Influence of Cs doping in spray deposited SnO2 thin films for LPG sensors

Detection of low concentrations of petroleum gas was achieved using transparent conducting SnO₂ thin films doped with 0–4 wt.% caesium (Cs), deposited by spray pyrolysis technique. The electrical resistance change of the films was evaluated in the presence of LPG upon doping with different concentrations of Cs at different working temperatures in the range 250–400 °C. The investigations showed that the tin oxide thin film doped with 2% Cs with a mean grain size of 18 nm at a deposition temperature of 325 °C showed the maximum sensor response (93.4%). At a deposition temperature of 285 °C, the film doped with 3% Cs with a mean grain size of 20 nm showed a high response of 90.0% consistently. The structural properties of Cs-doped SnO₂ were studied by means of X-ray diffraction (XRD); the preferential orientation of the thin films was found to be along the (3 0 1) directions. The crystallite sizes of the films determined from XRD are found to vary between 15 and 60 nm. The electrical investigations revealed that Cs-doped SnO₂ thin film conductivity in a petroleum gas ambience and subsequently the sensor response depended on the dopant concentration and the deposition temperature of the film. The sensors showed a rapid response at an operating temperature of 345 °C. The long-term stability of the sensors is also reported.     

Detection of amines with chromium-doped WO3 mesoporous material

Chromium-doped mesoporous tungsten trioxide – with KIT-6 structure – was prepared through a chemical route. The resulting material was deposited on a micromechanically fabricated hot-plate and tested as a sensor for ammonia and trimethylamine in the temperature range of 200–500 °C. Maximum response was reached at 350 and 450 °C for ammonia and TMA, respectively. It was also found that the sensor shows a non-linear cross-sensitivity to the gases.     

Polysilicon nanofilm pressure sensor

Utilizing 80 nm polysilicon nanofilm as piezoresistors, a pressure sensor with high performance is developed. The complete fabrication process is described. The pressure properties of the sensor were measured at the temperature from 0 to 200 °C. For 0.6 MPa full scale pressure, the sensitivity is 23.00 mV/V/MPa at 0 °C and 18.27 mV/V/MPa at 200 °C, the temperature coefficient of sensitivity (TCS) is about −0.098%/ °C without any compensation. The temperature coefficient of offset (TCO) is about −0.017%/ °C. Because of the good piezoresistive and temperature characteristics of polysilicon nanofilm, the pressure sensor demonstrates a better performance.     

Adhesive bonding with SU-8 in a vacuum for capacitive pressure sensors

This paper describes a method for fabricating capacitive pressure sensors through the use of adhesive bonding with SU-8 in a vacuum. The influence of different parameters on the bonding of structured wafers was investigated. It was found that pre-bake time, pumping time, and the thickness of the crosslink layer are the most important factors for successful bonding. Bonding quality was evaluated by inspection through the transparent glass of the sensor and through the use of an SEM photograph, with 90% of the area successfully bonded and an ultimate yield of 70% of the sensors. The measured bonding strength was 17.15 MPa and 19.6 MPa for wafers bonded in 80 °C and 100 °C, respectively. The pressure–capacitance characteristic test results show that this bonding process is a viable micro electro mechanical systems (MEMS) fabrication technology for cavity sealing in a vacuum.     

Investigation on formaldehyde gas sensor with ZnO thick film prepared through microwave heating method

ZnO nanopowders were prepared through microwave heating method. ZnO thick film sensors were fabricated by using ZnO nanopowders as sensing materials. The phase composition and morphology of the material particles were characterized by means of X-ray diffraction (XRD) and transmission electron microscopy (TEM), respectively. The gas-sensing properties of the sensors based on ZnO nano-materials were investigated. It was found that the sensor based on ZnO nano-materials (low power, 10× 10 min) exhibited very high responses to benzene and toluene when operating at 440 and 370 °C, respectively; but the sensor based on ZnO (low power, 10× 10 min) showed very low responses to benzene and toluene when operating at 205–215 °C. The sensor based on ZnO (low power, 10× 10 min) showed high response and good selectivity to dilute formaldehyde when operating at 210 °C; especially, the response to 0.001 ppm HCHO attained 7.4 when operating at 210 °C.     

Solid-state potentiometric SO2 sensor combining NASICON with V2O5-doped TiO2 electrode

A compact tubular sensor based on NASICON (sodium super ionic conductor) and V₂O₅-doped TiO₂ sensing electrode was designed for the detection of SO₂. In order to reduce the size of the sensor, a thick-film of NASICON was formed on the outer surface of a small Al₂O₃ tube; furthermore, a thin layer of V₂O₅-doped TiO₂ with nanometer size was attached on the NASICON as a sensing electrode. This paper investigated the influence of V₂O₅ doping and sintering temperature on the characteristics of the sensor. The sensor attached with 5 wt% V₂O₅-doped TiO₂ sintered at 600 °C exhibited excellent sensing properties to 1–50 ppm SO₂ in air at 200–400 °C. The EMF value of the sensor was almost proportional to the logarithm of SO₂ concentration and the sensitivity (slope) was −78 mV/decade at 300 °C. It was also seen that the sensor showed a good selectivity to SO₂ against NO, NO₂, CH₄, CO, NH₃ and CO₂. Moreover, the sensor had speedy response kinetics to SO₂ too, the 90% response time to 50 ppm SO₂ was 10 s, and the recovery time was 35 s. On the basis of XPS analysis for the SO₂-adsorbed sensing electrode, a sensing mechanism involving the mixed potential at the sensing electrode was proposed.     

Pulsed laser deposited Y-doped BaZrO3 thin films for high temperature humidity sensors

Pulsed laser deposited (PLD) Y-doped BaZrO₃ thin films (BaZr_1-xY_xO_3-y/2, x = 0.2, y > 0), were investigated as to their viability for reliable humidity microsensors with long-term stability at high operating temperatures (T > 500 °C) as required for in situ point of source emissions control as used in power plant combustion processes. Defect chemistry based models and initial experimental results in recent humidity sensor literature [1] and [2]. indicate that bulk Y-doped BaZrO₃ could be suitable for use in highly selective, high temperature compatible humidity sensors. In order to accomplish faster response and leverage low cost batch microfabrication technologies we have developed thin film deposition processes, characterized layer properties, fabricated and tested high temperature humidity micro sensors using these thin films. Previously published results on sputtering Y-doped BaZrO₃ thin films have confirmed the principle validity of our approach [3]. However, the difficulty in controlling the stoichiometry of the films and their electrical properties as well as mud flat cracking of the films occurring either at films thicker than 400 nm or at annealing temperature above 800 °C have rendered sputtering a difficult process for the fabrication of reproducible and reliable thin film high temperature humidity microsensors, leading to the evaluation of PLD as alternative deposition method for these films.X-ray Photoelectron Spectroscopy (XPS) data was collected from as deposited samples at the sample surface as well as after 4 min of Ar⁺ etching. PLD samples were close to the desired stoichiometry. X-ray diffraction (XRD) spectra from all as deposited BaZrO₃:Y films show that the material is polycrystalline when deposited at substrate temperatures of 800 °C. AFM results revealed that PLD samples have a particle size between 32 nm and 72 nm and root mean square (RMS) roughness between 0.2 nm and 1.2 nm. The film conductivity increases as a function of temperature (from 200 °C to 650 °C) and upon exposure to a humid atmosphere, supporting our hypothesis of a proton conduction based conduction and sensing mechanism. Humidity measurements are presented for 200–500 nm thick films from 500 °C to 650 °C at vapor pressures of between 0.05 and 0.5 atm, with 0.03–2% error in repeatability and 1.2–15.7% error in hysteresis during cycling for over 2 h. Sensitivities of up to 7.5 atm⁻¹ for 200 nm thick PLD samples at 0.058 atm partial pressure of water were measured.     

Characterization of electrospun ZnO–SnO2 nanofibers for ethanol sensor

ZnO–SnO₂ nanofibers have been developed through in situ electrospinning technique and calcination. Poly(vinyl pyrrolidone) (PVP) is selected as fiber template. The composition of products can be controlled concisely by adjusting the compositions in their precursors. Under the optimized experimental conditions, the prepared product shows the desirable sensing characteristics towards ethanol gas at 300 °C, such as high response, excellent linearity in the range of 1–300 ppm, quick response time (5 s) and recovery time (6 s), good reproducibility, stability and selectivity.     

Designing of MIP-based QCM sensor for the determination of Cu(II) ions in solution

A novel quartz crystal microbalance (QCM) sensor with a high selectivity and sensitivity has been developed for the determination of Cu(II) ions, based on the modification of Cu(II) ion-imprinted polymer (Cu(II)-IIP) film onto a quartz crystal. The performance of the developed MIP-QCM sensor was evaluated and the results indicated that a sensitive MIP-QCM sensor could be fabricated. The obtained MIP-QCM sensor presents high-selectivity monitoring of Cu(II) ions, better reproducibility, shorter response time (6 min), wider linear range (0.001–50 μM) and lower detection limit (8 × 10⁻⁴ μM). The practical analysis of the MIP-QCM sensor confirms the feasibility of Cu(II) determination in wastewater.     

Flexible humidity sensor in a sandwich configuration with a hydrophilic porous membrane

We constructed a wearable and flexible humidity sensor (thickness: 80 μm) in a sandwich configuration, with a hydrophilic poly-tetrafluoroethylene membrane placed between two gold deposited layers, using soft-MEMS techniques. The device was used to measure humidity level, via its electrical conductivity, using a multi-frequency LCR-meter at frequencies ranging from 100 Hz to 100 kHz. The device was calibrated at 100 Hz against moist air over the range of 30–85% RH, which includes normal humidity levels in the atmosphere and physiological air such as breath and evaporating sweat. The response sensitivity of the humidity device was extremely high, even for recovery to dry air; for example response time was less than 1 s for a conductivity shift between humid air of 80% RH and dry air of −60 °C dew point. The sensor performance was reproducible over multiple measurements, with a coefficient of variation of 1.77% (n = 5). The sensor was appropriate for physiological applications, and was successfully used in two non-invasive approaches: to monitor breath air at the mouth, and to measure sweat moisture from the nostrils.     

Tetrakis(alkylthio)-substituted lutetium bisphthalocyanines for sensing NO2 and O3

In this study, the nitrogen dioxide (NO₂) and ozone (O₃) sensing properties of a series bis[tetrakis(alkylthio) phthalocyaninato] lutetium(III) complexes [(C_nH_2n+1S)₄Pc]₂Lu(III) (n = 6, 10, 16) are investigated as a function of concentration in the temperature range between 25 °C and 150 °C. The concentration ranges were 1–10 ppm for NO₂, and 50 ppb–1 ppm for O₃. The response time and the sensor response to NO₂ are measured for approximately 1 min and 100% ppm⁻¹, respectively, for compound 1 at room temperature. At room temperature, all compounds are in the solid phase. The response time decreases to a few seconds with increasing operation temperature to 150 °C. At this temperature, all compounds are in the liquid crystal phase. The fastest response to oxidizing gases is observed at the liquid crystal phase of the Pcs. It has also been observed that the response time and the sensor response depend on the alkyl chain lengths of the Pcs. The doping effect of oxygen has been determined under high purity nitrogen N₂ flow, after exposure to dry air, at a different period of time and after annealing. It has been found that the conductivities of [(C_nH_2n+1S)₄Pc]₂Lu(III) thin films increased after exposure to dry air and the conduction mechanism also changed from ohmic behavior to space-charge-limited conduction.     

Fiber Bragg grating weighing sensor of beam with two parallel holes

Due to the strains of fiber Bragg gratings mounted on the gauge hole of beam with two parallel holes excited by the weight, a fiber Bragg grating weighing sensor is developed. During the double differential operation of the relation shifts of Bragg wavelength of these four mounted gratings, the shifts of Bragg wavelengths caused by the temperature fluctuation and the bending moment caused by the deflection load can be compensated. The loading and unloading experiments indicate that the delay of grating weighing sensor is 0.28%FS, and the repetition is 0.32%FS. Through the least-square algorithm fitting, the load response sensitivity of grating weighing sensor is 9.992 × 10⁻⁶ kg f⁻¹, and the fitting linearity is 0.6%FS. The temperature drift of grating weighing sensor is 0.02%FS/°C at the range of 20–60 °C. The fitting linearity is 1.5%FS under the action of deflection load.     

BOD微生物传感器和快速BOD测定仪的研制

报导了一种用皮状丝孢酵母组成的ＢＯＤ微生物传感器和流通式微机化愉速ＢＯＤ测定仪。本法的响应时间为（３～７）ｍｉｎ，测定范围为（１０～６０）ｍｇ／Ｌ，线性方程ΔＩ＝０．４２＋１．６４Ｃ，相关系数γ＝０．０９７。对４０ｍｇ／ＬＢＯＤ标样平行测定８次的相对标准偏差ＲＤ＝３．７１％，加标回收率为９４．１％～１０４．７％     

Autonomous multi-sensor micro-system for measurement of ocean water salinity

This paper describes the design, fabrication and application of a micro-fabricated salinity sensor system. The theoretical electrochemical behaviour is described using electrical equivalent diagrams and simple scaling properties are investigated analytically and numerically using finite element method (FEM). The chip design and fabrication is described and measurement results of two different electrode designs are presented. The 4 mm × 4 mm multi-sensor allows for salinity determination with an accuracy of ±0.5 psu through determination of the electrical conductivity, temperature and pressure with accuracies of ±0.6 mS, ±0.065 ° C and ±0.05 bar, respectively.     

Development of a piezoelectric polymer film sensor for plantar normal and shear stress measurements

We have developed a new sensor prototype for plantar pressure measurements during gait. The mechanical stress at the plantar surface has two components, pressure acting normal to the surface and shear stress acting tangential to the surface. The shear stress can be further divided into anterior–posterior (AP) and medial–lateral (ML) components. The developed sensor simultaneously measures both normal and shear stresses. It utilizes commercial polyvinylidenefluoride (PVDF) material and consists of four separate sensor elements. This paper presents the sensor development and calibration for each force components. A shaker providing dynamic excitation force was used in the calibration. Average sensitivities computed from the results were (12.6 ± 0.8) mV/N for the normal force, (223.9 ± 20.3) mV/N for the AP shear force and (55.2 ± 11.9) mV/N for the ML shear force. A preliminary plantar pressure measurement was also done. The results obtained were promising. However, the sensor developed here is the first prototype. In future, a matrix sensor based on this principle is planned to be constructed.     

An optical biosensor for multi-sample determination of biochemical oxygen demand (BOD)

An optical biosensor for parallel multi-sample determination of biochemical oxygen demand (BOD) in wastewater samples has been developed. The biosensor monitors the dissolved oxygen (DO) concentration in water through an oxygen sensing film immobilized on the bottom of glass sample vials. The oxygen sensing film contains the tris(4,7-diphenyl-1,10-phenanthroline) ruthenium(II) dye (Ru(dpp)) the luminescence intensity of which varies with oxygen concentration. A computer-controlled moving optrode head with four blue light emitting diodes (LEDs) was scanned sequentially under each sample vial. The luminescence signal was collected by an optical cable and transmitted to a photomultiplier tube (PMT) and processed by a microcomputer. The microbial samples (activated sludge and Bacillus subtilis were immobilized in a sol–gel composite material of silica and poly(vinyl alcohol)-grafted-poly(vinylpyridine) on the oxygen sensing film. The performance of the microbial film as a function of cell loading, thickness, temperature and pH and in the presence of heavy metals as well as its stability and service life have been investigated. The BOD value was determined from the rate of oxygen consumption by the microorganisms in the first 20 min. The BOD values obtained from this biosensor correlates well with the results of the conventional 5-day BOD test.     

Effects of internal electrode composition on the reliability of low-firing PMN–PZT multilayer ceramic actuators

We investigated the effects of internal electrode composition on the reliability of low-firing multilayer ceramic actuators using Ag internal electrodes. Ag–ceramic composite pastes were prepared by adding Pb(Mg_1/3Nb_2/3)O₃–Pb(Zr_0.475,Ti_0.525)O₃ (PMNZT) ceramic powders to a commercial Ag paste at concentrations in the range of 0–60 vol%. PMNZT multilayered laminates were fabricated using tape casting, and then cofired at 925 °C for 10 h. The fatigue behaviors of multilayer actuators with Ag internal electrodes having different PMNZT concentrations were compared by applying a 2 kV/mm ac electric field at 50 °C under a relative humidity of 30%. The failure data were analyzed using Weibull statistics. The addition of PMNZT ceramics enhanced the mean time to failure by reducing the densification mismatch between the piezoelectric ceramic and internal electrode layers during the cofiring process.     

BOD微生物传感器的研制

本文是以BSA-GA为交联剂,将异常汉逊氏酵母菌(Hansenula anomalaVar.scheggil)菌体固定成膜,与氧电极偶合研制成BOD微生物传感器.在29.5℃、pH6.8的工作条件下,该传感器响应时间为2～3min,线性范围1～85mg/L,标准偏差0.91mg/L,变异系数4.2%,回收率94～107%,该电极操作简便、快速、测定的重现稳定性较好,能连续稳定测试一周以上,可作为各种污水中BOD测定的新方法.     

Novel tunable laser sources with 1.5-μm and 1.57-μm cascaded DFB reflectors for in situ gas monitoring applications

Novel tunable lasers based on 1.5-μm and 1.57-μm cascaded distributed-feedback reflectors are realized for real-time monitoring of H₂O and CO gas mixtures immediately in multi-gas sensor systems. With simple fabrication procedures, the new design allows the realization of a widely tunable laser source that can cover the H₂O and CO absorption wavelength bands. With the temperature tuning of 0.1 nm/°C and current tuning of 0.014 nm/mA, the laser can be tuned to cover over 3 nm wavelength range in each wavelength band. Experiments verify that the lasers can have more than 38 dB SMSR over the tuning range. The characteristics of high power, excellent spectral purity, and simple wavelength switching control can simplify the analysis procedures of gas sensing and thus reduce the cost. By direct absorption method, the tunable laser has been successfully adopted in a diode laser sensor system for monitoring of water vapor concentration near 1.5 μm and carbon monoxide near 1.57 μm. Less than 15% error in the line strength is observed between the measured data and HITRAN database.     

Bioluminescent sensor for naphthalene in air: Cell immobilization and evaluation with a dynamic standard atmosphere generator

A dynamic atmosphere generator with a naphthalene emission source has been constructed and used for the development and evaluation of a bioluminescence sensor based on the bacteria Pseudomonas fluorescens HK44 immobilized in 2% agar gel (10⁷ cell mL⁻¹) placed in sampling tubes. A steady naphthalene emission rate (around 7.3 nmol min⁻¹ at 27 °C and 7.4 mL min⁻¹ of purified air) was obtained by covering the diffusion unit containing solid naphthalene with a PTFE filter membrane. The time elapsed from gelation of the agar matrix to analyte exposure (“maturation time”) was found relevant for the bioluminescence assays, being most favorable between 1.5 and 3 h. The maximum light emission, observed after 80 min, is dependent on the analyte concentration and the exposure time (evaluated between 5 and 20 min), but not on the flow rate of naphthalene in the sampling tube, over the range of 1.8–7.4 nmol min⁻¹. A good linear response was obtained between 50 and 260 nmol L⁻¹ with a limit of detection estimated in 20 nmol L⁻¹ far below the recommended threshold limit value for naphthalene in air.