Precision frequency trimming of SAW and STW resonators using Xe(+) heavy ion bombardment

A method for precision frequency trimming of surface acoustic wave (SAW) and surface transverse wave (STW) based resonant devices using a Xe(+) heavy ion bombardment technique is described. The devices are downtrimmed in frequency in an in-situ monitoring process by means of a Kaufmann type ion source that allows first a rough and then a fine frequency trimming with an accuracy of 1 ppm in a single continuous in-situ monitoring process. An improvement of the device insertion loss and unloaded Q as a result of the trimming process is achieved. Single mode 776 MHz STW resonators can be downtrimmed by more than 5000 ppm without deteriorating their parameters while SAW resonators allow a much lower frequency downshift. The method is simple and can cost effectively be applied to SAW and STW device fabrication.     

Theoretical and experimental mass-sensitivity analysis of polymer-coated SAW and STW resonators for gas sensing applications

Polymer-coated surface transverse waves (STW) resonators have recently been successfully studied for organic gas sensing applications. The first results indicate increased absolute and even relative sensitivity as compared to similar resonators with surface acoustic waves (SAW). However, the gain in sensitivity is accompanied by the adverse effect of an increased attenuation and the advantage frame is difficult to establish quantitatively. In this paper, a new set of experimental samples with Parylene C-coated quartz substrates are studied. The samples are matched in frequency and wavelength. The results are compared and the obtained features explained using available theoretical algorithms for analyzing layered SAW and Love configurations, and a recently developed STW algorithm. The approximate limits of advantageous applicability of the STW resonator gas sensors are discussed.     

Coupling-of-modes analysis of STW resonators including loss mechanism

Surface transverse wave (STW) resonators exhibit substantial advantages over conventional surface acoustic wave (SAW) resonators. However, their analysis is more involved because of the complicated nature of STW. Many parameters have been studied, but the one that has been difficult to analyze accurately is the quality factor Q, which is of great importance for characterizing the devices. At present, none of the available analytical models is concerned with quantitative loss consideration, and the establishment of reliable design rules is difficult. We present a theoretical study that allows one to conduct coupling-of-modes (COM) STW loss analysis and estimate the resonator Q from material and layout parameters. The COM transmission coefficient χ₁₁ is derived by Floquet analysis. Its imaginary part is obtained by numerically fitting available experimental data for the Q-factor of particular resonators. It is a measure of STW propagation loss that adds to the electrode reflection loss     

High Q metal strip SSBW resonators using a SAW design

An experimental study of metal strip surface skimming bulk wave (SSBW) resonators using a surface acoustic wave (SAW) design is presented. Characteristics of SSBW and SAW resonators fabricated with the same photolithographic mask are compared and discussed. High Q low-loss SSBW resonators are achieved using a conventional two-port SAW resonator design and taking special care of the distance L between both interdigital transducers, the metal thickness h/lambda (lambda=acoustic wavelength) and the finger-to-gap ratio. Best overall performance of the SSBW devices in this study is achieved at L=nlambda/2-lambda/4 (compared with L=nlambda/2-lambda/8 for SAW resonators), h /lambda=1.6% (compared with 2% for SAW), and finger-to-gap ratio close to 1. The best device fabricated shows an unloaded Q of 5820 and an insertion loss of 7.8 dB at 766 MHz. The SSBW resonant frequency shows a stronger dependence on the metal thickness than the SAW one. This problem, however, is readily solved by frequency trimming using a CF(4) plasma etching technique. SSBW resonator can be trimmed by 0.2% down in frequency (compared with 0.05% for SAW) without affecting their performance.     

SAW devices for consumer communication applications

An overview of surface acoustic wave (SAW) filter techniques available for different applications is given. Techniques for TV IF applications are outlined, and typical structures are presented. This is followed by a discussion of applications for SAW resonators. Low-loss devices for mobile communication systems and pager applications are examined. Tapped delay lines (matched filters) and convolvers for code-division multiaccess (CDMA) systems are also covered. Although simulation procedures are not considered, for many devices the theoretical frequency response is presented along with the measurement curve.     

Modeling of waveguide-coupled SAW resonators

Coupling of modes in space (COMS) is applied to the analysis of waveguide coupled surface acoustic wave (SAW) resonators. Standard one-dimensional COMS equations are extended to model distributed coupling between adjacent SAW reflector arrays. Computed frequency responses are presented for two-pole and four-pole waveguide coupled resonators     

Design and test of 3 GHz, fundamental mode surface transverse wave resonators on quartz

Surface transverse wave (STW) resonators, based on the propagation of high velocity shear horizontal waves on Y-rotated quartz were designed, fabricated and tested. A model is presented to predict the resonant frequency of a 3-grating structure as a function of design parameters such as periodicities, metal thickness, and finger-to-gap ratio. Experimental devices have been fabricated by direct e-beam lithography with linewidth geometries in the range of 0.3-0.5 mum, and an operating frequency close to 3 GHz in fundamental mode. Two different designs using either a quasi synchronous structure (type 1) or a change of periodicity inside the cavity (type 2) were tested. The best experimental factor of merit is close to the best results already published for quartz STW resonators.     

Design considerations on surface acoustic wave resonators with significant internal reflection in interdigital transducers

This paper discusses, both qualitatively and quantitatively, the operation and the design principle of current surface acoustic wave (SAW) resonators in which the internal reflection within interdigital transducers (IDTs) is not negligible and lower capacitance ratio is necessary. For the purpose, the p-matrix expression is used with the help of the coupling-of-modes theory. The internal reflection causes: deformation of the IDT passband shape, frequency dependence of the effective SAW velocity within IDTs, and suppression of higher-order resonances. It is shown that these features can be effectively used to enhance performances of both one-port SAW resonators and two-port double-mode SAW (DMS) filters. In addition, under proper designs accounting for the internal reflection, most of all structural discontinuities can be removed, and is most preferable for the reduced scattering loss at the discontinuity. Design criteria also are presented for DMS filters of wide bandwidth, and it is demonstrated how device performances are improved by proper design accounting for the criteria.     

Acceleration sensitivity of surface wave resonators

In light of the substantial performance advantages of STW over SAW in various areas, theoretical and experimental studies of the acceleration sensitivities of STW and SAW resonators have been undertaken. The purpose of the studios has been to understand the fundamental nature of STW and SAW acceleration sensitivities, and to determine whether the performance advantages of STW seen in other areas extend to the case of acceleration sensitivity. The basic approach utilizes the perturbation theory developed by Tiersten to calculate the acceleration sensitivities of both STW and SAW resonators. The acceleration-induced bias is conveniently written in terms of acceleration-induced deformation gradients and factored elastic stiffness expressions. This representation clarifies important concepts regarding the frequency shift and the involved elastic constants, and provides the designer with insight into the basic nature of the problem. The dependencies of the normal acceleration sensitivities on substrate and mode shape parameters and the fundamental nature of plate flexure are discussed at length. The calculations compare favorably to recent experimental results     

STW in-line acoustically coupled resonator filter on quartz

The scattering-matrix method was used for design of a surface transverse wave (STW) in-line acoustically coupled resonator filter on quartz. In this filter, two one-port STW resonators were coupled by means of a center reflector, grating phase shifters were placed between interdigital transducers and reflectors, and the pass band of the filter was located near the center frequency of the reflectors. At a frequency of about 509 MHz, insertion loss of about 5 dB and a 3 dB bandwidth of about 0.23 MHz was obtained. Differences between the measured and calculated amplitude responses are explained and design guidelines are presented. High STW velocity, low insertion loss, and very weak transverse mode make this filter attractive for high-frequency applications.     

Chemical sensor based on surface acoustic wave resonator using Langmuir-Blodgett film

A one-port surface acoustic wave (SAW) resonators incorporating Langmuir-Blodgett (LB) films has been investigated. SAW sensors are one potential applications of SAW devices. Most of the work reported on SAW sensor concerns delay lines. In this paper we characterize the mass loading effects of one-port resonators by depositing successive monolayers of LB films onto the surface. A 90 MHz SAW gas-phase sensor has been fabricated on an ST cut quartz substrate, and one-port resonator configurations have been used as the sensing element. Ultra thin monolayers of arachidic acid and arachidic acid ethyl ester have been deposited using the LB method. The resonant frequencies and the Q values have been measured as sensor response. Experimental results show that the Q values and the resonant frequencies of the one-port SAW resonator vary with film mass loading on the SAW device surface.     

Accurate measurement of anhydride fluorhydric acid concentration in controlled gaseous flow with STW sensors

This paper presents theoretical and experimental developments for the implementation of surface acoustic waves (SAW) sensors able to detect small concentrations of anhydride fluorhydric (HF) acid in air. Solutions based on the use of surface transverse waves (STW) on quartz (YXlt)/36 degrees/90 degrees have been analyzed to evaluate their sensitivity to HF. Devices have been tested first in a NH4F solution to evaluate the kinetics of the reaction. Measurements then were performed under various gaseous conditions to characterize the sensors when they are submitted to different controlled dilutions of HF in air. STW resonators have been successfully tested in different conditions, with capabilities to detect HF concentration much smaller than 1 ppm.     

Gas sensitivity comparison of polymer coated SAW and STW resonators operating at the same acoustic wave length

Results from systematic gas sensing experiments on polymer coated surface-transverse-wave (STW) and surface-acoustic-wave (SAW) based two-port resonators on rotated Y-cut quartz, operating at the same acoustic wavelength of 7.22 /spl mu/m, are presented. The acoustic devices are coated with chemosensitive films of different viscoelastic properties and thicknesses, such as solid hexamethyldisiloxane (HMDSO), semisolid styrene (ST), and soft allyl alcohol (AA). The sensor sensitivities to vapors of different chemical analytes are automatically measured in a sensor head, evaluated, and compared. It is shown that thin HMDSO- and ST-coated STW sensors are up to 3.8 times more sensitive than their SAW counterparts, while SAW devices coated with thick soft AA-films are up to 3.6 times more sensitive than the STW ones. This implies that SAWs are more suitable for operation with soft coatings while STWs perform better with solid and semisolid films. A close-to-carrier phase noise evaluation shows that the vapor flow homogeneity, the analyte concentration, its sorption dynamics, and the sensor oscillator design are the major limiting factors for the sensor noise and its resolution. A well designed ST-coated 700 MHz STW sensor provides a 178 kHz sensor signal at a 630 ppm concentration of tetra-chloroethylene and demonstrates short-term stability of 3/spl times/10/sup -9//s which results in a sensor resolution of about 7 parts per billion (ppb).     

Design and properties of STW asynchronous resonators on quartz

In a surface transverse wave (STW) asynchronous resonator, grating phase shifters are placed between interdigital transducers and reflectors to obtain the incident and reflected waves in phase, and the resonance frequency is located near the center frequency of the reflectors. In this paper, the scattering matrix method is used for design of such resonators with one dominant longitudinal mode. At a frequency of about 509.5 MHz, insertion loss, and loaded and unloaded quality factors of about 6 dB, 5,300 and 11,000, respectively, were obtained. The measured and calculated parameters of this resonator are in good agreement. Design guidelines and comparison of synchronous and asynchronous resonators are presented. Compared to synchronous resonators, low spurious signals' level, location of the resonance frequency near the center frequency of the reflectors, and simple design method make the asynchronous resonators more attractive for manufacture and practical applications.     

The coupling-of-modes approach to the analysis of STW devices. II

For pt. I see ibid., vol. 44, no. 3, p. 652-7 (1997). The method for analyzing surface transverse wave (STW) devices by using a coupling-of-modes (COM) formalism has been completed, covering the STW electromechanical coupling coefficient (ECC). An ECC analytical formula has been derived by fitting numerical results from STW effective permittivity analysis. The ECC exhibits frequency and mass-loading variation. Using this new result, a satisfactory agreement with available experimental frequency characteristics of STW two-port quartz resonators has been achieved, without the necessity of additional experimental information. In its present form, the method is self-consistent and applicable to arbitrary STW layouts.     

A direct digital synthesis system for acoustic wave sensors

Current designs for acoustic wave sensor system electronics are typically based on surface acoustic wave (SAW) oscillators, phase detectors, or phase-locked loops to measure changes in SAW velocity. The advantage of oscillators is a high resolution frequency output, as compared to phase detection systems which are more stable and can more easily provide amplitude information. Phase-locked loops (PLL) offer advantages of both the oscillator and phase detection systems but have the disadvantages of a fixed frequency range and the need for frequency counting circuitry. The objectives of this work were to study the performance of a direct digital synthesis (DDS) based PLL system with the advantages of a programmable frequency range, elimination of the need for frequency counting circuitry, and tolerance of large SAW sensor insertion losses. The DDS system tested had a resolution of 4 Hz and a range of 80 to 120 MHz in SAW humidity and temperature sensing applications indicating that the DDS based PLL is a practical electronic system for SAW sensors.     

Large-area, real-time imaging system for surface acoustic wavedevices

A system for imaging the particle displacement envelope of vibrational (transverse) modes of surface acoustic wave (SAW) devices is described. The modes are being imaged using a schlieren method for visualizing the acoustic power flow with a beam-expanded helium-neon (HeNe) laser. The optical arrangement uses internal reflection from within the quartz substrate to achieve high-efficiency acousto-optic diffraction of the laser light. The use of a CCD camera coupled with a frame grabber and a computer with image calculator software establishes an imaging system for large-area, real-time visualization, recording, accurate measurement, and analysis of vibrational modes of SAW devices. These methods are part of an effort to determine the relationship between acceleration sensitivity and transverse variations in the acoustic-mode shape in SAW resonators. Use of the system in imaging a 98 MHz SAW device is presented as an example     

Linear frequency tuning of SAW resonators

Frequency tuning in SAW (surface acoustic wave) resonator-stabilized oscillators is normally accomplished via utilization of a voltage-controlled phase shifter. The design of abrupt junction varactor diode-inductor networks which employ impedance transformation techniques to obtain linear frequency tuning of two-port SAW resonators is reported. The approach is similar to that previously developed for linear tuning of bulk wave, quartz crystal resonators. This technique uses varactor diode parallel inductance to provide a linear reactance versus voltage network, which is effectively connected in series with the resonator motional impedance in order to tune the effective resonator center frequency. Typical tuning ranges are significantly larger than those achievable using the phase shifter approach, and are on the order of 400 ppm for the 320-MHz resonator used.     

Extremely low thermal noise floor, high power oscillators usingsurface transverse wave devices

This paper presents state-of-the-art results on 1-GHz surface transverse wave (STW) oscillators running at extremely high loop power levels. The high-Q single-mode STW resonators used in these designs have an insertion loss of 3.6 dB, an unloaded Q of 8000, a residual PM noise of -142 dBc/Hz at a 1-Hz carrier offset, and operate at an incident power of up to +31 dBm in the loop. Other low-Q STW resonators and coupled resonator filters (CRF), with insertion losses in the 5-9 dB range, can conveniently handle power levels in excess of two Watts. These devices were incorporated into voltage controlled oscillators (VCO's) running from a 9.6-V dc source and provide an RF output power of +23 dBm at an RF/dc efficiency of 28%. Their tuning range was 750 kHz and the PM noise floor was -180 dBc/Hz. The oscillators, stabilized with the high-Q devices and using specially designed AB-class power amplifiers, delivered an output power of +29 dBm and exhibited a PM noise floor of -184 dBc/Hz and a 1-Hz phase noise level of -17 dBc/Hz. The 1-Hz phase noise level was improved to -33 dBc/Hz using a commercially available loop amplifier. In this case, the output power was +22 dBm. In all cases studied, the loop amplifier was found to be the factor limiting the close-to-carrier oscillator phase noise performance     

An interrogation unit for passive wireless SAW sensors based on fourier transform

The application of surface acoustic wave (SAW) resonators as sensor elements for different physical parameters such as temperature, pressure, and force has been well-known for several years. The energy storage in the SAW and the direct conversion from physical parameter to a parameter of the wave, such as frequency or phase, enables the construction of a passive sensor that can be interrogated wireless. This paper presents a temperature-measurement system based on passive wireless SAW sensors. The principle of SAW sensors and SAW sensor interrogation is discussed briefly. A new measurement device developed for analyzing the sensor signals is introduced. Compared to former interrogation units that detect resonance frequency of the SAW resonator by comparing amplitudes of sensor response signals related to different stimulating frequencies, the new equipment is able to measure the resonance frequency directly by calculating a Fourier transformation of the resonator response signal. Measurement results of an experimental setup and field tests are presented and discussed.