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低介电常数聚合物材料的研究进展 总被引:1,自引:0,他引:1
综述了低介电常数(low-k)材料研究的基本情况,以及可用于微电子领域的低介电常数聚合物材料,包括材料的化学结构和基本物理性质。并着重介绍了带有纳米孔的超低介电常数材料的研究进展。同时,对低介电常数材料的制备工艺也进行了简要的总结。 相似文献
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通过4,4’-二(4-烯丙氧基苯甲酸)苯酯与POSS分子的硅氢化反应,合成了POSS交联聚合物。用FTIR、XRD对聚合物结构进行了表征,利用椭偏仪测量了薄膜的折射率和介电常数。通过改变单体与POSS投料摩尔比,可制备出k<2.5的低介电常数薄膜。 相似文献
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POSS基有机-无机杂化高分子的制备及低介电性能 总被引:1,自引:0,他引:1
利用硅氢加成反应技术,以多面低聚倍半硅氧烷T8H8和二(对烯丙氧基苯甲酸)丁二醇酯为单体合成了有机.无机杂化交联聚合物。用FTIR和^29Si NMR等对材料进行了结构表征,结果表明,在聚合物中两种单体以化学键相连,无机与有机相均匀分散,T8H8分子中平均有6.3个Si-H键与C=C双键发生了加成反应,得到了三维网络聚合物。TGA分析结果表明,聚合物具有较高的热稳定性,热分解温度为376℃。Ellipsometer测试结果表明,聚合物薄膜具有较低的介电常数,k值为2.4。薄膜表面经三甲基氯硅烷疏水处理后,k值减小为2.2。 相似文献
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目前对于介电材料的研究与应用一般集中于电子产品及其相关领域,高介电陶瓷材料应用于油品精制领域还是一个新的尝试。首先简要介绍了介电力学精制工艺装置,并重点讨论了介电陶瓷在其中的应用及基本原理,最后选用几种不同介电常数的介电陶瓷材料在装置中进行了实验,实验证明,高介电陶瓷材料对油品有较好的精制效果,并且对于所选用的几种介电材料而言随着介电常数的增加精制效果也提高。 相似文献
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Low dielectric constant (low k) carbon-doped silicon oxide (CDO) films are obtained by plasma-enhanced chemical vapor deposition. The k value of the as-deposited CDO film is less than 2.9. However, the k value may be changed during the integration process. In integration process, photoresist removal is commonly implemented with oxygen plasma ashing or by wet chemical stripping. In this work, the impact of oxygen plasma treatment has been investigated on the quality of the low-k CDO films. Different plasma treatment conditions, including variable pressure, r.f. power, and treatment time were employed. A variety of techniques, including X-ray photoelectron spectroscopy (XPS), Fourier transform infrared (FTIR) spectroscopy, time-of-flight secondary ion mass spectrometry (TOF-SIMS), atomic force microscopy (AFM), and scanning electron microscope (SEM) were used to analyze the effect of the oxygen plasma post-treatment on the low-k CDO films. The result indicates that oxygen plasma will damage the CDO film by removing the entire carbon content in the upper part of the film with increasing treatment time, which results in an increase in the k value and film thickness loss. Our result also confirms that with low r.f. power and low pressure, the damage will be less. 相似文献
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采用紫外光辐照超低介电常数多孔SiCOH薄膜,研究不同照射时间对薄膜结构和性能的影响。采用动态纳米压入技术测量薄膜的力学性能,发现随照射时间增加,薄膜的模量(Er)和硬度(H)不断提高。当辐照时间增至6h时,薄膜力学强度分别达到Er约7.4GPa,H约1.0GPa。傅里叶变换红外光谱(FT-IR)、X射线光电子能谱(XPS)分析表明紫外辐照处理能够使薄膜样品中发生键的断裂与重新结合,从而改变了薄膜骨架的交联密度和刚性,进而提高力学性能。但介电性能并未受到明显影响,紫外辐照6h后,k值仅从2.0增至2.2。 相似文献
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A class of ultra low dielectric constant polymethylsilsesquioxane (PMSQ) films with T8(Me4NO)8 polyhedral oligomeric silsesquioxanes (T8 POSS) as double-effective porogen was studied. Through the Me4NO− groups of T8 POSS attacking the Si-O-Si chains of PMSQ, the POSS will be connected to the PMSQ crosslink system. POSS has the cage structure, which acted as the closed pores (≤ 1.5 nm). On the other hand, the Me4NO− groups served as the sacrificial template. When they decomposed after annealing, the open pores were then left in the films. The introduction of T8 POSS can greatly decrease the dielectric constant of PMSQ, and effectively improve its mechanical strength owing to T8(Me4NO)8 interconnected with PMSQ. These continuous and smooth films were prepared by spin-coating with thickness in the range of 60-200 nm. The dielectric constant of the films could be controlled by adjusting the proportion of porogen. These films showed good mechanical strength and ultra low dielectric constant. In particular, a POSS/PMSQ film with ultra low dielectric constant of 1.6 and modulus of 7 GPa had been prepared on silicon wafer by spin-coating. 相似文献
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A concentric cylinder capacitor has been used to measure the orthobaric liquid dielectric constants of multicomponent mixtures of the major components of liquefied natural gas (LNG) to an accuracy of approximately ± 0.05% at temperatures from 110 to 130 K. These mixtures ranged from a ternary mixture containing nitrogen, methane, and normal butane to four to eight component methane rich (74 to 90 mol %) mixtures containing up to 5 mol % of nitrogen, 16 mol % of ethane, 7 mol % of propane, 5 mol % of the butanes, and 0.44 mol % of the pentanes. Some of these mixtures were prepared to simulate commercial LNG compositions. Experimental densities previously reported for these mixtures have been combined with the mixture dielectric constant data to calculate values of the Clausius-Mossotti (CM) function and the excess CM function. Pure component experimental CM functions for LNG components except for propane and isobutane have been combined with the mixture data in the development of a simple calculational technique for the prediction of LNG densities to an uncertainty of approximately ± 0.15% based on a knowledge of the composition and dielectric constant of the liquid mixtures. In fitting the data, pseudo values of the CM function are derived for the slightly polar components, propane and isobutane, while constraining the mixture excess CM function to be zero. 相似文献
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D. K. Burghate V. S. Deogaonkar S. B. Sawarkar S. P. Yawale S. V. Pakade 《Bulletin of Materials Science》2003,26(2):267-271
In this paper the results of thermally stimulated discharge current (TSDC) and dielectric constant for 40PbO-60Bi2O3 glass thermoelectrets are presented. Measurements of TSDC and dielectric constant, ǵe, have been carried out in the temperature
range 30–300°C. The thermoelectrets were prepared at different polarizing fields. The various observed peaks in the thermograms
are discussed on the basis of space charge polarization. The trap energy is evaluated from the Garlick-Gibson plot of initial
rise method. Similarly other parameters such as relaxation time, charge release etc are evaluated. 相似文献
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Smart multifunctional materials exhibiting phase transition and tunable optical and/electrical properties provide a new direction towards engineering switchable devices. Specifically, the reversible, tunable and sign switch dielectric constants via external temperature stimuli observed in vanadium dioxide (VO2) make it a candidate of choice for tunable and switchable technologies devices. Here we report new aspect of the metal-insulator transition (MIT) through the sign switch of the static dielectric constant εS of pure VO2. As it is shown, the static dielectric constant showed an abrupt change from positive at T < 70 °C to negative at T > 70 °C. εS > 0 confirms the insulating phase where charges are localized while εS < 0 confirms the metallic phase of VO2 where charges are delocalized. We report for the first time the tunability of the dielectric constant from a negative sign for the static dielectric constant of VO2 thin film rarely found in real physical systems. We also demonstrate the tunability and switchability of the real and imaginary part of the dielectric constant (ε) via external temperature stimuli. More specifically, the real (ε) and Imaginary (ε) showed an abrupt thermal hysteresis which clearly confirms the phase transition. 相似文献