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In conventional light microscopy, images are formed either by direct imaging of the object at a desired magnification or by imaging the object onto a remote surface and converting the illuminance at that surface to an electrical signal. In laser scanning microscopy, the object or specimen surface is scanned point by point by a focused laser beam. The actual image or other pertinent characteristic of the object is then generated by an electronic system. Use of such scanned laser systems exists today in biomedical research, in the semiconductor microelectronics industry, and in varied other industrial inspection applications. In this paper, we review the basic principles of laser scanning microscopy, discuss advantages as compared to more conventional light microscopy, and illustrate the technique with examples of systems in use today. 相似文献
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Allen P.C. 《Proceedings of the IEEE. Institute of Electrical and Electronics Engineers》2002,90(10):1653-1669
The use of laser scanning to generate semiconductor masks is reviewed. Following a brief historical introduction that describes early pattern generator implementations, current and future industry mask requirements are described with the consequences for pattern generator design: the need for small features, tight CD control, and high pixel delivery rates. The system architecture of a current deep UV scanning system is described in detail along with important print strategies, such as grayscale printing and multipass error averaging. Several subsystem technologies are then explored with emphasis on the application to short wavelengths and multiple beams. Today, frequency-doubled lasers generate the 257-nm radiation used by DUV pattern generators; tomorrow, sum frequency generation will be required to reach the wavelengths at or below 200 nm. Acousto-optic modulation (AOM) technology is shown to scale favorably with shorter wavelengths and to have the bandwidth capability for future system. Acousto-optic beam deflection, polygonal mirror beam deflection, and the reduction of scan bow error through the use of an f /spl middot/ sin(/spl theta/) lens are examined. A section on scan optics and image formation presents the differences between partially coherent imaging as used by a wafer stepper and the incoherent superposition of Gaussian beams as used by a laser scanner. Partially coherent imaging is shown to have a sharper image slope but worse feature size linearity. This section also discusses the effect of finite AOM turn-on time on the aerial image in the scan direction. 相似文献
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Minghui Hong 《光电进展(英文版)》2024,(2):4-6
<正>As a manufacturing method that is focused on end-users,3D printing has gained a lot of attention in recent years due to its unique advantages in fabricating complex three-dimensional structures.Various new micro-nano 3D printing methods have been developed to meet the demand for high-precision and high-yield manufacturing1-9.Among them,multi-photon-photon lithography(MPL) is a promising 3D nanofabrication technology due to its capability of true 3D digital processing and nano... 相似文献
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无扫描物镜的激光扫描直径测量系统 总被引:2,自引:0,他引:2
系统由两个无扫描物镜的激光扫描单元构成,各单元相对独立的对工件进行测量,得到系列角度测量参数,智能仪表根据特定的测量公式计算出工件直径,系统便于安装调试,实用样机精度达±1μm。 相似文献
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《Proceedings of the IEEE. Institute of Electrical and Electronics Engineers》1974,62(8):1175-1176
It is shown that at fast scanning speeds the radar antenna beam contains frequency components other than the transmitted frequency, resulting in a frequency spread in the echo from a fixed target which is distinct from that arising from finite time on target. 相似文献
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Pudas M. Hagberg J. Leppavuori S. 《Electronics Packaging Manufacturing, IEEE Transactions on》2002,25(4):335-343
The gravure offset method has been developed toward an industrially viable printing technique for electronic circuitry. In order to obtain the optimum ink resin for printing lines of required thickness (>5 /spl mu/m) of narrow lines (down to 25 /spl mu/m), several ink resin systems have been assessed in previous studies by the authors. The best printed results were obtained with a novel ink using a hydrocarbon resin. This ink did not comply with the traditional ink transfer mechanism based on evaporation of the solvent, but with a postulated new "absorption mechanism.". 相似文献
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Compact ka-band bi-directional amplifier for low-cost electronic scanning array antenna 总被引:1,自引:0,他引:1
Yang J.M. Lai R. Chung Y.H. Nishimoto M. Battung M. Lee W. Kagiwada R. 《Solid-State Circuits, IEEE Journal of》2004,39(10):1716-1719
An innovative transceiver compaction technique is introduced to address the high manufacturing cost associated with a large-aperture phased array. Northrop Grumman Space Technology's bi-directional amplifiers are ideal for this application. The size, weight, and cost of the transceiver module is greatly reduced since only a single highly integrated monolithic microwave integrated circuit is required. The GaAs-based Ka-band bi-directional amplifiers are presented in this paper in both common-gate and common-source configuration. 相似文献
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电子元器件是电子设备的基础与核心,对电子设备微型化、集成化的发展起到至关重要的作用,但传统的制造方法在提高电容器元器件功率密度和能量密度方面存在难以逾越的鸿沟。在电子元器件制造中引入3D打印增材制造技术不仅能够突破传统加工制造技术的瓶颈,还可以实现电子电路性能的提升和特性化制造,目前已成功地打印出了功能性电子组件和电路。因此,结合3D打印原理和打印方法的分析,并以3D打印固体钽电容阳极块为例,详细阐述3D打印技术在电子元器件领域应用的技术难点和解决方法,以示3D打印技术在电子元器件领域具有广阔的应用前景。 相似文献
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激光扫描共聚焦显微镜(laser scanning confocal microscope,LSCM)具有分辨率高、制样简单、具有一定穿透能力、集激光扫描和数字图像处理为一体等优点。用于研究储层中的微孔隙,其能够快速、准确、直观地提供微孔隙的孔隙结构与面孔率等信息,本文通过对致密砂岩粒缘微缝、砂岩长石粒内溶蚀孔、云母内微孔、火山凝灰岩脱玻化气孔和英安岩溶蚀微孔进行激光共聚焦三维扫描,可以检测出孔径在0.1μm以上的微孔隙,有助于分析微孔隙特征与油气集输之间的关系,对天然气储层和致密砂岩储层的勘探和开发具有重要意义。 相似文献
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L. Rapp F. Serein-Spirau J.-P. Lère-Porte A.P. Alloncle P. Delaporte F. Fages C. Videlot-Ackermann 《Organic Electronics》2012,13(10):2035-2041
Active layers involved in top contact organic thin film transistors (TC-OTFTs) have been printed using the laser induced forward transfer (LIFT) technique. Bis(2-phenylethynyl) end-substituted terthiophene (diPhAc-3T) as a p-type organic semiconductor was vacuum evaporated on a quartz substrate prior to the transfer by laser onto an acceptor substrate to form an organic active layer for charge transport. The resulting printed diPhAc-3T pixels on the receiver substrates have a homogeneous morphology as shown by optical microscopy and atomic force microscopy (AFM). Electrical characterizations demonstrated that these transistors are fully functional with hole mobilities up to 0.04 cm2/V s, threshold voltage Vt near 0 V and Ion/Ioff ratio up to 2.8 × 105. The efficient cohesion of diPhAc-3T vacuum evaporated thin films induced by 3-dimensional growth offers an exceptionally high physical resistance to laser pulses. The large intermolecular interaction involved in such growth mechanism makes the thin films less sensitive to the mechanical damages induced by the laser. Due to the optical properties of diPhAc-3T, the use of a protecting layer deposited on the donor substrate prior to the diPhAc-3T active layer to trap the incident radiation during the LIFT was not required. 相似文献
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Brandenburg G. Geissenberger S. Kink C. Schall N.-H. Schramm M. 《Mechatronics, IEEE/ASME Transactions on》1999,4(1):25-31
In rotary offset printing presses, mechanical line shafts are being replaced by electronic shafts which consist of synchronized position and speed-controlled AC motors driving the complete printing units or single printing cylinders. The dynamic stiffness of the multimotor system to satisfy the requirements of high printing accuracy can be achieved by high-dynamic, cascaded current, speed and position control of the the drives, which can be combined with disturbance observers in critical cases, or by direct drive technology 相似文献
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The results of work to study the effects of laser and electron beam stimulation of GaAs FETs are reported. Studies were made using biassed and unbiassed devices and also using devices with the gate removed by etching. Several mechanisms can be effective but the major cause of the very large induced drain current sensitivities is the photovoltaic effect of the beam on the interface between the semi-insulating substrate and the channel and consequent channel depth changes. A reduction in drain current on illumination observed under negative bias conditions is attributed to the presence of a surface channel on the semi-insulating substrate. The two methods of stimulation produce essentially the same results despite the large differences in charge and input energy. The implications for reliability analysis are discussed. 相似文献