共查询到20条相似文献,搜索用时 390 毫秒
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设计了一种可以为不同阵列天线系统进行合路的微带三频合路器。它由分布式输入耦合线、输出馈线、谐振器和同频合路器组成。该合路器不需要匹配电路,因此可以减小尺寸,实现小型化需求。微带型谐振器因为会产生谐波,所以将微带谐振器放在输入输出馈线的合适位置以抑制谐波响应,从而提高合路器的隔离度。 相似文献
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硅通孔(Through Silicon Via, TSV)是3维集成电路(3D IC)进行垂直互连的关键技术,而绝缘层短路缺陷和凸点开路缺陷是TSV两种常见的失效形式。该文针对以上两种典型缺陷建立了TSV缺陷模型,研究了侧壁电阻及凸点电阻与TSV尺寸之间的关系,并提出了一种基于TSV缺陷电阻端电压的检测方法。同时,设计了一种可同时检测以上两种缺陷的自测试电路验证所提方法,该自测试电路还可以级联起来完成片内修复功能。通过分析面积开销可得,自测试/修复电路在3D IC中所占比例随CMOS/TSV工艺尺寸减小而减小,随TSV阵列规模增大而减小。 相似文献
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方块谐振器的品质因数(Q)很高,但是插入损耗也很大。为了得到低相噪的微机电系统(MEMS)振荡器,需要进一步提高方块谐振器的Q值,降低谐振器的插入损耗。通过支撑梁位置的合理设计可以达到极小的锚点损耗,从而实现非常高的品质因数。采用二阶面切变模态方块谐振器的设计方法,表现出了很多的优越性:Q值更高,动态电阻更小(在间隙为0.25 μm时达到82.1 Ω)。基于这种新型谐振器设计出的振荡器实现的相位噪声为:–156 dBc/Hz@1 kHz。 相似文献
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薄膜晶体管阵列基板过孔电阻大、耐流性差易发生过孔烧毁,引起显示异常。目前针对过孔电阻与耐流性影响因素及机理尚不明确,制约着未来高耐流性过孔的制备和应用。本文实验结果表明:氧化铟锡(Indium Tin Oxide, ITO)膜方块电阻减小、过孔坡度角减小、ITO膜与金属接触面积增大均可降低过孔电阻、提升过孔耐流性。结合过孔结构及机理分析指出,过孔电阻主要由ITO膜层自身电阻(RITO)及过孔接触电阻(Rcontact)组成,ITO膜方块电阻及过孔坡度角减小会使RITO减小,ITO膜与金属接触面积增大会使Rcontact减小。基板中部过孔耐流性差与中部的ITO膜方块电阻及过孔坡度角偏大有关。在满足产品光学品质标准前提下,ITO膜厚增厚、调控绝缘层膜质以及干法刻蚀参数减小坡度角、加大过孔接触面积设计是降低过孔电阻、提升过孔耐流性的有效途径。 相似文献
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针对现有微机械(Micromechanical,也称MEMS)圆盘谐振器串联动态电阻过大的问题,该文提出了电极移动法,将其它MEMS器件的可调性能引入MEMS圆盘谐振器,在现有最窄缝隙工艺条件下实现了电极-圆盘缝隙的进一步缩减,降低了串联动态电阻。该文给出了悬置电极的设计方法,推导了电极移动后有效缝隙宽度的表达式,提出了可防电极接触短路的微小圆孔状凹陷设计,并给出了加入凹陷后的有效缝隙宽度表达式。通过ANSYS仿真结果可知,分别加载2.10 V和66.38 V偏置电压后,0.1 m和1 m电极-圆盘缝隙缩小为0.0016 m和0.01 m。对于0.1~1.1 m缝隙谐振器,串联动态电阻变为原来的10-8倍以下。 相似文献
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Michael Reilly 《半导体技术》2004,29(12)
DUV lithography, using the 248 nm wavelength, is a viable manufacturing option for devices with features at 130 nm and less. Given the low kl value of the lithography, integrated process development is a necessary method for achieving acceptable process latitude. The application of assist features for rule based OPC requires the simultaneous optimization of the mask, illumination optics and the resist.Described in this paper are the details involved in optimizing each of these aspects for line and space imaging.A reference pitch is first chosen to determine how the optics will be set. The ideal sigma setting is determined by a simple geometrically derived expression. The inner and outer machine settings are determined, in turn,with the simulation of a figure of merit. The maximum value of the response surface of this FOM occurs at the optimal sigma settings. Experimental confirmation of this is shown in the paper.Assist features are used to modify the aerial image of the more isolated images on the mask. The effect that the diffraction of the scattering bars (SBs) has on the image intensity distribution is explained. Rules for determining the size and placement of SBs are also given.Resist is optimized for use with off-axis illumination and assist features. A general explanation of the material' s effect is discussed along with the affect on the through-pitch bias. The paper culminates with the showing of the lithographic results from the fully optimized system. 相似文献
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Thomas M.Trexler 《半导体技术》2004,29(5)
From its emergence in the late 1980s as a lower cost alternative to early EEPROM technologies, flash memory has evolved to higher densities and speedsand rapidly growing acceptance in mobile applications.In the process, flash memory devices have placed increased test requirements on manufacturers. Today, as flash device test grows in importance in China, manufacturers face growing pressure for reduced cost-oftest, increased throughput and greater return on investment for test equipment. At the same time, the move to integrated flash packages for contactless smart card applications adds a significant further challenge to manufacturers seeking rapid, low-cost test. 相似文献
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The relation between the power of the Brillouin signal and the strain is one of the bases of the distributed fiber sensors of temperature and strain. The coefficient of the Bfillouin gain can be changed by the temperature and the strain that will affect the power of the Brillouin scattering. The relation between the change of the Brillouin gain coefficient and the strain is thought to be linear by many researchers. However, it is not always linear based on the theoretical analysis and numerical simulation. Therefore, errors will be caused if the relation between the change of the Brillouin gain coefficient and the strain is regarded as to be linear approximately for measuring the temperature and the strain. For this reason, the influence of the parameters on the Brillouin gain coefficient is proposed through theoretical analysis and numerical simulation. 相似文献
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The parallel thinning algorithm with two subiterations is improved in this paper. By analyzing the notions of connected components and passes, a conclusion is drawn that the number of passes and the number of eight-connected components are equal. Then the expression of the number of eight-connected components is obtained which replaces the old one in the algorithm. And a reserving condition is proposed by experiments, which alleviates the excess deletion where a diagonal line and a beeline intersect. The experimental results demonstrate that the thinned curve is almost located in the middle of the original curve connectivelv with single pixel width and the processing speed is high. 相似文献
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Today, micro-system technology and the development of new MEMS (Micro-Electro-Mechanical Systems) are emerging rapidly. In order for this development to become a success in the long run, measurement systems have to ensure product quality. Most often, MEMS have to be tested by means of functionality or destructive tests. One reason for this is that there are no suitable systems or sensing probes available which can be used for the measurement of quasi inaccessible features like small holes or cavities. We present a measurement system that could be used for these kinds of measurements. The system combines a fiber optical, miniaturized sensing probe with low-coherence interferometry, so that absolute distance measurements with nanometer accuracy are possible. 相似文献
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GU Min-fen LIANG Zhong-cheng WANG Ren-zhou DONG Xiang-mei ZHANG Pei-ming CHEN Jia-bi 《光电子快报》2008,4(2):150-152
Waveguide multilayer optical card (WMOC) is a novel storage device of three-dimensional optical information. An advanced readout system fitting for the WMOC is introduced in this paper. The hardware mainly consists of the light source for reading, WMOC, motorized stages addressing unit, microscope imaging unit, CCD detecting unit and PC controlling & processing unit. The movement of the precision motorized stage is controlled by the computer through Visual Basic (VB) language in software. A control panel is also designed to get the layer address and the page address through which the position of the motorized stages can be changed. The WMOC readout system is easy to manage and the readout result is directly displayed on computer monitor. 相似文献
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Qi-jiang Ran Pei-de Han Yu-jun Quan Li-peng Gao Fan-ping Zeng Chun-hua Zhao 《光电子快报》2008,4(4):239-242
This paper presents a new method to increase the waveguide coupling efficiency in hybrid silicon lasers. We find that the propagation constant of the InGaAsP emitting layer can be equal to that of the Si resonant layer through improving the design size of the InP waveguide. The coupling power achieves 42% of the total power in the hybrid lasers when the thickness of the bonding layer is 100 nm. Our result is very close to 50% of the total power reported by Intel when the thickness of the thin bonding layer is less than 5 nm. Therefore, our invariable coupling power technique is simpler than Intel's. 相似文献
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The collinearly phase-matching condition of terahertz-wave generation via difference frequency mixed in GaAs and InP is theoretically studied. In collinear phase-matching, the optimum phase-matching wave hands of these two crystals are calculated. The optimum phase-matching wave bands in GaAs and lnP are 0.95-1.38μm and 0.7-0.96μm respectively. The influence of the wavelength choice of the pump wave on the coherent length in THz-wave tuning is also discussed. The influence of the temperature alteration on the phase-matching and the temperature tuning properties in GaAs crystal are calculated and analyzed. It can serve for the following experiments as a theoretical evidence and a reference as well. 相似文献
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Composition dependence of bulk and surface phonon-polaritons in ternary mixed crystals are studied in the framework of the modified random-element-isodisplacement model and the Bom-Huang approximation. The numerical results for Several Ⅱ - Ⅵ and Ⅲ- Ⅴ compound systems are performed, and the polariton frequencies as functions of the compositions for ternary mixed crystals AlxGa1-xAs, GaPxAS1-x, ZnSxSe1-x, GaAsxSb1-x, GaxIn1-xP, and ZnxCd1-xS as examples are given and discussed. The results show that the dependence of the energies of two branches of bulk phonon-polaritons which have phonon-like characteristics, and surface phonon-polaritons on the compositions of ternary mixed crystals are nonlinear and different from those of the corresponding binary systems. 相似文献
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An insert layer structure organic electroluminescent device(OLED) based on a new luminescent material (Zn(salen)) is fabricated. The configuration of the device is ITO/CuPc/NPD/Zn(salen)/Liq/LiF/A1/CuPc/NPD/Zn(salen)/Liq/LiF/A1. Effective insert electrode layers comprising LiF(1nm)/Al(5 nm) are used as a single semitransparent mirror, and bilayer cathode LiF(1 nm)/A1(100 nm) is used as a reflecting mirror. The two mirrors form a Fabry-Perot microcavity and two emissive units. The maximum brightness and luminous efficiency reach 674 cd/m^2 and 2.652 cd/A, respectively, which are 2.1 and 3.7 times higher than the conventional device, respectively. The superior brightness and luminous efficiency over conventional single-unit devices are attributed to microcavity effect. 相似文献