Comparison Study of (001)-/(100)-Oriented Epitaxial and Fiber-Textured Pb(Zr,Ti)O3 Thick Films Prepared by MOCVD

(001)-/(100)-oriented epitaxial PZT films and fiber-textured PZT films with a thickness of 2 μ m were deposited on (100) _c SrRuO₃//(100)SrTiO₃ and (111)Pt/TiO₂/SiO₂/(100)Si substrates, respectively, by metalorganic chemical vapor deposition (MOCVD). Crystal structure and the electrical properties were compared for epitaxial PZT films with those of fiber-textured ones, which had the same out-of-plane orientation but different in-plane orientation. The constituent phase change from the single phase of tetragonal PZT, mixture phases of tetragonal and rhombohedral ones and the single phase of rhombohedral one for both films when the Zr/(Zr + Ti) ratio increased. The out-of-plane lattice parameter of (001)- and (100)-axes of PZT films were almost the same value for both films. This indicates the residual strain in the PZT films was almost the same. Dielectric constant (? _r) took the maximum value around the MPB composition for (001)-/(100)-oriented fiber-textured films but was almost independent of the Zr/(Zr + Ti) ratio for epitaxial ones. Moreover, there was no significantly dependence of remanent polarization (P _r) value on the Zr/(Zr + Ti) ratio for (001)-/(100)-oriented fiber-textured films, while it took minimum value near the morphotropic phase boundary (MPB) for epitaxial ones.     

Dielectric properties and morphotropic phase boundaries in the xPb(Zn1/3Nb2/3)O3−(1−x)Pb(Zr0.5Ti0.5O3 pseudo-binary system

Ceramics in the xPb(Zn_1/3Nb_2/3)O₃−(1−x)Pb(Zr_0.5Ti_0.5)O₃ [xPZN–(1−x)PZT] solid solution system are expected to display excellent dielectric, piezoelectric, and ferroelectric properties in compositions close to the morphotropic phase boundary (MPB). The dielectric behavior of ceramics with x = 0.1−0.6 has been characterized in order to identify the MPB compositions in this system. Combined with X-ray diffraction results, ferroelectric hysteresis measurements, and Raman reflectivity analysis, it was consistently shown that an MPB exists between x = 0.2 and x = 0.3 in this binary system. When x ≤ 0.2, the tetragonal phase dominates at ambient temperatures. In the range of x ≥ 0.3, the rhombohedral phase dominates. For this rhombohedral phase, electrical measurements reveal a profound frequency dispersion in the dielectric response when x ≥ 0.6, suggesting a transition from normal ferroelectric to relaxor ferroelectric between 0.5 ≤ x ≤ 0.6. Excellent piezoelectric properties were found in 0.3PZN–0.7PZT, the composition closest to the MPB with a rhombohedral structure. The results are summarized in a PZN–PZT binary phase diagram.     

Dielectric and piezoelectric properties of sodium lithium niobate Na1−x Li x NbO3 lead free ferroelectric ceramics

High density sodium lithium niobate lead free ceramics near the morphtropic phase boundary [Na _x Li_1?x NbO₃, (LNN), x?=?0.12] were prepared by the solid state reaction method. XRD patterns showed that the lattice structures were changed after polarization. The temperature dependence of the dielectric constant and dielectric loss, pyroelectric coefficient and DSC curves of LNN ceramics showed that there exist three phase transitions from room temperature up to the Curie temperature. The hysteresis loop and piezoelectric properties were measured and discussed.     

Piezoelectric and Pyroelectric Properties of Pb(Zr,Ti)O3 Films for Micro-Sensors and Actuators

The piezoelectric and the pyroelectric properties of PZT films are systematically investigated for tetragonal (Zr/Ti = 30/70), morphotropic (52/48), and rhombohedral (70/30) compositions. The magnitude of the effective longitudinal piezoelectric coefficient (d₃₃) and pyroelectric coefficient (p) of these films is measured by atomic force microscopy and Byer-Roundy method, respectively. All films are consistently highly textured (111) orientation and have dense microstructures. Slightly less degree of texture in higher Zr-rich composition is observed due to the lattice mismatch between PZT and Pt bottom electrode and higher activation energy for nucleation. Squareness of polarization hysteresis loops is optimized in tetragonal composition, which indicates the tetragonal PZT is closer to the ideal hysteresis behavior than other compositions. It is shown that the piezoelectric coefficient and the pyroelectric figure of merit are dependent on the dielectric properties of the films. The morphotropic PZT films with high dielectric constant and low pyroelectric figure of merit show the largest piezoelectric coefficient values, while the tetragonal PZT films with low dielectric constant and high remanent polarization values show the largest pyroelectric figure of merit compared to other compositions, which indicate the suitability for PIR sensor devices.     

Influence of Post-Annealing on the Characteristics of Pb(Zr,Ti)O3 Thin Films Deposited by Liquid Delivery MOCVD Using a Cocktail Solution

Ferroelectric PZT thin films were deposited by liquid delivery MOCVD using a cocktail solution. The cocktail solution consisted of Pb(METHD)₂, Zr(METHD)₄ and Ti(MPD)(METHD)₂ diluted with ethylcyclohexane. The films deposited on Pt/Ti/SiO₂/Si at a substrate temperature of 500°C consisted of PZT, PbO and PbPt_x, and showed poor properties. However, after annealing at 450°C in air for thirty minutes, the PbPt_x phase disappeared while the volume of the PbO phase increased. The hysteresis properties were also improved by annealing at 450°C. After annealing at 600°C in air for thirty minutes, the PbPt_x and the PbO phases disappeared perfectly and the PZT thin films showed good hysteresis properties with the remanent polarization of 30 μC/cm² and the coercive field of 88 kV/cm.     

Microwave Dielectric Properties of Ferroelectric Pb(Zr1 − x Ti x )O3 Thin Films Using Interdigital Capacitors

Ferroelectric Pb(Zr_{1 ? x} Ti _x )O₃ (PZT) films were deposited on (001) MgO single crystals using sol-gel method. Structural properties and surface morphologies of PZT films were investigated using an X-ray diffractometer and a scanning electron microscopy, respectively. The dielectric properties of PZT films were investigated with the dc bias field of 0–135 kV/cm using interdigitated capacitors (IDC) which were fabricated on PZT films using a thick metal layer by photolithography and etching process. The small signal dielectric properties of PZT films were calculated by a modified conformal mapping method with low and high frequency data, such as capacitance measured by an impedance gain/phase analyzer at 100 kHz and reflection coefficient (S-parameter) measured by a HP 8510C vector network analyzer at 1–20 GHz. The IDC on PZT films exhibited about 67% of capacitance change with an electric field of 135 kV/cm at 10 GHz. These PZT thin films can be applied to tunable microwave devices such as phase shifters, tunable resonators and tunable filters.     

PIEZOELECTRIC RESPONSE OF PZT NANOSTRUCTURES OBTAINED BY FOCUSED ION BEAM

ABSTRACT

Pb(Zr_x,Ti_{1 - x})O₃ (PZT) microscale island (1μ m～ 100 nm) was fabricated by Focused Ion Beam (FIB) before and after its crystallization. In the first case the FIB etching is realized on amorphous films and a post annealing treatment, at the crystallization temperature of the PZT films, is necessary to cristallize the film in the perovskite phase. In the second case the etching are made on crystallized films. Local electrical properties were evaluated by piezoresponse force microscopy (PFM) technique and the degradations induce in the films are studies by Raman spectroscopy. Compared to the PZT island fabricated after crystallization, the result shows that there is noticeable enhancement in nanoscale electrical properties of PZT island fabricated before crystallization, especially when the island size decreases.     

MOCVD of Pb(Zr x Ti1-x )O3 thin films on MgTiO3/Si substrates and their electrical properties

Abstract

Pb(Zh _x , Ti_1-x )O₃(PZT) thin films were deposited on Si substrates using MgTiO₃ as the buffer layer and the electrical properties of those MFIS structures were investigated. PZT and MgTiO₃ films were made by MOCVD using ultrasonic spraying technique. Perovskite PZT films have been succesfully made at the substrate temperature of 550 to 600°C only when using MgTiO₃ buffer layer. AES depth profile analysis and RBS analysis revealed that there is no remarkable interdiffusion and no formation of reaction layer between PZT and MgTiO₃ and/or between MgTiO₃ and Si substrate. The capacitance-voltage (C-V) curves of the MFIS structure which were made with PZT and MgTiO₃buffer layer have shown the hysteresis resulted from the ferroelectric switching of the PZT films.     

Laser ablation-deposited PZT thin films for piezoelectric microsensors and microactuators

Abstract

We report on growth and deposition process optimization of laser ablation-deposited Pb(Zr_0.53Ti_0.47)O₃ thin films for application in piezoelectric microdevices. Films were grown on three different substrates: (100) cut LaAlO₃ single crystals, Pt/Ti/SiO₂/Si, and Pt/Ti/Si_3+xN₄/Si. On all three substrates, a deposition temperature of 620°C yielded perovskite films with good ferroelectric hysteresis properties. La_0.5Sr_0.5CoO₃ bottom and top electrodes were used for all films. PZT films on Pt/Ti/SiO₂/Si showed a variation of texture with film thickness. Thin membranes of PZT on Si_3+xN₄ were also fabricated.     

High piezoelectric activity in lead-free BaTiO3-BaZrO3-CaTiO3 ceramics with near polymorphic phase boundary

Abstract

Lead-free 0.88BaTiO₃–(0.12-x)BaZrO₃–xCaTiO₃ (BT-BZ-xCT) ceramics were fabricated via solid state reaction. The effect of CaTiO₃ content on crystal structure, phase transition, and electrical properties was investigated systematically. The crystal structure and phase transition of ceramics were characterized by X-ray diffraction (XRD), Raman spectra and dielectric measurement. Results show that ceramic in the composition, x?=?0.02, exhibits a rhombohedral structure. Ceramics with increasing CT content transformed from a rhombohedral to orthorhombic structure in the composition, x?=?0.04, and eventually became a tetragonal structure at the composition, x?≥?0.08. The polymorphic phase boundary (PPB) was observed at the composition, x?=?0.06, with coexistence of orthorhombic and tetragonal phases showing at almost room temperature. This PPB composition exhibited a high piezoelectric response (d₃₃*) of 1,150?pm/V at 10?kV/cm as an electric field was applied. These results indicate that the materials studied have potential as candidates for lead-free piezoelectric ceramics.     

Preparation and characterization of PZT thin films deposited on PZT buffer layer with different lead content

Lead zirconate titanate (PZT) thin films deposited on Pt electrode and Pb_1+x(Zr_0.52,Ti_0.48)O₃ (x = 0.10, 0.15, 0.25, 0.30) buffer layer have been prepared by sol-gel methods to investigate the effects of lead content in the buffer layer on crystalline orientation, electric and fatigue properties of PZT films. XRD and SEM showed that all films exhibited dense perovskite structure with (100) preferential orientation. The maximum dielectric constant (1571 at 100 Hz) was obtained in the PZT film with buffer layer containing 25% excess lead, which increased by 42.5% compared with the film without buffer layer. Fatigue resistance was improved by introducing buffer layer.     

Effect of Nb doping on structural and electric properties of PZT (65/35) ceramic

The aim of this study is to determine the effect of Nb⁵⁺ doping on PZT (65/35) based bulk materials in their structure, micro structure and electrical properties. The Nb content was chosen 0-9 mole%. These materials were prepared by conventional mixed oxide method. X ray diffraction studies suggest the compound to be of rhombohedral perovskite phase. Excess addition of Nb result in pyrochlore and fluorite phase develops in PZT (65/35) sample. Detailed studies of dielectric constant as a function of temperature (40degC to 500degC) and frequency (100 Hz to 1 MHz) suggest that the compounds undergo diffuse type of phase transition. Maximum dielectric constant and resistivity were found to be strongly dependent on doping and measuring frequencies. Using complex impedance analysis micro structural parameters such as bulk and grain boundary resistance, bulk charge carrier concentration and relaxation time were determined     

Optimized PZT Thin Films for Pyroelectric IR Detector Arrays

A planar multi target sputtering technology was used to deposit highly (111) oriented Pb(Zr _x Ti_1–x )O₃ (PZT) thin films with x ranging from 0–0.6. The preparation of a stable Pt/ZrO₂ electrode is described and analyzed in terms of stress and stress-temperature behavior. The PZT films with low Zr content are under compressive stress after deposition. The dielectric constant and loss peaks occur at a composition close to the morphotropic phase boundary. Films on the tetragonal side of the phase diagram with a Zr content up to about 25% exhibited a strong self polarization and strong voltage shifts in the C(V) curves. High pyroelectric coefficients of >2×10^–4 C/(m²K) have been measured on these films without additional poling. The self polarization fades out with increasing Zr content. The low values of the pyroelectric coefficient for the PZT film with 60% Zr is discussed in terms of the possible crystallographic variants after distortion and the tensile stress state during the phase transition. Based on the systematic study of stress and electrical properties of PZT films with a wide range of composition presented in this paper, films with a Zr content up to about 25% turned out to give the best properties for the use in pyroelectric detector arrays.     

Lead-free K<Subscript>0.5</Subscript>Na<Subscript>0.5</Subscript>NbO<Subscript>3</Subscript>–Bi<Subscript>0.5</Subscript>Li<Subscript>0.5</Subscript>ZrO<Subscript>3</Subscript>–BiAlO<Subscript>3</Subscript> ternary ceramics: Structure and piezoelectric properties

Lead-free perovskite (0.995–x)(K_0.5Na_0.5)NbO₃–x(Bi_0.5Li_0.5)ZrO₃–0.005BiAlO₃ ternary piezoelectric ceramics were projected and prepared by a conventional solid-state method. A research was conducted on the effects of (Bi_0.5Li_0.5)ZrO₃ content on the structure and piezoelectric properties of the ceramics. By combining the X-ray diffraction patterns with the temperature dependence of dielectric properties, a rhombohedral–orthorhombic–tetragonal phase coexistence was identified for the ceramics with 0.02 ≤ x ≤ 0.025, and a rhombohedral–tetragonal phase boundary was determined in the composition x = 0.03. Upon further increasing the (Bi_0.5Li_0.5)ZrO₃ content, the rhombohedral–tetragonal phase boundary transformed to a single rhombohedral structure with x ≥ 0.035. An obviously improved piezoelectric activity was obtained for the ceramics with compositions in and around the rhombohedral–tetragonal phase boundary, among which the composition x = 0.025 exhibited the maximum values of piezoelectric constant d ₃₃, and planar and thickness electromechanical coupling coefficients (k _p and k _t), of 252 pC/N, 0.366, and 0.466, respectively. In addition, the ceramic with x = 0.025 was found to possess a relatively high Curie temperature of 368 °C, suggesting it may have a prospect for applications at elevated ambient temperatures.     

Properties of PbZrxTi1−xO3/CeO2/SiO2/Si structure

Abstract

We report the crystalline quality and electrical properties of PbZr_xTi_1?xO₃ (PZT) films on n-type Si(100) substrates with CeO₂/SiO₂ dual buffer layers. PZT films and CeO₂ buffer layers were prepared by pulsed laser deposition technique, and SiO₂ buffer layers were formed by thermal dry oxidation. It was found that CeO₂/SiO₂ dual buffer layers effectively prevented Si and Pb interdiffusion between PZT and Si substrates. Furthermore, the capacitance-voltage (C-V) characteristics of the PZT/CeO₂/SiO₂/Si heterostructures demonstrated ferroelectric switching properties, showing a memory window as large as 2.7 V at 1 MHz.     

Conducting oxide electrodes for ferroelectric films

Abstract

Suitability of oxide electronic conductors [e.g. ruthenium oxide (RuO_x) and indium-tin-oxide (ITO)] as contact metallization for ferroelectric films (e.g. PbZr_xTi_1?xO₃) was investigated using techniques such as Rutherford backscattering spectrometry, x-ray diffraction and electron spectroscopy for chemical analysis. Thin films of RuO_x and ITO were deposited on Si substrates by reactive sputtering. Either PbO or PZT (x = 0.53) films were deposited onto the conducting oxides and the specimens were annealed at various temperatures between 400°C and 700°C. Less intermixing was found in Si/RuO_x/ PZT films when compared to Si/ITO/PZT under similar processing conditions. The ferroelectric properties of PZT films on RuO_x electrodes are compared to those on Pt electrodes. The PZT films show improved fatigue properties on RuO_x electrodes.     

Improvement on ferroelectric properties of metal-organic decomposited PZT thin film prepared by using prenucleation layer

Abstract

Perovskite SrRuO₃ (SRO) layer was, for the first time, been successfully synthesized by using metal-organic decomposition (MOD) process. The presence of SRO buffer layer on Pt(Si) substrates has significantly enhanced the crystallization and densification behavior of the subsequently deposited Pb(Zr_0.52Ti_0.48)O₃ films. The pyrochlore free perovskite phase can be obtained by post-annealing the PZT/SRO/Pt(Si) films at 500°C, which is 50°C lower than that needed in PZT/Pt(Si) films. The fine grain (～0.3 μm) microstructure can be attained by post-annealing at 650°C for PZT/SRO/Pt(Si) films and 700°C for PZT/Pt(Si) films. The ferroelectric hysteresis properties of the two PZT films are comparable to each other. The leakage current properties of PZT/SRO/Pt(Si) films increased pronouncedly with post-annealing temperature, resulting in inferriar leakage behavior to PZT/Pt(Si) films.     

Phase transition,microstructure and properties of (Na<Subscript>0.5</Subscript>Bi<Subscript>0.5</Subscript>)<Subscript>1-x</Subscript>Ba<Subscript>x</Subscript>TiO<Subscript>3</Subscript> lead-free piezoelectric ceramics

In this article, (Na_0.5Bi_0.5)_1-xBa_xTiO₃ lead-free piezoelectric ceramics were prepared by solid-state reaction. The influence of Ba contents on phase structures, compositional distribution and electrical properties of (Na_0.5Bi_0.5)_1-xBa_xTiO₃ ceramics were systematically investigated to further understand the nature of phase transition. It was found that the phase structure of (Na_0.5Bi_0.5)_1-xBa_xTiO₃ transforms from rhombohedral to tetragonal symmetry at x = 0.06 ~ 0.07 and Ba²⁺ segregation forms the coexistence of Ba-rich tetragonal and Ba-deficient rhombohedral phases close to MPB. The electrical properties of prepared samples regularly changed with Ba content, which is closely related to the distribution of rhombohedral and tetragonal phases. The prepared sample near MPB exhibited the largest dielectric constant and the excellent piezoelectric properties (the maximal measuring field reached 78 kV/cm and the piezoelectric constant d ₃₃ = 151pC/N).     

Filament-assisted pulsed laser deposition of epitaxial PbZrxTi1−xO3 films: Morphological and electrical characterization

Abstract

A modification of the conventional pulsed laser deposition technique was employed, whereby a low energy electron emitting filament was placed between the target and the substrate (-20 V filament/substrate bias) in order to produce reactive species (O_2- and O_?) during deposition. Using this modification, epitaxial thin films of PbZr_xTi_1?xO3 (PZT, 0 ≤ × ≤ 0.6) were prepared in situ on virgin (100) MgO and (100) Pt/(100) MgO substrates at a substrate temperature of 550°C and in an oxygen ambient (0.3 Torr). The topography of films prepared without a filament on virgin MgO were porous and composed of grains of about 1000 Å in diameter. As the emission current was increased from 0 to 400 μA, the grain size decreased to less than 100 Å with a concomitant decrease in the porosity. The nucleation of crystallites of other orientations was observed at emission currents greater than about 500 μA. Trilayer structures (Pt/PZT/Pt/<100>MgO) were fabricated for electrical measurements. Non-filament-assisted PZT cells usually failed because of a high probability of conductive paths through the PZT layer. Filament-assisted films were much less prone to this problem. Typical remanent polarizations and coercive fields were 15–20 μC/cm² and 30–50 kV/cm, respectively.     

Sol-gel PZT and Mn-doped PZT thin films for pyroelectric applications

Abstract

Thin films of ferroelectric lead zirconate titanate (PbZr_0.3Ti_0.7O₃ PZT30/70) and manganese doped lead zirconate titanate ((Pb(Zr_0.3Ti_0.7)_1?xMn_x)O_{3 ? x} = 0.01, PM01ZT30/70 and x = 0.03, PM03ZT30/70) have been prepared using sol-gei processing techniques. These materials can be used as the pyroelectric thin films in uncooled infrared (IR) detectors. Films deposited on Pt/Ti/SiO₂/Si substrates and annealed on a hot plate at 530°C for 5 min were seen to fully crystallize into the required perovskite phase and showed excellent ferroelectric behavior, demonstrated by reproducible hysteresis loops (P_r = 33 to 37 μC/cm², Ec(+) = 70 to 100 kV/cm, E_c(-) = -170 to -140 kV/cm). The pyroelectric coefficients (p) were measured using the Byer-Roundy method. At 20°C, p was 2.11×10^?4 Cm^?2K^?1 for PZT30/70, 3.00×10^?4 Cm^?2K^?1 for PM01ZT30/70 and 2.40×10^?4 Cm^?2K^?1 for PM03ZT30/70 thin films. The detectivity figures-of-merit (F_D) were 1.07×10^?5 Pa^?0.5 for PZT30/70, 3.07×10^?5 Pa^?0.5 for PM01ZT30/70 and 1.07×10^?5 Pa^?0.5 for PM03ZT30/70. These figures compare well with values reported previously.