掺氮ZnO薄膜的光电特性及其薄膜晶体管研究

Using NH3 as nitrogen source gas, N-doped ZnO （ZnO：N） thin films in c-axis orientation were deposited on glass substrates by radio frequency magnetron sputtering at room temperature. The ZnO：N thin films display significant increase of resistivity and decrease of photoluminescence intensity. As-grown ZnO：N material was used as active channel layer and Si3N4 was used as gate insulator to fabricate thin-film transistor. The fabricated devices on glasses demonstrate typical field effect transistor characteristics.     

制备工艺对ZnO薄膜的结构与光学性质的影响

利用射频磁控反应溅射技术生长出具有高度晶面(0002)取向的ZnO外延薄膜。通过AFM、XRD、吸收光谱和荧光光谱等测试手段,分别研究分析了不同衬底、不同溅射气氛和退火对ZnO薄膜结构及光学性质的影响。研究表明,在200℃低温生长的硅基ZnO薄膜具有几百纳米的氧化锌准六角结构外形;当氧氩比为4:1(质量流量比)时,吸收谱激子峰最佳;退火后,激子峰(363 nm)加强,同时出现了402 nm的本征氧空位紫光发射。     

Nanoflower ZnO thin-film grown by hydrothermal technique based Schottky diode

This paper reports the realization of planar Schottky diodes based on nanorod ZnO thin film. The nanorod ZnO thin film was fabricated by hydrothermal technique on boron doped p-type Si (100) substrate. The Ag//ZnO/Al planar diode operating with voltage bias from –3 to 3 V. The I–V characteristics clearly indicate that the devices have rectifying performance. The thermionic emission theory governs the current across the studied Schottky diode. The device achieved a turn-on voltage of 0.9 V, barrier height 0.69 eV and saturation current of 1.2 × 10^–6 A. The diode shows a very large ideality factor (n > > 2) which is attributed to high interface trap concentration. The surface topology was investigated by scanning electron microscope (SEM). The structural properties of the nanostructured ZnO thin film were characterized by X-ray diffraction (XRD). The SEM images reveal that the ZnO nanorods grow perpendicular to the substrate with uniformity and high density. The XRD pattern illustrates the dominant peak appearing at (002). This intense peak indicates the c-axis orientated phase of the wurtzite ZnO structure. It demonstrates that the crystals grow uniformly perpendicular to the substrate surface in good agreement with the SEM images.     

Triacetate cellulose gate dielectric organic thin-film transistors

Here, we report on the performance and the characterization of all solution-processable top-contact organic thin-film transistors (OTFTs) consisting of a natural-resourced triacetate cellulose gate dielectric and a representative hole-transport poly[2,5-bis(3-dodecylthiophen-2-yl)thieno[3,2-b]thiophene] (pBTTT) semiconductor layer on rigid or flexible substrates. The bio-based triacetate cellulose layer has an important role in the OTFT fabrication because it provides the pBTTT semiconducting polymer with highly suitable gate dielectric properties including a low surface roughness, hydrophobic surface, appropriate dielectric constant, and low leakage current. The triacetate cellulose gate dielectric-based pBTTT OTFTs exhibit an average filed-effect mobility of 0.031 cm²/Vs similar to that obtained from a SiO₂ gate dielectric-based OTFT device in ambient conditions. Even after a bending stimulation of 100 times and in an outward bending state, the flexible triacetate cellulose gate pBTTT OTFT device still showed excellent electrical device performance without any hysteresis.     

(Al,Zr)共掺杂ZnO透明导电薄膜的结构以及光电性能研究

用射频磁控溅射法在玻璃衬底上氩气气氛中制备出(Al,Zr)共掺杂的ZnO透明导电薄膜,研究了不同Zr掺杂浓度和薄膜厚度ZnO薄膜的结构、电学和光学特性。结果表明,在最佳沉积条件下我们制备出了具有(002)单一择优取向的多晶六角纤锌矿结构,电阻率为2.2×10-2Ω.cm,且可见光段(320～800nm)平均透过率达到85%的ZnO透明导电薄膜。在150℃的条件下对(Al,Zr)共掺杂的ZnO薄膜进行1h的退火处理,薄膜电阻率降低至8.4×10-3Ω.cm。Zr杂质的掺入改善了薄膜的可见光透光性。     

Air-flow navigated crystal growth for TIPS pentacene-based organic thin-film transistors

6,13-Bis(triisopropylsilylethynyl)pentacene (TIPS pentacene) is a promising active channel material of organic thin-film transistors (OTFTs) due to its solubility, stability, and high mobility. However, the growth of TIPS pentacene crystals is intrinsically anisotropic and thus leads to significant variation in the performance of OTFTs. In this paper, air flow is utilized to effectively improve the TIPS pentacene crystal orientation and enhance performance consistency in OTFTs, and the resulted films are examined with optical microscopy, X-ray diffraction, and thin-film transistor measurements. Under air-flow navigation (AFN), TIPS pentacene drop-cast from toluene solution has been observed to form thin films with improved crystal orientation and increased areal coverage on substrates, which subsequently lead to a fourfold increase of average hole mobility and one order of magnitude enhancement in performance consistency defined by the ratio of average mobility to the standard deviation of the field-effect mobilities.     

溶胶-凝胶法制备ZnO薄膜及表征

采用溶胶-凝胶法在石英玻璃衬底上使用旋转涂覆技术生长了Zn O薄膜.对薄膜的XRD分析表明Zn O薄膜为纤锌矿结构并沿c轴取向生长.透射光谱表明薄膜的禁带宽度为3.2 8e V ,与Zn O体材料的禁带宽度3.30 e V基本相同.用光致发光谱分析了经过5 0 0～70 0℃热处理获得的Zn O薄膜,结果表明Zn O薄膜在室温下有较强的紫外带边发射,但当热处理温度高于70 0℃时,可见光波段发射明显增加     

Enhancement of electrical properties in pentacene-based thin-film transistors using a lithium fluoride modification layer

We investigated the electrical performances of pentacene-based thin-film transistors with a thin LiF film as a modification layer between the source/drain electrodes and the active layer. Au, Pt, and Pd were employed as the source/drain (S/D) electrodes of the organic thin-film transistors (OTFTs). The thickness of the LiF layer was varied to optimize the electrical performances of the OTFTs. We found that the electrical performances of the devices with LiF layer are better than those without inserting the LiF layer, regardless of which one metal used for the S/D electrodes. The electrical performances of the devices in terms of drain current, on resistance, threshold voltage, on/off current ratio and mobility have been optimized when the thickness of the LiF buffer layer was at 1.0 nm. These improvements are attributed to work function of S/D contact materials were modified by the dipole of the inserted LiF layer and an ultrathin LiF layer provides the tunneling condition to enhance the carrier injection efficiently. Additionally, LiF layer with optimal thickness (1.0 nm) can modify surface roughness of pentacene film and partly enhance the carrier injection.     

用脉冲激光沉积方法制备的ZnO薄膜的结构及光致发光特性

在从室温到800℃的温度范围内,用脉冲激光沉积方法在Al₂O₃（0001）衬底上制备了ZnO薄膜。采用X射线衍射仪、原子力显微镜以及荧光光谱仪分别研究了衬底温度对ZnO薄膜表面形貌、结晶质量和光致发光特性的影响。X射线衍射仪和原子力显微镜的结果表明,当衬底温度从室温升高到400℃时,ZnO薄膜的结构及结晶质量逐渐提高,而当衬底温度超过400℃时,其结构和结晶质量变差;在400℃下生长的ZnO薄膜具有最佳的表面形貌和结晶质量。室温光致发光的测量结果表明,400℃下生长的ZnO薄膜的紫外发光强度最强,且发光波长最短（386 nm）。     

Nanoporous characteristics of sol-gel-derived ZnO thin film

Sol-gel-derived nanoporous ZnO film has been successfully deposited on glass substrate at 200℃ and subsequently annealed at different temperatures of 300, 400 and 600℃. Atomic force micrographs demonstrated that the film was crack-free, and that granular nanoparticles were homogenously distributed on the film surface. The average grain size of the nanoparticles and RMS roughness of the scanned surface area was 10 nm and 13.6 nm, respectively, which is due to the high porosity of the film. Photoluminescence (PL) spectra of the nanoporous ZnO film at room temperature show a diffused band, which might be due to an increased amount of oxygen vacancies on the lattice surface. The observed results of the nanoporous ZnO film indicates a promising application in the development of electrochemical biosensors due to the porosity of film enhancing the higher loading of bio-macromolecules (enzyme and proteins).     

Bias stress effect in solution-processed organic thin-film transistors: Evidence of field-induced emission from interfacial ions

Though bias-stress instability in organic thin film transistors (OTFTs) has been studied in a variety of architectures, it is as yet poorly understood. We have investigated the bias-stress effect in fully solution-processed TIPS-pentacene based OTFTs with polymer dielectric by applying prolonged gate-source voltage (V_GS). The interface is deliberately defect engineered to obtain excellent adhesion and reasonably good steady state characteristics. Both increasing and decreasing behavior of drain-source current (I_DS) drift over 3000s have been observed, and analyzed in terms of electron capture and emission respectively. The step-by-step change in V_GS is compared with the one step change from V_GS = 0V to V_GS = −40V. It has been observed that, for the case of step-wise increase in gate bias, the I_DS transients are slower by many orders of magnitude than if the V_GS is directly switched to deep bias (−40V) in a single step. A phenomenological model is used to explain the I_DS decaying transients. The field induced emission of carriers from interfacial traps is shown to be central to the model and experimental features. The effect due to a prolonged application of drain-source voltage (V_DS) is small, though noticeable in terms of increasing the I_DS only by 3% with continuous application of V_DS for 3000 s.     

高RF功率制备的ZnO:Li薄膜性能研究

实验采用射频(RF)磁控溅射法在高射频功率(550 W)下制备了Zn0.9Li0.1O薄膜,探讨了薄膜的光学性能,并与低溅射功率制备的薄膜性能进行了比较。结果表明,高功率下溅射的薄膜晶粒均匀细小,表面平整致密,在可见光波长范围内,透过率达80%。该薄膜的光学带隙约3.29 eV,明显低于低功率溅射的薄膜(3.44 eV)。其室温光致发光(PL)谱结果显示,最强峰是由Li杂质能级引起的399 nm峰,热处理后,370 nm的带间发光峰增强,而低功率制备的薄膜其PL谱与纯ZnO材料的特征谱相似。     

溶胶-凝胶法制备Co,Cu共掺杂ZnO薄膜 结构及光学特性

采用溶胶-凝胶法在玻璃基片上制备了纯ZnO薄膜和高浓度Cu掺杂的Co,Cu共掺ZnO(Zn0.90CoxCu0.1-xO,x=0.01,0.03,0.05)薄膜。扫描电镜观察到无论是纯ZnO还是掺杂ZnO薄膜表面都有均匀分布的颗粒,但是在Cu含量较高时均匀性更好。X射线衍射揭示所有样品都具有纤锌矿结构,但是Cu掺杂量的增加使晶格常数略有减小,而晶粒尺寸却略有增大。XPS测试结果表明样品中Co离子的价态为+2价和+3价,Cu离子的价态为+2价和+1价共存。室温光致发光测量在所有样品中均观察到较强的紫外发光峰、蓝光双峰和较弱的绿光发光峰。     

Li、Mg掺杂ZnO薄膜PL特性研究

采用溶胶-凝胶法在玻璃基片上制备了Li、Mg掺杂的ZnO薄膜,研究了薄膜的光致发光(PL)性能。结果表明,由氧缺位引起的深能级发光峰(450~470 nm)的强度随Li和Mg掺杂量的增加而下降。Mg的添加会使薄膜的带边发射(NBE)增强,而Li的掺杂抑制了NBE峰,同时引发403 nm的Li杂质能级峰,该能级位于价带顶0.29 eV处。     

退火对溅射ZnO薄膜光吸收性能的影响

利用射频磁控溅射制备了高c轴取向的ZnO薄膜,采用X-射线衍射仪、扫描电镜和紫外-可见光分光光度计研究了退火对ZnO薄膜的结构和光吸收性能的影响。结果表明,退火可以改善ZnO薄膜的质量和光吸收性能。退火后薄膜的结构、形貌和光吸收性能得到改善,薄膜中缺陷减少,晶粒长大致密化,尺寸较均匀;紫外吸收峰变窄,强度增加,吸收边变得陡峭并向长波方向移动,光学带隙降低。450℃退火的ZnO薄膜具有最佳的结晶质量和紫外吸收性能。     

退火气氛对稀土Eu3+掺杂ZnO薄膜结构和发光性质的影响

采用脉冲激光沉积(PLD)法在Si(111)衬底上制备稀土Eu3+掺杂ZnO薄膜材料,分别在纯氧和真空气氛中进行退火处理。XRD图谱中仅观察到尖锐的ZnO(002)衍射峰,表明ZnO:Eu3+,Li+薄膜具有良好的c轴取向。薄膜的结构参数显示：在纯氧气氛中退火的样品具有较大的晶粒尺寸且应力较小,表明在纯氧中退火的样品具有较好的结晶质量。通过光致发光谱发现,在纯氧中退火的样品的IUV/IDL比值较大,说明在纯氧中退火的样品缺陷去除更充分,结晶质量更好。当用395nm光激发样品时,仅发现Eu3+位于595nm附近的5D0→7F1磁偶极跃迁峰。并没有发现Eu3+在613 nm附近的特征波长发射,表明掺杂的Eu3+占据了ZnO基质反演对称中心格位。     

ZnO纳米颗粒薄膜的制备及其光学特性

采用化学回流法制备了3种不同粒径的ZnO纳米颗粒,然后旋涂在ITO玻璃衬底上,形成样品a、b和c3种ZnO纳米颗粒薄膜.场发射扫描电子显微镜(FESEM)结果显示,3种样品晶粒都呈颗粒形状,形成的薄膜较平整,平均晶粒尺寸分别为(φ)5 nm、(φ)25 nm和(φ)40 nm.X线衍射(XRD)结果表明,ZnO纳米颗粒为多晶六方晶系纤锌矿结构.样品a、b在可见光区有很少的光吸收,在紫外光区有很强的吸收,而由于纳米颗粒的直径较大,样品c在紫外和可见光区都存在很强的吸收.室温下的光致发光谱表明,样品a有一个近带边(NBE)紫外发射峰和蓝光发射峰,样品b、c出现一很宽的深能级缺陷相关的可见光发光带,这说明3种薄膜都存在大量的本征缺陷.     

Performance enhancement of p-type organic thin-film transistors by surface modification of hybrid dielectrics

The quality of the dielectric/organic semiconductor interface is a critical issue, because it determines the charge transport properties in organic thin-film transistors (OTFTs). High-k organic-inorganic hybrid films have received considerable attention for their outstanding dielectric properties, including low leakage currents, high breakdown fields, and suitable band offsets against the organic semiconductor. However, Hf and Zr hybrid gate dielectrics on p-type OTFTs show poor charge transport properties in the organic semiconductor channel, due to the polaron disorder elicited by the high-k properties and the presence of the –N(CH₃)₂ polarity (hole trapper) on the dielectric/semiconductor interface. In this report, the surface of the Hf and Zr hybrid dielectrics was capped by an ultra-thin poly-1,3,5-trivinyl-1,3,5,-trimethyl-cyclosiloxane (pV3D3) layer formed via an initiated chemical vapor deposition (iCVD) process, to modify the hybrid dielectrics/semiconductor interface. The pV3D3-capped Hf and Zr hybrid OTFTs show an enhanced V_T stability while a large amount of V_T shift was observed from the Hf and Zr hybrid OTFTs. This large amount of V_T shift is attributed to the hole trap sites originated by –N(CH₃)₂ on the uncapped hybrid dielectrics. Furthermore, the p-type OTFTs with the pV3D3-capped hybrid dielectrics show a higher mobility than those with the uncapped hybrid dielectrics. The presence of the non-polar/low-k pV3D3 on the hybrids contribute to narrow the density of state (DOS) in the organic channel, improving the charge transport properties. This combined approach using the bulk layer of Hf and Zr hybrid films and the pV3D3 capping layer can overcome the limitations of single-layer hybrid dielectrics and improve the overall device performance of the OTFTs.     

基于自组装工艺的ZnO纳米线网络晶体管

本文提出了一种,制备均匀高密度ZnO纳米线网络的简单高效的自组装方法。在此方法中,ZnO纳米线经3-氨丙基三乙氧基硅烷修饰后,其表面出现带正电的氨基功能团。经亲水性处理后的SiO2层在水中带负电,从而凭借静电吸引作用,修饰后的ZnO纳米线吸附在SiO2/Si基底,形成纳米线网络。利用此纳米线网络制备得场效应晶体管。纳米线密度为2.8/μm2的晶体管,其电流开关比为2.4×105,跨导为336 nS, 场效应迁移率为27.4 cm2/V?s.     

ZnO：Ag薄膜的结构对其紫外发光增强的研究

利用脉冲激光沉积方法(PLD),在Si(100)衬底上生长了银掺杂的氧化锌薄膜(ZnO:Ag),所用的激光波长分别是1064 nm和355 nm.通过x射线衍射分析发现,两种不同激光沉积样品的晶体结构有很大的区别.此外,由1064 nm激光制备的ZnO:Ag薄膜,在氧气中800℃的条件下退火一个小时后,在其光致发光(PL)谱中发现,样品的紫外发光峰强度随薄膜中Ag含量增加而急剧增强,但在同样条件下处理的由355 nm激光制备的薄膜,没有观察到类似现象.经过分析和比较,我们认为这种紫外发光增强的特殊现象,是ZnO:Ag薄膜中的纳米Ag颗粒所引起的局部等离子共振而导致.