共查询到20条相似文献,搜索用时 203 毫秒
1.
Rasras M. De Wolf I. Groeseneken G. Kaczer B. Degraeve R. Maes H.E. 《Electron Devices, IEEE Transactions on》2001,48(2):231-238
The widely accepted anode-hole injection model assumes that the breakdown of oxide films during electrical stress is due to backflow of holes created in the anode by hot electrons. This explanation has been supported by the observation of a substrate hole current during Fowler-Nordheim (FN) substrate electron injection in n-type MOSFETs gate. In this paper, we reexamine the origin of the FN-induced substrate hole current. Based on direct experiments performed on nMOSFETs, we concluded that not the anode hole injection, but the generation of electron-hole pairs in the substrate by FN-induced photons in the gate, is the dominant source of the substrate hole current. Consequently, the generally accepted explanation of oxide degradation based on the anode hole injection model might therefore have to be revised 相似文献
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Projecting lifetime of deep submicron MOSFETs 总被引:8,自引:0,他引:8
Erhon Li Rosenbaum E. Jiang Tao Peng Fang 《Electron Devices, IEEE Transactions on》2001,48(4):671-678
A detailed examination of hot-carrier-induced degradation in MOSFETs from a 0.25-μm and a 0.1-μm technology is performed. Although the worst case stress condition depends on the stress voltage, channel length, and oxide thickness, Ib,peak is projected to be the worst case stress condition at the operating voltage for both nMOSFETs and pMOSFETs. Post-metallization anneal (PMA) in deuterium can significantly improve the device lifetime if the primary degradation mechanism at the stress condition is interface trap generation due to interface depassivation by energetic electrons 相似文献
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This study investigates the effects of oxide traps induced by SOI of various thicknesses (TSOI = 50, 70 and 90 nm) on the device performance and gate oxide TDDB reliability of Ni fully silicide metal-gate strained SOI MOSFETs capped with different stressed SiN contact-etch-stop-layer (CESL). The effects of different stress CESLs on the gate leakage currents of the SOI MOSFET devices are also investigated. For devices with high stress (either tensile or compressive) CESL, thinner TSOI devices have a smaller net remaining stress in gate oxide film than thicker TSOI devices, and thus possess a smaller bulk oxide trap (NBOT) and reveal a superior gate oxide reliability. On the other hand, the thicker TSOI devices show a superior driving capability, but it reveals an inferior gate oxide reliability as well as a larger gate leakage current. From low frequency noise (LFN) analysis, we found that thicker TSOI device has a higher bulk oxide trap (NBOT) density, which is induced by larger strain in the gate oxide film and is mainly responsible for the inferior gate oxide reliability. Presumably, the gate oxide film is bended up and down for the p- and nMOSFETs, respectively, by the net stress in thicker TSOI devices in this CESL strain technology. In addition, the bending extent of gate oxide film of nMOSFETs is larger than that of pMOSFETs due to the larger net stress in gate oxide film resulting from additional compressive stress of shallow trench isolation (STI) pressed on SOI. Therefore, an appropriate SOI thickness design is the key factor to achieve superior device performance and reliability. 相似文献
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MOSFET器件继续微缩则闸极氧化层厚度将持续减小,在0.13μm的技术闸极二氧化硅的厚度必须小于2nm,然而如此薄的氧化层直接穿透电流造成了明显的漏电流。为了降低漏电流,二氧化硅导入高浓度的氮如脱耦等离子体氮化制备氮氧化硅受到高度重视。然而,脱耦等离子体氮化制备氮氧化硅的一项顾虑是pMOSFET负偏压温度的失稳性。在此研究里测量了脱耦等离子体氮化制备氮氧化硅pMOSFET负偏压温度失稳性,并且和传统的二氧化硅闸电极比较,厚度1.5nm的脱耦等离子体氮化制备氮氧化硅pMOSFET和厚度1.3nm的二氧化硅pMOSFET经过125℃和10.7MVcm的电场1h的应力下比较阈值电压,结果显示脱耦等离子体氮化制备氮氧化硅pMOSFET在负偏压温度应力下性能较差。在15%阈值电压改变的标准下,延长10年的寿命,其最大工作电压是1.16V,可以符合90nm工艺1V特操作电压的安全范围内。 相似文献
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MOSFET器件继续微缩则闸极氧化层厚度将持续减小,在0.13μm的技术闸极二氧化硅的厚度必须小于2 nm,然而如此薄的氧化层直接穿透电流造成了明显的漏电流.为了降低漏电流,二氧化硅导入高浓度的氮如脱耦等离子体氮化制备氮氧化硅受到高度重视.然而,脱耦等离子体氮化制备氮氧化硅的一项顾虑是pMOSFET负偏压温度的失稳性.在此研究里测量了脱耦等离子体氮化制备氮氧化硅pMOSFET负偏压温度失稳性,并且和传统的二氧化硅闸电极比较,厚度1.5 nm的脱耦等离子体氮化制备氮氧化硅pMOSFET和厚度1.3 nm的二氧化硅pMOSFET经过125℃和10.7MV/cm的电场1 h的应力下比较阈值电压,结果显示脱耦等离子体氮化制备氮氧化硅pMOSFET在负偏压温度应力下性能较差.在15%阈值电压改变的标准下,延长10年的寿命,其最大工作电压是1.16 V,可以符合90 nm工艺1 V特操作电压的安全范围内. 相似文献
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Auger recombination-enhanced hot carrier degradation in nMOSFETs with a forward substrate bias 总被引:2,自引:0,他引:2
Tsai C.-W. Chen M.-C. Ku S.-H. Tahui Wang 《Electron Devices, IEEE Transactions on》2003,50(4):1022-1026
Enhanced hot carrier degradation in nMOSFETs with a forward substrate bias is observed. The degradation cannot be explained by conventional channel hot electron effects. Instead, an Auger recombination-assisted hot electron process is proposed. In the process, holes are injected from the forward-biased substrate and provide for Auger recombination with electrons in the channel, thus substantially increasing channel hot electron energy. Measured hot electron gate current and the light emission spectrum provide evidence that the high-energy tail of channel electrons is increased with a positive substrate bias. The drain current degradation is about ten times more serious in forward-biased substrate mode than in standard mode. The Auger-enhanced degradation exhibits positive temperature dependence and may appear to be a severe reliability issue in high temperature operation condition. 相似文献
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For gate oxides thinner than 40 Å, conventional schemes of incorporating N in the oxides might become insufficient in stopping B penetration. By implanting N into the Si substrates with a sacrificial oxide layer; we have grown 25 Å gate oxide and prevented B penetration in the presence of F after 90 min of 850°C and 10 s of 1050°C anneals. SIMS analyses surprisingly reveal a N peak formed within the thin oxide layer, while no N is left in the Si substrate beyond the oxide layer. In addition, no B is seen in the substrate, either. As a consequence, threshold voltage of pMOSFETs is shifted to a more negative value which agrees with calculations assuming no B penetration. Meanwhile, threshold voltage of nMOSFETs is not affected by the N implant, which confirms that B penetration is the only explanation for the pMOSFET data. Prevention of B penetration also improves the short-channel effects for 0.25-μm pMOSFETs, while no difference is seen in nMOSFETs with and without N implant 相似文献
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The degradation of device under GIDL(gate-induced drain leakage current)stress has been studied using LDD NMOSFETs with 1.4 nm gate oxides.Experimental result shows that the degradation of device parameters depends more strongly on Vd than on Vg.The characteristics of the GIDL current are used to analyze the damage generated during the stress.It is clearly found that the change of GIDL current before and after stress can be divided into two stages.The trapping of holes in the oxide is dominant in the first stage,but that of electrons in the oxide is dominant in the second stage.It is due to the common effects of edge direct tunneling and band-to-band tunneling.SILC(stress induced leakage current)in the NMOSFET decreases with increasing stress time under GIDL stress.The degradation characteristic of SILC also shows saturating time dependence.SILC is strongly dependent on the measured gate voltage.The higher the measured gate voltage,the less serious the degradation of the gate current.A likely mechanism is presented to explain the origin of SILC during GIDL stress. 相似文献
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《Electron Devices, IEEE Transactions on》1986,33(9):1329-1333
We have employed a technique of constant current stress between the gate and drain of a MOS transistor to study the degradation of the threshold voltage, transconductance, and substrate current characteristics of the transistor. From the transistor characteristics, we propose that the degradation mechanism is a combined effect of trapping of holes in the gate oxide created by impact ionization due to the high electric field (> 8 MV/cm) across the oxide, and electron trapping phenomena. The degradation characteristics of the transistor under this constant current stress are quite similar to that observed normally due to the injection of hot electrons in the gate oxide when the transistor is biased in "ON" condition and the gate and drain voltages are selected to produce maximum substrate current. 相似文献
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《Electron Devices, IEEE Transactions on》2006,53(8):1805-1814
The waveform effect on dynamic bias temperature instability (BTI) is systematically studied for both p- and nMOSFETs with ultrathin SiON gate dielectrics by using a modified direct-current current–voltage method to monitor the stress-induced interface trap density. Interface traps are generated at the inversion gate bias (negative for pMOSFETs and positive for nMOSFETs) and are partially recovered at the zero or accumulation gate bias. Devices under high-frequency bipolar stress exhibit a significant frequency-dependent degradation enhancement. Approximate analytical expressions of the interface trap generation for devices under the static, unipolar, or bipolar stress are derived in the framework of conventional reaction–diffusion (R–D) model and with an assumption that additional interface traps$(N_ it^ast)$ are generated in each cycle of the dynamic stress. The additional interface trap generation is proposed to originate from the transient trapped carriers in the states at and/or near the$hboxSiO_2/hboxSi$ interface upon the gate voltage reversal from the accumulation bias to the inversion bias quickly, which may accelerate dissociation of Si–H bonds at the beginning of the stressing phase in each cycle. Hence,$N_ it^ast$ depends on the interface-state density, the voltage at the relaxation (i.e., accumulation) bias, and the transition time of the stress waveform (the fall time for pMOSFETs and the rise time for nMOSFETs). The observed dynamic BTI behaviors can be perfectly explained by this modified R–D model. 相似文献
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This paper reports the observation of a new hot hole component of the gate current of p+-poly gate pMOS transistors. The phenomenon is characterized as a function of drain, gate, and substrate bias on devices featuring different oxide thickness and drain engineering options. The new hole gate current component is ascribed to injection into the oxide of substrate tertiary holes, generated by an impact ionization feedback mechanism similar to that responsible of CHannel Initiated Secondary ELectron injection (CHISEL) in nMOSFETs 相似文献
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Kow Ming Chang Yuan Hung Chung Gin Ming Lin 《Electron Device Letters, IEEE》2002,23(5):255-257
Studies the anomalous variations of the OFF-state leakage current (IOFF) in n-channel poly-Si thin-film transistors (TFTs) under static stress. The dominant mechanisms for the anomalous IOFF can be attributed to (1) IOFF increases due to channel hot electrons trapping at the gate oxide/channel interface and silicon grain boundaries and (2) IOFF decreases due to hot holes accumulated/trapped near the channel/bottom oxide interface near the source region. Under the stress of high drain bias, serious impact ionization effect will occur to generate hot electrons and hot holes near the drain region. Some of holes will be injected into the gate oxide due to the vertical field (~(V_Gstress V_Dstress)/T OX) near the drain and the others will be migrated from drain to source along the channel due to lateral electric field (~V_Dstress/LCH) 相似文献
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研究了不同沟道和栅氧化层厚度的n-M O S器件在衬底正偏压的VG=VD/2热载流子应力下,由于衬底正偏压的不同对器件线性漏电流退化的影响。实验发现衬底正偏压对沟长0.135μm,栅氧化层厚度2.5 nm器件的线性漏电流退化的影响比沟长0.25μm,栅氧化层厚度5 nm器件更强。分析结果表明,随着器件沟长继续缩短和栅氧化层减薄,由于衬底正偏置导致的阈值电压减小、增强的寄生NPN晶体管效应、沟道热电子与碰撞电离空穴复合所产生的高能光子以及热电子直接隧穿超薄栅氧化层产生的高能光子可能打断S i-S iO2界面的弱键产生界面陷阱,加速n-M O S器件线性漏电流的退化。 相似文献
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Chang Yong Kang Ji-Woon Yang Jungwoo Oh Rino Choi Young Jun Suh Floresca H.C. Jiyoung Kim Moon Kim Byoung Hun Lee Hsing-Huang Tseng Jammy R. 《Electron Device Letters, IEEE》2008,29(5):487-490
In this letter, the effects of TiN-induced strain engineering on device characteristics for a metal gate/high-k silicon-on-insulator fin-shaped field-effect transistors were studied. From a convergent-beam electron-diffraction analysis and simulation study, a 3-nm TiN electrode was found to lead to significantly higher tensile stress on the Si substrate than a 20-nm TiN electrode. This high stress-induced fast bulk carrier generation results in the transient current-time characteristics. Therefore, 3- and 20-nm TiN electrodes are the excellent choice for nMOSFETs and pMOSFETs, respectively, which is from the standpoint of strain engineering, threshold voltage (Vth), and performance. Due to the metal-induced strain, Idsat improvements of 15% and 12% for nMOSFETs and pMOSFETs, respectively, were achieved. 相似文献
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