A micromachined impact microactuator driven by electrostatic force

This paper presents a novel micromachined actuator which is developed to produce precise and unlimited displacement. The actuator is driven by impact force between a silicon micro-mass and a stopper. The suspended silicon micro-mass is encapsulated between two glass plates and driven by electrostatic force. When the mass hits the stopper which is fixed on glass plates, impact force is generated to drive the whole actuator in a nano size step (/spl sim/10 nm). The overall dimension of the device is 3 mm /spl times/3 mm. The driving voltage is 100 V and average speed is 2.7 /spl mu/m/s. The total thickness is 600 /spl mu/m.     

A micromachined reaction force actuator (RFA) for a nanomanipulator preparation

A reaction force actuator (RFA) was fabricated to translate a microstage with nanostep movement, and its performance was experimentally evaluated using an optical fiber based built-in microinterferometer. The proposed RFA consists of a shuttle mass, movable electrode, fixed electrode, springs, and spring anchor, all of which reside on the movable substrate. The RFA placed on the platform is free to move when the driving force is larger than the static friction. The fixed electrodes are gold-wired to the external electrodes on the platform covered with a dielectric layer for electrical isolation. When external voltage is applied to the electrodes, the springs experience deflections, and the electrostatic force and restoring force react on the movable substrate through the spring anchor and the fixed electrode, respectively. If the driving voltage is large enough that the resultant force overcomes the friction from the platform, the RFA including the movable substrate can make a displacement with no physical collision between the movable and fixed electrodes. In order to suppress the drift motion due to external noise, electrostatic pressure was applied between the movable substrate and the platform on which a 100-/spl mu/m-thick dielectric thin film is positioned. The nanomotion of the fabricated actuator was evaluated with various voltages using an optical fiber interferometer. The minimum step movement 1.21/spl plusmn/0.24 nm was experimentally obtained at the driving voltage of 18 V, and the estimated total displacement was 450 nm at the highest affordable driving voltage of 85 V.     

Frictional Aging and Sliding Bifurcation in Monolayer-Coated Micromachines

Using a high-performance polycrystalline-silicon micromachined actuator that also functions as a friction tester, we have found frictional forces that cannot be explained by Amontons' law with a constant coefficient of friction. In our friction test, a constant tangential force is applied while normal load is ramped down at a rate mathdotF _n after a hold time t _h at a hold load F _h. When coated by a monolayer of FOTAS (CF₃ C₅F₁₀C₂H₄Si(N(CH₃)₂)₃), we find that there is no unique coefficient of static friction mu_s , but instead that mu_s depends on all three of these parameters. The dependence on t _h implies static friction aging, but the rate of static friction aging can be suppressed by greater hold force. When sliding motion begins, we have identified a critical normal force to shear force ratio such that any motion initiating above the critical ratio proceeds with time-dependent frictional creep over several hundred nanometers, whereas any motion initiating below the critical ratio proceeds with a large inertial jump. These effects demonstrate that contact aging effects extend from the micrometer to the nanometer scale and are relevant to micromachined interfaces.     

Characterizing fruit fly flight behavior using a microforce sensor with a new comb-drive configuration

This paper reports a MEMS microforce sensor with a novel configuration of bulk micromachined differential triplate comb drives that overcomes the difficulty of electrically isolating the two stationary capacitor comb sets in bulk micromachining. A high-yield fabrication process using deep-reactive ion etching (DRIE) on silicon-on-insulator (SOI) wafers and only three lithographic masks was utilized to construct the high aspect ratio devices. The process features dry release of both suspended structures and the entire device in order to protect fragile components. The sensor has a high sensitivity (1.35 mV//spl mu/N), good linearity (<4%), and a large bandwidth (7.8 kHz), and is therefore well suited for characterizing flight behavior of fruit flies (Drosophila melanogaster). The technique allows for the instantaneous measurement of flight forces, which result from a combination of aerodynamic forces and inertial forces generated by the wings, and demonstrates a novel experimental paradigm for exploring flight biomechanics in the fruit fly. The average lift force is determined to be 9.3 /spl mu/N (/spl plusmn/2.3 /spl mu/N), which is in the range of typical body weights of fruit flies. The potential impact of this research extends beyond gathering flight data on Drosophila melanogaster by demonstrating how MEMS technology can be used to provide valuable tools for biomechanical investigations.     

Gimbal-less MEMS two-axis optical scanner array with high fill-factor

In this paper, we report on a MEMS-based two-axis optical scanner array with a high fill factor (>96%), large mechanical scan angles (/spl plusmn/4.4/spl deg/ and /spl plusmn/3.4/spl deg/), and high resonant frequencies (20.7 kHz). The devices are fabricated using SUMMiT-V, a five-layer surface-micromachining process. High fill factor, which is important for 1/spl times/N/sup 2/ wavelength-selective switches (WSSs), is achieved by employing crossbar torsion springs underneath the mirror, eliminating the need for gimbal structures. The proposed mirror structure can be readily extended to two-dimensional (2-D) array for adaptive optics applications. In addition to two-axis rotation, piston motion with a stroke of 0.8 /spl mu/m is also achieved. [1496].     

Dynamic interaction between deformable surfaces and nonsmooth objects

In this paper, we introduce new techniques that enhance the computational performance for the interactions between sharp objects and deformable surfaces. The new formulation is based on a time-domain predictor-corrector model. For this purpose, we define a new kind of (/spl pi/, /spl beta/, I)-surface. The partitioning of a deformable surface into a finite set of (/spl pi/, /spl beta/, I)-surfaces allows us to prune a large number of noncolliding feature pairs. This leads to a significant performance improvement in the collision detection process. The intrinsic collision detection is performed in the time domain. Although it is more expensive compared to the static interference test, it avoids portions of the surfaces passing through each other in a single time step. In order to resolve all the possible collision events at a given time, a penetration-free motion space is constructed for each colliding particle. By keeping the velocity of each particle inside the motion space, we guarantee that the current colliding feature pairs will not penetrate each other in the subsequent motion. A static analysis approach is adopted to handle friction by considering the forces acting on the particles and their velocities. In our formulation, we further reduce the computational complexity by eliminating the need to compute repulsive forces.     

Microoptical characterization of piezoelectric vibratory microinjections in drosophila embryos for genome-wide RNAi screen

In this paper, we study the effect of acoustic agitation on the penetration force for microinjections in Drosophila embryos for genome-wide RNA interference (RNAi) screens, using an integrated optical MEMS force encoder for in vivo characterization of the dynamic penetration forces. Two modes of operation are investigated. In the first mode of operation, the injector is brought into contact and acts on the embryo with a fixed force, and the vibration amplitude of the microinjector is increased till penetration occur. We observed a linear decrease in the penetration force of 1.6 /spl mu/N with every 0.1 m/s tip velocity increase. In the second mode of operation, the vibration amplitude is kept constant and the injector is pushed into the embryo until penetration. We simulate the optical force encoder eigenmodes and measure the injection force over the frequency range from 0 to 16 kHz with actuation voltages up to 150V. Among the eight encoder eigenmodes with resonant frequency up to 16 kHz, the longitudinal vibration along the injector is shown to dominate the force reduction at 14 kHz. Two other modes, both involving significant out-of-plane injector motion, reduce the penetration force by 52% around 3.1 kHz. The average penetration force is calculated based on injections into multiple embryos for each experimental condition. For each microinjection, the peak (or average) penetration force can be derived from the peak (or average) relative displacement of the two gratings upon penetration. The achieved minimum peak penetration force was 15.6 /spl mu/N (/spl sim/29.7% of the static penetration force), while the minimum average penetration force was 2.7 /spl mu/N (5.1% of the static penetration force).     

Robust design and model validation of nonlinear compliant micromechanisms

Although the use of compliance or elastic flexibility in microelectromechanical systems (MEMS) helps eliminate friction, wear, and backlash, compliant MEMS are known to be sensitive to variations in material properties and feature geometry, resulting in large uncertainties in performance. This paper proposes an approach for design stage uncertainty analysis, model validation, and robust optimization of nonlinear MEMS to account for critical process uncertainties including residual stress, layer thicknesses, edge bias, and material stiffness. A fully compliant bistable micromechanism (FCBM) is used as an example, demonstrating that the approach can be used to handle complex devices involving nonlinear finite element models. The general shape of the force-displacement curve is validated by comparing the uncertainty predictions to measurements obtained from in situ force gauges. A robust design is presented, where simulations show that the estimated force variation at the point of interest may be reduced from /spl plusmn/47 /spl mu/N to /spl plusmn/3 /spl mu/N. The reduced sensitivity to process variations is experimentally validated by measuring the second stable position at multiple locations on a wafer.     

Two-axis single-crystal silicon micromirror arrays

This work presents the design, fabrication, and testing of a two-axis 320 pixel micromirror array. The mirror platform is constructed entirely of single-crystal silicon (SCS) minimizing residual and thermal stresses. The 14-/spl mu/m-thick rectangular (750/spl times/800 /spl mu/m/sup 2/) silicon platform is coated with a 0.1-/spl mu/m-thick metallic (Au) reflector. The mirrors are actuated electrostatically with shaped parallel plate electrodes with 86 /spl mu/m gaps. Large area 320-mirror arrays with fabrication yields of 90% per array have been fabricated using a combination of bulk micromachining of SOI wafers, anodic bonding, deep reactive ion etching, and surface micromachining. Several type of micromirror devices have been fabricated with rectangular and triangular electrodes. Triangular electrode devices displayed stable operation within a (/spl plusmn/5/spl deg/, /spl plusmn/5/spl deg/) (mechanical) angular range with voltage drives as low as 60 V.     

Static Force-Based Modeling and Parameter Estimation for a Deformable Link Composed of Passive Spherical Joints With Preload Forces

To balance the contradiction between higher flexibility and heavier load bearing capacity, we present a novel deformable manipulator which is composed of active rigid joints and deformable links. The deformable link is composed of passive spherical joints with preload forces between socket-ball surfaces. To estimate the load bearing capacity of a deformable link, we present a static force-based model of spherical joint with preload force and analyze the static force propagation in the deformable link. This yields an important result that the load bearing capacity of a spherical joint only depends on its radius, preload force, and static friction coefficient. We further develop a parameter estimation method to estimate the product of preload force and static friction coefficient. The experimental results validate our model. 80.4% of percentage errors on the maximum payload mass prediction are below 15%.      

Channel assignment with separation for interference avoidance in wireless networks

Given an integer /spl sigma/>1, a vector (/spl delta//sub 1/, /spl delta//sub 2/,..., /spl delta//sub /spl sigma/-1/), of nonnegative integers, and an undirected graph G=(V, E), an L(/spl delta//sub 1/, /spl delta//sub 2/,..., /spl delta//sub /spl sigma/-1/)-coloring of G is a function f from the vertex set V to a set of nonnegative integers, such that |f(u)-f(v)|/spl ges//spl delta//sub i/, if d(u,v)=i, for 1相似文献   

Single mask, large force, and large displacement electrostatic linear inchworm motors

We have demonstrated a family of large force and large displacement electrostatic linear inchworm motors that operate with moderate to high voltages. The inchworm motor design decouples actuator force from total travel and allows the use of electrostatic gap-closing actuators to achieve large force and large displacement while consuming low power. A typical inchworm motor measures 3 mm /spl times/ 1 mm /spl times/ 50 /spl mu/m and can lift over 130 times its own weight. One motor has achieved a travel of 80 /spl mu/m and a calculated force of 260 /spl mu/N at 33 V. The force density of that motor was 87 /spl mu/N/mm/sup 2/ at 33 V and the energy efficiency was estimated at 8%. Another motor displaced the shuttle at an average velocity of almost 4 mm/s and achieved an estimated power density of 190 W/m/sup 3/. Motors were cycled 23.6 million times for over 13.5 h without stiction. This family of motors is fabricated in silicon-on-insulator (SOI) wafers using a single mask.     

气动薄膜执行机构模型优化及参数辨识

在气动调节阀中,针对智能电气阀门定位器控制算法的开发通常需以气动薄膜执行机构模型为基础;本研究对应用于气动薄膜执行机构的传统Karnopp摩擦模型进行了优化,对动静摩擦判断条件DV(临界速度)进行修改,修改后的模型解决了DV如何选取这一问题。同时对传统气动薄膜执行机构模型的参数辨识方法进行改进,将多元线性回归和最小二乘法应用于估算气动薄膜执行机构中移动部件质量,弹簧刚度系数,预紧力,库伦摩擦和粘滞摩擦系数,通过实际气室压力和估计气室压力的标准误差、相关系数与参数向量中每个参数对应的p-value三个指标来决定参数的选取结果。将摩擦模型整合进气动薄膜执行机构动力学模型中,通过仿真和实验验证了参数辨识方法有效性。在开环不同幅值的阶跃信号和随机信号激励下进行仿真和实验对比,结果表明,整合后的摩擦模型能准确模拟气动薄膜执行机构的动态过程,该模型和参数辨识方法同样适用于其它机械装备。     

Analog piezoelectric-driven tunable gratings with nanometer resolution

This work presents the design, fabrication, and characterization of a piezoelectrically actuated MEMS diffractive optical grating, whose spatial periodicity can be tuned in analog fashion to within a fraction of a nanometer. The fine control of the diffracted beams permits applications in dense wavelength-division multiplexing (DWDM) optical telecommunications and high-resolution miniaturized spectrometers. The design concept consists of a diffractive grating defined on a deformable membrane, strained in the direction perpendicular to the gratings grooves via thin-film piezoelectric actuators. The tunable angular range for the first diffracted order is up to 400 /spl mu/rad with 0.2% strain (/spl sim/8 nm change in grating periodicity) at 10 V actuation, as predicted by device modeling. The actuators demonstrate a piezoelectric d/sub 31/ coefficient of -100 pC/N and dielectric constant /spl epsiv//sub r/ of 1200. Uniformity across the tunable grating and the out-of-plane deflections are also characterized and discussed.     

A piezoelectric microvalve for compact high-frequency, high-differential pressure hydraulic micropumping systems

A piezoelectrically driven hydraulic amplification microvalve for use in compact high-performance hydraulic pumping systems was designed, fabricated, and experimentally characterized. High-frequency, high-force actuation capabilities were enabled through the incorporation of bulk piezoelectric material elements beneath a micromachined annular tethered-piston structure. Large valve stroke at the microscale was achieved with an hydraulic amplification mechanism that amplified (40/spl times/-50/spl times/) the limited stroke of the piezoelectric material into a significantly larger motion of a micromachined valve membrane with attached valve cap. These design features enabled the valve to meet simultaneously a set of high frequency (/spl ges/1 kHz), high pressure(/spl ges/300 kPa), and large stroke (20-30 /spl mu/m) requirements not previously satisfied by other hydraulic flow regulation microvalves. This paper details the design, modeling, fabrication, assembly, and experimental characterization of this valve device. Fabrication challenges are detailed.     

Magnetic MEMS reconfigurable frequency-selective surfaces

A reconfigurable frequency-selective electromagnetic filter implemented by integrating hard magnetic materials with microelectromechanical systems (MEMS) provides a new variation of reconfigurable frequency-selective surfaces (FSS). By incorporating magnetically actuated dipole elements that are capable of being tilted away from the supporting surface, we can tune the FSSs operating frequency without having to physically alter the dimensions of the dipole elements. The 25/spl times/25 array of microactuators used in this work each consist of a 896/spl times/168/spl times/30 /spl mu/m/sup 3/ ferromagnetic plate made of 40Co-60Ni, layered with a 1-/spl mu/m-thick conductor (Au), attached to a pair of 400/spl times/10/spl times/1 /spl mu/m/sup 3/ polysilicon torsion beams, suspended just above the supporting substrate. The high remanent magnetization of the ferromagnetic material allows for relatively small magnetic fields (/spl sim/2.1 kA/m) to induce significant angular deflections (/spl sim/45/spl deg/). This innovative reconfigurable FSS design has successfully demonstrated electromagnetic-signal diplexing and tuning its resonant frequency over a bandwidth of 2.7 GHz at a frequency of 85 GHz.     

/spl epsi/-SSVR: a smooth support vector machine for /spl epsi/-insensitive regression

A new smoothing strategy for solving /spl epsi/-support vector regression (/spl epsi/-SVR), tolerating a small error in fitting a given data set linearly or nonlinearly, is proposed in this paper. Conventionally, /spl epsi/-SVR is formulated as a constrained minimization problem, namely, a convex quadratic programming problem. We apply the smoothing techniques that have been used for solving the support vector machine for classification, to replace the /spl epsi/-insensitive loss function by an accurate smooth approximation. This will allow us to solve /spl epsi/-SVR as an unconstrained minimization problem directly. We term this reformulated problem as /spl epsi/-smooth support vector regression (/spl epsi/-SSVR). We also prescribe a Newton-Armijo algorithm that has been shown to be convergent globally and quadratically to solve our /spl epsi/-SSVR. In order to handle the case of nonlinear regression with a massive data set, we also introduce the reduced kernel technique in this paper to avoid the computational difficulties in dealing with a huge and fully dense kernel matrix. Numerical results and comparisons are given to demonstrate the effectiveness and speed of the algorithm.     

Silicon micro XY-stage with a large area shuttle and no-etching holes for SPM-based data storage

A micro XY-stage with a 5/spl times/5 mm/sup 2/-area shuttle is fabricated for application in a nanometer-scale data storage device. A central shuttle of the device is designed as a large square on which a high-density recording medium is deposited. Perpendicularly combined comb-drive actuators allow the large shuttle free access in the x-y plane. No etching holes on the central shuttle are preferred in order to maximize the effective recording area. Therefore, a novel release process, Micro-Channel Assisted Release Process (/spl mu/CARP) is proposed to release a large plate structure without any etching holes and to resist downward sticking. The static and dynamic strokes of the device were measured. Mechanical interferences between x-and y-directional drives were estimated by finite-element method (FEM) analysis and compared with the experimental results.     

Spatially resolved temperature mapping of electrothermal actuators by surface Raman scattering

In this paper, we report spatially resolved temperature profiles along the legs of working V-shaped electrothermal (ET) actuators using a surface Raman scattering technique. The Raman probe provides nonperturbing optical data with a spatial resolution of 1.2 /spl mu/m, which is required to observe the 3-/spl mu/m-wide actuator beams. A detailed uncertainty analysis reveals that our Raman thermometry of polycrystalline silicon is performed with fidelity of /spl plusmn/10 to 11 K when the peak location of the Stokes-shifted optical phonon signature is used as an indicator of temperature. This level of uncertainty is sufficient for temperature mapping of many working thermal MEMS devices which exhibit characteristic temperature differences of several hundred Kelvins. To our knowledge, these are the first quantitative and spatially resolved temperature data available for thermal actuator structures. This new temperature data set can be used for validation of actuator thermal design models and these new results are compared with finite-difference simulations of actuator thermal performance.     

Position control of parallel-plate microactuators for probe-based data storage

In this paper, we present the use of closed-loop voltage control to extend the travel range of a parallel-plate electrostatic microactuator beyond the pull-in limit. Controller design considers nonlinearities from both the parallel-plate actuator and the capacitive position sensor to ensure robust stability within the feedback loop. Desired transient response is achieved by a pre-filter added in front of the feedback loop to shape the input command. The microactuator is characterized by static and dynamic measurements, with a spring constant of 0.17 N/m, mechanical resonant frequency of 12.4 kHz, and effective damping ratio from 0.55 to 0.35 for gaps between 2.3 to 2.65 /spl mu/m. The minimum input-referred noise capacitance change is 0.5 aF//spl radic/Hz measured at a gap of 5.7 /spl mu/m, corresponding to a minimum input-referred noise displacement of 0.33 nm//spl radic/Hz. Measured closed-loop step response illustrates a maximum travel distance up to 60% of the initial gap, surpassing the static pull-in limit of one-third of the gap.