch granules in the nanometre scale which were prepared by a physical destruction method. The present study directly demonstrated that fine particles of approximately 30 nm in diameter were present inside each granule and occasionally formed straight chain arrangements. We considered that these fine particles correspond to the individual single cluster in the cluster model which has been proposed in previous studies on the starch granule structure. 相似文献
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The problem of transient four-wave mixing with noncoincident optical pulses is analyzed using the formalism of the time evolution and the density matrix operators. The results are relevant to problems involving real time holography and wave conjugation. The treatment establishes a bridge between the conventional formalisms of nonlinear optics and of photon echoes. 相似文献
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水提女贞子粗多糖经过纯化得到三种多糖分别为LL-Ⅰ1,LL-Ⅰ2,LL-Ⅲ。用气相色谱对女贞子多糖组分进行分析,用原子力显微镜对其结构形态进行观测,结果表明,LL-Ⅰ1,含有鼠李糖/核糖、阿拉伯糖、甘露糖、葡萄糖和半乳糖;LL-Ⅰ2,含有鼠李糖/核糖和葡萄糖;LL-Ⅲ含有鼠李糖/核糖、阿拉伯糖、甘露糖、葡萄糖和半乳糖。原子力显微镜分析表明LL-Ⅰ1,LL-Ⅰ2,LL-Ⅲ分别不同程度的聚集成股,且具有螺旋结构。这种现象可能与聚集体的分子间相互作用和糖链间的氢键缔合有关。 相似文献
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Flexible circuit technology is a key factor in the continued shrinkage of microelectronic components and devices. One of the important applications of the flexible circuits is in hard disk drive industry, where they are used as an interconnection between the preamplifier and head slider assembly of a hard disk drive. At present, defect characterization of flexible circuits is often performed after manufacture usually with optical microscopy. While this may be sufficient for certain low-tech applications, for advanced ultra high-density hard disk components may not be enough. With a continuing reduction of the dimension of the current carrying conductor wires, the size of defects that may affect long-term reliability of the system is reaching the resolution limit of traditional techniques used to characterize the defects. This paper presents combined application of atomic force microscope (AFM) and ultrasonic atomic force microscope (UAFM) to characterize defects in flexible circuits. Three identical flexible circuits from different manufactures are examined using AFM and UAFM. The AFM and UAFM images of a particular region, in the flexible circuit in all the three samples are compared. Images from pure polymer region of the flexible circuit are compared with the images of the regions containing copper and polymer. In general, the UAFM images show subsurface features while AFM images show surface topography. This capability of UAFM can be used to image the grain structure of the copper film without removing the polymer cover layer film. It also detects the sub-micron defects present at the polymer/metal interface. Analysis of the grain structure of copper, distribution of defects at the polymer/metal interface is presented. Based on these observations, the applicability of AFM/UAFM to image the microstructure of copper in flexible circuits and possible effect of defects in flexible circuits on the long-term reliability of the hard disc drive are discussed. 相似文献