共查询到19条相似文献,搜索用时 93 毫秒
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微全分析系统中的MEMS技术 总被引:3,自引:0,他引:3
微全分析系统(μTAS)的研究和应用,近年来有了巨大发展。本文将着重叙述基于MEMS技术的μTAS的研究和发展,扼要介绍设计,制造μTAS的一些新技术,新材料和新方法,以及我们在研制μTAS方面的一些进展。 相似文献
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2001 PITTCON仍在美国新奥尔良召开.会议交流论文1900多篇,参展厂家一千多家,参会人数24970人,都比上一年有所减少,但它仍不失为全世界有关分析化学和分析仪器最大的国际会议和展览会,充分体现了分析化学和分析仪器的一些最新发展.其中特别值得注意的是微型全分析系统(μ-TAS),整个会议有4个分会和近百篇论文是专门关于这一主题的.这在PITTCON的历史上是破天荒的.下面就会上所见所闻,结合本人在会后学习研究中所了解到有关情况,对μ-TAS的发展谈一些个人看法. 相似文献
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微全分析系统中的微分离学及其在生命科学中的应用 总被引:1,自引:0,他引:1
讨论了以芯片毛细管电泳为基础的微分离技术的平台特征,特别强调了微分离技术在生命科学中的潜在应用,也对不同类型电泳技术研究方法的异同进行了比较. 相似文献
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微全分析系统中的微分离学及其在生命科学中的应用 总被引:3,自引:0,他引:3
讨论了以芯片毛细管电泳为基础的微分离技术的平台特性,特别强调了微分离技术在生命科学中的潜在应用,也对不同类型电泳技术研究方法的异同进行了比较。 相似文献
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微系统(Microsystems)是指将尺寸在微米级的功能器件与微电子器件(LSI)集成在一块基板上的系统。此系统不仅具有处理、计算功能更具有信息输入,传感以及动作执行,检测等功能。因此,微系统是发展新一代计算、先进机器人、智能化系统的核心技术。一个以微系统技术为核心的工业──微细工业,这包括微传感器(Microsensors)、微执行器(Microactuators)、微机械(Micromachining)、微电器(Microelectronics)、激光学(Microoptics)以及微加工(Microfabrication),将成为新兴工业而取代若干传统工业,最终实现机电产品及仪器仪表工业中的集成化、微型化及经济化。微系统科学是将工业科学从宏观引入微观世界的关键,是21世纪科学与工业发展的必然趋势之一。本文从微系统的发展背景开始,阐述了做系统及激光学包括新兴的二元光学(Binaryoptics)的形成与发展,指出早于1965年美国Stanford大学首先从事微结构(Microstratures)研究,完成了脑微电极探针,70年代美国DARPA(先进防御研究计划)将LSI推向1μm的水平,1981年美国NSF(国家科学基金)将原价6万美元的不同驱动源做在一个仅需几百美元的掩模上,从而有了做系统的开端。本文接着分析了微系统的共同技术特点,指出微系统除尺寸小、功? 相似文献
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The error motions of micro mechanical systems, such as micro-spindles, increase with the increasing of the rotational speed, which not only decreases the rotational accuracy, but also promotes instability and limits the maximum operational speed. One effective way to deal with it is to use micro-flexible couplings between the drive and driven shafts so as to reduce error motions of the driven shaft. But the conventional couplings, such as diaphragm couplings, elastomeric couplings, bellows couplings, and grooved couplings, etc, cannot be directly used because of their large and complicated structures. This study presents a novel micro-coupling that consists of a flexible coupling and a shape memory alloy(SMA)-based clamp for micro mechanical systems. It is monolithic and can be directly machined from a shaft. The study performs design optimization and provides manufacturing considerations, including thermo-mechanical training of the SMA ring for the desired Two-Way-Shape-Memory effect(TWSMe). A prototype micro-coupling and a prototype micro-spindle using the proposed coupling are fabricated and tested. The testing results show that the prototype micro-coupling can bear a torque of above 5 N · mm and an axial force of 8.5 N and be fitted with an SMA ring for clamping action at room temperature(15 ℃) and unclamping action below –5 ℃. At the same time, the prototype micro-coupling can work at a rotational speed of above 200 kr/min with the application to a high-speed precision micro-spindle. Moreover, the radial runout error of the artifact, as a substitute for the micro-tool, is less than 3 μm while that of turbine shaft is above 7 μm. It can be concluded that the micro-coupling successfully accommodates misalignment errors of the prototype micro-spindle. This research proposes a micro-coupling which is featured with an SMA ring, and it is designed to clamp two shafts, and has smooth transmission, simple assembly, compact structure, zero-maintenance and balanced motions. 相似文献
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为了实现微机电系统微波信号滤波,开发了适用于微机电系统的小尺寸左右手复合传输线微波带阻滤波器,对该滤波器的原理、结构特点、加工工艺等进行了研究。根据左手材料理论,介绍了具有蛇形槽单元的滤波器结构。以蛇形槽结构的一个单元为例,对比传统插指电容左手单元结构,提取了蛇形槽的等效电路,并分析了蛇形槽结构单元的优点,即在相同的面积内,可以获得更大的等效电路参数。最后,结合溅射、光刻、电铸、刻蚀等MEMS技术,设计了器件的加工工艺。使用MEMS工艺,加工了主体尺寸5 mm×7 mm的器件。相移常数的仿真和实验结果表明,在高频带部分(2.1~5.2 GHz)的相移常数为负(左手区),相速度与群速度方向相反,左手区的相对带宽为82.7%。结果显示,与其他设计相比,本文设计的器件尺寸小,左手区的相对带宽大,可以提供更大的工作频带范围 相似文献
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Xiang Cheng Zhigang Wang Kazuo Nakamoto Kazuo Yamazaki 《The International Journal of Advanced Manufacturing Technology》2011,53(5-8):523-533
Many researches have studied the micro tools either by simulations or experiments showing that the micro tools play very important roles in micro/nano machining, and micro tool geometries have a direct impact on the final machining quality. Commercially available micro milling tools are usually simply made from downsizing of macro milling tools, which may not be able to be accurately fabricated. Custom micro milling tools have been created by some researchers, but no design criteria for micro milling tools have been introduced. The above factors constrain the development of effective micro milling tools and consequently constrain the researches on micro/nano milling. Based on former researcher??s work, this paper tries to introduce the design criteria for the custom micro tooling. Firstly, the extent typical micro milling tools are studied, and their drawback/limitations are summarized. Secondly, experimental evaluations of the key drawback/limitations are processed. Thirdly, the design criteria for custom micro milling tools are proposed, and corresponding design process is introduced. Then, a new micro hexagonal end mill has been designed based on these criteria. Finally, a polycrystalline diamond micro hexagonal end mill with a diameter of 0.5?mm was fabricated by wire electrical discharge machining, and the evaluation experiments for the hexagonal end mill have been processed on a nano milling center. Experimental results show the newly designed hexagonal end mill can achieve submicron level surface roughness and has simultaneously high-accuracy side and bottom machining capabilities. 相似文献
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A proposal for dichroic experiments in the electron microscope 总被引:1,自引:0,他引:1
Building upon the similarities between inelastic electron scattering and X-ray absorption we show that dichroism can be observed in electron energy loss spectrometry (EELS) in the transmission electron microscope (TEM). Natural or magnetic linear dichroism can be studied in electron scattering experiment with definite wave vector transfer in the interaction.The detection of circular dichroism in the TEM relies on interferometric EELS in a particular scattering geometry that allows extraction of the mixed dynamic form factor from energy loss spectra. Similarities between dichroic signals in energy loss near edge structures and X-ray absorption near edge structures are discussed, and a new experimental setup for dichroic measurements in the TEM is proposed. 相似文献
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Walter Michaeli Dirk Opfermann Thomas Kamps 《The International Journal of Advanced Manufacturing Technology》2007,33(1-2):206-211
In micro systems technology, the process of micro assembly injection moulding is used for the generation of hybrid micro systems.
With this process, more functions are integrated in less space. In the field of medical technology, miniaturisation also means
new methods of treatment with fewer side effects on the patient. New cures are developed by the miniaturisation of medical
instruments, such as keyhole surgery. For detailed investigations a specific demonstration was developed to display the potential
of micro assembly injection moulding in medical science. This part consists of a carbon-fibre reinforced PEEK puncture needle,
which incorporates three lumens. The selected materials allow use of the needle during magnetic resonance imaging. In order
to attach additional equipment a plastic connector needs to be overmoulded on the needle. The investigations focus on the
injection moulding process by characterising the influences of temperature, moulding parameters and material combinations
on the resulting bond strength between needle and connector. 相似文献
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M. L. Alvarez E. Estévez I. Sarachaga A. Burgos M. Marcos 《The International Journal of Advanced Manufacturing Technology》2013,68(1-4):711-725
The growing complexity of current automation applications demand clear methodologies and procedures in order to assure that the system under design meets the requirements. Within the industrial automation field there are several methods, techniques, tools and standards that have captured the experience of designers through years of practice. On the other hand, the software engineering discipline offers different methodologies covering the different phases of the life cycle (analysis, design, test and maintenance). This work pretends to take advantage of both: the maturity of the software engineering discipline and the well-spread methods and standards of the industrial automation field. In particular, the proposed methodological approach uses model based engineering principles for developing automation control systems combining modeling methods of automation field. Specifically, it combines GEMMA (Guide d'Étude des Modes de Marches et d'Arrêts), UML (Unified Modeling Language) use case diagrams and GRAFCET (GRAphe Fonctionnel de Commande, Etapes, Transitions) for assisting the designer during the analysis, design and coding phases. Using GEMMA, the states of the automated process are identified. Use case diagrams allow identifying the actors that participate in the operation modes. Finally, a set of GRAFCET templates assists in the design of use cases. Thus, the user is guided through the development phases in which the concepts used are familiar to him/her. The final step includes the automatic generation of the Program Organization Units (POUs) in PLCopen XML interface. The proposed methodology is illustrated by means of a simple but illustrative mechatronic case study. 相似文献